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KR970046678U - Ion implanter with improved beamline section - Google Patents

Ion implanter with improved beamline section

Info

Publication number
KR970046678U
KR970046678U KR2019950048859U KR19950048859U KR970046678U KR 970046678 U KR970046678 U KR 970046678U KR 2019950048859 U KR2019950048859 U KR 2019950048859U KR 19950048859 U KR19950048859 U KR 19950048859U KR 970046678 U KR970046678 U KR 970046678U
Authority
KR
South Korea
Prior art keywords
improved
ion implanter
beamline section
beamline
section
Prior art date
Application number
KR2019950048859U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950048859U priority Critical patent/KR970046678U/en
Publication of KR970046678U publication Critical patent/KR970046678U/en

Links

KR2019950048859U 1995-12-27 1995-12-27 Ion implanter with improved beamline section KR970046678U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048859U KR970046678U (en) 1995-12-27 1995-12-27 Ion implanter with improved beamline section

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048859U KR970046678U (en) 1995-12-27 1995-12-27 Ion implanter with improved beamline section

Publications (1)

Publication Number Publication Date
KR970046678U true KR970046678U (en) 1997-07-31

Family

ID=60845786

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048859U KR970046678U (en) 1995-12-27 1995-12-27 Ion implanter with improved beamline section

Country Status (1)

Country Link
KR (1) KR970046678U (en)

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19951227

UG1501 Laying open of application
UC1204 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid