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KR960018646A - 광로조절장치의 제조방법 - Google Patents

광로조절장치의 제조방법 Download PDF

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Publication number
KR960018646A
KR960018646A KR1019940029763A KR19940029763A KR960018646A KR 960018646 A KR960018646 A KR 960018646A KR 1019940029763 A KR1019940029763 A KR 1019940029763A KR 19940029763 A KR19940029763 A KR 19940029763A KR 960018646 A KR960018646 A KR 960018646A
Authority
KR
South Korea
Prior art keywords
electrode
sacrificial layer
signal electrode
matrix substrate
forming
Prior art date
Application number
KR1019940029763A
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English (en)
Inventor
민용기
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019940029763A priority Critical patent/KR960018646A/ko
Priority to CA002205168A priority patent/CA2205168A1/en
Priority to JP8515934A priority patent/JPH10508952A/ja
Priority to BR9510396A priority patent/BR9510396A/pt
Priority to RU97110173/09A priority patent/RU2143715C1/ru
Priority to PCT/KR1995/000133 priority patent/WO1996015630A1/en
Priority to CN95196202A priority patent/CN1061203C/zh
Priority to CZ19971487A priority patent/CZ288386B6/cs
Priority to PL95320161A priority patent/PL178550B1/pl
Priority to HU9800822A priority patent/HU221360B1/hu
Priority to AU36744/95A priority patent/AU701168B2/en
Priority to TW084111042A priority patent/TW305944B/zh
Priority to MYPI95003145A priority patent/MY132060A/en
Priority to DE69522898T priority patent/DE69522898T2/de
Priority to EP95116566A priority patent/EP0712021B1/en
Priority to US08/548,034 priority patent/US5606452A/en
Priority to PE1995284565A priority patent/PE36497A1/es
Priority to UY24087A priority patent/UY24087A1/es
Publication of KR960018646A publication Critical patent/KR960018646A/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00174—See-saws
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/30—Picture reproducers using solid-state colour display devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
  • Liquid Crystal (AREA)

Abstract

본 발명은 광로조절장치의 제조방법에 관한 것으로, 액티브 매트릭스 기판(50)상에 희생층(62)을 형성하고, 그 희생층에서 상기 액티브 매트릭스 기판상의 신호전극패드(42) 부분에 대응하는 상기 희생층의 부분을 제거한 다음 전체 면상에 하부전극(52)을 적층하며, 상기 전체 면상에 변형재료로서의 압전재료를 사용하는 제1변형부(54)를 적층하고, 상기 신호전극패드(42) 부분상에서 상기 압전재료와 하부전극 및 상기 매트릭스 기판(50)을 제거하여 상기 신호전극패드를 노츨시키며, 상기 노출된 신호전극패드(42)와 전기적으로 접속되도록 금속제의 중간전극(56)을 형성하고, 그 중간전극상에 상기 제1변형부와 동일한 재료의 제2변형부(58)를 형성하며, 그 제2변형부(58)상에 상기 하부전극과 전기적으로 접속되면서 반사막으로 작용하는 상부전극(60)을 형성하고, 화소간 분리를 위한 화소패더닝공정을 행하여 상기 희생층(62)을 제거하는 단계에 의해 상기 제1변형부와 제2변형부는 ZnO로 형성됨과 더블어 상기 중간전국(56)은 상기 신호전극패드(42)와 접속된 신호전극으로 작용하는 광로조절장치를 제조함으로써 고온의 열처리공정을 배제한 것이다.

Description

광로조절장치의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명에 따라 제조된 광로조절장치의 요부를 나타낸 단면구조도.
제4도(a) 내지 제4도(f)는 본 발명에 따른 광로조절장치의 제조방법을 설명하는 도면이다.

Claims (4)

  1. 다수의 신호전극패드(42)를 갖춘 액티브 매트릭스기판(40)상에 희생층(62)을 형성하는 단계와, 상기 희생층(62)에서 상기 액티브 매트릭스기판(40)상의 신호전극패드(42) 부분에 대응하는 상기 희생층(62)의 부분을 제거한 다음 그 전체 면상에 하부전극(52)을 적층하는 단계, 상기 전체 면상에 저온 성형이 가능한 재료를 사용하는 제1변형부(54)를 적층하는 단계, 상기 신호전극패드(42) 부분상에서 상기 제1변형부(54)로부터 상기 액티브 매트릭스기판(40)을 제거하여 상기 신호전극패드(42)를 노출시키는 단계, 상기 노출된 신호전극패드(42)와 전기적으로 접속되도록 금속제의 중간전극(56)을 형성하는 단계, 상기 중간전극(56)상에 상기 제1변형부(54)와 동일한 재료의 제2변형부(58)를 형성하는 단계, 상기 제2변형부(58)상에 상기 하부전극(52)과 전기적으로 접속되면서 반사막으로 작용하는 금속제의 상부전극(60)을 형성하는 단계 및, 화소간 분리를 위한 화소패터닝공정을 행하여 상기 희생층(62)을 제거하는 단계를 포함하여 구성된 것을 특징으로 하는 광로조절장치의 제조방법.
  2. 제1항에 있어서, 상기 제1변형부(54)와 제2변형부(56)는 ZnO를 사용하여 저온의 열처러 공정으로 형성되는 것을 특징으로 하는 광로조절장치의 제조방법.
  3. 제1항에 있어서, 상기 중간전극(56)은 상기 신호전극패드(42)와 접속되어 신호전극으로 작용하는 것을 특징으로 하는 광로조절장치의 제조방법.
  4. 제1항에 있어서, 상기 중간전극(56)의 형성시 인접한 액츄에이터와의 분리를 위한 중간전극패터닝공정이 더 실행되는 것을 특징으로 하는 광로조절장치의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940029763A 1994-11-14 1994-11-14 광로조절장치의 제조방법 KR960018646A (ko)

