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KR960018518A - Method and apparatus for measuring the geometric position of an object - Google Patents

Method and apparatus for measuring the geometric position of an object Download PDF

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Publication number
KR960018518A
KR960018518A KR1019950012943A KR19950012943A KR960018518A KR 960018518 A KR960018518 A KR 960018518A KR 1019950012943 A KR1019950012943 A KR 1019950012943A KR 19950012943 A KR19950012943 A KR 19950012943A KR 960018518 A KR960018518 A KR 960018518A
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South Korea
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probe
potential
measuring
coupling
voltage divider
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Korean (ko)
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글레익스더 프란쯔
뱌클 디에터
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호르스트 시에들
호르스트 시에들 케이쥐이
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G01D5/165—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

이동물체의 기하학적 위치, 변위 또는 각도를 측정하기 위해 적어도 한방향으로 뻗은 기하학적으로 큰 연장부를 가진 분압기 소자에 적어도 한방향으로 상이한 교번 전압 진폭들을 가진 교번전압 진폭 분산형태가 분압기 소자의 적어도 한 방향으로 얻어지는 방식으로 교번 전압이 제공되고, 전위 측정탐침이 감지될 변위(S), 각도 또는 위치에 따라, 적어도 하나의 방향을 따라 안내되고 분압기 소자와 비접촉 유지되어 전위 측정탐침이 용량결합에 의해 모든 시간에 탐침에 의해 취해진 위치에 따라 교번전압 진폭 분포형태의 상이한 교류진폭들을 탐지하여 전위탐짐의 변위에 걸쳐 용량관계가 일정하게 유지되며, 전위 측정탐침이 결합전극에 용량적으로 작용하는 전위 결합 탐침에 연결되며, 이로부터 결합탐침 및 결합전극 사이의 각각의 위치에 따라 측정방향으로 변하는 전위 측정탐침에 의해 감지된 교번 전압 진폭값이 평가를 위해 전달된다.A method in which an alternating voltage amplitude distribution with different alternating voltage amplitudes in at least one direction is obtained in at least one direction of the voltage divider element in a voltage divider element having a geometrically large extension extending in at least one direction to measure the geometric position, displacement or angle of the moving object An alternating voltage is provided and the probe is guided along at least one direction and held in contact with the voltage divider element, depending on the displacement S, angle or position at which it is to be sensed, so that the probe is capacitively coupled at all times. According to the position taken by the different AC amplitudes in the form of alternating voltage amplitude distribution, the capacitance relationship is kept constant over the displacement of the potential probe, and the potential measuring probe is connected to the potential coupling probe which acts capacitively on the coupling electrode. From which the respective position between the coupling probe and the coupling electrode The alternating voltage amplitude values detected by the potential measuring probe varies the measuring direction is transmitted for evaluation.

Description

물체의 기하학적 위치를 측정하기 위한 방법 및 장치Method and apparatus for measuring the geometric position of an object

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 정상 전위특성을 가진 분압기 장치 위에 설치된 용량 기초의 선형 변위센서의 제1실시예를 나타내는 다이어그램이다.FIG. 1 is a diagram showing a first embodiment of a capacitive-based linear displacement sensor installed on a voltage divider device having a stationary potential characteristic.

제2도는 저항 사다리망에 의해 형성된 상이한 교번 전위에 각각 연결된 서로 절연된 인접한 독립 전극판들로 구성된 분압기 위에 설치된 측정센서 및 결합 영역으로 이루어진 용량기초 선형 변위센서의 또 하나의 실시예를 나타낸다.FIG. 2 shows another embodiment of a capacitive-based linear displacement sensor consisting of a coupling region and a measuring sensor mounted on a voltage divider consisting of mutually isolated adjacent independent electrode plates respectively connected to different alternating potentials formed by a resistive ladder network.

