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KR890008921A - 얇은 웨이퍼 처리 및 제조용 장치 및 방법 - Google Patents

얇은 웨이퍼 처리 및 제조용 장치 및 방법 Download PDF

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Publication number
KR890008921A
KR890008921A KR1019880014553A KR880014553A KR890008921A KR 890008921 A KR890008921 A KR 890008921A KR 1019880014553 A KR1019880014553 A KR 1019880014553A KR 880014553 A KR880014553 A KR 880014553A KR 890008921 A KR890008921 A KR 890008921A
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South Korea
Prior art keywords
bar
wafer
slicing
leveling
face
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KR1019880014553A
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English (en)
Inventor
펠트 마이어 프리츠
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원본미기재
게엔인 게오르그 뮐러 뉘른베르크 아게
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Publication of KR890008921A publication Critical patent/KR890008921A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02013—Grinding, lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
    • B23P23/02—Machine tools for performing different machining operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/003—Multipurpose machines; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49792—Dividing through modified portion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49815—Disassembling
    • Y10T29/49821—Disassembling by altering or destroying work part or connector
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/5176—Plural diverse manufacturing apparatus including means for metal shaping or assembling including machining means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/5176—Plural diverse manufacturing apparatus including means for metal shaping or assembling including machining means
    • Y10T29/5177—Plural diverse manufacturing apparatus including means for metal shaping or assembling including machining means and work-holder for assembly

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mining & Mineral Resources (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

내용 없음

Description

얇은 웨이퍼 처리 및 제조용 장치 및 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명에 따른 방법을 수행하기 위해 적합시킬수 있는 장치의 실시예를 도시한 약 정면도.
제4도는 본 발명에 따른 방밥을 수행하기 위해 본 발명에 따른 장치의 전사시도.
제5도는 본 발명에 따른 방법을 수행하기 위해 제4도에 도시된 장치의 일부의 부분 단면에서의 정면도.

Claims (12)

