KR960012667U - 가스라인 연결 장치 - Google Patents
가스라인 연결 장치Info
- Publication number
- KR960012667U KR960012667U KR2019940024784U KR19940024784U KR960012667U KR 960012667 U KR960012667 U KR 960012667U KR 2019940024784 U KR2019940024784 U KR 2019940024784U KR 19940024784 U KR19940024784 U KR 19940024784U KR 960012667 U KR960012667 U KR 960012667U
- Authority
- KR
- South Korea
- Prior art keywords
- connection device
- gas line
- line connection
- gas
- line
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Gasket Seals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940024784U KR200190786Y1 (ko) | 1994-09-26 | 1994-09-26 | 가스라인 연결 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940024784U KR200190786Y1 (ko) | 1994-09-26 | 1994-09-26 | 가스라인 연결 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960012667U true KR960012667U (ko) | 1996-04-17 |
KR200190786Y1 KR200190786Y1 (ko) | 2000-09-01 |
Family
ID=19393955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940024784U KR200190786Y1 (ko) | 1994-09-26 | 1994-09-26 | 가스라인 연결 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200190786Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100478831B1 (ko) * | 2002-11-22 | 2005-03-25 | 주식회사 수림 | 반도체 가공용 가스 연결장치 |
-
1994
- 1994-09-26 KR KR2019940024784U patent/KR200190786Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200190786Y1 (ko) | 2000-09-01 |
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Legal Events
Date | Code | Title | Description |
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UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19940926 |
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UG1501 | Laying open of application | ||
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Patent event date: 19970830 Patent event code: UA02012R01D Comment text: Request for Examination of Application Patent event date: 19940926 Patent event code: UA02011R01I Comment text: Application for Utility Model Registration |
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