제3도는 용량 감지효과로 인해, 관련된 전위 측정 탐침의 대향판과 연결되어 작동하는 회로가 측정방향을 따라 상이한 교번 전압 진폭들을 픽오프하는 방식으로 설계된 분압기(분산)회로를 포함하는 용량 기초 선형 변위센서의 제3실시예를 나타내는 다이어그램이다.3 shows a capacitive-based linear displacement comprising a voltage divider circuit designed in such a way that, due to the capacitive sensing effect, a circuit operating in conjunction with an opposing plate of an associated potential measuring probe picks off different alternating voltage amplitudes along the measuring direction. Diagram showing a third embodiment of the sensor.

제4도는 분압기(분산)장치가 제2도 및 제3도의 구조들의 조합으로 이뤄져 있는 용량 기초 위치 센서의 하나의 실시예를 나타내는 다이어그램이다.4 is a diagram illustrating one embodiment of a capacitive elementary position sensor in which a potentiometer (dispersion) device consists of a combination of the structures of FIGS. 2 and 3.

제5도는 두 개의 회전 측정장치들이 공동기판 위에 배치되어 있는 용량기초 위치센서의 마지막 실시예를 나타낸다.5 shows a final embodiment of a capacitive based position sensor in which two rotation measuring devices are arranged on a cavity substrate.

제7도는 저항경로의 형태를 가진 분압기(분산)소자 및 전위 측정 탐침 사이의 용량적 상호작용을 도시한 제7도와 함께 본 발명의 이해를 돕기 위한 분압기(분산) 소자의 다이어그램이다.FIG. 7 is a diagram of a voltage divider element for the understanding of the present invention, with FIG. 7 showing the capacitive interaction between a voltage divider element in the form of a resistance path and a potential measuring probe.

제8도는 양측면에 제공된 픽오프를 가진 또 하나의 바람직한 개발을 나타내는 다이어그램이다.8 is a diagram showing another preferred development with pickoffs provided on both sides.

Claims (16)