  1. 반도체 기판으로 사용하기 위한 단결정 또는 다결정 재료같은 딱딱한 비금속 물질의 하나 이상의 정확한 평면을 갖는 얇은 웨이퍼를 이러한 재료의 바로부터 제조하는 방법에 있어서, 단부면으로 부터 상기 바를 따라 세로로 연장된 홀더 부재를 상기 바에 고정시키는 단계와 디스크형 웨이퍼를 분리하도록 상기 바를 슬라이싱하는 단계와 상기 스라이싱 작업이 완결되기 전에 정확하게 평면 상태로 상기 바의 상기 단부면을 레벨링하는 단계와, 상기 슬라이싱 작업이 상기 바가 완전히 분할되고 상기 홀더 부재가 완전하지는 않지만 부분적으로 분할된 후에 상기 슬라이싱 작업으로 형성된 웨이퍼가 상기 홀더 부재에 의해 상기 바와 연결되어 유지되도록 상기 슬라이싱 작업이 종결되는 단계와, 상기 웨이퍼와 상기 바를 연결하는 상기 홀더 부재의 부위를 연마하는 것에 의해 상기 바로 부터 상기 웨이퍼가 분리되는 단계를 구비하는 것을 특징으로 하는 웨이퍼 제조방법.
  2. 제1항에 있어서, 상기 슬라이싱 단계가 내부구멍 또는 실톱을 사용하여 바를 슬라이싱하는 것을 포함하고, 상기 레벨링 단계가 숫돌차를 사용하여 상기 바의 상기 단부면을 레벨링하는 것을 포함하고, 상기 내부 구멍 또는 실톱 및 상기 숫돌차가 단일의 유니트로서 일체로 된 것을 특징으로 하는 웨이퍼 제조 방법.
  3. 제2항에 있어서, 상기 숫돌차로 형성된 공간내에 위치된 이송판상에서 상기 바로부터 분리된 후 상기웨이퍼를 위치시키는 단계를 추가적으로 포함하는 것을 특징으로 하는 웨이퍼 제조 방법.
  4. 제1항에 있어서, 이송판 상에서 상기 바로부터 분리된후 상기 웨이퍼를 위치시키는 단계를 추가적으로 포함하는 것을 특징으로 하는 웨이퍼 제조방법.
  5. 제1항에 있어서, 상기 바의 상기 단부면의 레벨링 단계 및 상기 바이 슬라이싱 단계가 거의 동시에 수행되는 것을 특징으로 하는 웨이퍼 제조방법.
  6. 반도체 기판으로 사용하기 위한 단결정 또는 다결정 재료 같은 딱딱한 비금속 물질의 하나 이상의 정확한 평면을 갖는 얇은 웨이퍼를 이러한 재료의 바로부터 제조하는 장치에 있어서, 상기 바의 단부면으로 구성된 제1표면을 갖고 바로 부터 디스크 형상의 웨이퍼를 분리하도록 상기 바를 슬라이싱하기 위한 수단과, 상기 슬리이싱 수단으로 상기 슬라이싱을 달성하기 전에 정확하게 평면 상태로 상기 바의 상기 단부면을 레벨링하기 위한 수단과, 상기 슬라이싱 수단으로 상기 분리된 웨이퍼와 상기바를 연결하도록 완전하지도 않지만 부분적으로 분할되기에 적합하며 상기 단부면으로 부터 세로로 연장된 상기 바의 상기 표면에 고정된 홀더 부재를 구비하며 상기 슬라이싱 동안 상기 바를 홀딩(holding)하기 위한 상기 슬라이싱 수단과 연합된 수단과, 상기 바로 부터 상기 웨이퍼를 분리하도록 상기 분리된 웨이퍼와 상기 바를 연결한 상기 홀더 부재의 부위를 연마하기 위해 수단을 구비하는 상기 레벨링 수단을 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
  7. 제6항에 있어서, 상기 슬라이싱 수단이 내부구멍 또는 실톱을 구비하고, 상기 레벨링 수단이 상기 내부구멍 톱으로 형성된 개구 부근에 위치된 숫돌차를 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
  8. 제7항에 있어서, 상기 숫돌차가 컵모양의 숫돌차인 것을 특징으로 하는 웨이퍼 제조 장치.
  9. 제8항에 있어서, 상기 컵모양의양의 숫돌차에 의해 형성된 공간내에 위치된 이승판을 부가로 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
  10. 제9항에 있어서, 상기 이승판이 상기 바로 부터 상기 이승판까지 분리된 웨이퍼를 홀딩하기 위해 흡입원으로 표면을 연결하기 위한 수단을 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
  11. 제10항에 있어서, 상기 숫돌차와 관련된 축방향 및 방사상 방향에서 상기 이송판의 위치를 조정하기 위한 수단을 부가로 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
  12. 제11항에 있어서, 또 다른 위치에서 상기 이송판상에 유지되고, 상기 바로 부터 분리된 웨이퍼를 이송하기 위한 수단을 부가로 구비하는 것을 특징으로 하는 웨이퍼 제조 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880014553A 1987-11-05 1988-11-05 얇은 웨이퍼 처리 및 제조용 장치 및 방법 KR890008921A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP3737540.7 1987-11-05
DE3737540A DE3737540C1 (de) 1987-11-05 1987-11-05 Verfahren und Maschine zum Herstellen von Ronden mit zumindest einer planen Oberflaeche

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KR890008921A true KR890008921A (ko) 1989-07-13

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US (2) US4881518A (ko)
JP (1) JPH01153259A (ko)
KR (1) KR890008921A (ko)
DE (1) DE3737540C1 (ko)
FR (1) FR2622820A1 (ko)
GB (1) GB2212081B (ko)
IT (1) IT1229933B (ko)

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DE3737540C1 (de) 1989-06-22
IT8822335A0 (it) 1988-10-17
GB8825807D0 (en) 1988-12-07
JPH01153259A (ja) 1989-06-15
FR2622820A1 (fr) 1989-05-12
IT1229933B (it) 1991-09-16
US4881518A (en) 1989-11-21
GB2212081B (en) 1991-10-16
GB2212081A (en) 1989-07-19
US4967461A (en) 1990-11-06

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