MXPA97003079A - Formed mirror of filmed delgadapara to be used in an opt projection system - Google Patents

Abstract

The present invention relates to a formation of thin film driven M x N mirrors for use in an optical projection system, the formation comprising: a switching matrix including a substrate having a top surface and being provided with a first, second and third conduction line patterns formed on the upper surface, wherein the first and second conduction line patterns are connected to an outer circuit and are used to carry an image signal and a driving signal, respectively, and the The third driving line pattern is used to provide the image signal to each of the thin film driven mirrors, an M x N pair formation of support members, wherein each of the support members is placed on the upper part of the second and third driving line patterns, and a formation of driving structures M x N, each of the action structures This includes a first, second, central and third and fourth tongue portions, each of the tongue portions being separated from each other by a space therebetween, each of the actuation structures further including a reflecting layer, a elastic layer and an electroplating layer, each of the actuating structures further includes a pair of actuators and a pair of gate actuators, each of the actuators and the gate actuators having a proximal end and a distal end, each of the actuators in the pair is positioned either below the first and fourth tab sections if each of the gate actuators in the pair is placed below the second and third tab portions, respectively, or below the second and third portions of tabs if each of the gate actuators in the pair is placed below the first and fourth tongue portions, respectively. each of the actuators in the pair and each of the gate actuators in the pair is cantilevered from each of the support members by the proximal end thereof, each of the gate actuators is further provided with an insulation layer fixed at the bottom thereof at the far end, and a contact layer fixed at the bottom of the insulation layer, wherein the driving signal that is provided through the second line pattern is applies to each of the gate actuators, causing the pair of gate actuators to bend downward, thereby forcing the contact layer in each of the gate actuators to contact the first and third patterns. of driving line to thereby allow the image signal from the first driving line pattern to be transmitted to the third driving line pattern tion, and therefore to each of the actuators, causing the pair of actuators in each of the drive structures to tilt, resulting in the central tab portion thereof tilting while remaining flat, allowing in this way that the entire central tab portion is used to reflect the light beams

Description

"FORMULATION OF SLIDED FILM MIRRORS FOR USE IN AN OPTICAL PROJECTION SYSTEM" TECHNICAL FIELD OF THE INVENTION The present invention relates to an optical projection system; and more particularly with a formation of M x N thin film driven mirrors for use in the system.

ANTECEDENTS OF THE TECHNIQUE Among the different video presentation systems available in the field, an optical projection system is known as being able to provide a high quality presentation on a large scale. In this optical projection system, the light of a lamp is uniformly illuminated towards a formation of, eg, M x N powered mirrors, wherein each of the mirrors engages with each of the actuators. The actuators may be made of an electroplating material such as a piezoelectric material or an electrostrictive material that deforms in response to an electric field applied thereto.

The reflected light beam of each of the mirrors is incident on an aperture of, e.g., an optical baffle. By applying an electrical signal to each of the actuators, the relative position of each of the mirrors with respect to the incident light beam is altered, thereby causing a deviation in the optical path of the reflected beam from each of the mirrors. Since the optical path of each of the reflected beams is varied, the amount of light reflected from each of the mirrors passing through the aperture is changed by modulating the beam intensity in this way. Beams modulated through the aperture are transmitted to a projection screen through an appropriate optical device such as a projection lens, in order to present an image thereon. In Figures 1 and 2, there is shown a cross-sectional view and a perspective view, respectively, of an array 10 of thin film-driven mirrors 11 M x N for use in an optical projection system, which is disclosed in the co-pending co-pending application, the serial number of US Patent 08 / 340,762, entitled "ARRAY OF THIN FILM ACTUATED MIRRORS FOR USE IN AN OPTICAL PROJECTION SYSTEM AND METHOD FOR THE MANUFACTURE THEREOF", comprising an active matrix 12, a formation 13 of structures 14 M x N of thin film drive, a formation 15 of support members 16 M x N and a formation 17 of mirror layers 18 M x N. The active matrix 12 includes a substrate 19, a formation of M x N transistors (not shown) and a terminal array 21 M x N connection. Each of the drive structures 14 in the formation 10 is provided with a first and second drive parts 22 (a), 22 (b) and a central part 22 (c) therebetween, the first and second parts 22 ( a), 22 (b) and drive, are identically de-structured, wherein each of the first and second drive parts 22 (a), 22 (b) has at least one thin film layer 23 of an electrisplacer material, v.gr, a piezoelectric material, including the upper and lower surfaces 24, 25, an elastic layer 26 having a lower surface 41, and a first and a second electrode 28, 29. The elastic layer 26 is placed on the surface 24 of layer 23 of electroplating film. The first and second electrodes 28, 29 are placed on the upper and lower surfaces 24, 25 of the electroplating thin film layer 23, respectively, wherein an electrical signal applied through the electroplating thin film layer 23, placed between the first and second electrodes 28, 29, causes a deformation thereof, and therefore, of the drive parts 22 (a), 22 (b). Each of the support members 16 is used to hold each of the drive structures 13 in place and also to electrically connect each of the drive structures 14 with the active matrix 12. Each of the mirror layers 18 includes a first side 30, a second opposite side 31 and a central portion 32 therebetween as shown in Figure 2, wherein the first side 30, the second opposite side 31 and the central portion 32 of each of the mirror layers 18 are secured on the upper part of the first, second drive parts 22 (a), 22 (b), and central 22 (c) of each of the drive structures 14, respectively, such that when the first and the second parts 22 (a), 22 (b) of drive in each of the drive structures 14 deforms in response to the electrical signal, the part 22 (c) is installed in each of the drive structures 13 and therefore both the central portion 32 of each corresponding mirror layer 18 slopes while remaining flat, thus allowing the entire central portion 32 to reflect the light beams, resulting in increased optical efficiency.

One of the main drawbacks of the above-described formation 10 of the thin film driven mirrors 10 is that it incorporates therein an active matrix 2 which includes the formation of transistors to provide driving and image signals to each of the driven mirrors 11. of thin film, in order to raise the cost, in a considerable way, of the production of the formation 10.

EXHIBITION OF THE INVENTION Therefore, an object of the present invention is to provide a formation of M x N thin film driven mirrors that dispenses with an M x N transistor formation, included in an active matrix, to provide impeller and image signals to each of the thin film driven mirrors. Another object of the present invention is to provide a formation of thin film driven M x N mirrors, including therein a novel means for providing imaging and driving signals to each of the thin film driven mirrors. A further object of the present invention is to provide a formation of thin film driven M x N mirrors, using each of the thin film driven mirrors a pair of gate actuators. In accordance with one aspect of the present invention, a formation of thin film driven M x N mirrors is provided for use in an optical projection system, the array comprising: a switching matrix consisting of a substrate having a top surface and that is provided with a first, second and third conduction line patterns formed on the upper surface, wherein the first and second conduction line patterns are connected to an external source and used to carry an image signal and a driving signal, respectively, and the third driving line pattern is used to provide the image signal to each of the thin film driven mirrors; a pair formation of support members M x N, wherein each of the support members is placed on top of the third pattern of the line of conduction; and an array of drive structures M x N, each of the drive structures includes a first, a second, a central, a third and a fourth tongue portions, each of the tongue portions being spaced apart from one another by means of a space between them, each of the drive structures further includes a reflective layer, an elastic layer and an electrodisplacive layer, each of the drive structures still further includes a pair of actuators, and a pair of gate actuators. , each of the actuators and gate actuators have a proximal end and a distal end, each of the actuators in the pair is positioned either below the first and fourth tongue portions, if each of the gate actuators. in the pair is placed below the second and third tongue portions, respectively, or below the second and third tongue portions Each of the gate actuators in the pair is positioned below the first and fourth tongue portions respectively, each of the actuators in the pair and each of the gate actuators in the pair being cantilevered from each of the two actuators in the pair. the support members by the proximal end thereof, each of the gate actuators being further provided with an insulation layer affixed at the bottom thereof at the distal end, and a contact layer fixed at the bottom of the gate. the insulation layer, where the driving signal that is provided through the second pattern of the line of conduction is applied to each of the gate actuators, causing the pair of gate actuators to bend downwards, forcing this way the contact layer in each of the gate actuators to be contacted with the first and third driving line patterns for this way perm itir that the signal of the image from the first pattern of the line of conduction is transmitted to the third pattern of line of conduction, and therefore, to each of the actuators, causing the pair of actuators in each of the drive structures to tilt, resulting in the central tab portion thereof tilting while remaining flat allowing the This way, the central tab portion as a whole reflects the light beams.

BRIEF DESCRIPTION OF THE DRAWINGS The foregoing objects and others as well as the features of the present invention will become apparent from the following description of the preferred embodiments provided in conjunction with the accompanying drawings, wherein: Figure 1 represents a cross-sectional view of a mirror formation Thin film driven M x N disclosed above; Figure 2 illustrates a perspective view of the formation of thin film driven M x N mirrors shown in Figure 1; Figure 3 provides a cross-sectional view of the formation of thin film driven M x N mirrors in accordance with the preferred embodiment of the present invention; Figure 4 presents a partial top view of a switching matrix to be used in forming the invention of the thin film driven M x N mirrors shown in Figure 3; Figure 5 offers a top view of the mirror operated in the formation of the invention; Figure 6 presents a cross-sectional view of an actuator in the actuated mirror of the invention; and Figure 7 illustrates a cross-sectional view of a gate actuator in the actuated mirror of the invention.

MODES FOR CARRYING OUT THE INVENTION Referring now to Figures 3 to 7, different views of the formation of the invention of the film driven M x N mirrors are provided for use in an optical projection system, where M and N are integers, in accordance with preferred embodiments of the present invention. It should be noted that the same parts that appear in Figures 3 to 7 are represented by like reference numbers. In Figure 3 a cross-sectional view of a formation 100 of thin film driven mirrors 101 M x N is illustrated for use in an optical projection system comprising a switching matrix 102, a formation 103 of M x N pairs ( not shown) of the support member 104, and a formation 105 of the drive structure 106 M x N. As shown in Figure 3, each of the drive structures 106 includes a reflective layer 107 made of a light reflecting material. (e.g., aluminum (Al), an elastic layer 108 made of an insulating material, v.gr, silicon nitride (SÍ3N4), and an electrodisplaciva layer 109 made of a piezoelectric material, v.gr, lead titanate zirconium (PZT), or an electrostrictive material, v.gr, lead-magnesium niobate (PMN) The switching matrix 102 includes a substrate 110 having an upper surface 111 and made of an insulating material, v.gr ., alumina (AI2O3) The switching matrix 102, unlike the active matrix of the formerly disclosed formation of the thin film driven M x N mirrors having a M × N transistor array, is provided with a first , a second and a third driving line patterns 112, 113, 114 formed on the upper surface 111 thereof as shown in Figure 4, wherein the first, and the second driving line patterns 112, 113 are connect to an outside source (not illustrated) and are used to carry an image signal and a driving signal, respectively, and the third line pattern 114 is used to provide the image signal to each of the driven mirrors 101. Each of the support members 104, made of the same material as the elastic layer 109, is placed on top of the second and third driving line patterns 113, 114. Figure 5 represents a detailed top view of a drive structure 106 constituting the formation 100 shown in Figure 3. Each of the drive structures 106 includes a first, a second, a central, a fourth portions of tabs 115, 116, 117, 118, 119, each of the tongue portions being separated from one another by a space 120 therebetween.

