[go: up one dir, main page]

KR970063337A - 전자원과 그 전자원을 구비한 전자선 조사장치 - Google Patents

전자원과 그 전자원을 구비한 전자선 조사장치 Download PDF

Info

Publication number
KR970063337A
KR970063337A KR1019970004201A KR19970004201A KR970063337A KR 970063337 A KR970063337 A KR 970063337A KR 1019970004201 A KR1019970004201 A KR 1019970004201A KR 19970004201 A KR19970004201 A KR 19970004201A KR 970063337 A KR970063337 A KR 970063337A
Authority
KR
South Korea
Prior art keywords
electron
electron source
cathode
less
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019970004201A
Other languages
English (en)
Other versions
KR100505378B1 (ko
Inventor
사또루 후꾸하라
Original Assignee
가나이 쯔도무
가부시키가이샤 히다치 세사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가나이 쯔도무, 가부시키가이샤 히다치 세사쿠쇼 filed Critical 가나이 쯔도무
Publication of KR970063337A publication Critical patent/KR970063337A/ko
Application granted granted Critical
Publication of KR100505378B1 publication Critical patent/KR100505378B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

본 발명은 전자현미경이나 전자선 묘화장치 등의 전자선 응용장치에 사용되는 SE 전자원에 관한 것으로, 제어전압에 의해 프로브 전류를 가변시키는 전자총에 있어서, 최적인 전자원 구조를 제공하는 것을 목적으로 한다.
SE 전자원의 구조로서, 팁 선단의 테이퍼각도 15도 이하, 곡률반경 0.5㎛ 이하를 채용한 전자원.
본 발명을 채용한 SE 전자원을 사용한 전자총에서는, 제어전압의 변화에 대하여 얻어지는 프로브 전류의 가변범위가 커지기 때문에, 1개의 인출전압 설정으로 충분하다. 또, 그 인출전압치도 작아지기 때문에, 방전에 의한 팁의 파손도 없어지고, 전자총의 안정도가 증가한다.

Description

전자원과 그 전자원을 구비한 전자선 조사장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명과 종래기술의 음극의 전자현미경 사진.
제3도는 본 발명 팁과 종래기술의 팁을 위한 테스트 장치를 나타내는 도.
제4도는 본 발명 팁과 종래기술에 의한 팁의 비교도.

Claims (4)

  1. 바늘형상의 음극과, 상기 음극으로부터 전자를 인출하기 위한 전계를 인가하는 인출전극과, 상기 음극과 인출전극의 사이에 설치되며 전자선의 양을 제어하는 제어전극을 구비하는 전자원으로서, 상기 음극의 선단각을 15도 미만으로 한 것을 특징으로 하는 전자원.
  2. 제1항에 있어서, 상기 음극의 선단형상을 0.5㎛ 미만을 선단 곡률반경으로 한 것을 특징으로 하는 전자원.
  3. 선단각을 15도 미만으로 한 바늘형상의 음극과, 상기 음극으로부터 전자를 인출하기 위한 전계를 형성하는 인출전극과, 상기 음극과 인출전극의 사이에 배치되며 전자선의 양을 제어하는 제어전극을 구비한 전자원을 가지는 전자선 조사장치로서, 상기 인출전극에 일정한 정전압을 인가하면서 상기 제어전극에 부전압을 인가하고, 상기 부전압치를 변화시키기 위한 제어수단을 구비하여 이루어지는 것을 특징으로 하는 전자선 조사장치.
  4. 제3항에 있어서, 상기 음극의 선단형상을 0.5㎛미만의 선단 곡률반경으로 한 것을 특징으로 하는 전자선 조사장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970004201A 1996-02-14 1997-02-13 전자원과그전자원을구비한전자선조사장치 Expired - Lifetime KR100505378B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4966696 1996-02-14
JP8-049666 1996-02-14

Publications (2)

Publication Number Publication Date
KR970063337A true KR970063337A (ko) 1997-09-12
KR100505378B1 KR100505378B1 (ko) 2005-10-21

Family

ID=12837505

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970004201A Expired - Lifetime KR100505378B1 (ko) 1996-02-14 1997-02-13 전자원과그전자원을구비한전자선조사장치

Country Status (4)

Country Link
US (1) US5834781A (ko)
EP (1) EP0790633B1 (ko)
KR (1) KR100505378B1 (ko)
DE (1) DE69709554T2 (ko)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068970A1 (fr) * 1999-05-11 2000-11-16 Hitachi, Ltd. Appareil a faisceau electronique, et inspection d'un canon a electrons
JP4261806B2 (ja) * 2002-02-15 2009-04-30 株式会社日立ハイテクノロジーズ 電子線装置及びその高電圧放電防止方法
US6798126B2 (en) * 2002-05-03 2004-09-28 Fei Company High angular intensity Schottky electron point source
KR100523840B1 (ko) * 2003-08-27 2005-10-27 한국전자통신연구원 전계 방출 소자
GB2414856B (en) * 2004-06-03 2008-11-12 Nanobeam Ltd Charged particle gun
US20060196853A1 (en) * 2005-03-04 2006-09-07 The Regents Of The University Of California Micro-joining using electron beams
US9257257B2 (en) * 2006-06-30 2016-02-09 Shimadzu Corporation Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter
GB2483182B (en) * 2006-06-30 2012-04-18 Shimadzu Corp Electron beam generating appparatus and electron emitters
DE102011013262A1 (de) 2011-03-07 2012-09-13 Adlantis Dortmund Gmbh Ionisationsquelle und Nachweisgerät für Spurengase
WO2012127963A1 (ja) 2011-03-18 2012-09-27 電気化学工業株式会社 電子銃又はイオン銃の取扱方法および収容体
US9349562B2 (en) 2011-12-29 2016-05-24 Elwha Llc Field emission device with AC output
JP6278897B2 (ja) * 2011-12-29 2018-02-14 エルファー エルエルシー 電界放出デバイスのための装置と方法
US8810161B2 (en) 2011-12-29 2014-08-19 Elwha Llc Addressable array of field emission devices
US9646798B2 (en) 2011-12-29 2017-05-09 Elwha Llc Electronic device graphene grid
US9018861B2 (en) 2011-12-29 2015-04-28 Elwha Llc Performance optimization of a field emission device
US8692226B2 (en) 2011-12-29 2014-04-08 Elwha Llc Materials and configurations of a field emission device
US8810131B2 (en) 2011-12-29 2014-08-19 Elwha Llc Field emission device with AC output
US8970113B2 (en) 2011-12-29 2015-03-03 Elwha Llc Time-varying field emission device
US8946992B2 (en) 2011-12-29 2015-02-03 Elwha Llc Anode with suppressor grid
US8575842B2 (en) 2011-12-29 2013-11-05 Elwha Llc Field emission device
US8928228B2 (en) 2011-12-29 2015-01-06 Elwha Llc Embodiments of a field emission device
US9171690B2 (en) 2011-12-29 2015-10-27 Elwha Llc Variable field emission device
US9627168B2 (en) 2011-12-30 2017-04-18 Elwha Llc Field emission device with nanotube or nanowire grid
US9659735B2 (en) 2012-09-12 2017-05-23 Elwha Llc Applications of graphene grids in vacuum electronics
US9659734B2 (en) 2012-09-12 2017-05-23 Elwha Llc Electronic device multi-layer graphene grid
DE102014226812A1 (de) * 2014-12-22 2016-06-23 Siemens Aktiengesellschaft Vorrichtung zum Erzeugen eines Elektronenstrahls
EP3065161B1 (en) * 2015-01-09 2018-11-21 Technology Research Association For Future Additive Manufacturing Electron gun, control method and control program thereof, and three-dimensional shaping apparatus
US11322329B2 (en) 2018-08-27 2022-05-03 Hitachi High-Tech Corporation Electron source, method for manufacturing the same, and electron beam device using the same
US11651929B2 (en) 2018-12-05 2023-05-16 Hitachi High-Tech Corporation Charged particle source and charged particle beam device
EP3905299A4 (en) * 2018-12-28 2022-04-06 Canon Anelva Corporation ELECTRON GUN, X-RAY GENERATING DEVICE, AND X-RAY IMAGING DEVICE
KR102640728B1 (ko) * 2019-04-18 2024-02-27 주식회사 히타치하이테크 전자원 및 하전 입자선 장치

