[go: up one dir, main page]

KR960006359U - 웨이퍼 홀딩 척 - Google Patents

웨이퍼 홀딩 척

Info

Publication number
KR960006359U
KR960006359U KR2019940017304U KR19940017304U KR960006359U KR 960006359 U KR960006359 U KR 960006359U KR 2019940017304 U KR2019940017304 U KR 2019940017304U KR 19940017304 U KR19940017304 U KR 19940017304U KR 960006359 U KR960006359 U KR 960006359U
Authority
KR
South Korea
Prior art keywords
wafer holding
holding chuck
chuck
wafer
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR2019940017304U
Other languages
English (en)
Other versions
KR200161813Y1 (ko
Inventor
홍영준
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940017304U priority Critical patent/KR200161813Y1/ko
Publication of KR960006359U publication Critical patent/KR960006359U/ko
Application granted granted Critical
Publication of KR200161813Y1 publication Critical patent/KR200161813Y1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940017304U 1994-07-13 1994-07-13 웨이퍼 홀딩 척 Expired - Lifetime KR200161813Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017304U KR200161813Y1 (ko) 1994-07-13 1994-07-13 웨이퍼 홀딩 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017304U KR200161813Y1 (ko) 1994-07-13 1994-07-13 웨이퍼 홀딩 척

Publications (2)

Publication Number Publication Date
KR960006359U true KR960006359U (ko) 1996-02-17
KR200161813Y1 KR200161813Y1 (ko) 1999-12-01

Family

ID=19388248

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017304U Expired - Lifetime KR200161813Y1 (ko) 1994-07-13 1994-07-13 웨이퍼 홀딩 척

Country Status (1)

Country Link
KR (1) KR200161813Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100819710B1 (ko) * 2003-11-04 2008-04-04 동부일렉트로닉스 주식회사 웨이퍼 반송장치

Also Published As

Publication number Publication date
KR200161813Y1 (ko) 1999-12-01

Similar Documents

Publication Publication Date Title
DE59510304D1 (de) Bohrfutter
DE69528980D1 (de) Bohrfutter
DE69842191D1 (de) Halbleiterscheibenhaltevorrichtung
DE69500752D1 (de) Wafer Träger
DE69806578D1 (de) Waferhaltevorrichtung
DE69514175D1 (de) Spannfutter
DE69502235D1 (de) Spannbackenfutter
KR960015613U (ko) 웨이퍼 척
KR960006359U (ko) 웨이퍼 홀딩 척
KR960019141U (ko) 파티클 방지용 웨이퍼 척
KR960012675U (ko) 웨이퍼 척
KR970046599U (ko) 웨이퍼척
KR970064208U (ko) 웨이퍼 척
KR940023533U (ko) 웨이퍼 척의 구조
KR970011211U (ko) 웨이퍼 척
KR970003265U (ko) 웨이퍼 척
KR960035622U (ko) 웨이퍼 척
KR960025264U (ko) 웨이퍼 홀더
KR950034371U (ko) 웨이퍼 홀더
KR950028699U (ko) 웨이퍼 홀더
KR950031497U (ko) 웨이퍼 홀더
KR940023573U (ko) 웨이퍼 척
KR950015663U (ko) 웨이퍼 척
KR950034363U (ko) 웨이퍼 척 세정장치
KR960019144U (ko) 진공 웨이퍼 척

Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19940713

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19970709

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19940713

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19990831

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19990906

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19990907

UG1601 Publication of registration
UR1001 Payment of annual fee

Payment date: 20020820

Start annual number: 4

End annual number: 4

UR1001 Payment of annual fee

Payment date: 20030814

Start annual number: 5

End annual number: 5

UR1001 Payment of annual fee

Payment date: 20040820

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20050822

Year of fee payment: 7

UR1001 Payment of annual fee

Payment date: 20050822

Start annual number: 7

End annual number: 7

LAPS Lapse due to unpaid annual fee