이동물체의 기하학적 위치, 변위 또는 각도를 측정하기 위한 방법으로서 예정된 전위분포를 따라 탐침을 이동시키는 단계 및 탐침에 의해 감지된 측정값을 평가하는 단계를 포함하는 방법에 있어서 a) 적어도 한방향으로 뻗은 기하학적으로 큰 연장부를 가진 분압기 소자에 적오도 한방향으로 상이한 교번 전압 진폭들을 가진 교번 전압 진폭 분산형태가 분압기 소자의 적어도 한 방향으로 얻어지는 방식으로 교번 전압이 제공되고, b)전위 측정탐침이 감지될 변위(S), 각도 또는 위치에 따라, 적어도 하나의 방향을 따라 안내되고 분압기 소자와 비접촉 유지되어 전위 측정탐침이 용량결합에 의해 모든 시간에 탐침에 의해 취해진 위치에 따라 교번 전압진폭 분포형태의 상이한 교류진폭들을 탑지하며 전위탐침의 변위에 걸쳐 용량관계가 일정하게 유지되며, c) 전위 측정탐침이 결합전극에 용량적으로 작용하는 전위 결합 탐침에 연결되며, 이로부터 d) 결합탐침 및 결합 전극 사이의 각각의 위치에 따라 측정방향으로 변하는 전위 측정탐침에 의해 감지된 교번 전압 진폭값이 평가를 위해 전달되도록 된 방법.A method for measuring the geometric position, displacement, or angle of a moving object, the method comprising moving a probe along a predetermined potential distribution and evaluating a measured value sensed by the probe, the method comprising: a) geometrically extending in at least one direction; Alternate voltage is provided in such a way that the voltage divider with different voltage amplitudes in at least one direction is obtained in at least one direction of the voltage divider element in the voltage divider element having a large extension. S), depending on the angle or position, is guided along at least one direction and held in contact with the voltage divider element so that the potential measuring probe has a different ac amplitude in the form of alternating voltage amplitude distribution depending on the position taken by the probe at all times by capacitive coupling Capacities remain constant across the displacement of the probe C) the potential measurement probe is connected to a potential coupling probe which acts capacitively on the coupling electrode, and d) is detected by the potential measurement probe which changes in the measurement direction depending on the respective position between the coupling probe and the coupling electrode. Alternating voltage amplitude values are to be conveyed for evaluation. 이동물체의 기하학적 위치, 변위 또는 각도를 측정하기 위한 비접촉 용량기초 위치센서에 있어서, 주방향으로 적어도 하나의 주연장부를 가지며 교번전압이 공급되는 평면 분압기 소자(13,13′, 13″, 13″′)가 제공되며, 전위 측정탐침(15,15′,15″)이 측정 이동시 변하지 않는 일정거리에서 분압기 소자와 비접촉으로 분압기소자를 따라 안내되며, 전위 측정탐침이 적어도 전기적으로 전위 결합탐침에 연결되어 결합탐침과 동시에 측정이동을 수행하며, 교번전압 진폭이 측정탐침(15,15′,15″)에 의해 감지되어 측정값에 상대적으로 선형으로 변하는 정지 결합 전극표면(16)과 용량적으로 상호작용하는 전위 결합탐침이 평가를 위해 제공되도록 된 위치센서.A non-contact capacitive foundation position sensor for measuring the geometric position, displacement, or angle of a moving object, comprising: planar voltage divider elements (13, 13 ', 13 ", 13") having at least one main extension in a circumferential direction and supplied with an alternating voltage ′) Is provided, and the potential measuring probes 15, 15 ′ and 15 ″ are guided along the voltage divider element in contact with the voltage divider element at a constant distance which does not change during the measurement movement, and the potential measuring probe is at least electrically connected to the potential coupled probe. And the measurement movement is performed simultaneously with the coupling probe, and the alternating voltage amplitude is sensed by the measurement probes (15, 15 ', 15 ") and capacitively intersects with the stationary coupling electrode surface 16 which changes linearly relative to the measured value. Position sensor, wherein a working potential binding probe is provided for evaluation. 