[go: up one dir, main page]

MX9303141A - Metodos y aparatos para depositar recubrimientos de barrera. - Google Patents

Metodos y aparatos para depositar recubrimientos de barrera.

Info

Publication number
MX9303141A
MX9303141A MX9303141A MX9303141A MX9303141A MX 9303141 A MX9303141 A MX 9303141A MX 9303141 A MX9303141 A MX 9303141A MX 9303141 A MX9303141 A MX 9303141A MX 9303141 A MX9303141 A MX 9303141A
Authority
MX
Mexico
Prior art keywords
container
methods
devices
plasma
barrier coatings
Prior art date
Application number
MX9303141A
Other languages
English (en)
Inventor
H Ronald Thomas
Robert J Babacz
Robert R Newton
Original Assignee
Polar Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polar Materials Inc filed Critical Polar Materials Inc
Publication of MX9303141A publication Critical patent/MX9303141A/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45574—Nozzles for more than one gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/227—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/1379—Contains vapor or gas barrier, polymer derived from vinyl chloride or vinylidene chloride, or polymer containing a vinyl alcohol unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/139—Open-ended, self-supporting conduit, cylinder, or tube-type article

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)

Abstract

Se forma un recubrimiento de barrera sobre un artículo polimérico (B, C) tal como sobre el interior de un recipiente termoplástico. Un gas oxidante (70), se convierte en un plasma, en una cámara de plasma (46) remota de la cámara de tratamiento (32). La especie oxidante activada con plasma resultante, se entrega al interior (40) del recipiente. Un vapor reactivo de organosilicio (76) se entrega por separado, pero simultáneamente, al interior (40) del recipiente, de tal manera que el vapor de organosilicio y la especie activa oxidante se mezclan adentro del recipiente. También se aplica un campo eléctrico (42, 44) al recipiente, de tal manera que los productos de reacción se depositan bajo la influencia del campo eléctrico, para formar el recubrimiento de barrera.
MX9303141A 1992-05-28 1993-05-27 Metodos y aparatos para depositar recubrimientos de barrera. MX9303141A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88963792A 1992-05-28 1992-05-28

Publications (1)

Publication Number Publication Date
MX9303141A true MX9303141A (es) 1994-04-29

Family

ID=25395488

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9303141A MX9303141A (es) 1992-05-28 1993-05-27 Metodos y aparatos para depositar recubrimientos de barrera.

Country Status (8)

Country Link
US (2) US5378510A (es)
EP (1) EP0601166A4 (es)
JP (1) JPH07502561A (es)
AU (1) AU666389B2 (es)
CA (1) CA2112102C (es)
MX (1) MX9303141A (es)
PL (1) PL302309A1 (es)
WO (1) WO1993024243A1 (es)

Families Citing this family (117)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308649A (en) * 1992-06-26 1994-05-03 Polar Materials, Inc. Methods for externally treating a container with application of internal bias gas
US5670224A (en) * 1992-11-13 1997-09-23 Energy Conversion Devices, Inc. Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates
JP2899600B2 (ja) * 1994-01-25 1999-06-02 キヤノン販売 株式会社 成膜方法
CH687614A5 (de) * 1994-02-04 1997-01-15 Tetra Pak Suisse Sa Verfahren zum Versehen einer Verpackung mit hervorragenden Sperreigenschaften in bezug auf Gase.
US5565248A (en) * 1994-02-09 1996-10-15 The Coca-Cola Company Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance
ATE179914T1 (de) 1994-02-16 1999-05-15 Coca Cola Co Hohler behälter mit inerter oder undurchlässiger innerer oberfläche durch plasmaunterstütze oberflächereaktion oder in situ polymerisation
US6149982A (en) * 1994-02-16 2000-11-21 The Coca-Cola Company Method of forming a coating on an inner surface
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
US5521351A (en) * 1994-08-30 1996-05-28 Wisconsin Alumni Research Foundation Method and apparatus for plasma surface treatment of the interior of hollow forms
DE4437050A1 (de) * 1994-10-17 1996-04-18 Leybold Ag Vorrichtung zum Behandeln von Oberflächen von Hohlkörpern, insbesondere von Innenflächen von Kraftstofftanks
DE4438359C2 (de) * 1994-10-27 2001-10-04 Schott Glas Behälter aus Kunststoff mit einer Sperrbeschichtung
DE4445427C2 (de) * 1994-12-20 1997-04-30 Schott Glaswerke Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht
WO1996033098A2 (en) * 1995-04-13 1996-10-24 Xmx Corporation Gas-impermeable, chemically inert container structure and method of producingthe same
DE19523444A1 (de) * 1995-06-28 1997-01-02 Antec Angewandte Neue Technolo Verfahren zur Beschichtung von Kunststoffen oder ähnlichen weichen Werkstoffen
WO1997018343A1 (fr) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Procede et dispositif de sterilisation, de desodorisation et de protection de la surface interne de recipients et tubes
US6342277B1 (en) 1996-08-16 2002-01-29 Licensee For Microelectronics: Asm America, Inc. Sequential chemical vapor deposition
US6112695A (en) 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
US5800880A (en) * 1997-03-26 1998-09-01 Tetra Laval Holdings & Finance, S.A. Process for coating the interior wall of a container with a SiOx barrier layer
DE19722205A1 (de) * 1997-05-27 1998-12-03 Leybold Systems Gmbh Verfahren und Vorrichtung zur Beschichtung von Kunststoff- oder Glasbehältern mittels eines PCVD-Beschichtungsverfahrens
CA2304613A1 (en) 1997-09-30 1999-04-08 Jacques Laurent Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
WO1999017333A1 (en) 1997-09-30 1999-04-08 Tetra Laval Holdings & Finance S.A. Device and method for treating the inside surface of a plastic container with a narrow opening in a plasma enhanced process
US6165402A (en) * 1998-01-30 2000-12-26 Abbott Laboratories Method for making a stopper
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6475579B1 (en) 1999-08-06 2002-11-05 Plastipak Packaging, Inc. Multi-layer plastic container having a carbon-treated internal surface and method for making the same
US6247603B1 (en) * 1999-08-20 2001-06-19 Continental Plastic Containers, Inc. Container coating for increasing product outage
CA2388647A1 (en) 1999-10-27 2001-05-03 Mark Rule Process for reduction of acetaldehyde and oxygen in beverages contained in polyester-based packaging
FI118804B (fi) 1999-12-03 2008-03-31 Asm Int Menetelmä oksidikalvojen kasvattamiseksi
US6274212B1 (en) 2000-02-22 2001-08-14 The Coca-Cola Company Method to decrease the acetaldehyde content of melt-processed polyesters
JP3505571B2 (ja) * 2000-03-06 2004-03-08 静岡大学長 ポリプロピレンをベースフィルムとするガスバリヤーフィルムの製造方法
US20010038894A1 (en) * 2000-03-14 2001-11-08 Minoru Komada Gas barrier film
FR2806324B1 (fr) * 2000-03-15 2002-09-27 Air Liquide Procede et dispositif de mise en oeuvre d'une reaction chimique et procede de traitement de surface utilisant de tels procede et dispositif
AU2001275172A1 (en) * 2000-06-06 2001-12-17 The Dow Chemical Company Transmission barrier layer for polymers and containers
JP3265364B2 (ja) 2000-06-27 2002-03-11 静岡大学長 銅薄膜直接接合ポリイミドフィルムおよびその製造方法
WO2002004552A1 (en) * 2000-07-06 2002-01-17 Commonwealth Scientific And Industrial Research Organisation A process for modifying the surface of a substrate containing a polymeric material by means of vaporising the surface modifying agent
AUPQ859000A0 (en) 2000-07-06 2000-07-27 Commonwealth Scientific And Industrial Research Organisation Apparatus for surface engineering
US6720052B1 (en) 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6740378B1 (en) * 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
FR2814382B1 (fr) * 2000-09-28 2003-05-09 Cebal Procede de depot d'un revetement interne dans un recipient en matiere plastique
JP4595276B2 (ja) * 2000-12-25 2010-12-08 東洋製罐株式会社 マイクロ波プラズマ処理方法及び装置
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
US6632874B2 (en) 2001-05-01 2003-10-14 The Coca-Cola Company Method to decrease aldehyde content in polyolefin products
DE10138696A1 (de) * 2001-08-07 2003-03-06 Schott Glas Verfahren und Vorrichtung zum gleichzeitigen Beschichten und Formen eines dreidimensionalen Körpers
US6617152B2 (en) * 2001-09-04 2003-09-09 Corning Inc Method for creating a cell growth surface on a polymeric substrate
BR0308827A (pt) * 2002-04-15 2005-01-25 Coca Cola Co Estrutura revestida, bebida embalada, e, método para reduzir a permeabilidade de vapor ou gás
US6743524B2 (en) * 2002-05-23 2004-06-01 General Electric Company Barrier layer for an article and method of making said barrier layer by expanding thermal plasma
US7041350B1 (en) 2002-08-30 2006-05-09 The Coca-Cola Company Polyester composition and articles with reduced acetaldehyde content and method using hydrogenation catalyst
DE10243022A1 (de) * 2002-09-17 2004-03-25 Degussa Ag Abscheidung eines Feststoffs durch thermische Zersetzung einer gasförmigen Substanz in einem Becherreaktor
US20040149225A1 (en) * 2002-11-12 2004-08-05 Weikart Christopher M. Process and apparatus for depositing plasma coating onto a container
US6982498B2 (en) 2003-03-28 2006-01-03 Tharp John E Hydro-electric farms
US6762275B1 (en) 2003-05-27 2004-07-13 The Coca-Cola Company Method to decrease the acetaldehyde content of melt-processed polyesters
US20050049391A1 (en) * 2003-08-28 2005-03-03 Mark Rule Polyester composition and articles with reduced acetaldehyde content and method using vinyl esterification catalyst
DE10354625A1 (de) * 2003-11-22 2005-06-30 Sig Technology Ltd. Verfahren zur Bestimmung der Gasdurchlässigkeit von Behälterwandungen, Behälter mit Oberflächenbeschichtung sowie Beschichtungseinrichtung mit Messvorrichtung
JP2005280718A (ja) * 2004-03-26 2005-10-13 Yoshino Kogyosho Co Ltd 高いガスバリア性を有する合成樹脂製容器
DE102004020185B4 (de) * 2004-04-22 2013-01-17 Schott Ag Verfahren und Vorrichtung für die Innenbeschichtung von Hohlkörpern sowie Verwendung der Vorrichtung
EP1799877B2 (en) * 2004-08-18 2016-04-20 Dow Corning Corporation Sioc:h coated substrates
CN100558940C (zh) * 2004-08-18 2009-11-11 陶氏康宁公司 涂布的基片及其制备方法
US20070048456A1 (en) * 2004-09-14 2007-03-01 Keshner Marvin S Plasma enhanced chemical vapor deposition apparatus and method
US20060070677A1 (en) * 2004-09-28 2006-04-06 Tokai Rubber Industries, Ltd. Hose with sealing layer, direct-connect assembly including the same, and method of manufacturing the same
BRPI0515854A (pt) * 2004-10-13 2008-08-12 Dow Global Technologies Inc processo melhorado para preparar uma barreira protetora para um recipiente
JP2006118669A (ja) * 2004-10-25 2006-05-11 Sanoh Industrial Co Ltd 樹脂チューブ
US20060292323A1 (en) * 2005-04-18 2006-12-28 Hutchinson Gerald A Water-resistant coated articles and methods of making same
CA2609764C (en) * 2005-05-27 2013-06-18 Kirin Beer Kabushiki Kaisha Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container
WO2006133730A1 (en) 2005-06-16 2006-12-21 Innovative Systems & Technologies Method for producing coated polymer
GB0515357D0 (en) * 2005-07-27 2005-08-31 Psimedica Ltd Silicon package material
AU2006304284A1 (en) * 2005-10-14 2007-04-26 Advanced Plastics Technologies Luxembourg S.A. Methods of forming multilayer articles by surface treatment applications
WO2007102378A1 (ja) * 2006-02-28 2007-09-13 Toppan Printing Co., Ltd. 電気泳動用カセットおよびその製造方法
DE102006024675A1 (de) * 2006-05-26 2007-11-29 Robert Bosch Gmbh Verfahren und Vorrichtung zur Oberflächenbehandlung an Behältnissen oder Gegenständen
US7700167B2 (en) * 2006-08-31 2010-04-20 Honeywell International Inc. Erosion-protective coatings on polymer-matrix composites and components incorporating such coated composites
US20080139003A1 (en) * 2006-10-26 2008-06-12 Shahid Pirzada Barrier coating deposition for thin film devices using plasma enhanced chemical vapor deposition process
JP4861885B2 (ja) * 2007-04-06 2012-01-25 東海ゴム工業株式会社 シール層付ホースの製造方法
US7877968B2 (en) * 2007-05-15 2011-02-01 Kraft Foods Global Brands Llc Method for forming a container with improved release properties
US8003178B2 (en) * 2007-05-15 2011-08-23 Kraft Foods Global Brands Llc Container with improved release properties
DE102007045216A1 (de) * 2007-09-21 2009-04-02 Khs Corpoplast Gmbh & Co. Kg Vorrichtung zur Plasmabehandlung von Werkstücken
DK2253008T3 (en) * 2008-03-12 2017-05-08 Alytus Corp S A PLASMA SYSTEM
US8062470B2 (en) * 2008-05-12 2011-11-22 Yuri Glukhoy Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers
US20090284421A1 (en) * 2008-05-16 2009-11-19 Yuri Glukhoy RF antenna assembly having an antenna with transversal magnetic field for generation of inductively coupled plasma
DE102008037160A1 (de) 2008-08-08 2010-02-11 Krones Ag Versorgungsvorrichtung
PL2251454T3 (pl) 2009-05-13 2014-12-31 Sio2 Medical Products Inc Powlekanie i kontrola pojemnika
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
EP2279801B1 (en) * 2009-07-27 2015-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Coating methods using plasma jet and plasma coating apparatus
US8715789B2 (en) * 2009-12-18 2014-05-06 Sub-One Technology, Inc. Chemical vapor deposition for an interior of a hollow article with high aspect ratio
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
FI20105902A0 (fi) 2010-08-30 2010-08-30 Beneq Oy Laite
MX360848B (es) * 2010-10-29 2018-11-20 Bayer Consumer Care Ag Método par abolizar polietilenglicol en una solución concentrada terapéutica.
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US20120128896A1 (en) * 2010-11-19 2012-05-24 Tucker Edward B Stain-resistant container and method
WO2012122559A2 (en) 2011-03-10 2012-09-13 KaiaTech, Inc. Method and apparatus for treating containers
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
KR20140053144A (ko) * 2011-07-01 2014-05-07 레인하우센 플라즈마 게엠베하 중공체 플라즈마 처리
US20180326069A1 (en) * 2011-10-24 2018-11-15 Bayer Healthcare Llc Therapeutic solution concentrate
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
DE102012201956A1 (de) * 2012-02-09 2013-08-14 Krones Ag Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern
DE102012201955A1 (de) * 2012-02-09 2013-08-14 Krones Ag Powerlanze und plasmaunterstützte Beschichtung mit Hochfrequenzeinkopplung
DE102012204690A1 (de) * 2012-03-23 2013-09-26 Krones Ag Vorrichtung zum Plasmabeschichten von Füllgutbehältern, wie Flaschen
DE102012206081A1 (de) * 2012-04-13 2013-10-17 Krones Ag Beschichtung von Behältern mit Plasmadüsen
CA2887352A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
EP2914762B1 (en) 2012-11-01 2020-05-13 SiO2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US20160015898A1 (en) 2013-03-01 2016-01-21 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
KR102472240B1 (ko) 2013-03-11 2022-11-30 에스아이오2 메디컬 프로덕츠, 인크. 코팅된 패키징
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US20160017490A1 (en) 2013-03-15 2016-01-21 Sio2 Medical Products, Inc. Coating method
BR112015029160B1 (pt) 2013-05-20 2022-02-01 Unilever Ip Holdings B.V. Processo para revestimento de um recipiente
US11326254B2 (en) * 2014-03-03 2022-05-10 Picosun Oy Protecting an interior of a gas container with an ALD coating
WO2015148471A1 (en) 2014-03-28 2015-10-01 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
JP6585702B2 (ja) * 2014-07-21 2019-10-02 ゲア プロコマック エセ．ピ．ア．Ｇｅａ Ｐｒｏｃｏｍａｃ Ｓ．Ｐ．Ａ． プラスチック材料のパリソンで開始する容器を成形するための成形装置及びこの装置を備えた成形機構
BR112018003051B1 (pt) 2015-08-18 2022-12-06 Sio2 Medical Products, Inc Tubo de coleta de sangue submetido a vácuo
US10626047B2 (en) 2016-10-18 2020-04-21 Owens-Brockway Glass Container Inc. Glass container coating process
JP7060427B2 (ja) * 2018-03-29 2022-04-26 イビデン株式会社 Ｃｖｄ装置用ノズル、ｃｖｄ装置およびｃｖｄ膜の製造方法
FR3091875B1 (fr) * 2019-01-17 2021-09-24 Innovative Systems Et Tech Isytech Procédé et dispositif de traitement pour le dépôt d’un revêtement à effet barrière
EP3946767A4 (en) 2019-04-03 2023-01-18 Kaiatech, Inc. DEVICE, PROBE ASSEMBLY AND METHOD FOR TREATMENT OF CONTAINERS

