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KR970069828A - Container for storing and returning lithographic reticles - Google Patents

Container for storing and returning lithographic reticles Download PDF

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Publication number
KR970069828A
KR970069828A KR1019970006338A KR19970006338A KR970069828A KR 970069828 A KR970069828 A KR 970069828A KR 1019970006338 A KR1019970006338 A KR 1019970006338A KR 19970006338 A KR19970006338 A KR 19970006338A KR 970069828 A KR970069828 A KR 970069828A
Authority
KR
South Korea
Prior art keywords
container
wall
storing
partition
weak
Prior art date
Application number
KR1019970006338A
Other languages
Korean (ko)
Other versions
KR100246069B1 (en
Inventor
에이취. 애드보케이트 윌리엄
에스. 허그 조슈아
Original Assignee
제프리 엘. 포맨
인터내셔널 비지네스 머신즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제프리 엘. 포맨, 인터내셔널 비지네스 머신즈 코포레이션 filed Critical 제프리 엘. 포맨
Publication of KR970069828A publication Critical patent/KR970069828A/en
Application granted granted Critical
Publication of KR100246069B1 publication Critical patent/KR100246069B1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Buffer Packaging (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

본 발명은 약한 물체를 저장하고 반송하기 위한 용기에 있어서, 하나의 개방면을 갖는 박스를 형성하는 한쌍의 측벽과, 하나의 상부벽과, 하나의 하부벽과, 하나의 후방벽과; 물체가 격벽에 대해 위치되어 용이하게 이동되지 않도록 저장 및 반송 중 물체를 격리하여 경사 방향으로 물체를 지지하기 위한 측벽들 사이에 이격되고 경사진 다수의 격벽을 포함하는 용기에 관한 것이다.A container for storing and transporting a weak object, comprising: a pair of sidewalls, a top wall, a bottom wall, and a back wall forming a box having a single open surface; A container comprising a plurality of partitions spaced apart and inclined between sidewalls for isolating the object during storage and transport to support the object in an oblique direction so that the object is positioned relative to the partition and not easily moved.

Description

석판 인쇄 레티클을 저장하고 반송하기 위한 용기Container for storing and returning lithographic reticles

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 경사진 격벽을 갖는 용기를 도시하는 도면.1 shows a container having an inclined partition.

Claims (5)

약한 물체를 저장하고 반송하기 위한 용기에 있어서, 하나의 개방면을 갖는 박스를 형성하는 한쌍의 측벽과, 하나의 상부벽과, 하나의 하부벽과, 하나의 후방벽과; 물체가 격벽에 대해 위치되어 용이하게 이동되지 않도록 저장 및 반송 중 물체를 격리하여 경사 방향으로 물체를 지지하기 위한 측벽돌 사이에 이격되고 경사진 다수의 격벽을 포함하는 것을 특징으로 하는 용기.A container for storing and conveying a weak object, comprising: a pair of side walls, a top wall, a bottom wall, and a back wall forming a box having one open surface; And a plurality of partitions spaced and inclined between sidewall stones for isolating the object during storage and transport to support the object in an oblique direction such that the object is positioned relative to the partition and not easily moved. 제1항에 있어서, 격벽의 각도는 xg〈xo, x'g〉xg=경사 방향이 x-y평면에 수직하다고 가정할 때, 물체에 대한 무게중심의 계산된 또는 측정된 x 성분이며, x'g=물체를 경사지게 할 때 xg의 상대 x 위치이며, xo=경사 방향이 y-z평면에 수직하다고 가정할 때 물체의 측정된 폭이며 또한 물체가 경사지는 피봇 점인 조건을 만족시키는 것을 특징으로 하는 용기.The method of claim 1, wherein the angle of the partition wall is x g < x o , x ' g > x g = the calculated or measured x component of the center of gravity for the object, assuming that the inclination direction is perpendicular to the xy plane, x ' g = the relative x position of x g when the object is inclined, x o = the measured width of the object assuming the inclination direction is perpendicular to the yz plane, and also characterized by satisfying the condition of the pivot point at which the object is inclined Container. 제2항에 있어서, 측벽에 부착되어 개방면에 걸쳐지는 반송 중 용기 내부에 물체를 유지하기 위한 유지 수단을 또한 포함하는 것을 특징으로 하는 용기.3. A container according to claim 2, further comprising holding means for holding an object inside the container during conveyance that is attached to the side wall and spans the open surface. 제1항에 있어서, 반송 시 후방벽이 개방면보다 낮아지도록 용기에 중심에 이격되어 부착된 손잡이를 또한 포함하는 것을 특징으로 하는 용기.The container of claim 1, further comprising a handle attached to a center spaced apart from the container such that the rear wall is lower than the opening surface during conveyance. 제1항에 있어서, 약한 물체가 레티클인 것을 특징으로 하는 용기.The container of claim 1, wherein the weak object is a reticle. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970006338A 1996-04-30 1997-02-27 Container for storing and transporting lithographic reticles KR100246069B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US64138196A 1996-04-30 1996-04-30
US8/641,381 1996-04-30
US08/641,381 1996-04-30

Publications (2)

Publication Number Publication Date
KR970069828A true KR970069828A (en) 1997-11-07
KR100246069B1 KR100246069B1 (en) 2000-04-01

Family

ID=24572115

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970006338A KR100246069B1 (en) 1996-04-30 1997-02-27 Container for storing and transporting lithographic reticles

Country Status (2)

Country Link
JP (1) JPH1035776A (en)
KR (1) KR100246069B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103738562A (en) * 2013-11-29 2014-04-23 吴江市新锦华纺织有限公司 Novel containing box for textile manufacturing

Also Published As

Publication number Publication date
KR100246069B1 (en) 2000-04-01
JPH1035776A (en) 1998-02-10

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