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KR950001327A - 광학부품의 다층 반사방지막 - Google Patents

광학부품의 다층 반사방지막 Download PDF

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Publication number
KR950001327A
KR950001327A KR1019930009977A KR930009977A KR950001327A KR 950001327 A KR950001327 A KR 950001327A KR 1019930009977 A KR1019930009977 A KR 1019930009977A KR 930009977 A KR930009977 A KR 930009977A KR 950001327 A KR950001327 A KR 950001327A
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South Korea
Prior art keywords
film
layer film
layer
sio
reflection film
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KR1019930009977A
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English (en)
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KR960013791B1 (ko
Inventor
편도인
Original Assignee
이대원
삼성항공산업 주식회사
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Priority to KR1019930009977A priority Critical patent/KR960013791B1/ko
Publication of KR950001327A publication Critical patent/KR950001327A/ko
Application granted granted Critical
Publication of KR960013791B1 publication Critical patent/KR960013791B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

본 발명은 광학부품의 다층 반사방지막에 관한 것으로 4층의 박막구조로 가시광선 영역(특히, 420㎚-680㎚)에서의 분광투과율 향상을 꾀함과 아울러 온도변화에 따른 막의 갈라짐 즉, 크랙현상을 제거하는데 그 목적이 있다. 이에 따라 가시광선의 설정파장을 λ°라 할때 합성수지 렌즈쪽으로부터 막두께 구성이 0.25±0.01λ°인 제층막과, 0.25±0.01λ°인 제2층막과, 0.53±0.01λ°인 제3층막 및 0.25±0.01λ°인 제4층막으로 적층된 다층 반사방지막을 순차적으로 설치하되, 상기 제1층막의 물질은 SiO2로 하고, 상기 제2층막의 물질을 CeF3로, 상기 제3츰막의 ZrO2로, 상기 제4층막의 물질을 SiO2로 구성하므로써 전술된 바와 같은 효과(분광 투과율 향상, 크랙제거 등)를 가질 수 있는 고신뢰성의 다층 반사방지막을 실현할 수 있게 된다.

Description

광학부품의 다층 반사방지막
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 광학부품의 다층 반사방지막 구성을 나타내는 단면도, 제3도는 본 발명의 따른 다층 반사방지막을 형성하기 위한 코팅기 내부 구조를 도시한 단면도이다.

Claims (3)

  1. 광학부품인 합성수지 렌즈 표면 상에 광학막 두께가 0.25±0.01λ°로 형성된 제1층막, 0.25±0.01λ°로형성된 제2층막, 0.53±0.01λ°로 형성된 제3층막 및 0.25±0.01λ°로 형성된 제4층막이 순차적으로 적층된 구조를 갖도록 구성되어 상기 제1층막의 물질을 SiO2로 하고, 상기 제2층막의 물질을 CeF3로 하고, 상기 제3층막의 물질을 ZrO2로하고, 상기 제4층막의 물질을 SiO2로 한 것을 특징으로 하는 광학부품의 단층 반사방지막.(여기서 λ°는 가시광선이 설정파장)
  2. 제1항에 있어서, 상기 다층 반사방지막은 적층막이 형성될 렌즈 표면상의 최고점 온도가 74℃ 이하에서 멀티 코팅됨을 특징으로 하는 광학부품의 다층 반사방지막.
  3. 제1항에 있어서, 상기 합성수지 렌즈는 폴리스티렌 및 PMMA 광학재료중 선택된 어느 하나로 이루어짐을 특징으로 하는 광학부품의 다층 반사방지막.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930009977A 1993-06-03 1993-06-03 광학부품의 다층 반사방지막 KR960013791B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930009977A KR960013791B1 (ko) 1993-06-03 1993-06-03 광학부품의 다층 반사방지막

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930009977A KR960013791B1 (ko) 1993-06-03 1993-06-03 광학부품의 다층 반사방지막

Publications (2)

Publication Number Publication Date
KR950001327A true KR950001327A (ko) 1995-01-03
KR960013791B1 KR960013791B1 (ko) 1996-10-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930009977A KR960013791B1 (ko) 1993-06-03 1993-06-03 광학부품의 다층 반사방지막

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Country Link
KR (1) KR960013791B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE39416E1 (en) 1999-01-08 2006-12-05 Lg Electronics Inc. Structure of rotor for outer rotor type brushless motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE39416E1 (en) 1999-01-08 2006-12-05 Lg Electronics Inc. Structure of rotor for outer rotor type brushless motor

Also Published As

Publication number Publication date
KR960013791B1 (ko) 1996-10-10

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