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KR900013450U - 소프트랜더 - Google Patents

소프트랜더

Info

Publication number
KR900013450U
KR900013450U KR2019880021892U KR880021892U KR900013450U KR 900013450 U KR900013450 U KR 900013450U KR 2019880021892 U KR2019880021892 U KR 2019880021892U KR 880021892 U KR880021892 U KR 880021892U KR 900013450 U KR900013450 U KR 900013450U
Authority
KR
South Korea
Prior art keywords
softlander
Prior art date
Application number
KR2019880021892U
Other languages
English (en)
Other versions
KR920004053Y1 (ko
Inventor
지원호
이상훈
Original Assignee
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업 주식회사 filed Critical 삼성항공산업 주식회사
Priority to KR2019880021892U priority Critical patent/KR920004053Y1/ko
Publication of KR900013450U publication Critical patent/KR900013450U/ko
Application granted granted Critical
Publication of KR920004053Y1 publication Critical patent/KR920004053Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019880021892U 1988-12-29 1988-12-29 소프트랜더 KR920004053Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880021892U KR920004053Y1 (ko) 1988-12-29 1988-12-29 소프트랜더

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880021892U KR920004053Y1 (ko) 1988-12-29 1988-12-29 소프트랜더

Publications (2)

Publication Number Publication Date
KR900013450U true KR900013450U (ko) 1990-07-05
KR920004053Y1 KR920004053Y1 (ko) 1992-06-20

Family

ID=19282664

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880021892U KR920004053Y1 (ko) 1988-12-29 1988-12-29 소프트랜더

Country Status (1)

Country Link
KR (1) KR920004053Y1 (ko)

Also Published As

Publication number Publication date
KR920004053Y1 (ko) 1992-06-20

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Legal Events

Date Code Title Description
A201 Request for examination
UA0108 Application for utility model registration

Comment text: Application for Utility Model Registration

Patent event code: UA01011R08D

Patent event date: 19881229

UA0201 Request for examination

Patent event date: 19881229

Patent event code: UA02012R01D

Comment text: Request for Examination of Application

UG1501 Laying open of application
E902 Notification of reason for refusal
UE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event code: UE09021S01D

Patent event date: 19920130

UG1604 Publication of application

Patent event code: UG16041S01I

Comment text: Decision on Publication of Application

Patent event date: 19920521

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

Patent event date: 19920831

Comment text: Decision to Grant Registration

Patent event code: UE07011S01D

REGI Registration of establishment
UR0701 Registration of establishment

Patent event date: 19921006

Patent event code: UR07011E01D

Comment text: Registration of Establishment

UR1002 Payment of registration fee

Start annual number: 1

End annual number: 3

Payment date: 19921001

UR1001 Payment of annual fee

Payment date: 19950613

Start annual number: 4

End annual number: 4

UR1001 Payment of annual fee

Payment date: 19960603

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 19961231

Year of fee payment: 6

UR1001 Payment of annual fee

Payment date: 19961231

Start annual number: 6

End annual number: 6

LAPS Lapse due to unpaid annual fee
UC1903 Unpaid annual fee