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KR940022928A - 반도체 장치 - Google Patents

반도체 장치 Download PDF

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Publication number
KR940022928A
KR940022928A KR1019940006671A KR19940006671A KR940022928A KR 940022928 A KR940022928 A KR 940022928A KR 1019940006671 A KR1019940006671 A KR 1019940006671A KR 19940006671 A KR19940006671 A KR 19940006671A KR 940022928 A KR940022928 A KR 940022928A
Authority
KR
South Korea
Prior art keywords
conductive film
light
film
semiconductor device
insulating film
Prior art date
Application number
KR1019940006671A
Other languages
English (en)
Other versions
KR0136730B1 (ko
Inventor
히데아끼 모또지마
Original Assignee
사또 후미오
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 사또 후미오, 가부시끼가이샤 도시바 filed Critical 사또 후미오
Publication of KR940022928A publication Critical patent/KR940022928A/ko
Application granted granted Critical
Publication of KR0136730B1 publication Critical patent/KR0136730B1/ko

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/413—Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Light Receiving Elements (AREA)
  • Photovoltaic Devices (AREA)

Abstract

본 발명은 실드 효과를 보유하면서 수광 감도의 저하를 억제하는 도전막을 제공하여, 이 도전막에 의해 피복되는 수광소자를 갖고 잇는 반도체 장치를 제공하는 것을 목적으로 한다.
본 발명의 반도체 장치는 반도체 기판(11)에 설치된 포토다이오드(12)와, 반도체 기판(11) 상에 형성된 절연막(14)와, 포토아디오드(12) 상의 절연막(14)의 내부에 형성된 투광성 도전막(15)와, 절연막(17)상에 설치된 포토다이오드(12)위를 개구하는 차광성 도전막(18)을 갖고 있고, 투광막 도전막(15)는 그물눈 형태로 형성되고, 정전위 라인과 전기적으로 접속된다.

Description

반도체 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 한 실시예의 반도체 장치를 도시한 단면도.

Claims (5)

  1. 반도체 기판에 설치된, 광신호를 전기 신호로 변환하는 수광 소자와, 상기 수광 소자 상에 절연막을 개재하여 형성되어 정전위 라인과 전기적으로 접속된 투광성 도전막과, 상기 절연막 상에 상기 수광 소자위를 개구하도록 형성된 차광성 막을 구비하는 반도체 장치에 있어서, 상기 투광성 도전막은 복수의 개구부를 갖는 것을 특징으로 하는 반도체 장치.
  2. 제1항에 있어서, 상기 투광성 도전막은 그물눈 형태로 형성된 것을 특징으로 하는 반도체 장치.
  3. 제1항에 있어서, 상기 투광성 도전막은 슬릿 형태로 형성된 것을 특징으로 하는 반도체 장치.
  4. 제1항에 있어서, 상기 투광성 도전막은 상기 절연막의 내부에 형성된 것을 특징으로 하는 반도체 장치.
  5. 제1항에 있어서, 상기 투광성 도전막이 폴리실리콘이고, 상기 차광성막이 Al계 금속으로 이루어지는 차광성 도전막인 것을 특징으로 하는 반도체 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940006671A 1993-03-21 1994-03-31 반도체 장치 KR0136730B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP93-073242 1993-03-31
JP5073242A JPH06291356A (ja) 1993-03-31 1993-03-31 半導体装置

Publications (2)

Publication Number Publication Date
KR940022928A true KR940022928A (ko) 1994-10-22
KR0136730B1 KR0136730B1 (ko) 1998-04-24

Family

ID=13512523

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940006671A KR0136730B1 (ko) 1993-03-21 1994-03-31 반도체 장치

Country Status (2)

Country Link
JP (1) JPH06291356A (ko)
KR (1) KR0136730B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW504849B (en) 1997-02-25 2002-10-01 Matsushita Electric Ind Co Ltd Optical receiver
JP2016018832A (ja) 2014-07-07 2016-02-01 パナソニックＩｐマネジメント株式会社 光結合装置

Also Published As

Publication number Publication date
KR0136730B1 (ko) 1998-04-24
JPH06291356A (ja) 1994-10-18

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