KR870005887A - 무접촉 운반 장치 - Google Patents
무접촉 운반 장치 Download PDFInfo
- Publication number
- KR870005887A KR870005887A KR860010726A KR860010726A KR870005887A KR 870005887 A KR870005887 A KR 870005887A KR 860010726 A KR860010726 A KR 860010726A KR 860010726 A KR860010726 A KR 860010726A KR 870005887 A KR870005887 A KR 870005887A
- Authority
- KR
- South Korea
- Prior art keywords
- box
- conveying device
- contactless
- transport apparatus
- contactless transport
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Conveyance Elements (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명 구체예의 평면도.
제2도는 본발명의 정면도.
제3도는 이젝터(ejector)의 설명도.
제4도는 분리판을 부차한 본 발명의 정면도이고,
제5도는 그것의 정면도,
제14도는 다른 발명의 무접촉 운반장치의 설명도.
* 도면의 주요부분에 대한 부호의 설명
1 : 박스 3 : 곡부
4 : 벤드 5 : 노즐
9' : 분리판 10,10' : 가이드
11,11' : 보스 14 : 후드
15 : 배기관 16 : 운동수단
17 : 운반장치 19 : 작동아암
22 : 저장테이블 23'23 : 홈
25 : 중공 A : 무접촉운반장치
Claims (7)
- 박스의 상단은 닫혀있고 하단은 열려있으며, 박스의 상단에 부착된 노즐과 열려진 박스의 하단의 내부에 연속적으로 곡부와 벤드를 갖는 박스에 의해 형성되는 것을 특징으로 하는 무접촉 운반장치.
- 제1항에 있어서, 상기 박스가 노즐로부터 박스의 내부에 방사상으로 연장된 분리판을 갖는 것을 특징으로 하는 무접촉 운반장치.
- 제1항에 있어서, 상기 박스가 박스로부터 운반물이 이탈되지 않도록 박스의 외부에 고정된 가이드를 갖는 것을 특징으로 하는 무접촉 운반장치.
- 제1항에 있어서, 상기 박스가 박스의 하부에서 목적물의 구멍속으로 삽입될수 있는 보스를 갖는 것을 특징으로 하는 무접촉 운반장치.
- 제1항에 있어서, 상기 박스가 박스를 감싸는 배기관이 부착된 후드를 갖는것을 특징으로 하는 무접촉 운반장치.
- 제1항에 있어서, 상기 벤드가 홈이나 중공을 갖는 것을 특징으로 하는 무접촉 운반장치.
- 운반물을 운반하기 위한 운반장치 및 상기 운반장치와 운반물이 저장되는 저장 테이블 사이에서 상.하로 움직이고 회전할수 있는 무접촉 운반장치가 부착된 작동 아암을 갖는 운동수단으로 구성되는 것을 특징으로 하는 무접촉 운반 시스템.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60-297489 | 1985-12-30 | ||
| JP29748985A JPS62157792A (ja) | 1985-12-30 | 1985-12-30 | 位置決め機構を備えた空気保持装置 |
| JP61-34048 | 1986-02-17 | ||
| JP3404886A JPS62290654A (ja) | 1986-02-17 | 1986-02-17 | 空気保持器 |
| JP61-91652 | 1986-04-21 | ||
| JP9165286A JPS62251094A (ja) | 1986-04-22 | 1986-04-22 | 排気吸引機構を備えた空気保持装置 |
| JP10819786A JPS62264118A (ja) | 1986-05-12 | 1986-05-12 | 無接触ワ−ク空気保持装置 |
| JP61-108197 | 1986-05-12 | ||
| JP61235333A JPS6392537A (ja) | 1986-10-02 | 1986-10-02 | 無接触搬送装置 |
| JP61-235333 | 1986-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR870005887A true KR870005887A (ko) | 1987-07-07 |
Family
ID=33437235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR860010726A KR870005887A (ko) | 1985-12-30 | 1986-12-15 | 무접촉 운반 장치 |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR870005887A (ko) |
| DE (1) | DE3642937A1 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1989012907A1 (en) * | 1988-06-17 | 1989-12-28 | Epsilon Technology, Inc. | Wafer handling system with bernoulli pick-up |
| US6631935B1 (en) | 2000-08-04 | 2003-10-14 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafer and wafer-like objects |
| DE10347545A1 (de) * | 2003-10-14 | 2005-05-19 | Lubas Maschinen Gmbh | Vorrichtung zum Transportieren und Stapeln flächiger Lasten |
| DE102004045957A1 (de) * | 2004-09-22 | 2006-04-06 | Singulus Technologies Ag | Vorrichtung zum Halten und Transportieren eines Werkstücks mit einer ebenen Oberfläche |
| DE102008062343B4 (de) * | 2008-12-15 | 2013-05-29 | Festo Ag & Co. Kg | Nach dem Bernoulli-Prinzip arbeitender Sauggreifer |
| CN112943753B (zh) * | 2021-04-09 | 2022-06-24 | 浙江大学 | 一种扩张辐射流动机构 |
-
1986
- 1986-12-15 KR KR860010726A patent/KR870005887A/ko not_active Application Discontinuation
- 1986-12-16 DE DE19863642937 patent/DE3642937A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE3642937A1 (de) | 1987-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19861215 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |