KR970018104A - How to Form ITO Pattern on Glass of LCD - Google Patents
How to Form ITO Pattern on Glass of LCD Download PDFInfo
- Publication number
- KR970018104A KR970018104A KR1019950029043A KR19950029043A KR970018104A KR 970018104 A KR970018104 A KR 970018104A KR 1019950029043 A KR1019950029043 A KR 1019950029043A KR 19950029043 A KR19950029043 A KR 19950029043A KR 970018104 A KR970018104 A KR 970018104A
- Authority
- KR
- South Korea
- Prior art keywords
- glass
- pattern
- lcd
- forming
- ito
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000011521 glass Substances 0.000 title claims abstract 10
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Abstract
본 발명은, LCD의 글라스에 ITO 패턴을 형성시키는 방법에 관한 것으로, 그 방법은 진공으로 유지하는 케이스(3)내에 글라스(1)와, 패턴을 형성시키고 마스크(2)를 위치시키고, 스퍼터링에 의해 ITO를 글라스에 흡착되도록 하는 것에 의해 글라스에 패턴을 형성시키는 것을 특징으로 한다. 상기 방법에 의하면 기존의 포토레지스트 코팅공정, 노광공정, 에칭공정 등을 제거할 수 있어 공정을 단축시키고 불량률을 줄이며 생산성을 향상시키는 효과가 있다.The present invention relates to a method of forming an ITO pattern on a glass of an LCD, which method comprises forming a glass (1), a pattern, and placing a mask (2) in a case (3) to be kept in vacuum. It is characterized by forming a pattern on the glass by allowing the ITO to be adsorbed on the glass. According to the above method, the existing photoresist coating process, exposure process, etching process, etc. can be removed, thereby shortening the process, reducing defect rate, and improving productivity.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명에 따른 방법을 설명하는 도면이다.1 is a diagram illustrating a method according to the invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950029043A KR970018104A (en) | 1995-09-05 | 1995-09-05 | How to Form ITO Pattern on Glass of LCD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950029043A KR970018104A (en) | 1995-09-05 | 1995-09-05 | How to Form ITO Pattern on Glass of LCD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970018104A true KR970018104A (en) | 1997-04-30 |
Family
ID=66597287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950029043A Withdrawn KR970018104A (en) | 1995-09-05 | 1995-09-05 | How to Form ITO Pattern on Glass of LCD |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970018104A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020080159A (en) * | 2001-04-12 | 2002-10-23 | 에프디테크 주식회사 | Apparatus and method of depositing ITO electrodes for automatically manufacturing OELD |
-
1995
- 1995-09-05 KR KR1019950029043A patent/KR970018104A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020080159A (en) * | 2001-04-12 | 2002-10-23 | 에프디테크 주식회사 | Apparatus and method of depositing ITO electrodes for automatically manufacturing OELD |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19950905 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |