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KR950007022U - Substrate Damage Detection Device - Google Patents

Substrate Damage Detection Device

Info

Publication number
KR950007022U
KR950007022U KR2019930016459U KR930016459U KR950007022U KR 950007022 U KR950007022 U KR 950007022U KR 2019930016459 U KR2019930016459 U KR 2019930016459U KR 930016459 U KR930016459 U KR 930016459U KR 950007022 U KR950007022 U KR 950007022U
Authority
KR
South Korea
Prior art keywords
detection device
damage detection
substrate damage
substrate
detection
Prior art date
Application number
KR2019930016459U
Other languages
Korean (ko)
Other versions
KR970005433Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930016459U priority Critical patent/KR970005433Y1/en
Publication of KR950007022U publication Critical patent/KR950007022U/en
Application granted granted Critical
Publication of KR970005433Y1 publication Critical patent/KR970005433Y1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930016459U 1993-08-24 1993-08-24 Detecting device of board injury KR970005433Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930016459U KR970005433Y1 (en) 1993-08-24 1993-08-24 Detecting device of board injury

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930016459U KR970005433Y1 (en) 1993-08-24 1993-08-24 Detecting device of board injury

Publications (2)

Publication Number Publication Date
KR950007022U true KR950007022U (en) 1995-03-21
KR970005433Y1 KR970005433Y1 (en) 1997-06-04

Family

ID=19361830

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930016459U KR970005433Y1 (en) 1993-08-24 1993-08-24 Detecting device of board injury

Country Status (1)

Country Link
KR (1) KR970005433Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100493766B1 (en) * 1998-04-30 2005-08-01 삼성전자주식회사 Substrate transfer tool of etching facility for manufacturing LCD and substrate transfer method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100493766B1 (en) * 1998-04-30 2005-08-01 삼성전자주식회사 Substrate transfer tool of etching facility for manufacturing LCD and substrate transfer method

Also Published As

Publication number Publication date
KR970005433Y1 (en) 1997-06-04

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Legal Events

Date Code Title Description
A201 Request for examination
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19930824

UA0201 Request for examination

Patent event date: 19930824

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

UG1501 Laying open of application
E902 Notification of reason for refusal
UE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event code: UE09021S01D

Patent event date: 19961212

UG1604 Publication of application

Patent event code: UG16041S01I

Comment text: Decision on Publication of Application

Patent event date: 19970507

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19970901

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19970930

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19970927

LAPS Lapse due to unpaid annual fee
UC1903 Unpaid annual fee