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217392B1 (ko) * 1970-09-18 1977-05-14
US4324999A (en) * 1980-04-30 1982-04-13 Burroughs Corporation Electron-beam cathode having a uniform emission pattern
US4663559A (en) * 1982-09-17 1987-05-05 Christensen Alton O Field emission device
EP0366851B1 (en) * 1988-11-01 1994-02-16 International Business Machines Corporation Low-voltage source for narrow electron/ion beams
US5155412A (en) * 1991-05-28 1992-10-13 International Business Machines Corporation Method for selectively scaling a field emission electron gun and device formed thereby
US5191217A (en) * 1991-11-25 1993-03-02 Motorola, Inc. Method and apparatus for field emission device electrostatic electron beam focussing
JPH0684452A (ja) * 1992-03-27 1994-03-25 Denki Kagaku Kogyo Kk 熱電界放射陰極
JPH0684451A (ja) * 1992-03-27 1994-03-25 Denki Kagaku Kogyo Kk 熱電界放射陰極
JPH0684450A (ja) * 1992-03-27 1994-03-25 Denki Kagaku Kogyo Kk 熱電界放射陰極
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
JP3264775B2 (ja) * 1994-06-29 2002-03-11 電気化学工業株式会社 熱電界放射電子銃
JP3582855B2 (ja) * 1994-07-22 2004-10-27 電気化学工業株式会社 熱電界放射陰極及びその製造方法
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
DE69506375T2 (de) * 1994-10-03 1999-06-17 Koninklijke Philips Electronics N.V., Eindhoven Partikel-optisches gerät mit einer elektronenquelle versehen die eine nadel und eine membranartige extraktionselektrode aufweist
JPH08171879A (ja) * 1994-12-16 1996-07-02 Hitachi Ltd ショットキーエミッション電子源の動作温度設定方法

Also Published As

Publication number Publication date
DE69709554D1 (de) 2002-02-21
EP0790633A3 (en) 1998-07-08
EP0790633B1 (en) 2002-01-16
US5834781A (en) 1998-11-10
DE69709554T2 (de) 2002-10-02
KR100505378B1 (ko) 2005-10-21
EP0790633A2 (en) 1997-08-20

Similar Documents

Publication Publication Date Title
KR970063337A (ko) 전자원과 그 전자원을 구비한 전자선 조사장치
EP2096661A1 (en) Cold cathode field emission electron gun and its application to electron beam instruments
US4994711A (en) High brightness solid electrolyte ion source
JPH0266840A (ja) 電子線測定器
EP0037455A2 (en) Ion source
KR950009866A (ko) 인라인형 칼라 음극선관용 전자총의 전압 인가 방법 및 전극 구조
EP0390118A3 (en) Field emission scanning electron microsope and method of controlling beam aperture angle
US5962961A (en) Thermal field emission electron gun
US4346325A (en) Electron gun
KR950009865A (ko) 음극선관용 전자총
US3786305A (en) Field emission electron gun
Mousa Characteristics of tungsten substrate with Al2O3 coatings under UHV conditions
KR840006554A (ko) 음극선관
US2554170A (en) Electronic lens for microscopes
KR960019453A (ko) 4중극렌즈를 사용한 컬러음극선관 및 이를 구비한 컬러표시장치
KR890016614A (ko) 브라운관용 전자총
JPH09129166A (ja) 電子銃
SU785903A1 (ru) Электронна пушка
JPH0535540B2 (ko)
RU1806417C (ru) Электровакуумный прибор
JPS62108442A (ja) 静電レンズ
RU1812576C (ru) Электронно-лучевой прибор
JPH01149345A (ja) 液体金属イオン源
JPS5457862A (en) Ion-beam irradiation device
SU692430A1 (ru) Электронна газоразр дна пушка

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19970213

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20011114

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 19970213

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20031127

Patent event code: PE09021S01D

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20040831

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20050628

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20050725

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20050726

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20080722

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20090720

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20100719

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20110617

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20120629

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20130705

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20130705

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20140707

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20140707

Start annual number: 10

End annual number: 10

FPAY Annual fee payment

Payment date: 20150630

Year of fee payment: 11

PR1001 Payment of annual fee

Payment date: 20150630

Start annual number: 11

End annual number: 11

FPAY Annual fee payment

Payment date: 20160701

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20160701

Start annual number: 12

End annual number: 12

EXPY Expiration of term
PC1801 Expiration of term