[go: up one dir, main page]

KR970003386A - 쇼트아크형 수은램프 및 그 점등방법 - Google Patents

쇼트아크형 수은램프 및 그 점등방법 Download PDF

Info

Publication number
KR970003386A
KR970003386A KR1019960018351A KR19960018351A KR970003386A KR 970003386 A KR970003386 A KR 970003386A KR 1019960018351 A KR1019960018351 A KR 1019960018351A KR 19960018351 A KR19960018351 A KR 19960018351A KR 970003386 A KR970003386 A KR 970003386A
Authority
KR
South Korea
Prior art keywords
mercury lamp
short arc
cathode
encapsulation
anode
Prior art date
Application number
KR1019960018351A
Other languages
English (en)
Other versions
KR100389999B1 (ko
Inventor
신키치 모리모토
기요타다 나카무라
도시유키 시마
오사무 이노우에
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR970003386A publication Critical patent/KR970003386A/ko
Application granted granted Critical
Publication of KR100389999B1 publication Critical patent/KR100389999B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

본 발명은 장시간에 걸쳐 안정한 점등이 가능한 램프를 제공하는 것을 목적으로 하며, 상기 목적을 달성하기 위하여 본 발명은 발광관(1)의 내부에 음극(20)과 양극(30)이 근접하게 배치되고, 그 양쪽 단에 봉지부(12), (13)를 가지는 쇼크아크형 수은램프에 있어서, 상기 음극(20)은 상기 봉지부(12)로부터 연장되는 막대모양부재(21)의 선단에 설치되고, 이 막대모양부재(21)의 외경보다 큰 외경으로 구성되며, 또한 그 봉지부(12)측의 후단(23)은 테이퍼모양인 것을 특징으로 하는 쇼트아크형 수은램프.

Description

쇼트아크형 수은램프 및 그 점등방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 쇼트아크형 수은램프를 도시한 개략적인 단면도이다, 제2도는 본 발명에 관한 음극의 부분확대도이다, 제3도는 본 발명에 관한 쇼트아크형 수은램프의 내부에 있어서의 기류의 흐름과 혹화물과의 관계를 나타내는 도면이다, 제4도는 본 발명에 관한 쇼트아크형 수은램프를 사용한 노광장치를 개략적으로 도시한 도면이다.

Claims (5)

  1. 발광관의 내부에 음극과 양극이 근접배치되고, 그 양쪽 단에 봉지부를 가지는 쇼트아크형 수은램프에 있어서, 상기 음극은 상기 봉지부로부터 연장되는 막대모양부재의 선단에 설치되고, 이 막대모양부재의 외경보다 큰 외경으로 구성되며, 또한 봉지부측의 후단은 테이퍼모양인 것을 특징으로 하는 쇼트아크형 수은램프.
  2. 제1항에 있어서, 상기 테이퍼는 20 ~ 40°의 범위인 것을 특징으로 하는 쇼트아크형 수은램프.
  3. 제1항에 있어서, 상기 음극과 상기 양극 사이에 형성되는 아크 휘점은 발광관에 대한 전극이 연장되는 방향에 있어서의 중심위치보다도 양극측으로 위치하고 있는 것을 특징으로 하는 쇼트아크형 수은램프.
  4. 제1항에 있어서, 상기 막대모양부재는 텅스텐 코일이 감긴 것을 특징으로 하는 쇼트아크형 수은램프.
  5. 발광관의 내부에 음극과 양극이 근접하게 배치되고, 그 양쪽 단에 봉지부를 가지는 쇼트아크형 수은램프를 점등하는 방법으로서, 상기 봉지부로부터 연장되는 막대모양부재의 선단에 설치되고, 이 막대모양부재의 외경보다도 큰 외경으로 구성되며, 또한 그 봉지부측의 후단은 테이퍼모양인 음극이 위쪽을, 상기 양극이 아래쪽이 수직으로 배치시켜서 당해 수은램프를 점등하는 쇼트아크형 수은램프의 점등방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960018351A 1995-06-26 1996-05-28 쇼트아크형수은램프및그점등방법 KR100389999B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18058195A JP3158972B2 (ja) 1995-06-26 1995-06-26 ショートアーク型水銀ランプ及びその点灯方法
JP95-180581 1995-06-26

Publications (2)

Publication Number Publication Date
KR970003386A true KR970003386A (ko) 1997-01-28
KR100389999B1 KR100389999B1 (ko) 2003-10-04

Family

ID=16085772

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960018351A KR100389999B1 (ko) 1995-06-26 1996-05-28 쇼트아크형수은램프및그점등방법

Country Status (7)

Country Link
US (1) US5818169A (ko)
EP (1) EP0751548B1 (ko)
JP (1) JP3158972B2 (ko)
KR (1) KR100389999B1 (ko)
AT (1) ATE184423T1 (ko)
DE (1) DE69604135T2 (ko)
TW (1) TW444229B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3298453B2 (ja) * 1997-03-18 2002-07-02 ウシオ電機株式会社 ショートアーク型放電ランプ
US6515406B1 (en) * 1999-02-05 2003-02-04 Matsushita Electric Industrial Co., Ltd. High-pressure mercury vapor discharge lamp and lamp unit
DE20005764U1 (de) 2000-03-30 2000-06-08 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH, 81543 München Kurzbogenlampe
JP3669292B2 (ja) * 2001-06-14 2005-07-06 ウシオ電機株式会社 ショートアーク型放電ランプ
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
CN1985346A (zh) * 2004-07-09 2007-06-20 皇家飞利浦电子股份有限公司 高强度放电灯的电极
JP5322217B2 (ja) * 2008-12-27 2013-10-23 ウシオ電機株式会社 光源装置
JP5363174B2 (ja) * 2009-04-10 2013-12-11 株式会社ユメックス ショートアーク型放電灯
JP2016207482A (ja) * 2015-04-23 2016-12-08 岩崎電気株式会社 ショートアーク型放電ランプ
JP2017027765A (ja) 2015-07-22 2017-02-02 セイコーエプソン株式会社 放電灯、放電灯の製造方法、光源装置、およびプロジェクター
JP2019029272A (ja) * 2017-08-02 2019-02-21 ウシオ電機株式会社 レーザ駆動ランプ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE475339A (ko) * 1946-06-17
US3517248A (en) * 1967-10-23 1970-06-23 Us Navy Pressure control of electrode position in gas tube
US3621322A (en) * 1968-09-12 1971-11-16 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh High-pressure compact arc lamp with electrodes containing tantalum carbide
US3543076A (en) * 1968-10-31 1970-11-24 Boeing Co Aeorodynamic arc lamp electrodes
JPS592145B2 (ja) * 1979-10-01 1984-01-17 株式会社東芝 短弧光放電灯
JPH0773001B2 (ja) * 1985-10-18 1995-08-02 東芝ライテック株式会社 投光光源装置
JPH073784B2 (ja) * 1986-10-23 1995-01-18 東芝ライテック株式会社 シヨ−トア−ク放電灯
JP2765836B2 (ja) * 1987-04-13 1998-06-18 株式会社日立製作所 露光用光源
KR920000942B1 (ko) * 1988-06-23 1992-01-31 도오시바 라이텍크 가부시기가이샤 쇼트아크 방전등
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
JPH03274648A (ja) * 1990-03-23 1991-12-05 Ushio Inc ショートアーク型水銀蒸気放電灯
US5258691A (en) * 1990-11-14 1993-11-02 General Electric Company Metal halide lamp having improved operation acoustic frequencies
US5083059A (en) * 1990-12-31 1992-01-21 Welch Allyn, Inc. Electrode for metal halide discharge lamp
JP2732458B2 (ja) * 1991-05-31 1998-03-30 ウシオ電機株式会社 ショートアーク型高圧水銀蒸気放電灯
US5497049A (en) * 1992-06-23 1996-03-05 U.S. Philips Corporation High pressure mercury discharge lamp
US5539273A (en) * 1994-06-29 1996-07-23 Welch Allyn, Inc. Etched electrode for metal halide discharge lamps
JP3077538B2 (ja) * 1994-11-29 2000-08-14 ウシオ電機株式会社 ショートアーク型水銀ランプ

Also Published As

Publication number Publication date
EP0751548B1 (en) 1999-09-08
JP3158972B2 (ja) 2001-04-23
US5818169A (en) 1998-10-06
ATE184423T1 (de) 1999-09-15
JPH0917387A (ja) 1997-01-17
EP0751548A1 (en) 1997-01-02
DE69604135T2 (de) 2000-01-05
DE69604135D1 (de) 1999-10-14
KR100389999B1 (ko) 2003-10-04
TW444229B (en) 2001-07-01

Similar Documents

Publication Publication Date Title
KR970003386A (ko) 쇼트아크형 수은램프 및 그 점등방법
ATE458265T1 (de) Metallhalogenidlampe mit keramischem entladungsgefäss
JP2006245017A (ja) 高圧放電ランプ
KR900003958A (ko) 형광램프
US6268698B1 (en) Capacitive glow starting of high intensity discharge lamps
KR960019473A (ko) 쇼트아크형 수은램프
TW429390B (en) Mercury-free metal-halide lamp
US5539271A (en) Horizontal burning metal halide lamp
EP0189988A2 (en) Projector lamp
KR910014991A (ko) 싱글 엔드형 금속 증기방전등
JP3200575B2 (ja) メタルハライドランプ
US3364374A (en) Compact source lamp having electrode construction providing arc stabilization
EP0866492A3 (en) Discharge lamp of the short arc type
US4069416A (en) Lamp equipped with magnets
KR910019107A (ko) 빛(光) 반사체가 있는 광원(光源)
JP3850753B2 (ja) 放電灯
US4064418A (en) Controlled arc stream in high intensity discharge lamps
KR830008423A (ko) 관구(管球)의 제조방법
RU98101034A (ru) Натриевая лампа высокого давления
KR900015241A (ko) 보조양극을 갖는 형광램프
KR900013569A (ko) 금속 할라이드 램프
EP0366995A2 (en) Arc discharge lamp having improved performance
CA1204145A (en) Fluorescent lamp
JPH01232655A (ja) 高圧ナトリウムランプ
JP3159576B2 (ja) メタルハライドランプ

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19960528

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20010214

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 19960528

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20021217

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20030527

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20030620

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20030623

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20060412

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20070405

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20080410

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20090413

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20100408

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20110415

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20120611

Start annual number: 10

End annual number: 10

FPAY Annual fee payment

Payment date: 20130531

Year of fee payment: 11

PR1001 Payment of annual fee

Payment date: 20130531

Start annual number: 11

End annual number: 11

FPAY Annual fee payment

Payment date: 20140603

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20140603

Start annual number: 12

End annual number: 12

FPAY Annual fee payment

Payment date: 20150515

Year of fee payment: 13

PR1001 Payment of annual fee

Payment date: 20150515

Start annual number: 13

End annual number: 13

EXPY Expiration of term
PC1801 Expiration of term