제2항에 있어서, 전위 측정탐침(15,15′,15″) 및 전위 결합탐침(17)이 적어도 대향표면들(결합 전극표면16, 분압기 소자 (13,13′, 13″, 13″′)의 영역에서 평면 연장부를 가진 전기 용량성 소자를 구성하여 일체로 형성되며, 또한 측정이동을 수행하기 위해 전위 측정탐침 및 전위 결합탐침의 영역에서의 용량한계가 각각의 대향표면들(결합 전극표면;분압기소자)에 대한 불변거동을 보이는 방식으로 설계된 공동 지지대를 포함하도록 된 위치센서.3. Potential measuring probes (15, 15 ', 15 ") and potential coupling probes (17) at least opposing surfaces (coupling electrode surface 16, voltage divider elements 13, 13', 13", 13 "'). The capacitive element is formed integrally by forming a capacitive element having a planar extension in the region of), and the capacitive limits in the region of the potential measuring probe and the potential bonding probe are respectively opposite to the opposite surfaces (coupling electrode surfaces) in order to carry out the measurement movement. A position sensor intended to include a joint support designed in such a way as to show an invariant behavior for the voltage divider element. 제3항에 있어서, 각각의 관련 분압기 소자를 가진 전위 측정탐침 및 각각으 관련 결합 전극표면을 가진 전위 결합탐침이 각각 측정이동에 의해 변하지 않는 직렬 연결 측정 및 결합 축전기들을 구성하는 위치센서.4. A position sensor according to claim 3, wherein the potential measuring probe with each associated voltage divider element and the potential coupling probe with each associated coupling electrode surface constitute series connection measurement and coupling capacitors, respectively, which are not changed by measurement movement. 제4항에 있어서, 측정 및 결합축전기의 이동부품들(전위 측정탐침 15, 15′, 15″;전위 결합탐침 17) 각각이 측정방향으로 평행하게 연결되어 구동될 수 있으며, 이들 각각이 축전기 대향면들(분압기 소자 13,13′,13″,13″′; 결합전극표면 16)이 반송기판상에 정적으로 지지되는 위치센서.5. The method of claim 4, wherein each of the moving parts of the measuring and coupling capacitor (potential measuring probes 15, 15 ', 15 "; potential coupling probe 17) can be driven in parallel with each other in the measuring direction, each of which is opposed to the capacitor. A position sensor in which surfaces (potentiometer elements 13, 13 ', 13 ", 13"'; coupling electrode surface 16) are statically supported on a carrier substrate. 제2항에 있어서, 전위 축정탐침(13,13′,13″,13″′) 및 전위 결합탐침(17)이 기계적으로 또한 전기적으로 결합된 위치센서.3. Position sensor according to claim 2, wherein the potential storage probe (13, 13 ', 13 ", 13"') and the potential coupling probe (17) are mechanically and electrically coupled. 제2항에 있어서, 전위 측정탐침 및 관련 분압기 소자를 포함하는 전위 측정영역(11) 및 관련 결합 전극표면(16)을 가진 전위 결합탐침(17)을 포함하는 전위 결합영역(12)이 절연 반송기기판의 동일 또는 대향표면들상에 배치된 위치센서.The potential coupling region 12 according to claim 2, wherein the potential coupling region 12 including the potential measurement probe 11 having the potential measurement probe and the associated voltage divider element and the potential coupling probe 17 having the associated coupling electrode surface 16 is insulated and conveyed. Position sensors disposed on the same or opposite surfaces of the instrument panel. 제2항에 있어서, 분압기 소자(13)가 전위차계 저항 경로(13)형태의 분압기인 위치센서.3. Position sensor according to claim 2, wherein the voltage divider element (13) is a voltage divider in the form of a potentiometer resistance path (13). 제2항에 잇어서, 분압기 소자가 계단 전압곡선을 가진 분압기가 얻어지도록 측정방향으로 잇달아 배치되고 저항 사다리 분압기회로(20)와 각각 연결된 서로 절연된 전극판들(19,19′)로 구성된 위치센서.The position sensor according to claim 2, wherein the voltage divider element is arranged in the measuring direction so as to obtain a voltage divider having a step voltage curve, and is composed of mutually insulated electrode plates 19 and 19 'respectively connected to the resistance ladder voltage divider circuit 20. . 제2항에 있어서, 분압기소자(13″)가 측정방향으로 향하는 넓거나 좁아지는 특징을 가진 인접측정 전극표면들과 함께 측정방향에 가로로 배치되어 측정방향으로 좁거나 넓어지는 적어도 두 개, 바람직하게는 세 개의 측정 전극표면들(21)로 구성된 위치센서.At least two, preferably, narrow or wide in the measuring direction, arranged horizontally in the measuring direction together with adjacent measuring electrode surfaces having the feature of widening or narrowing in the measuring direction. Position sensor consisting of three measuring electrode surfaces (21). 제2항에 있어서, 분압기소자(13″)가 양면에 도포된 유전체를 포함하며, 한면 위에서 즉, 전위 측정탐침(15″)에 면한 측면상에서는 측정방향으로 잇달아 배열된 전극판들을 갖고 있으며, 반대면에서는 측정방향으로 넓거나 좁혀지는 두 개의 측정 전극표면들(25,25′)을 갖는 위치센서.The voltage divider element 13 ″ includes a dielectric coated on both sides, and has electrode plates arranged one after the other in the measuring direction on one side, ie on the side facing the potential measuring probe 15 ″, and vice versa. Position sensor having two measuring electrode surfaces (25, 25 ') that are wider or narrower in the measurement direction at the surface. 제9항에 있어서, 측정방향으로 뻗은 전위 측정탐침(15′)의 판의 연장부가 측정방향으로의 각각의 전극판(19)의 너비(B)와 일치하는 위치센서.10. The position sensor according to claim 9, wherein an extension of the plate of the potential measuring probe (15 ') extending in the measuring direction coincides with the width (B) of each electrode plate (19) in the measuring direction. 제12항에 있어서, 전위 측정탐침의 판이 전극판(19)의 너비와 일치하는 측정방향의 연장부(B)를 가진 직사각 부분과 측정방향으로 양면상에 뻗은 두 개의 삼각부분들로 구성된 위치센서.13. The position sensor according to claim 12, wherein the plate of the potential measuring probe comprises a rectangular portion having an extension portion B in the measuring direction coinciding with the width of the electrode plate 19 and two triangular portions extending on both sides in the measuring direction. . 제2항에 있어서, 전위 측정영역(11) 및 전위 결합영역(12)으로 구성된 적어도 하나의 측정시스템이 저항경로를 포함하고 원호의 일부의 형태를 가진 분압기소자(13″′) 및 이와 함께 동심적으로 제공되어 부분원호를 따르는 내부 결합 전극표면들(16′)을 가진 공동의 원형 반송기, 기판 및 일체 형성된 중간 브리지를 통해 기계적으로, 또한 전기적으로 연결되고 측정경로의 예정된 부분 원형운동을 따라 공동 지지대에 의해 안내되는 전위 측정탐침(15″) 및 전위 결합탐침(17′)의 두 개의 판형 대향 추건기표면들로 구성된 공동 전기용량 소자상에 배치되어 있는 위치센서.The voltage divider element 13 "'according to claim 2, wherein the at least one measuring system consisting of the potential measuring region 11 and the potential coupling region 12 includes a resistance path and has a form of a portion of an arc, and concentric with it. Along a predetermined partial circular motion of the measuring path mechanically and electrically connected via a hollow circular carrier, substrate and integrally formed intermediate bridge having internally coupled electrode surfaces 16 'along the partial arc. A position sensor disposed on a common capacitive element consisting of two plate-like counter-dryer surfaces of a potential measuring probe (15 ″) and a potential coupling probe (17 ') guided by a cavity support. 제2항에 있어서, 거리변화의 영향을 줄이기 위해 공동 분압기 소자(저항경로)가 양면 분기배열을 위해 양면에 동시에 주사되는 위치센서.The position sensor according to claim 2, wherein the common potentiometer element (resistance path) is simultaneously scanned on both sides for double-sided branching arrangement to reduce the influence of distance change. 제2∼25항중 어느 하나에 있어서, 실제 소자들(저항 및 콜렉터 경로들, 전압 분산 소자들, 분기표면들, 측정탐침들등)이 방습 및 방부 보호층에 의해 덮혀있는 위치센서.The position sensor according to any one of claims 2 to 25, wherein the actual elements (resistance and collector paths, voltage dissipation elements, branch surfaces, measuring probes, etc.) are covered by a moisture proof and anticorrosion protective layer. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950012943A 1994-11-10 1995-05-24 Method and apparatus for measuring the geometric position of an object Withdrawn KR960018518A (en)

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US3636449A (en) * 1970-02-12 1972-01-18 Burdick Corp Position sensor
DE2826398C2 (en) * 1978-06-16 1982-11-11 Heribert Ing.(grad.) 4048 Grevenbroich Czerny Capacitive displacement transducer
US4434391A (en) * 1982-01-15 1984-02-28 Sperry Corporation Capacitive feedback transducer and closed loop instrument meter mechanism
DE3441217A1 (en) * 1984-11-10 1986-05-15 Wilde Membran Impuls Technik GmbH, 5828 Ennepetal Position transducer
WO1994011888A1 (en) * 1992-11-10 1994-05-26 Copal Company Limited Potentiometer

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