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442686A (en) * 1964-03-13 1969-05-06 Du Pont Low permeability transparent packaging films
US3828960A (en) * 1972-11-10 1974-08-13 Dow Chemical Co Heat insulating container having plastic walls retaining vacuum
GR79744B (es) * 1982-12-10 1984-10-31 Boc Group Plc
US4552791A (en) * 1983-12-09 1985-11-12 Cosden Technology, Inc. Plastic container with decreased gas permeability
US4478874A (en) * 1983-12-09 1984-10-23 Cosden Technology, Inc. Methods for improving the gas barrier properties of polymeric containers
DE3576802D1 (de) * 1984-12-30 1990-05-03 Ajinomoto Kk Transparente kunststoffmaterialbuechse.
JPS61189626A (ja) * 1985-02-18 1986-08-23 Canon Inc 堆積膜形成法
US4667620A (en) * 1985-10-29 1987-05-26 Cosden Technology, Inc. Method and apparatus for making plastic containers having decreased gas permeability
US4673586A (en) * 1985-10-29 1987-06-16 Cosden Technology, Inc. Method for making plastic containers having decreased gas permeability
US4767586A (en) * 1986-01-13 1988-08-30 Kimberly-Clark Corporation Apparatus and method for forming a multicomponent integral laid fibrous web with discrete homogeneous compositional zones, and fibrous web produced thereby
ZA884511B (en) * 1987-07-15 1989-03-29 Boc Group Inc Method of plasma enhanced silicon oxide deposition
US4888199A (en) * 1987-07-15 1989-12-19 The Boc Group, Inc. Plasma thin film deposition process
US4764405A (en) * 1987-07-22 1988-08-16 Air Products And Chemicals, Inc. Method for increasing barrier properties of thermoplastic substrates
US5180435A (en) * 1987-09-24 1993-01-19 Research Triangle Institute, Inc. Remote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layer
US4880675A (en) * 1988-04-25 1989-11-14 Air Products And Chemicals, Inc. Hot-fillable plastic containers
US4853250A (en) * 1988-05-11 1989-08-01 Universite De Sherbrooke Process of depositing particulate material on a substrate
US4883686A (en) * 1988-05-26 1989-11-28 Energy Conversion Devices, Inc. Method for the high rate plasma deposition of high quality material
US5122431A (en) * 1988-09-14 1992-06-16 Fujitsu Limited Thin film formation apparatus
US4918031A (en) * 1988-12-28 1990-04-17 American Telephone And Telegraph Company,At&T Bell Laboratories Processes depending on plasma generation using a helical resonator
JPH02247375A (ja) * 1989-03-20 1990-10-03 Anelva Corp プラズマ蒸着装置
DE69012727T2 (de) * 1989-03-31 1995-02-09 Canon Kk Verfahren zur herstellung eines polykristallinen filmes mittels chemischen dampfniederschlags.
US5085904A (en) * 1990-04-20 1992-02-04 E. I. Du Pont De Nemours And Company Barrier materials useful for packaging
CA2048168A1 (en) * 1990-08-03 1992-02-04 John T. Felts Silicon oxide based thin film vapour barriers
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
KR960000190B1 (ko) * 1992-11-09 1996-01-03 엘지전자주식회사 반도체 제조방법 및 그 장치
US5389153A (en) * 1993-02-19 1995-02-14 Texas Instruments Incorporated Plasma processing system using surface wave plasma generating apparatus and method

Also Published As

Publication number Publication date
AU4403093A (en) 1993-12-30
WO1993024243A1 (en) 1993-12-09
JPH07502561A (ja) 1995-03-16
US5704983A (en) 1998-01-06
PL302309A1 (en) 1994-07-25
AU666389B2 (en) 1996-02-08
CA2112102A1 (en) 1993-12-09
EP0601166A4 (en) 1996-09-25
CA2112102C (en) 1999-12-07
EP0601166A1 (en) 1994-06-15
US5378510A (en) 1995-01-03

Similar Documents

Publication Publication Date Title
MX9303141A (es) Metodos y aparatos para depositar recubrimientos de barrera.
ES8707311A1 (es) Procedimiento para revestir sustratos en una camara de vacio
CA998887A (en) Nozzle for chemical vapor deposition of coatings
IE801937L (en) Plasma chemical vapour deposition
MY107421A (en) Gas feeding device and deposition film forming apparatus employing the same.
ES8704737A1 (es) Un procedimiento de esterilizacion
DE69021960D1 (de) Verfahren zur kontinuierlichen Herstellung von einem grossflächigen funktionellen aufgedampften Film mittels Mikrowellen-Plasma-CVD sowie Anlage zur Durchführung des Verfahrens.
RU95106473A (ru) Устройство для стерилизации изделия пероксидом водорода, способ стерилизации изделия паром пероксида водорода, способ стерилизации изделия плазмой пероксида водорода, способ стерилизации изделия пероксидом водорода, герметизированный кожух, способ получения неводного комплекса пероксида водорода, органический комплекс пероксида водорода, комплекс карбонат рубидия - пероксид водорода
ES2158379T3 (es) Procedimiento para el tratamiento de plasma.
AU1078988A (en) Hydrogen peroxide plasma sterilization system
ES2149631T3 (es) Deposito de dioxido de silicio por un procedimiento de evaporacion activada con plasma.
JPH0377673B2 (es)
TW347416B (en) Post treatment method for in-situ cleaning
JPS5715870A (en) Pretreatment for painting of polyolefin product
EP1927124A2 (de) Verfahren und vorrichtung zur innenseitigen plasmabehandlung von hohlkörpern
NO924951D0 (no) Fremgangsmaate for fremstilling av uorganiske membraner ved organometallisk, kjemisk dampavsetning
ES8503892A1 (es) Procedimiento para depositar un material transparente electricamente aislante sobre un dispositivo fotovoltaico
DE3785749D1 (de) Enrichtung zum herstellen eines plasmas und zur behandlung von substraten darin.
AU4638693A (en) Chemical vapor deposition from single organometallic precursors
JP2011514265A (ja) Ｗｖｔｒバリア性を改善した多層スタック構造体の製造方法
EP0367289A3 (en) Plasma chemical vapor deposition apparatus
AR005087A1 (es) Aparato para recubrir electrostaticamente recipientes huecos hechos a partir de un material dielectrico y con un agujero que conduce a su interior
AU4125093A (en) Process for producing a silicon containing deposit at the surface of a metallic substrate, process for providing an anti-corrosive treatment, and metallized polymer support
AU1164201A (en) Intumescent composition
ES2089039T3 (es) Procedimiento para la eliminacion de material excedente de una camara para la deposicion por chisporroteo y dispositivo para la realizacion del mismo.