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KR890015044A - 기판 지지형 광 도파관을 포함하는 장치와 그 제조방법 - Google Patents

기판 지지형 광 도파관을 포함하는 장치와 그 제조방법 Download PDF

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Publication number
KR890015044A
KR890015044A KR1019890002560A KR890002560A KR890015044A KR 890015044 A KR890015044 A KR 890015044A KR 1019890002560 A KR1019890002560 A KR 1019890002560A KR 890002560 A KR890002560 A KR 890002560A KR 890015044 A KR890015044 A KR 890015044A
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South Korea
Prior art keywords
waveguide
layer
substrate
core
cladding
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KR1019890002560A
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English (en)
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KR910006730B1 (ko
Inventor
하워드 헨리 찰스
알버트 레비 롤란드
Original Assignee
엘리 웨이스
아메리칸 텔리폰 앤드 텔리그라프 캄파니
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Publication of KR890015044A publication Critical patent/KR890015044A/ko
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Publication of KR910006730B1 publication Critical patent/KR910006730B1/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Gyroscopes (AREA)

Abstract

내용 없음.

Description

기판 지지형 광 도파관을 포함하는 장치와 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 양호한 실시태양으로서, 병행 기판 지지형 도파관을 포함하는 광 결합기(opticalcoulper)의 개략적인 평면도.
제2도는 제1도의 광 결합기의 개략적인 단면도.

Claims (12)

  1. 기판(11)상의 일부의 제1도파관 클래딩층(21)상에 도파관 코어(12)를 포함하는 기판 지지형 광 도파관을 포함하는 장치에 있어서, 코어-클래딩 습윤층(22)은 상기 도파관 코어와 접하고 있는 상기 제1도파관 클래딩의 적어도 일부분 상에 있는 것을 특징으로 하는 상기 장치.
  2. 제1항에 있어서, 상기 습윤층(22)의 물질은 본질적으로 상기 도파관 코어의 물질과 동일한 상기 장치.
  3. 제1항에 있어서, 상기 기판(11)은 본질적으로 실리콘으로 이루어진 상기 장치.
  4. 제1항에 있어서, 상기 제1클래딩층(21)의 물질은 본질적으로 실리콘 이산화물로 이루어진 상기 장치.
  5. 제1항에 있어서, 상기 도파관 코어(12)의 물질은 본질적으로 인 규산 유리로 이루어진 상기 장치.
  6. 제1항에 있어서, 상기 기판(11)의 물질은 근본적으로 세라믹 물질로 이루어진 상기 장치.
  7. 제6항에 있어서, 상기 세라믹 물질은 용융 실리카인 상기 장치.
  8. 제1항에 있어서, 상기 습윤층(22)상의 제2클래딩층(23)을 더 포함하는 상기 장치.
  9. 제8항에 있어서, 상기 제2클래딩층(23)의 물질은 근본적으로 실리카 유리로 이루어진 상기 장치.
  10. 기판 지지형 도파관을 포함하는 장치를 제조하는 방법에 있어서, 도파관 클래딩 물질의 몸체상에 도파관 코어물질 층을 침착시키는 단계와, 상기 도파관을 포함하는 패턴을 생성하기 위하여 상기 코어물질층의 부분들을 선택적으로 제거하는 단계와, 상기 코어 물질과 인접한 상기 도파관 클래딩 물질의 적어도 일부분상에 습윤층을 제공하는 단계와, 상기 도파관을 가열함으로써 평활화하는 단계를 포함하는 상기 방법.
  11. 제10항에 있어서, 상기 습윤층은 침착시킴으로써 제공되는 상기 방법.
  12. 제10항에 있어서, 상기 습윤층은 상기 선택적으로 제거후 코어 물질의 잔류층으로서 제공되는 상기 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890002560A 1988-03-03 1989-03-02 기판 지지형 광 도파관을 포함하는 장치와 그 제조방법 KR910006730B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US163687 1988-03-03
US07/163,687 US4902086A (en) 1988-03-03 1988-03-03 Device including a substrate-supported optical waveguide, and method of manufacture
US163,687 1988-03-03
SG25894A SG25894G (en) 1988-03-03 1994-02-21 Device including a substrate-supported optical waveguide, and method of manufacture

Publications (2)

Publication Number Publication Date
KR890015044A true KR890015044A (ko) 1989-10-28
KR910006730B1 KR910006730B1 (ko) 1991-09-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890002560A KR910006730B1 (ko) 1988-03-03 1989-03-02 기판 지지형 광 도파관을 포함하는 장치와 그 제조방법

Country Status (8)

Country Link
US (1) US4902086A (ko)
EP (1) EP0331335B1 (ko)
JP (1) JP2634664B2 (ko)
KR (1) KR910006730B1 (ko)
CA (1) CA1323783C (ko)
DE (1) DE68908583T2 (ko)
ES (1) ES2046463T3 (ko)
SG (1) SG25894G (ko)

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Also Published As

Publication number Publication date
DE68908583T2 (de) 1994-03-31
JP2634664B2 (ja) 1997-07-30
US4902086A (en) 1990-02-20
KR910006730B1 (ko) 1991-09-02
DE68908583D1 (de) 1993-09-30
EP0331335A2 (en) 1989-09-06
ES2046463T3 (es) 1994-02-01
EP0331335A3 (en) 1990-10-24
JPH01267509A (ja) 1989-10-25
CA1323783C (en) 1993-11-02
EP0331335B1 (en) 1993-08-25
SG25894G (en) 1995-03-17

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