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KR910010179A - 가는선의 미세결함 검출장치 - Google Patents

가는선의 미세결함 검출장치 Download PDF

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Publication number
KR910010179A
KR910010179A KR1019900018174A KR900018174A KR910010179A KR 910010179 A KR910010179 A KR 910010179A KR 1019900018174 A KR1019900018174 A KR 1019900018174A KR 900018174 A KR900018174 A KR 900018174A KR 910010179 A KR910010179 A KR 910010179A
Authority
KR
South Korea
Prior art keywords
measured
detecting
image
hairline
scattered light
Prior art date
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Application number
KR1019900018174A
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English (en)
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KR940002504B1 (ko
Inventor
코오헤이 카도
마사히로 나카죠
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
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Application filed by 다니이 아끼오, 마쯔시다덴기산교 가부시기가이샤 filed Critical 다니이 아끼오
Publication of KR910010179A publication Critical patent/KR910010179A/ko
Application granted granted Critical
Publication of KR940002504B1 publication Critical patent/KR940002504B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

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  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Closed-Circuit Television Systems (AREA)

Abstract

내용 없음.

Description

가는선의 미세결함 검출장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1의 실시예에 있어서의 가는선의 미세결함 검출장치의 모식도,
제2도는 본 발명의 제2의 실시예에 있어서의 가는선의 미세결함 검출장치의 모식도,

Claims (2)

  1. 피측정물에 단파장의 레이저광을 조사하므로서 형성되는 화상의 푸우리에 변화된 패턴을 텔레비젼카메라로 관측하는 장치에 있어서, 피측정물은 가는선이고, 상기 피측정물에 대하여 피측정물의 긴쪽방향으로 평면형상으로 퍼지고 두께가 피측정물의 두께보다 큰광속을 형성하는 원기둥렌즈군과, 상기 피측정물을 통과한 산란광 이외의 레이저광을 차광하는 차광판과, 산란광에 의한 화상의 푸우리에 변화된 패턴의 흐트러짐을 축소검출하는 광학계 및 화상인식장치를 구비한 것을 특징으로하는 가는선의 미세결함 검출장치.
  2. 제1항에 있어서, 피측정물에 대하여 2방향으로부터 피측정물의 긴쪽방향으로 평면형상으로 퍼지고 두께가 피측정레이저광을 조사하는 수단과, 각각의 산란광에 의한 화상의 푸우리에 변화된 패턴을 검출하는 수단을 가진 것을 특징으로하는 가는선의 미세결함 검출장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900018174A 1989-11-10 1990-11-10 가는선의 미세결함 검출장치 Expired - Fee Related KR940002504B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1293556A JPH0781963B2 (ja) 1989-11-10 1989-11-10 細線の微細欠陥検出装置
JP1-293556 1989-11-10

Publications (2)

Publication Number Publication Date
KR910010179A true KR910010179A (ko) 1991-06-29
KR940002504B1 KR940002504B1 (ko) 1994-03-25

Family

ID=17796277

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900018174A Expired - Fee Related KR940002504B1 (ko) 1989-11-10 1990-11-10 가는선의 미세결함 검출장치

Country Status (2)

Country Link
JP (1) JPH0781963B2 (ko)
KR (1) KR940002504B1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2084819A1 (en) * 1992-01-27 1993-07-28 Ralph Edourd Frazee Jr. In-pattern on-line coating defect detection system
CA2088081A1 (en) * 1992-02-13 1993-08-14 Ralph Edward Frazee Jr. Out-of-pattern coating defect detection system
KR101288528B1 (ko) * 2011-07-25 2013-07-26 디케이아즈텍 주식회사 실린더 형상의 투명 결정체 내의 결함측정방법

Also Published As

Publication number Publication date
JPH0781963B2 (ja) 1995-09-06
KR940002504B1 (ko) 1994-03-25
JPH03154854A (ja) 1991-07-02

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