[go: up one dir, main page]

KR900002386A - Low Temperature Plasma Heating Tube - Google Patents

Low Temperature Plasma Heating Tube Download PDF

Info

Publication number
KR900002386A
KR900002386A KR1019880009389A KR880009389A KR900002386A KR 900002386 A KR900002386 A KR 900002386A KR 1019880009389 A KR1019880009389 A KR 1019880009389A KR 880009389 A KR880009389 A KR 880009389A KR 900002386 A KR900002386 A KR 900002386A
Authority
KR
South Korea
Prior art keywords
discharge tube
temperature plasma
low temperature
length
heating tube
Prior art date
Application number
KR1019880009389A
Other languages
Korean (ko)
Inventor
김상경
Original Assignee
김상경
권종혁
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김상경, 권종혁 filed Critical 김상경
Priority to KR1019880009389A priority Critical patent/KR900002386A/en
Publication of KR900002386A publication Critical patent/KR900002386A/en

Links

Landscapes

  • Gas-Filled Discharge Tubes (AREA)

Abstract

내용 없음No content

Description

저온 플라즈마형 발열용 방전관Low Temperature Plasma Heating Tube

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 1도는 본 방전관의 일부 절개 사시도1 is a partially cutaway perspective view of the discharge tube

제 2도는 제 1도의 종단면도.2 is a longitudinal cross-sectional view of FIG.

제 3도는 본 발명의 전극부 확대 단면도.3 is an enlarged cross-sectional view of an electrode unit of the present invention.

Claims (2)

방전관의 길이와 내경의 비를 9:1로 하고, 전극간의 거리는 방전관의 길이가 250mm일때 160mm이하로 하고, 전극두부의 지름은 전극간거리의 1/18로 한 방전관에 전체가스의 0.09%의 A(알곤), 97%의 6.5 : 3.5비율의 He(헬륨) : Ne(네온) 혼합가스를 주입하고 잔여부와 기타 회가스를 봉입하고 방전관 외피에 원적외선 방출효과가 큰 금속산화물 또는 세라믹을 코팅한 저온 플라즈마형 발열용 방전관.The ratio between the length of the discharge tube and the inner diameter is 9: 1, and the distance between the electrodes is 160 mm or less when the length of the discharge tube is 250 mm, and the diameter of the electrode head is 1/18 of the distance between the electrodes. (Argon), 97% of 6.5: 3.5 ratio of He (Helium): Ne (neon), mixed gas, and the remaining part and other ash gas are enclosed, and metal oxide or ceramic with large infrared ray emission effect is coated on the discharge tube shell. Low temperature plasma type discharge tube. 제 1항에 있어서 방전관의 길이를 250mm, 내경을 26mm이하로 한 석영재 고진공의 저온 플라즈마형 발열용 방전관.The high-temperature plasma-type heat discharge tube for quartz material according to claim 1, wherein the discharge tube has a length of 250 mm and an inner diameter of 26 mm or less. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019880009389A 1988-07-26 1988-07-26 Low Temperature Plasma Heating Tube KR900002386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019880009389A KR900002386A (en) 1988-07-26 1988-07-26 Low Temperature Plasma Heating Tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019880009389A KR900002386A (en) 1988-07-26 1988-07-26 Low Temperature Plasma Heating Tube

Publications (1)

Publication Number Publication Date
KR900002386A true KR900002386A (en) 1990-02-28

Family

ID=68137614

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880009389A KR900002386A (en) 1988-07-26 1988-07-26 Low Temperature Plasma Heating Tube

Country Status (1)

Country Link
KR (1) KR900002386A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101012910B1 (en) * 2006-02-28 2011-02-08 도쿄엘렉트론가부시키가이샤 Plasma Processing Apparatus and Substrate Heating Mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101012910B1 (en) * 2006-02-28 2011-02-08 도쿄엘렉트론가부시키가이샤 Plasma Processing Apparatus and Substrate Heating Mechanism

Similar Documents

Publication Publication Date Title
KR890011669A (en) Plasma torch
GB1353683A (en) Discharge lamp having cavity electrodes
MY104282A (en) Smoking article
KR900002386A (en) Low Temperature Plasma Heating Tube
KR950701724A (en) INSULATOR FOR FLUORESCENT LAMP
JPS5778765A (en) Fluorescent glow discharge lamp
BR8605276A (en) ARC TUBE FOR METAL STEAM DISCHARGE LAMP AND GAS ELECTRIC DISCHARGE LAMP
EP0156385A3 (en) Electrode alignment and capsule design for single-ended low wattage metal halide laps
JPS52104382A (en) Fluorescent lamp for low temperature use
US3705325A (en) Short arc discharge lamp
GB863468A (en) Improvements in or relating to low pressure electric discharge lamps
KR900013569A (en) Metal halide lamp
JPS56134790A (en) Gas laser device
KR890012343A (en) Plasma ion discharge tube for heat generation
MX161926A (en) PROCEDURE AND DEVICE FOR OBTAINING HOT GASES
JPS54113980A (en) Metal halide lamp
JPS5676159A (en) Metal halide lamp
DE3580486D1 (en) GAS BURNER.
EP0254147A3 (en) Hot cathode type discharge lamp apparatus
KR950004335A (en) Oxide cathode
JPS52113579A (en) High pressure metal vapor discharge lamp
JPS57202643A (en) Metallic vapor discharge lamp
JPH0236063U (en)
JPS53137575A (en) Metal vapor discharge lamp
JPS56134468A (en) Fluorescent lamp

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19880726

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19880726

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 19910221

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 19910527

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 19910221

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I