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KR960025434U - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number
KR960025434U
KR960025434U KR2019940037364U KR19940037364U KR960025434U KR 960025434 U KR960025434 U KR 960025434U KR 2019940037364 U KR2019940037364 U KR 2019940037364U KR 19940037364 U KR19940037364 U KR 19940037364U KR 960025434 U KR960025434 U KR 960025434U
Authority
KR
South Korea
Prior art keywords
wafer carrier
wafer
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR2019940037364U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940037364U priority Critical patent/KR960025434U/en
Publication of KR960025434U publication Critical patent/KR960025434U/en
Withdrawn legal-status Critical Current

Links

KR2019940037364U 1994-12-29 1994-12-29 Wafer carrier Withdrawn KR960025434U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940037364U KR960025434U (en) 1994-12-29 1994-12-29 Wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940037364U KR960025434U (en) 1994-12-29 1994-12-29 Wafer carrier

Publications (1)

Publication Number Publication Date
KR960025434U true KR960025434U (en) 1996-07-22

Family

ID=60850198

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940037364U Withdrawn KR960025434U (en) 1994-12-29 1994-12-29 Wafer carrier

Country Status (1)

Country Link
KR (1) KR960025434U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100410991B1 (en) * 2001-02-22 2003-12-18 삼성전자주식회사 Loadport for semiconductor processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100410991B1 (en) * 2001-02-22 2003-12-18 삼성전자주식회사 Loadport for semiconductor processing apparatus

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19941229

UG1501 Laying open of application
UC1204 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid