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KR860003660A - 높은 스위칭 속도와 래치업(latchup)효과를 받지 아니하는 상보형 반도체 장치 - Google Patents

높은 스위칭 속도와 래치업(latchup)효과를 받지 아니하는 상보형 반도체 장치

Info

Publication number
KR860003660A
KR860003660A KR1019850007087A KR850007087A KR860003660A KR 860003660 A KR860003660 A KR 860003660A KR 1019850007087 A KR1019850007087 A KR 1019850007087A KR 850007087 A KR850007087 A KR 850007087A KR 860003660 A KR860003660 A KR 860003660A
Authority
KR
South Korea
Prior art keywords
subject
semiconductor device
switching speed
high switching
complementary semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019850007087A
Other languages
English (en)
Other versions
KR900004871B1 (ko
Inventor
다께히데 시라또
Original Assignee
후지쓰가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지쓰가부시끼가이샤 filed Critical 후지쓰가부시끼가이샤
Publication of KR860003660A publication Critical patent/KR860003660A/ko
Application granted granted Critical
Publication of KR900004871B1 publication Critical patent/KR900004871B1/ko
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85Complementary IGFETs, e.g. CMOS
    • H10D84/859Complementary IGFETs, e.g. CMOS comprising both N-type and P-type wells, e.g. twin-tub
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0123Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0167Manufacturing their channels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
KR1019850007087A 1984-10-13 1985-09-26 높은 스위칭 속도와 래치업(latchup)효과를 받지 아니하는 상보형 반도체 장치 Expired KR900004871B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59214617A JPS61111576A (ja) 1984-10-13 1984-10-13 半導体装置
JP59-214617 1984-10-13

Publications (2)

Publication Number Publication Date
KR860003660A true KR860003660A (ko) 1986-05-28
KR900004871B1 KR900004871B1 (ko) 1990-07-08

Family

ID=16658687

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019850007087A Expired KR900004871B1 (ko) 1984-10-13 1985-09-26 높은 스위칭 속도와 래치업(latchup)효과를 받지 아니하는 상보형 반도체 장치

Country Status (5)

Country Link
US (1) US4893164A (ko)
EP (1) EP0178991B1 (ko)
JP (1) JPS61111576A (ko)
KR (1) KR900004871B1 (ko)
DE (1) DE3581045D1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120142467A1 (en) * 2010-12-01 2012-06-07 Hyundai Motor Company Idler device

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61111576A (ja) * 1984-10-13 1986-05-29 Fujitsu Ltd 半導体装置
US5206535A (en) * 1988-03-24 1993-04-27 Seiko Epson Corporation Semiconductor device structure
EP0357410B1 (en) * 1988-09-01 1993-11-03 Fujitsu Limited Semiconductor integrated circuit device
US5223451A (en) * 1989-10-06 1993-06-29 Kabushiki Kaisha Toshiba Semiconductor device wherein n-channel MOSFET, p-channel MOSFET and nonvolatile memory cell are formed in one chip and method of making it
JPH03203348A (ja) * 1989-12-29 1991-09-05 Sony Corp 半導体装置及び半導体装置の製法
US5210437A (en) * 1990-04-20 1993-05-11 Kabushiki Kaisha Toshiba MOS device having a well layer for controlling threshold voltage
KR920008951A (ko) * 1990-10-05 1992-05-28 김광호 더블도우프된 채널스톱층을 가지는 반도체장치 및 그 제조방법
JP3184298B2 (ja) * 1992-05-28 2001-07-09 沖電気工業株式会社 Cmos出力回路
EP0637073A1 (en) * 1993-07-29 1995-02-01 STMicroelectronics S.r.l. Process for realizing low threshold P-channel MOS transistors for complementary devices (CMOS)
US5500548A (en) * 1995-01-05 1996-03-19 Texas Instruments Incorporated Non-epitaxial CMOS structures and processors
US5739058A (en) * 1995-12-14 1998-04-14 Micron Technology, Inc. Method to control threshold voltage by modifying implant dosage using variable aperture dopant implants
JPH1092950A (ja) 1996-09-10 1998-04-10 Mitsubishi Electric Corp 半導体装置及びその製造方法
US6878595B2 (en) * 2003-01-27 2005-04-12 Full Circle Research, Inc. Technique for suppression of latchup in integrated circuits (ICS)
US7773442B2 (en) 2004-06-25 2010-08-10 Cypress Semiconductor Corporation Memory cell array latchup prevention
US9842629B2 (en) 2004-06-25 2017-12-12 Cypress Semiconductor Corporation Memory cell array latchup prevention

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4229756A (en) * 1979-02-09 1980-10-21 Tektronix, Inc. Ultra high speed complementary MOS device
JPS5643605A (en) * 1979-09-18 1981-04-22 Fujitsu Ltd Photoswitch
JPS57143854A (en) * 1981-02-27 1982-09-06 Toshiba Corp Complementary type metal oxide semiconductor device and its manufacture
JPS57211248A (en) * 1981-06-22 1982-12-25 Hitachi Ltd Semiconductor integrated circuit device
JPS5821857A (ja) * 1981-07-31 1983-02-08 Seiko Epson Corp アナログ・デイジタル混載集積回路
JPS5871650A (ja) * 1981-10-26 1983-04-28 Hitachi Ltd 半導体集積回路装置
JPS5874083A (ja) * 1981-10-28 1983-05-04 Seiko Instr & Electronics Ltd Mis集積回路とその製造方法
JPS58170047A (ja) * 1982-03-31 1983-10-06 Fujitsu Ltd 半導体装置
JPS5969948A (ja) * 1982-10-15 1984-04-20 Fujitsu Ltd マスタ−スライス型半導体集積回路
US4516313A (en) * 1983-05-27 1985-05-14 Ncr Corporation Unified CMOS/SNOS semiconductor fabrication process
JPS60767A (ja) * 1983-06-17 1985-01-05 Hitachi Ltd 半導体装置
DE3340560A1 (de) * 1983-11-09 1985-05-15 Siemens AG, 1000 Berlin und 8000 München Verfahren zum gleichzeitigen herstellen von schnellen kurzkanal- und spannungsfesten mos-transistoren in vlsi-schaltungen
JPS60123055A (ja) * 1983-12-07 1985-07-01 Fujitsu Ltd 半導体装置及びその製造方法
FR2571178B1 (fr) * 1984-09-28 1986-11-21 Thomson Csf Structure de circuit integre comportant des transistors cmos a tenue en tension elevee, et son procede de fabrication
JPS61111576A (ja) * 1984-10-13 1986-05-29 Fujitsu Ltd 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120142467A1 (en) * 2010-12-01 2012-06-07 Hyundai Motor Company Idler device

Also Published As

Publication number Publication date
EP0178991A3 (en) 1986-12-03
US4893164A (en) 1990-01-09
EP0178991B1 (en) 1991-01-02
KR900004871B1 (ko) 1990-07-08
EP0178991A2 (en) 1986-04-23
DE3581045D1 (de) 1991-02-07
JPS61111576A (ja) 1986-05-29
JPH0144021B2 (ko) 1989-09-25

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