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KR950031496U - 프로브카드 - Google Patents

프로브카드

Info

Publication number
KR950031496U
KR950031496U KR2019940008995U KR19940008995U KR950031496U KR 950031496 U KR950031496 U KR 950031496U KR 2019940008995 U KR2019940008995 U KR 2019940008995U KR 19940008995 U KR19940008995 U KR 19940008995U KR 950031496 U KR950031496 U KR 950031496U
Authority
KR
South Korea
Prior art keywords
probe card
probe
card
Prior art date
Application number
KR2019940008995U
Other languages
English (en)
Other versions
KR200194290Y1 (ko
Inventor
강성모
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940008995U priority Critical patent/KR200194290Y1/ko
Publication of KR950031496U publication Critical patent/KR950031496U/ko
Application granted granted Critical
Publication of KR200194290Y1 publication Critical patent/KR200194290Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR2019940008995U 1994-04-27 1994-04-27 프로브카드 KR200194290Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940008995U KR200194290Y1 (ko) 1994-04-27 1994-04-27 프로브카드

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940008995U KR200194290Y1 (ko) 1994-04-27 1994-04-27 프로브카드

Publications (2)

Publication Number Publication Date
KR950031496U true KR950031496U (ko) 1995-11-22
KR200194290Y1 KR200194290Y1 (ko) 2000-09-01

Family

ID=19381859

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940008995U KR200194290Y1 (ko) 1994-04-27 1994-04-27 프로브카드

Country Status (1)

Country Link
KR (1) KR200194290Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007165715A (ja) * 2005-12-15 2007-06-28 Tokyo Electron Ltd プローブカードの装着方法及びこの方法に用いられるプローブカード移載補助装置

Also Published As

Publication number Publication date
KR200194290Y1 (ko) 2000-09-01

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19940427

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19970428

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19940427

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E902 Notification of reason for refusal
UE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event code: UE09021S01D

Patent event date: 19991029

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 20000526

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 20000620

Patent event code: UR07011E01D

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