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KR940001970U - Thermal breaker - Google Patents

Thermal breaker

Info

Publication number
KR940001970U
KR940001970U KR2019920009917U KR920009917U KR940001970U KR 940001970 U KR940001970 U KR 940001970U KR 2019920009917 U KR2019920009917 U KR 2019920009917U KR 920009917 U KR920009917 U KR 920009917U KR 940001970 U KR940001970 U KR 940001970U
Authority
KR
South Korea
Prior art keywords
thermal breaker
breaker
thermal
Prior art date
Application number
KR2019920009917U
Other languages
Korean (ko)
Other versions
KR950001745Y1 (en
Inventor
신승우
류필렬
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR92009917U priority Critical patent/KR950001745Y1/en
Publication of KR940001970U publication Critical patent/KR940001970U/en
Application granted granted Critical
Publication of KR950001745Y1 publication Critical patent/KR950001745Y1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67109Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR92009917U 1992-06-05 1992-06-05 Apparatus for heat prevention KR950001745Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92009917U KR950001745Y1 (en) 1992-06-05 1992-06-05 Apparatus for heat prevention

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92009917U KR950001745Y1 (en) 1992-06-05 1992-06-05 Apparatus for heat prevention

Publications (2)

Publication Number Publication Date
KR940001970U true KR940001970U (en) 1994-01-03
KR950001745Y1 KR950001745Y1 (en) 1995-03-13

Family

ID=19334362

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92009917U KR950001745Y1 (en) 1992-06-05 1992-06-05 Apparatus for heat prevention

Country Status (1)

Country Link
KR (1) KR950001745Y1 (en)

Also Published As

Publication number Publication date
KR950001745Y1 (en) 1995-03-13

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Legal Events

Date Code Title Description
A201 Request for examination
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19920605

UA0201 Request for examination

Patent event date: 19920605

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

UG1501 Laying open of application
UG1604 Publication of application

Patent event code: UG16041S01I

Comment text: Decision on Publication of Application

Patent event date: 19950218

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19950612

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19950630

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

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End annual number: 3

Payment date: 19950630

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