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KR940019725U - 고주파 전력 발생장치의 인터페이스 장치 - Google Patents

고주파 전력 발생장치의 인터페이스 장치

Info

Publication number
KR940019725U
KR940019725U KR2019930000309U KR930000309U KR940019725U KR 940019725 U KR940019725 U KR 940019725U KR 2019930000309 U KR2019930000309 U KR 2019930000309U KR 930000309 U KR930000309 U KR 930000309U KR 940019725 U KR940019725 U KR 940019725U
Authority
KR
South Korea
Prior art keywords
high frequency
frequency power
interface device
power generator
generator
Prior art date
Application number
KR2019930000309U
Other languages
English (en)
Other versions
KR0127364Y1 (ko
Inventor
김재달
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019930000309U priority Critical patent/KR0127364Y1/ko
Publication of KR940019725U publication Critical patent/KR940019725U/ko
Application granted granted Critical
Publication of KR0127364Y1 publication Critical patent/KR0127364Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
KR2019930000309U 1993-01-12 1993-01-12 고주파 전력 발생장치의 인터페이스 장치 KR0127364Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930000309U KR0127364Y1 (ko) 1993-01-12 1993-01-12 고주파 전력 발생장치의 인터페이스 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930000309U KR0127364Y1 (ko) 1993-01-12 1993-01-12 고주파 전력 발생장치의 인터페이스 장치

Publications (2)

Publication Number Publication Date
KR940019725U true KR940019725U (ko) 1994-08-22
KR0127364Y1 KR0127364Y1 (ko) 1998-12-01

Family

ID=19349556

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930000309U KR0127364Y1 (ko) 1993-01-12 1993-01-12 고주파 전력 발생장치의 인터페이스 장치

Country Status (1)

Country Link
KR (1) KR0127364Y1 (ko)

Also Published As

Publication number Publication date
KR0127364Y1 (ko) 1998-12-01

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19930112

UG1501 Laying open of application
A201 Request for examination
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Patent event date: 19950905

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

Patent event date: 19930112

Patent event code: UA02011R01I

Comment text: Application for Utility Model Registration

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19980616

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

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