Each of the drive structures 106 further includes a pair of actuators 121 and a pair of gate actuators 122, whose cross-sectional views are shown in Figures 6 and 7, respectively, wherein each of the actuators 121 and each one of the gate actuators 122 is provided with proximal and distal ends 123, 124. As shown in Figure 6, each of the actuators 121 includes a portion of the reflective layer 107, a portion of the elastic layer 108, a signal electrode layer 125, a portion of the electroplate layer 109 and a polarization electrode layer 126, wherein the signal electrode layer 125 is electrically connected to the third line pattern 114. Each of the actuators 121 is cantilevered from each of the support members 104, by the proximal end 123 thereof. In addition, each of the gate actuators 122, as shown in Figure 7, is provided with a portion of the reflective layer 107, a portion of the elastic layer 108, a gate signal electrode layer 127, a portion of the electroplating layer 109 and a gate bias electrode layer 128 wherein the gate signal electrode layer 127 is electrically connected in the second conduction line pattern 113. As in the case of the actuators 121, each of the gate actuators 122 is cantilevered from each of the support members 104 by the proximal end 123 thereof. Each of the gate actuators 122 is further provided with an insulation layer 129 fixed at the bottom of the gate bias electrode layer 128 at the distal end 124 thereof, and a contact layer 130 which is manufactured from an electrically conductive material, v.gr, silver (Ag) attached to the bottom of the insulation layer 129, wherein the ation layer 129 is used to prevent a short circuit between the gate polarization electrode layer 128 and the contact layer 130. The gate bias electrode layer 128 in each of the gate actuators 122 is electrically connected to the bias electrode layer 126 in each of the actuators 121, and therefore, the bias voltage applied thereto. It is identical. Each of the actuators 121 in the drive structures 106 is positioned either below the first and fourth tongue portions 115, 119 and each of the gate actuators 122 is positioned below the second and third portions 116, 118 of tab, respectively, or below the second and third tab portions 116, 118, if each of the gate actuators 122 is positioned below the first and fourth tab portions 115, 119. When the driving signal in the form of an electric potential, which is provided through the second conduction line pattern 113, is applied through the portion of the electroplating layer 109, between the gate signal electrode layer 127 and the gate polarization electrode layer 128 in each of the gate actuators 122, leads to a deformation of the portion of the electroplating layer 109 as a result of the developed electric field of the potential difference between the voltage of the driving signal and the polarization voltage. The deformation of the portion of the electroweaker layer 109 in turn will lead to a development of an internal stress at the boundary of the portion of the electroplating layer 109 and the portion of the elastic layer 108. If the portion of the electroplating layer 109 is made of a thin film piezoelectric material this will cause the corresponding gate actuator to bend, the direction of bending depending on the polarity of the electric field. If the voltage of the driving signal is greater than the bias voltageit is. , results in a downward bend of the corresponding gate actuators. On the other hand, if the voltage of the driving signal is less than the bias voltage, it results in an upward bending of the corresponding gate actuator 122. On the other hand, if the portion of the electroplating layer 109 is made of a piezoelectric material without thin film poles, this will cause the corresponding gate actuator to bend downwardly. The downward bend of the pair of gate actuators 122 forces the contact layer 130 towards each of the gate actuators 122 to contact the first and third line patterns 112, 114 to thereby form a bridge. electrical between them, allowing the image signal to pass from the first conduction line pattern 112 to the third conduction line pattern 114, and therefore, to the signal electrode layer 125 in one of the actuators 121. Each of the actuators 121 in each of the drive structures 126 operates under a similar principle as in the gate actuator 122. Once the image signal is applied through a portion of the electroplating layer 109 between the signal electrode layer 125 and the polarization electrode layer 126 of each of the actuators 121, it causes a deformation of the portion of the electrode. the electricallyplastic layer 109 in the pair of emitters 121 which in turn will cause the central tab portion 117 placed therebetween in the corresponding drive structures 106 to tilt while remaining flat thereby allowing the entire tab portion 117 central is used to reflect the light beams. The formation 100 of the invention of the thin film driven spikes 101 M x N uses a pair of gate actuators 122 in each of the drive structures 106, and the switching matrix includes the first, second and third patterns 112, 113, 114 of the driving line in order to provide the driving and image signals to each of the driven mirrors 101, as opposed to the above-described formation 10 of thin film driven mirrors 11 M x N, where it is used the active matrix including the formation of M x N transistors. Although the present invention has been described with respect to certain preferred embodiments only, other modifications and variations may be made without departing from the scope of the present invention as indicated in the following claims.

