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KR910008377A - 3차원 직교좌표형 고속정밀측정기 - Google Patents

3차원 직교좌표형 고속정밀측정기 Download PDF

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Publication number
KR910008377A
KR910008377A KR1019890015311A KR890015311A KR910008377A KR 910008377 A KR910008377 A KR 910008377A KR 1019890015311 A KR1019890015311 A KR 1019890015311A KR 890015311 A KR890015311 A KR 890015311A KR 910008377 A KR910008377 A KR 910008377A
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KR
South Korea
Prior art keywords
axis
axes
cnc
high speed
speed precision
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Application number
KR1019890015311A
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English (en)
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KR920003740B1 (ko
Inventor
홍예선
김문상
Original Assignee
박원희
한국과학기술연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 박원희, 한국과학기술연구원 filed Critical 박원희
Priority to KR1019890015311A priority Critical patent/KR920003740B1/ko
Priority to DE4027921A priority patent/DE4027921A1/de
Priority to JP2263973A priority patent/JPH03140814A/ja
Publication of KR910008377A publication Critical patent/KR910008377A/ko
Application granted granted Critical
Publication of KR920003740B1 publication Critical patent/KR920003740B1/ko
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37275—Laser, interferometer
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37425—Distance, range

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

내용 없음.

Description

3차원 직교좌표형 고속정밀 측정기
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 3차원 직교좌표형 고속정밀측정기의 구성을 보인 개략도.

Claims (3)

  1. CNC제어 직선 구동축들을 이용하여 겐트리형으로 구성한 서어보 공압식 X, Y, Z축 구동모듈(3, 4), (5), (6)과, 이 X, Y, Z축 구동모듈(3, 4), (5), (6)의 구동을 제어하는 3축제어용 CNC제어기(2)와, 이 3축제어용 CNC제어기(2)와 데이타를 송, 수신하는 프로세스 컴퓨터(1)와, 상기 Z축구동모듈(6)의 하부에 부착되어 피측정물(8)의 표면간의 거리를 측정하는 레이저 광학식 비접촉 측정 프로브(7)로 구성하여된 것을 특징으로 하는 3차원 직교좌표형 고속정밀측정기.
  2. 제 1 항에 있어서, 프로세스 컴퓨터(1)로부터 신호 인터페이스부(11)를 통해 직교좌표계 수치 프로그램에따른 X, Y, Z축 CNC제어신호를 입력받아 X, Y, Z축 CNC위치제어를 행하고, X, Y, Z축의 직선측정값을 입력받아 상기 신호 인터페이스부(11)를 통해 상기 프로세스 컴퓨터(1)에 인가하는 X, Y, Z축용 CNC위치제어기(21), (22), (23)와, 이 X, Y, Z축용 CNC위치제어기(21), (22), (23)의 제어를 받아 구동되는 전기공압식 서어보밸브(24), (25), (26)와, 이 전기공압식 서어보밸브(24), (25), (26)의 구동에 따라 X, Y, Z축을 직선으로 이동시키는 서어보 공압식 실린더(27), (28), (29)와, 이 서어보 공압식 실린더(27), (28), (29)의 이동에 따른 X, Y, Z축의 직선값을 측정하여 상기 X, Y, Z축용 CNC위치제어기(21), (22), (23)에 인가하는 X, Y, Z축용 직선측정기(30), (31), (32)와, 상기 레이저 광학시 측정프로브(7)에서 측정된 신호를 처리한 후 상기 신호 인터페이스부(11)를 통해 상기 프로세스 컴퓨터(1)에 인가하는 측정신호처리기(33)로 상기 3축제어용 CNC제어기(2)를 구성한 것을 특징으로 하는 3차원 직교좌표형 고속정밀측정기.
  3. 제 2 항에 있어서, 레이저 광을 발생하는 레이저광원(71)과, 이 레이저광원(71)의 레이저광을 상기 피측정물(8)에 투사시키는 시준렌즈(72)와, 상기 피측정물(8)에서 반사된 레이저광을 집속시키는 집광렌즈(73)와, 이 집광렌즈(73)에서 집속된 레이저광에 의해 상을 맺어 그로부터 상기 측정신호처리기(33)에서 피측정물(8)의 상대적인 위치를 검출하게 화상 감지기(74)로 상기 레이저 광학식 비접촉 측정프로브(7)를 구성한 것을 특징으로 하는 3차원 직교좌표형 고속정밀측정기.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890015311A 1989-10-24 1989-10-24 3차원 직교좌표형 고속정밀측정기 Expired KR920003740B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019890015311A KR920003740B1 (ko) 1989-10-24 1989-10-24 3차원 직교좌표형 고속정밀측정기
DE4027921A DE4027921A1 (de) 1989-10-24 1990-09-03 Hochgeschwindigkeitspraezisionsmessvorrichtung fuer 3-dimensionale rechtwinkelige koordinaten
JP2263973A JPH03140814A (ja) 1989-10-24 1990-10-03 三次元直交座標型高速精密測定機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019890015311A KR920003740B1 (ko) 1989-10-24 1989-10-24 3차원 직교좌표형 고속정밀측정기

Publications (2)

Publication Number Publication Date
KR910008377A true KR910008377A (ko) 1991-05-31
KR920003740B1 KR920003740B1 (ko) 1992-05-09

Family

ID=19290980

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890015311A Expired KR920003740B1 (ko) 1989-10-24 1989-10-24 3차원 직교좌표형 고속정밀측정기

Country Status (3)

Country Link
JP (1) JPH03140814A (ko)
KR (1) KR920003740B1 (ko)
DE (1) DE4027921A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960031966A (ko) * 1995-02-28 1996-09-17 경주현 3차원측정기

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1003403C2 (nl) * 1996-06-24 1998-01-07 Johan Massee Inrichting voor het bewerken van een werkstuk.
NL1005318C2 (nl) 1997-02-20 1998-08-24 Johan Massee Inrichting voor het bewerken van een werkstuk, alsmede werkwijzen voor toepassing bij een dergelijke inrichting.
US6518996B1 (en) * 1999-02-22 2003-02-11 Optical Gaging Products, Inc. Compact video inspection apparatus with Y, Z, X compounded measurement axes
DE10020842A1 (de) * 2000-04-28 2001-10-31 Zeiss Carl Koordinatenmeßgerät oder Werkzeugmaschine
JP2018072222A (ja) * 2016-10-31 2018-05-10 オムロン株式会社 制御システム、その制御方法およびそのプログラム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124816A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 非接触式三次元計測装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960031966A (ko) * 1995-02-28 1996-09-17 경주현 3차원측정기

Also Published As

Publication number Publication date
KR920003740B1 (ko) 1992-05-09
JPH03140814A (ja) 1991-06-14
DE4027921A1 (de) 1991-04-25

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