KR960025328U - Wafer drying device - Google Patents

Wafer drying device

Info

Publication number: KR960025328U
Authority: KR; South Korea
Prior art keywords: drying device; wafer drying; wafer; drying
Prior art date: 1994-12-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

KR2019940035312U

Other languages

Korean (ko)

Other versions

KR0126103Y1 (en

Inventor

최기식

Original Assignee

현대전자산업주식회사

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-12-23

Filing date

1994-12-23

Publication date

1996-07-22

1994-12-23 Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사

1994-12-23 Priority to KR2019940035312U priority Critical patent/KR0126103Y1/en

1996-07-22 Publication of KR960025328U publication Critical patent/KR960025328U/en

1998-11-02 Application granted granted Critical

1998-11-02 Publication of KR0126103Y1 publication Critical patent/KR0126103Y1/en

2004-12-23 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/18—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Cleaning Or Drying Semiconductors (AREA)
Drying Of Solid Materials (AREA)

KR2019940035312U 1994-12-23 1994-12-23 Wafer drying device Expired - Lifetime KR0126103Y1 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
KR2019940035312U KR0126103Y1 (en)	1994-12-23	1994-12-23	Wafer drying device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR2019940035312U KR0126103Y1 (en)	1994-12-23	1994-12-23	Wafer drying device

Publications (2)

Publication Number	Publication Date
KR960025328U true KR960025328U (en)	1996-07-22
KR0126103Y1 KR0126103Y1 (en)	1998-11-02

Family

ID=19402422

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
KR2019940035312U Expired - Lifetime KR0126103Y1 (en)	1994-12-23	1994-12-23	Wafer drying device

Country Status (1)

Country	Link
KR (1)	KR0126103Y1 (en)

1994
- 1994-12-23 KR KR2019940035312U patent/KR0126103Y1/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
KR0126103Y1 (en)	1998-11-02

Publication	Publication Date	Title
DE69637769D1 (en)	2009-01-15	SEMICONDUCTOR DEVICE
DE69738008D1 (en)	2007-09-27	Semiconductor device
DE69739242D1 (en)	2009-03-19	SEMICONDUCTOR DEVICE
DE69433951D1 (en)	2004-09-23	Connected semiconductor device
DE69727373D1 (en)	2004-03-04	SEMICONDUCTOR DEVICE
DE69637698D1 (en)	2008-11-13	SEMICONDUCTOR DEVICE
DE69637809D1 (en)	2009-02-26	SEMICONDUCTOR DEVICE
DE59508581D1 (en)	2000-08-24	Semiconductor device
DE69522789D1 (en)	2001-10-25	Semiconductor device
DE69501381D1 (en)	1998-02-12	SEMICONDUCTOR DEVICE
DE69810955D1 (en)	2003-02-27	DRYING DEVICE
DE69513207D1 (en)	1999-12-16	Semiconductor device
FI973759A7 (en)	1997-09-23	Drying device
DE69728850T2 (en)	2005-04-21	SEMICONDUCTOR DEVICE
KR960012414A (en)	1996-04-20	Wafer Inspection Device
KR960009084A (en)	1996-03-22	Semiconductor device
KR960009225A (en)	1996-03-22	Semiconductor device
KR950029031U (en)	1995-10-20	Semiconductor device unwinding device
KR970046712U (en)	1997-07-31	Wafer Drying Device
KR960025328U (en)	1996-07-22	Wafer drying device
KR960025317U (en)	1996-07-22	Wafer drying device
DE69713658D1 (en)	2002-08-08	Semiconductor device
KR960003087U (en)	1996-01-22	Wafer Drying Equipment
KR970003206U (en)	1997-01-24	Drying device for semiconductor devices
SE9400125D0 (en)	1994-01-19	drying device

Legal Events

Date	Code	Title	Description
1994-12-23	A201	Request for examination
1994-12-23	UA0108	Application for utility model registration	Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19941223
1994-12-23	UA0201	Request for examination	Patent event date: 19941223 Patent event code: UA02012R01D Comment text: Request for Examination of Application
1996-07-22	UG1501	Laying open of application
1998-02-28	E902	Notification of reason for refusal
1998-02-28	UE0902	Notice of grounds for rejection	Comment text: Notification of reason for refusal Patent event code: UE09021S01D Patent event date: 19980228
1998-06-23	E701	Decision to grant or registration of patent right
1998-06-23	UE0701	Decision of registration	Patent event date: 19980623 Comment text: Decision to Grant Registration Patent event code: UE07011S01D
1998-07-02	REGI	Registration of establishment
1998-07-02	UR0701	Registration of establishment	Patent event date: 19980702 Patent event code: UR07011E01D Comment text: Registration of Establishment
1998-07-02	UR1002	Payment of registration fee	Start annual number: 1 End annual number: 3 Payment date: 19980702
1998-11-02	UG1601	Publication of registration
2001-06-18	UR1001	Payment of annual fee	Payment date: 20010618 Start annual number: 4 End annual number: 4
2002-06-18	UR1001	Payment of annual fee	Payment date: 20020618 Start annual number: 5 End annual number: 5
2003-06-20	UR1001	Payment of annual fee	Payment date: 20030620 Start annual number: 6 End annual number: 6
2004-06-18	FPAY	Annual fee payment	Payment date: 20040618 Year of fee payment: 7
2004-06-18	UR1001	Payment of annual fee	Payment date: 20040618 Start annual number: 7 End annual number: 7
2005-07-03	LAPS	Lapse due to unpaid annual fee