Claims (10)

CLAIMS:

1. A formation of thin film driven M x N mirrors for use in an optical projection system, the formation comprises: a commutating matrix including a substrate having a top surface and being provided with a first, second and third pattern of driving line formed on the upper surface, wherein the first and second driving line patterns are connected to an outer circuit and are used to carry an image signal and a driving signal, respectively, and the third line pattern of conduction is used to provide the image signal to each of the thin film driven mirrors; an array of M x N pairs of support members, wherein each of the support members is placed on top of the second and third conduction line patterns; and a formation of driving structures M x N, each of the driving structures includes a first, second, a central and a third and fourth tongue portions, each of the tongue portions being separated from the other by a space between them, each of the drive structures further includes a reflective layer, an elastic layer and an electrodisplacive layer, each of the actuating structures further including a pair of actuators and a pair of gate actuators, each of which actuators and gate actuators have a proximal end and a distal end, each of the actuators in the torque is positioned either below the first and fourth tabs sections if each of the gate actuators in the pair is placed below of the second and third tongue portions, respectively, or below the second and third tongue portions if each of the actuators of gate in the pair is placed below the first and fourth tongue portions, respectively, each of the actuators in the pair and each of the gate actuators in the pair is cantilevered from each of the members of the pair. support by the proximal end thereof, each of the gate actuators is further provided with an insulation layer fixed at the bottom thereof at the distant end, and a contact layer fixed at the bottom of the insulation layer , wherein the driving signal that is provided through the second driving line pattern is applied to each of the gate actuators, causing the pair of gate actuators to bend downwards, thus forcing the driving layer contact in each of the gate actuators to contact the first and third driving line patterns in order to allow the image signal n from the first driving line pattern is transmitted to the third driving line pattern, and therefore to each of the actuators, causing the pair of actuators in each of the drive structures to tilt, resulting in that the central tab portion thereof tilts while remaining flat, thereby allowing the entire central tab portion to be used to reflect the light beams.

2. The formation of thin film driven M x N mirrors of claim 1, wherein each of the actuators includes a portion of the reflective layer, a portion of the elastic layer, a signal electrode layer, a portion of the electroplating layer and a polarization electrode layer.

3. The formation of thin film driven M x N mirrors according to claim 2, wherein the signal electrode layer in each of the actuators is electrically connected to the third line pattern.

4. The formation of thin film driven M x N mirrors of claim 1, wherein each of the gate actuators includes a portion of the reflective layer, a portion of the elastic layer, a gate signal electrode layer, a portion of the electroplating layer and a gate polarization electrode layer.

5. The formation of thin film driven M x N mirrors of claim 4, wherein the gate signal electrode layer in each of the gate actuators is electrically connected to the second line pattern.

6. The formation of thin-film driven M x N mirrors of claims 2 and 4, wherein the polarization electrode layer in each of the actuators is electrically connected to the gate polarization electrode layer in each of the actuators. the gate actuators.

7. The formation of thin film driven M x N mirrors of claim 6, wherein the voltage applied to the polarization electrode layer and the gate polarization electrode layer in each of the actuators and each of the gate actuators, is identical.

8. The formation of mirrors M x N driven from the thin film of claim 1, wherein the substrate is made of an insulating material.

9. The formation of thin film driven M x N mirrors of claim 1, wherein each of the support members is made of an insulating material.

10. The formation of thin film driven M x N mirrors of claim 1, wherein the elastic layer is made of an insulating material.