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MX368144B - Análisis en el sitio del elemento informático integrado utilizando espectroscopía de onda acústica superficial. - Google Patents

Análisis en el sitio del elemento informático integrado utilizando espectroscopía de onda acústica superficial.

Info

Publication number
MX368144B
MX368144B MX2016017329A MX2016017329A MX368144B MX 368144 B MX368144 B MX 368144B MX 2016017329 A MX2016017329 A MX 2016017329A MX 2016017329 A MX2016017329 A MX 2016017329A MX 368144 B MX368144 B MX 368144B
Authority
MX
Mexico
Prior art keywords
ice
acoustic wave
surface acoustic
optical
interacted
Prior art date
Application number
MX2016017329A
Other languages
English (en)
Other versions
MX2016017329A (es
Inventor
Atkinson Robert
Gao Li
M Price James
l perkins David
Original Assignee
Halliburton Energy Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halliburton Energy Services Inc filed Critical Halliburton Energy Services Inc
Publication of MX2016017329A publication Critical patent/MX2016017329A/es
Publication of MX368144B publication Critical patent/MX368144B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/46—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by spectral analysis, e.g. Fourier analysis or wavelet analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0237—Thin materials, e.g. paper, membranes, thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Se proporcionan sistemas y métodos para la medición in situ de las propiedades físicas de un dispositivo de elemento informático integrado (ICE) utilizando espectroscopía de onda acústica superficial (SAW) durante la fabricación. El sistema incluye un dispositivo de medición que tiene una fuente de bomba que proporciona un pulso de excitación que genera una SAW en la superficie externa del ICE. El sistema proporciona una radiación de sonda para interactuar con la superficie externa del dispositivo de ICE y para formar una radiación interactuada, y un transductor óptico configurado para recibir la radiación interactuada y formar una señal. Un analizador recibe la señal del transductor óptico y determina una propiedad de una capa de material en la superficie externa del dispositivo de ICE, y un segundo dispositivo de medición utilizando al menos uno de monitoreo óptico, elipsometría, y espectroscopía óptica, está configurado para medir una segunda propiedad en el dispositivo de lCE.
MX2016017329A 2014-07-30 2014-07-30 Análisis en el sitio del elemento informático integrado utilizando espectroscopía de onda acústica superficial. MX368144B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2014/048791 WO2016018278A1 (en) 2014-07-30 2014-07-30 In-situ analysis of ice using surface acoustic wave spectroscopy

Publications (2)

Publication Number Publication Date
MX2016017329A MX2016017329A (es) 2017-05-01
MX368144B true MX368144B (es) 2019-09-20

Family

ID=55217998

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2016017329A MX368144B (es) 2014-07-30 2014-07-30 Análisis en el sitio del elemento informático integrado utilizando espectroscopía de onda acústica superficial.

Country Status (5)

Country Link
US (1) US20160265910A1 (es)
EP (1) EP3146292A4 (es)
BR (1) BR112016029829A2 (es)
MX (1) MX368144B (es)
WO (1) WO2016018278A1 (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6658406B2 (ja) * 2016-08-31 2020-03-04 株式会社デンソー 炭化珪素半導体装置の製造方法
DE102018122391A1 (de) * 2018-09-13 2020-03-19 Sikora Ag Vorrichtung und Verfahren zum Detektieren eines Gegenstandes
EP3953682B1 (en) * 2019-04-08 2025-03-19 Chevron U.S.A. Inc. Systems and methods for modeling substance characteristics

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812261A (en) * 1992-07-08 1998-09-22 Active Impulse Systems, Inc. Method and device for measuring the thickness of opaque and transparent films
US6175416B1 (en) * 1996-08-06 2001-01-16 Brown University Research Foundation Optical stress generator and detector
US6217720B1 (en) * 1997-06-03 2001-04-17 National Research Council Of Canada Multi-layer reactive sputtering method with reduced stabilization time
US6795198B1 (en) * 1998-05-28 2004-09-21 Martin Fuchs Method and device for measuring thin films and semiconductor substrates using reflection mode geometry
US6393915B1 (en) * 1999-07-29 2002-05-28 Koninklijke Philips Electronics N.V. Method and device for simultaneously measuring multiple properties of multilayer films
US6381019B1 (en) * 2000-06-30 2002-04-30 Brown University Research Foundation Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample
US7006221B2 (en) * 2001-07-13 2006-02-28 Rudolph Technologies, Inc. Metrology system with spectroscopic ellipsometer and photoacoustic measurements
US6786099B2 (en) * 2002-02-14 2004-09-07 Kla-Tencor Technologies Corporation Surface photo-acoustic film measurement device and technique
WO2005094503A2 (en) * 2004-03-23 2005-10-13 Trustees Of Boston University Characterization of micro- and nano scale materials by acoustic wave generation with a cw modulated laser
WO2011044473A1 (en) * 2009-10-09 2011-04-14 Rudolph Technologies, Inc. Substrate analysis using surface acoustic wave metrology
US8960294B2 (en) * 2011-08-05 2015-02-24 Halliburton Energy Services, Inc. Methods for monitoring fluids within or produced from a subterranean formation during fracturing operations using opticoanalytical devices
US9261461B2 (en) * 2011-08-05 2016-02-16 Halliburton Energy Services, Inc. Systems and methods for monitoring oil/gas separation processes
US9013702B2 (en) * 2012-04-26 2015-04-21 Halliburton Energy Services, Inc. Imaging systems for optical computing devices
US9575209B2 (en) * 2012-12-22 2017-02-21 Halliburton Energy Services, Inc. Remote sensing methods and systems using nonlinear light conversion and sense signal transformation

Also Published As

Publication number Publication date
MX2016017329A (es) 2017-05-01
BR112016029829A2 (pt) 2017-08-22
EP3146292A1 (en) 2017-03-29
US20160265910A1 (en) 2016-09-15
EP3146292A4 (en) 2018-01-17
WO2016018278A1 (en) 2016-02-04

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