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KR950010181U - 부식용액 가열용 히터 - Google Patents

부식용액 가열용 히터

Info

Publication number
KR950010181U
KR950010181U KR2019930019009U KR930019009U KR950010181U KR 950010181 U KR950010181 U KR 950010181U KR 2019930019009 U KR2019930019009 U KR 2019930019009U KR 930019009 U KR930019009 U KR 930019009U KR 950010181 U KR950010181 U KR 950010181U
Authority
KR
South Korea
Prior art keywords
heating heater
solution heating
corrosion solution
corrosion
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR2019930019009U
Other languages
English (en)
Other versions
KR960008661Y1 (ko
Inventor
이건원
Original Assignee
이건원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이건원 filed Critical 이건원
Priority to KR2019930019009U priority Critical patent/KR960008661Y1/ko
Publication of KR950010181U publication Critical patent/KR950010181U/ko
Application granted granted Critical
Publication of KR960008661Y1 publication Critical patent/KR960008661Y1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019930019009U 1993-09-21 1993-09-21 부식용액 가열용 히터 Expired - Fee Related KR960008661Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930019009U KR960008661Y1 (ko) 1993-09-21 1993-09-21 부식용액 가열용 히터

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930019009U KR960008661Y1 (ko) 1993-09-21 1993-09-21 부식용액 가열용 히터

Publications (2)

Publication Number Publication Date
KR950010181U true KR950010181U (ko) 1995-04-24
KR960008661Y1 KR960008661Y1 (ko) 1996-10-07

Family

ID=19364000

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930019009U Expired - Fee Related KR960008661Y1 (ko) 1993-09-21 1993-09-21 부식용액 가열용 히터

Country Status (1)

Country Link
KR (1) KR960008661Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150064619A (ko) 2013-12-03 2015-06-11 한국단자공업 주식회사 시일 및 이를 구비한 방수커넥터

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200197146Y1 (ko) * 2000-05-03 2000-09-15 박명선 조리용 가스버너의 연소장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150064619A (ko) 2013-12-03 2015-06-11 한국단자공업 주식회사 시일 및 이를 구비한 방수커넥터

Also Published As

Publication number Publication date
KR960008661Y1 (ko) 1996-10-07

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Legal Events

Date Code Title Description
A201 Request for examination
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19930921

UA0201 Request for examination

Patent event date: 19930921

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

UG1501 Laying open of application
UG1604 Publication of application

Patent event code: UG16041S01I

Comment text: Decision on Publication of Application

Patent event date: 19960910

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19961223

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19970327

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19970327

FPAY Annual fee payment

Payment date: 19991008

Year of fee payment: 4

UR1001 Payment of annual fee

Payment date: 19991008

Start annual number: 4

End annual number: 4

LAPS Lapse due to unpaid annual fee
UC1903 Unpaid annual fee