[go: up one dir, main page]

KR960006360U - 척-케리어 감지센서 - Google Patents

척-케리어 감지센서

Info

Publication number
KR960006360U
KR960006360U KR2019940017305U KR19940017305U KR960006360U KR 960006360 U KR960006360 U KR 960006360U KR 2019940017305 U KR2019940017305 U KR 2019940017305U KR 19940017305 U KR19940017305 U KR 19940017305U KR 960006360 U KR960006360 U KR 960006360U
Authority
KR
South Korea
Prior art keywords
chuck
detection sensor
carrier detection
carrier
sensor
Prior art date
Application number
KR2019940017305U
Other languages
English (en)
Other versions
KR200161812Y1 (ko
Inventor
오영수
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940017305U priority Critical patent/KR200161812Y1/ko
Publication of KR960006360U publication Critical patent/KR960006360U/ko
Application granted granted Critical
Publication of KR200161812Y1 publication Critical patent/KR200161812Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940017305U 1994-07-13 1994-07-13 척-케리어 감지센서 KR200161812Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017305U KR200161812Y1 (ko) 1994-07-13 1994-07-13 척-케리어 감지센서

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017305U KR200161812Y1 (ko) 1994-07-13 1994-07-13 척-케리어 감지센서

Publications (2)

Publication Number Publication Date
KR960006360U true KR960006360U (ko) 1996-02-17
KR200161812Y1 KR200161812Y1 (ko) 1999-12-01

Family

ID=19388249

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017305U KR200161812Y1 (ko) 1994-07-13 1994-07-13 척-케리어 감지센서

Country Status (1)

Country Link
KR (1) KR200161812Y1 (ko)

Also Published As

Publication number Publication date
KR200161812Y1 (ko) 1999-12-01

Similar Documents

Publication Publication Date Title
DE69511542D1 (de) Positionsgeber
BR9608046A (pt) Sensor
FI953888L (fi) Anturi
DE59509359D1 (de) Sensorsystem
DE69536055D1 (de) Ortungsanlage
DE59509790D1 (de) Winkelsensor
DE69535659D1 (de) NOx Sensor
BR9607782A (pt) Disposição de sensor
DE69631750D1 (de) Objektdetektionsgerät
DE69637638D1 (de) Röntgenbildsensor
DE69724772D1 (de) Flüssigkeitssensor
DE59608120D1 (de) Positionssensor
DE69619850D1 (de) Sensoranordnung
DE59308671D1 (de) Fühler
FI955611A0 (fi) Näytetunnistin
DE69504437D1 (de) Dauerzustandssensor
DE59503570D1 (de) Positionssensor
BR9400185A (pt) Dispositivo sensor
ATA159897A (de) Sensor
DE69517353D1 (de) Momentfassungsgerät
DE69523800D1 (de) Festpunktdetektionsvorrichtung
DE69633363D1 (de) Sensorelement
DE69620655D1 (de) Sensorelement
FR2722576B1 (fr) Capteur amperemetrique.
DE59706157D1 (de) Positionssensor

Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19940713

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19970714

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19940713

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19990831

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19990906

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19990907

UG1601 Publication of registration
UR1001 Payment of annual fee

Payment date: 20020820

Start annual number: 4

End annual number: 4

UR1001 Payment of annual fee

Payment date: 20030814

Start annual number: 5

End annual number: 5

UR1001 Payment of annual fee

Payment date: 20040820

Start annual number: 6

End annual number: 6

UR1001 Payment of annual fee

Payment date: 20050822

Start annual number: 7

End annual number: 7

UR1001 Payment of annual fee

Payment date: 20060818

Start annual number: 8

End annual number: 8

UR1001 Payment of annual fee

Payment date: 20070827

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20080820

Year of fee payment: 10

UR1001 Payment of annual fee

Payment date: 20080820

Start annual number: 10

End annual number: 10

EXPY Expiration of term