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KR960012676U - 웨이퍼 전달장치의 위치 세팅용 웨이퍼 - Google Patents

웨이퍼 전달장치의 위치 세팅용 웨이퍼

Info

Publication number
KR960012676U
KR960012676U KR2019940025103U KR19940025103U KR960012676U KR 960012676 U KR960012676 U KR 960012676U KR 2019940025103 U KR2019940025103 U KR 2019940025103U KR 19940025103 U KR19940025103 U KR 19940025103U KR 960012676 U KR960012676 U KR 960012676U
Authority
KR
South Korea
Prior art keywords
wafer
setting
transfer device
wafer transfer
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR2019940025103U
Other languages
English (en)
Other versions
KR0116362Y1 (ko
Inventor
황두환
문현명
유순포
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940025103U priority Critical patent/KR0116362Y1/ko
Publication of KR960012676U publication Critical patent/KR960012676U/ko
Application granted granted Critical
Publication of KR0116362Y1 publication Critical patent/KR0116362Y1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940025103U 1994-09-28 1994-09-28 웨이퍼 전달장치의 위치 세팅용 웨이퍼 Expired - Lifetime KR0116362Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940025103U KR0116362Y1 (ko) 1994-09-28 1994-09-28 웨이퍼 전달장치의 위치 세팅용 웨이퍼

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940025103U KR0116362Y1 (ko) 1994-09-28 1994-09-28 웨이퍼 전달장치의 위치 세팅용 웨이퍼

Publications (2)

Publication Number Publication Date
KR960012676U true KR960012676U (ko) 1996-04-17
KR0116362Y1 KR0116362Y1 (ko) 1998-04-22

Family

ID=19394197

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940025103U Expired - Lifetime KR0116362Y1 (ko) 1994-09-28 1994-09-28 웨이퍼 전달장치의 위치 세팅용 웨이퍼

Country Status (1)

Country Link
KR (1) KR0116362Y1 (ko)

Also Published As

Publication number Publication date
KR0116362Y1 (ko) 1998-04-22

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Legal Events

Date Code Title Description
A201 Request for examination
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19940928

UA0201 Request for examination

Patent event date: 19940928

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

UG1501 Laying open of application
E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19971230

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19980112

Patent event code: UR07011E01D

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UR1002 Payment of registration fee

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UG1601 Publication of registration
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