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KR970047900A - Prism Coupler Device and Control Method - Google Patents

Prism Coupler Device and Control Method Download PDF

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Publication number
KR970047900A
KR970047900A KR1019950066191A KR19950066191A KR970047900A KR 970047900 A KR970047900 A KR 970047900A KR 1019950066191 A KR1019950066191 A KR 1019950066191A KR 19950066191 A KR19950066191 A KR 19950066191A KR 970047900 A KR970047900 A KR 970047900A
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South Korea
Prior art keywords
angle
rotary stage
computer
incident angle
polarizer
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KR1019950066191A
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Korean (ko)
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KR100352585B1 (en
Inventor
장태현
이문호
정훤우
김효성
Original Assignee
김종진
포항종합제철 주식회사
정명식
학교법인 제철학원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

본 발명은 유기물 또는 무기물을 박막형태로 만들었을 경우, 박막의 굴절 및 두께를 레이져빔 및 광학부품(Pptical Part)을 이용하여 비파괴적으로 측정하는 프리즘커플러(Prism Coupler) 장치 및 제어방법에 관한 것이다.The present invention relates to a prism coupler device and a control method for non-destructively measuring the refraction and thickness of a thin film by using a laser beam and a optical part when an organic or inorganic material is made into a thin film. .

(ellipsometer)와 보완적으로 1μm까지의 범위에서 두께와 굴절율을 측정가능하고, 굴절율만 측정한다면 수 ㎜이상의 두께를 갖는 박막의 굴절율도 측정가능한 장치를 제작하였다. 측정과정이 간단하고 시편의 조건이 까다롭지 않아 다양한 분야에 이용될 것으로 전망되는 효과를 가진다.A device capable of measuring thickness and refractive index in the range up to 1 μm complementarily with an ellipsometer and measuring a refractive index of a thin film having a thickness of several millimeters or more if only the refractive index is measured. The measurement process is simple and the conditions of the specimen are not demanding, so it is expected to be used in various fields.

Description

프리즘커플러(Prism Coupler) 장치 및 제어방법Prism Coupler Device and Control Method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도의 (가) 내지 (다)는 본 발명에 따른 프리즘커플러의 기본 원리를 설명하기 위한 도면.1A to 1C are diagrams for explaining the basic principle of a prism coupler according to the present invention.

Claims (2)

주포 파장이 632.8nm인 헬륨-네온 레이저빔을 투사하는 입사광원(20); 상기 광원(20)의 편광상태를 TE모드 또는 TM모드로 만들어 주기 위한 편광기(21); 입사각의 영점을 지정을 위하여 상기 편광기(21)와 프리즘(10) 사이에 설치되는 빔스프린터(22) 및 조리개(23); 입사각에 변화를 주기 위해 구동되는 로타리 스테이지(26); 마이크로스텝모터를 구동하는 콘트롤러(27); 컴퓨터(29)와 상기 콘트롤러(27)과의 통신수단인 입출력 인터페이스(28); 전체동작을 제어하는 컴퓨터(29); 및 상기 빔스프리터(22)에 연결된 검출기(25')와 상기 컴퓨터(29) 사이에 개재되는 ADC포드;를 포함하여 구성된 것을 특징으로 하는 프리즘커플러 장치.An incident light source 20 for projecting a helium-neon laser beam having a gun wavelength of 632.8 nm; A polarizer 21 for making the polarization state of the light source 20 to TE mode or TM mode; A beam printer 22 and an aperture 23 installed between the polarizer 21 and the prism 10 to designate the zero point of the incident angle; A rotary stage 26 driven to change the angle of incidence; A controller 27 for driving the microstep motor; An input / output interface 28 which is a communication means between the computer 29 and the controller 27; A computer 29 for controlling the overall operation; And an ADC pod interposed between the detector (25 ') connected to the beam splitter (22) and the computer (29). 컴퓨터(29), 검출기(25)(25'), 레이저(20)등을 안정화되도록 워밍업을 수행하는 스텝(100); 측정각도 구간의 초기 입사각과 여기까지 움직이는 속도를 입력하는 스텝(101); 로타리 스테이지(26)가 초기 입사각으로 구동되는 스텝(102); 원하는 각도까지 위과정을 반복하는 스템(103). 실제 데이터를 받는데 필요한 열저 정보, 즉 로타리스테이지의 속도, 각도 1°당 마이크로스텝 모터의 스텝수, 최대 레이저 강도, 평균화 정도, 저장할 파일이름등을 입력하는 스텝(104); 마이크로스텝 모터를 초기화하는 스텝(105); 로타리스테이지 동작 및 데이타를 취득하는 스텝(106); 로타리스테이지를 영점으로 복귀하는 스텝(107); 데이타를 저장하는 스템(108); 및 신호해석 및 처리하는 스텝(109)를 구비하여 된 것을 특징으로 하는 프리즘커플러 제어방법.A step 100 of warming up to stabilize the computer 29, the detectors 25, 25 ', the laser 20 and the like; Step 101 of inputting an initial incident angle of the measurement angle section and a moving speed to here; Step 102, in which the rotary stage 26 is driven at an initial incident angle; Stem 103 to repeat the above process to the desired angle. Step 104 of inputting thermal information necessary for receiving actual data, namely, the speed of the rotary stage, the number of steps of the microstep motor per 1 ° angle, the maximum laser intensity, the averaging degree, the file name to be stored, and the like; Step 105 of initializing the microstep motor; Step 106, acquiring rotary stage operation and data; Step 107 of returning the rotary stage to zero; A stem 108 for storing data; And step (109) for signal analysis and processing. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950066191A 1995-12-29 1995-12-29 Prism Coupler Device and Control Method Expired - Fee Related KR100352585B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950066191A KR100352585B1 (en) 1995-12-29 1995-12-29 Prism Coupler Device and Control Method

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Application Number Priority Date Filing Date Title
KR1019950066191A KR100352585B1 (en) 1995-12-29 1995-12-29 Prism Coupler Device and Control Method

Publications (2)

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KR970047900A true KR970047900A (en) 1997-07-26
KR100352585B1 KR100352585B1 (en) 2002-12-31

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040041311A (en) * 2002-11-11 2004-05-17 삼성전자주식회사 method and apparatus for analyzing a sample having an organic coating layer
KR100438213B1 (en) * 2001-09-08 2004-07-01 (주)새론 Prism coupler and method of measuring Optical parameter
KR100442428B1 (en) * 2001-10-16 2004-07-30 엘지전자 주식회사 Protection method for subscriber board of exchange

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3909144A1 (en) * 1989-03-21 1990-09-27 Basf Ag METHOD FOR DETERMINING THE INDEX OF BREAKING AND LAYER THICKNESS LAYERS
JPH02300606A (en) * 1989-05-16 1990-12-12 Mitsubishi Electric Corp Film thickness measuring instrument
JPH0686011U (en) * 1993-01-25 1994-12-13 日本航空電子工業株式会社 Film thickness and refractive index measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438213B1 (en) * 2001-09-08 2004-07-01 (주)새론 Prism coupler and method of measuring Optical parameter
KR100442428B1 (en) * 2001-10-16 2004-07-30 엘지전자 주식회사 Protection method for subscriber board of exchange
KR20040041311A (en) * 2002-11-11 2004-05-17 삼성전자주식회사 method and apparatus for analyzing a sample having an organic coating layer

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