KR900002386A - Low Temperature Plasma Heating Tube - Google Patents
Low Temperature Plasma Heating Tube Download PDFInfo
- Publication number
- KR900002386A KR900002386A KR1019880009389A KR880009389A KR900002386A KR 900002386 A KR900002386 A KR 900002386A KR 1019880009389 A KR1019880009389 A KR 1019880009389A KR 880009389 A KR880009389 A KR 880009389A KR 900002386 A KR900002386 A KR 900002386A
- Authority
- KR
- South Korea
- Prior art keywords
- discharge tube
- temperature plasma
- low temperature
- length
- heating tube
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Gas-Filled Discharge Tubes (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 1도는 본 방전관의 일부 절개 사시도1 is a partially cutaway perspective view of the discharge tube
제 2도는 제 1도의 종단면도.2 is a longitudinal cross-sectional view of FIG.
제 3도는 본 발명의 전극부 확대 단면도.3 is an enlarged cross-sectional view of an electrode unit of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019880009389A KR900002386A (en) | 1988-07-26 | 1988-07-26 | Low Temperature Plasma Heating Tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019880009389A KR900002386A (en) | 1988-07-26 | 1988-07-26 | Low Temperature Plasma Heating Tube |
Publications (1)
Publication Number | Publication Date |
---|---|
KR900002386A true KR900002386A (en) | 1990-02-28 |
Family
ID=68137614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880009389A KR900002386A (en) | 1988-07-26 | 1988-07-26 | Low Temperature Plasma Heating Tube |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR900002386A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101012910B1 (en) * | 2006-02-28 | 2011-02-08 | 도쿄엘렉트론가부시키가이샤 | Plasma Processing Apparatus and Substrate Heating Mechanism |
-
1988
- 1988-07-26 KR KR1019880009389A patent/KR900002386A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101012910B1 (en) * | 2006-02-28 | 2011-02-08 | 도쿄엘렉트론가부시키가이샤 | Plasma Processing Apparatus and Substrate Heating Mechanism |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19880726 |
|
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19880726 Comment text: Request for Examination of Application |
|
PG1501 | Laying open of application | ||
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19910221 Patent event code: PE09021S01D |
|
E601 | Decision to refuse application | ||
PE0601 | Decision on rejection of patent |
Patent event date: 19910527 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19910221 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |