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KR970063390A - 기판처리장치 - Google Patents

기판처리장치 Download PDF

Info

Publication number
KR970063390A
KR970063390A KR1019970001055A KR19970001055A KR970063390A KR 970063390 A KR970063390 A KR 970063390A KR 1019970001055 A KR1019970001055 A KR 1019970001055A KR 19970001055 A KR19970001055 A KR 19970001055A KR 970063390 A KR970063390 A KR 970063390A
Authority
KR
South Korea
Prior art keywords
substrate
conveyance
board
roller
upper side
Prior art date
Application number
KR1019970001055A
Other languages
English (en)
Inventor
이와오 다나카
요시히코 마쯔시타
Original Assignee
이시다 아키라
다이닛뽕 스크린 세이조오 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이시다 아키라, 다이닛뽕 스크린 세이조오 가부시키가이샤 filed Critical 이시다 아키라
Publication of KR970063390A publication Critical patent/KR970063390A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

구조가 간단하고 동시에, 기판의 폭치수에 관계없이 적량의 처리액을 기판에 공급하여 처리가 가능하도록 한다.
반송방향으로 소정의 간격으로 경사진 회전축을 가지는 반송롤러(50)가 병설된 기판반송장치(5)와, 상기 병설된 반송롤러(50)의 사이에서 기판(B)의 반송방향과 직교하는 방향으로 설치된 지지축(61)으로 회전가능하게 지지됨과 동시에 반송되는 기판(B)의 하위 가장자리를 지지하는 사이드롤러(64)를 구비한 위치유지수단(6)과, 상기 기판(B)의 상위측 위치에서 기판(B)의 반송방향을 따라 배치되고 기판(B)의 표면에 처리액을 공급하는 리퀴드나이프(31b)를 구비하고 있다. 위치유지수단(6)은 기판반송장치(5)에 의해 반송되는 기판(B)의 폭치수에 따라 기판(B)의 상위측위치를 일치시키기 위해, 반송롤러(50)와 평행한 방향으로 이동가능하게 설치되어있다.

Description

기판처리장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 기판처리장치의 일실시형태를 나타내는 개략구성도.

Claims (2)

  1. 반송방향으로 소정의 간격으로 경사진 회전축을 가지는 반송롤러가 병설된 기판반송수단과, 상기 병설된 반송롤러의 사이에서 기판의 반송방향과 직교하는 방향으로 설치된 지지축으로 회전가능하게 지지됨과 동시에 반송되는 기판의 하위가장자리를 지지하는 회전체를 구비한 위치 유지수단과, 상기 기판의 상위측위치에서 기판의 반송방향을 따라 배치되고 기판의 표면에 처리액을 공급하는 처리액공급수단을 구비한 것을 특징으로 하흔 기판처리장치.
  2. 제1항에 있어서, 상기 위치유지수단은 기판반송수단에 의해 반송되는 기판의 폭치수에 따라 기판의 상위측 위치를 일치시키기 위해, 반송롤러와 평행한 방향으로 이동가능하게 설치되어 있는 것을 특징으로 하는 기판 처리장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970001055A 1996-02-19 1997-01-15 기판처리장치 KR970063390A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP96-31034 1996-02-19
JP8031034A JPH09232268A (ja) 1996-02-19 1996-02-19 基板処理装置

Publications (1)

Publication Number Publication Date
KR970063390A true KR970063390A (ko) 1997-09-12

Family

ID=12320229

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970001055A KR970063390A (ko) 1996-02-19 1997-01-15 기판처리장치

Country Status (2)

Country Link
JP (1) JPH09232268A (ko)
KR (1) KR970063390A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100484061B1 (ko) * 2001-09-14 2005-04-19 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001284310A (ja) * 2000-03-31 2001-10-12 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
JP4602567B2 (ja) * 2000-12-15 2010-12-22 芝浦メカトロニクス株式会社 基板の洗浄装置
KR100547440B1 (ko) * 2003-01-27 2006-01-31 주식회사 디엠에스 기판 이송용 축을 구비하는 기판 처리 장치
KR100729430B1 (ko) * 2005-11-22 2007-06-15 주식회사 디엠에스 직각 반송이 가능한 기판 반송장치
JP6113966B2 (ja) * 2012-06-29 2017-04-12 安瀚視特股▲ふん▼有限公司ＡｖａｎＳｔｒａｔｅ Ｔａｉｗａｎ Ｉｎｃ． ガラス基板の搬送方法、および、ガラス基板の搬送装置
JP6315547B2 (ja) * 2013-12-17 2018-04-25 芝浦メカトロニクス株式会社 基板処理装置
CN103878136B (zh) * 2014-04-10 2016-08-17 苏州创峰光电科技有限公司 垂直输送的滚轮装置
CN105013739A (zh) * 2015-06-24 2015-11-04 江苏华尚汽车玻璃工业有限公司 一种汽车玻璃原片的清洗工艺

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100484061B1 (ko) * 2001-09-14 2005-04-19 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치

Also Published As

Publication number Publication date
JPH09232268A (ja) 1997-09-05

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