KR970067550A - wafer - Google Patents
wafer Download PDFInfo
- Publication number
- KR970067550A KR970067550A KR1019960005458A KR19960005458A KR970067550A KR 970067550 A KR970067550 A KR 970067550A KR 1019960005458 A KR1019960005458 A KR 1019960005458A KR 19960005458 A KR19960005458 A KR 19960005458A KR 970067550 A KR970067550 A KR 970067550A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- top edge
- present
- order
- relates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
본 발명은 웨이퍼의 플랫존을 셀프어라인하는 방식으로, 웨이퍼 어라인을 하기 위하여 상면 가장자리에 마킹 표시가 형성된 웨이퍼에 관한 것이다.The present invention relates to a wafer in which marking marks are formed on a top edge of the wafer in order to self align the flat zone of the wafer.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2도는 본 발명의 웨이퍼의 일실시예를 설명하기 위해 도시한 도면이다.FIG. 2 is a view for explaining an embodiment of the wafer of the present invention.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960005458A KR970067550A (en) | 1996-03-02 | 1996-03-02 | wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960005458A KR970067550A (en) | 1996-03-02 | 1996-03-02 | wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970067550A true KR970067550A (en) | 1997-10-13 |
Family
ID=66221848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960005458A Withdrawn KR970067550A (en) | 1996-03-02 | 1996-03-02 | wafer |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970067550A (en) |
-
1996
- 1996-03-02 KR KR1019960005458A patent/KR970067550A/en not_active Withdrawn
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19960302 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |