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KR950002237U - Auto handler's preheater stopper device - Google Patents

Auto handler's preheater stopper device

Info

Publication number
KR950002237U
KR950002237U KR2019930010573U KR930010573U KR950002237U KR 950002237 U KR950002237 U KR 950002237U KR 2019930010573 U KR2019930010573 U KR 2019930010573U KR 930010573 U KR930010573 U KR 930010573U KR 950002237 U KR950002237 U KR 950002237U
Authority
KR
South Korea
Prior art keywords
preheater
stopper device
auto handler
handler
auto
Prior art date
Application number
KR2019930010573U
Other languages
Korean (ko)
Other versions
KR200165862Y1 (en
Inventor
이병오
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019930010573U priority Critical patent/KR200165862Y1/en
Publication of KR950002237U publication Critical patent/KR950002237U/en
Application granted granted Critical
Publication of KR200165862Y1 publication Critical patent/KR200165862Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR2019930010573U 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler KR200165862Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Publications (2)

Publication Number Publication Date
KR950002237U true KR950002237U (en) 1995-01-04
KR200165862Y1 KR200165862Y1 (en) 2000-01-15

Family

ID=19357206

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Country Status (1)

Country Link
KR (1) KR200165862Y1 (en)

Also Published As

Publication number Publication date
KR200165862Y1 (en) 2000-01-15

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19930616

UG1501 Laying open of application
A201 Request for examination
UA0201 Request for examination

Patent event date: 19960617

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19930616

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E902 Notification of reason for refusal
UE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event code: UE09021S01D

Patent event date: 19990225

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19990729

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19991021

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19991022

UG1601 Publication of registration
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FPAY Annual fee payment

Payment date: 20050922

Year of fee payment: 7

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Payment date: 20050922

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