Priority Applications (18)

Application Number Priority Date Filing Date Title
KR1019940029763A KR960018646A (ko) 1994-11-14 1994-11-14 광로조절장치의 제조방법
CA002205168A CA2205168A1 (en) 1994-11-14 1995-10-17 Array of thin film actuated mirrors and method for the manufacture thereof
JP8515934A JPH10508952A (ja) 1994-11-14 1995-10-17 Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法
BR9510396A BR9510396A (pt) 1994-11-14 1995-10-17 Matriz de M x N espelhos atuados com película fina método para a fabricação de uma matriz de M x N espelhos atuados com película fina
RU97110173/09A RU2143715C1 (ru) 1994-11-14 1995-10-17 Матрица тонкопленочных приводных зеркал и способ ее изготовления
PCT/KR1995/000133 WO1996015630A1 (en) 1994-11-14 1995-10-17 Array of thin film actuated mirrors and method for the manufacture thereof
CN95196202A CN1061203C (zh) 1994-11-14 1995-10-17 薄膜致动反射镜阵列及其制造方法
CZ19971487A CZ288386B6 (en) 1994-11-14 1995-10-17 Array of M times N thin film actuated mirrors and method for the manufacture thereof
PL95320161A PL178550B1 (pl) 1994-11-14 1995-10-17 Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
HU9800822A HU221360B1 (en) 1994-11-14 1995-10-17 Array of thin film actuated mirrors and method for the manufacture thereof
AU36744/95A AU701168B2 (en) 1994-11-14 1995-10-17 Array of thin film actuated mirrors and method for the manufacture thereof
TW084111042A TW305944B (ko) 1994-11-14 1995-10-19
MYPI95003145A MY132060A (en) 1994-11-14 1995-10-19 Array of thin film actuated mirrors and method for the manufacture thereof
DE69522898T DE69522898T2 (de) 1994-11-14 1995-10-20 Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung
EP95116566A EP0712021B1 (en) 1994-11-14 1995-10-20 Array of thin film actuated mirrors and method for the manufacture thereof
US08/548,034 US5606452A (en) 1994-11-14 1995-10-25 Array of thin film actuated mirrors and method for the manufacture thereof
PE1995284565A PE36497A1 (es) 1994-11-14 1995-11-14 Disposicion o conjunto de espejos accionados compuestos por peliculas delgadas y metodo para fabricar la misma
UY24087A UY24087A1 (es) 1994-11-14 1995-11-14 Conjunto de espejos accionados de pelicula delgada y metodo para la fabricacion de los mismos

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940029763A KR960018646A (ko) 1994-11-14 1994-11-14 광로조절장치의 제조방법

Publications (1)

Publication Number Publication Date
KR960018646A true KR960018646A (ko) 1996-06-17

Family

ID=19397806

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940029763A KR960018646A (ko) 1994-11-14 1994-11-14 광로조절장치의 제조방법

Country Status (18)

Country Link
US (1) US5606452A (ko)
EP (1) EP0712021B1 (ko)
JP (1) JPH10508952A (ko)
KR (1) KR960018646A (ko)
CN (1) CN1061203C (ko)
AU (1) AU701168B2 (ko)
BR (1) BR9510396A (ko)
CA (1) CA2205168A1 (ko)
CZ (1) CZ288386B6 (ko)
DE (1) DE69522898T2 (ko)
HU (1) HU221360B1 (ko)
MY (1) MY132060A (ko)
PE (1) PE36497A1 (ko)
PL (1) PL178550B1 (ko)
RU (1) RU2143715C1 (ko)
TW (1) TW305944B (ko)
UY (1) UY24087A1 (ko)
WO (1) WO1996015630A1 (ko)

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Also Published As

Publication number Publication date
JPH10508952A (ja) 1998-09-02
AU3674495A (en) 1996-06-06
UY24087A1 (es) 1996-04-11
CN1061203C (zh) 2001-01-24
HU221360B1 (en) 2002-09-28
MY132060A (en) 2007-09-28
DE69522898T2 (de) 2002-06-20
WO1996015630A1 (en) 1996-05-23
DE69522898D1 (de) 2001-10-31
EP0712021B1 (en) 2001-09-26
EP0712021A1 (en) 1996-05-15
CZ288386B6 (en) 2001-06-13
HUT77722A (hu) 1998-07-28
TW305944B (ko) 1997-05-21
CA2205168A1 (en) 1996-05-23
AU701168B2 (en) 1999-01-21
US5606452A (en) 1997-02-25
BR9510396A (pt) 1997-12-23
RU2143715C1 (ru) 1999-12-27
PE36497A1 (es) 1997-11-27
PL320161A1 (en) 1997-09-15
CZ148797A3 (en) 1997-12-17
PL178550B1 (pl) 2000-05-31
CN1163689A (zh) 1997-10-29

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