KR20210058653A - Apparatus for cutting for surface - Google Patents

Abstract

The present invention relates to a surface cutting device for separating the surface of a sample from a sample, and more specifically, to provide a surface cutting device capable of rapidly collecting flakes having a thickness of several μm.

Description

Surface cutting device {APPARATUS FOR CUTTING FOR SURFACE}

This application was filed on November 13, 2019. It claims the benefit of priority based on the applied Korean Patent Application No. 10-2019-0145063, and all contents disclosed in the documents of the Korean patent application are included as part of this specification.

The present invention relates to a surface cutting device for separating the surface of a sample from a sample, and more specifically, to a surface cutting device capable of rapidly collecting flakes of a thickness of several μm.

In the field of display materials, in order to realize high integration of multi-tasking, there is a continuous demand for a thin film.

For the development of excellent display materials, accurate analysis of a thin film composed of a single layer or multiple layers is essential, and pretreatment such as surface cutting of a thin film sample is required for thin film analysis.

For sample pretreatment such as thin film hard coating layer and self-healing coating layer, S.T.Japan Inc. EZ-Pick II, a thin film sample preparation equipment manufactured by the company, was used.

In the case of EZ-Pick Ⅱ, since there are many parts that an analyst must manually manipulate during sample preparation, the efficiency of the pretreatment process is determined by the analyst's experience and know-how, and pretreatment is possible only up to a scale of several tens of μm, and a long time is required. Became. In addition, the 1-2mg collection process was complicated.

In general, devices for surface cutting include equipment such as a milling machine and a microtome.

The milling machine shows a high error rate in micro-level processing, and since the processing is performed by spraying the refrigerant onto the workpiece during cutting, the refrigerant component is mixed, making it difficult to sample pure flakes.

In the case of microtome, micro-unit processing is possible, but because the toming process is performed while the sample is fixed in a sample holder similar to a vise, the surface pretreatment of a multilayered thin film sample in the form of mostly film It is difficult to apply.

In order to accurately and quickly analyze a thin film sample for display, there is a need for an automated pretreatment equipment capable of uniformly and rapidly cutting a thickness of several μm, which overcomes the above disadvantages.

In addition, a high-precision depth measurement means is required in order to fractionate a flake having a thickness of several μm from the surface of the thin film sample to a uniform thickness. The measurement of the depth can be performed in real time even during the process of collecting the thin film sample by the blade for surface cutting. Therefore, it is preferable that the measuring means measure the depth without affecting the thin film sample during the measurement process. However, since the thin film sample used in the display material field may be formed of a light-transmitting transparent material, the use of a sensor that does not physically affect the thin film sample, such as an optical sensor, may be limited.

The present invention relates to a surface cutting device for separating the surface of a sample from a sample, and more specifically, to provide a surface cutting device capable of rapidly collecting flakes having a thickness of several μm.

The surface cutting apparatus of the present invention includes: a sample tray unit on which a thin film sample is mounted on an upper surface; A blade unit for cutting the surface of the thin film sample mounted on the sample tray unit; A driving unit that provides a driving force to the blade unit or the sample tray unit to adjust the relative positions of the blade unit and the sample tray unit; A vacuum unit providing a negative pressure for fixing the position of the thin film sample on the upper surface of the sample tray unit; And a measuring unit measuring the depth of the lower end of the blade unit inserted into the thin film sample.

The driving unit of the surface cutting apparatus of the present invention includes a first driving unit for moving the blade unit in a first direction perpendicular to an upper surface of the sample tray unit on which the thin film sample is mounted, and the measurement unit It may be to measure the relative positional displacement between the first driving unit and the blade unit.

The first driving unit of the surface cutting apparatus of the present invention includes a moving unit that moves upwards along the first direction, and a linear actuator that transmits a driving force for moving the moving unit to move upwards, and the blade unit has a lower end portion It may include a blade portion that is in contact with or inserted into the thin film sample to cut the surface of the thin film sample, and a blade body portion that is coupled to a lower end portion and an upper end portion of the blade portion moves up and down with the moving portion.

The measuring unit of the surface cutting apparatus of the present invention includes a dial gauge fixed to the moving part, a measuring body coupled to a side surface of the blade body and a lower end in contact with the surface of the thin film sample, and the blade body. It may include a measurement support portion fixed and in contact with a measuring device of the dial gauge, and the measurement body portion may be elastically supported by the moving portion by an elastic member that contracts or expands in the first direction.

The measuring body of the surface cutting apparatus of the present invention may extend in an up-down direction, and a rolling wheel that rolls in the cutting direction of the blade unit may be provided at a lower end of the measuring body.

The moving part of the surface cutting device of the present invention includes a moving plate that is vertically moved by the linear actuator and has a surface parallel to the first direction, and is protruded on a surface of the moving plate to vertically move the measuring body. It may include a guide portion to guide.

The guide portion of the surface cutting apparatus of the present invention includes a first guide portion in contact with one side of the measuring body, and a second guide portion in contact with the other side of the measuring body, and the first guide portion It may include a rolling wheel supporting the one side surface of, and the second guide part may include a rolling wheel supporting the other side surface of the measurement body part.

The measuring body of the surface cutting apparatus of the present invention is provided with a first protrusion protruding from the measuring body in a direction perpendicular to the first direction, and the blade body is provided with the first protrusion from the blade body. A second protrusion protruding in a direction parallel to the protruding direction is provided, and passing through the first protrusion and the second protrusion in the first direction to adjust the relative positional displacement between the blade body and the measurement body It may further include a micrometer coupled to the first protrusion and the second protrusion.

In the surface cutting apparatus of the present invention, the dial gauge is fixed to the moving part so that the length direction of the measurer of the dial gauge is parallel to the first direction, and the measuring support part is a measuring support which is a plane perpendicular to the first direction. It includes a surface, and the end of the measurer of the dial gauge may be in contact with the measurement support surface.

The surface cutting apparatus of the present invention may be for separating or leaving a portion to be analyzed in a thin film sample for analysis of a multifunctional highly integrated thin film used in the field of display materials. The surface cutting apparatus of the present invention can accurately and quickly separate the flake to be analyzed from the thin film sample with a thickness of several μm.

The surface cutting apparatus of the present invention may be capable of measuring the depth of a blade inserted into the thin film sample with ultra high precision after mounting the thin film sample on the sample tray unit.

The surface cutting apparatus of the present invention can measure the depth in real time even while the blade unit collects the thin film sample, and may have minimal influence on the thin film sample due to the measurement in the depth measurement process.

1 is a conceptual diagram showing a surface cutting apparatus according to the present invention.
2 is a conceptual diagram showing a blade unit.
3 is a plan view showing a dial gauge.
4 is a front view showing a blade unit and a measuring unit.
5 is a rear view showing a blade unit and a measuring unit.
6 is a right side view showing the blade unit and the measuring unit.
7 is a cross-sectional view showing the AA cross section of FIG. 5.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this process, the size or shape of the components illustrated in the drawings may be exaggerated for clarity and convenience of description. In addition, terms specifically defined in consideration of the configuration and operation of the present invention may vary according to the intention or custom of users or operators. Definitions of these terms should be made based on the contents throughout this specification.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower" "left", "right", "vertical", "horizontal", "inside", "outside", "one side The orientation or positional relationship indicated by ”, “other surface” and the like is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship arranged when the product of the present invention is used in general, and for the description and brief description of the present invention However, it is not to be understood as limiting the present invention as it does not suggest or imply that the indicated device or element must have a specified orientation and be configured or manipulated in a specified orientation.

1 is a conceptual diagram showing a surface cutting apparatus according to the present invention. 2 is a conceptual diagram showing the blade unit 200. 3 is a plan view showing the dial gauge 310. 4 is a front view showing the blade unit 200 and the measuring unit. 5 is a rear view showing the blade unit 200 and the measuring unit. 6 is a right side view showing the blade unit 200 and the measurement unit. 7 is a cross-sectional view showing a cross-section A-A of FIG. 5.

Hereinafter, the surface cutting apparatus of the present invention will be described in detail with reference to FIGS. 1 to 7.

The surface cutting apparatus of the present invention may be for separating or leaving a portion of the thin film sample 10 to be analyzed in order to analyze a multifunctional highly integrated thin film used in the field of display materials. The surface cutting apparatus of the present invention can accurately and quickly separate the flake to be analyzed from the thin film sample 10 with a thickness of several μm.

The surface cutting device of the present invention can be applied to the PVC thin film sample 10 with little compression deformation. That is, the thin film sample 10 cut by the surface cutting device of the present invention may be a PVC sheet.

1, the surface cutting apparatus of the present invention includes a sample tray unit 100 on which a thin film sample 10 is mounted on an upper surface; A blade unit 200 for cutting the surface of the thin film sample 10 mounted on the sample tray unit 100; A driving unit 1000 that provides a driving force to the blade unit 200 or the sample tray unit 100 to adjust the relative positions of the blade unit 200 and the sample tray unit 100; A vacuum unit providing a negative pressure for fixing the position of the thin film sample 10 on the upper surface of the sample tray unit 100; And a measuring unit measuring the depth of the lower end of the blade unit 200 inserted into the thin film sample 10.

The vacuum unit can be an oil pump. In order to cut the surface of the thin film sample 10 to a uniform thickness, it may be important to completely adhere and fix the thin film sample 10 to the plane of the sample tray unit 100. Since the thin film for display is a material that cannot pass through the gas, when the thin film sample 10 of a large area is mounted on a flat plate, etc., when the thin film sample 10 is mounted in an excited state, the thin film sample 10 and the A curvature is formed in the thin film sample 10 by the gas between the planes, and the surface may not be cut to a uniform thickness. In the surface cutting apparatus of the present invention, after mounting the thin film sample 10 on the sample tray unit 100, a negative pressure is formed between the sample tray unit 100 and the thin film sample 10 to fix the thin film sample 10. Therefore, the thin film sample 10 can be completely in close contact with the sample tray unit 100 and fixed. That is, even if gas remains between the sample tray unit 100 and the thin film sample 10 after the thin film sample 10 is placed, the thin film sample 10 is the sample tray unit 100 because the vacuum unit completely sucks the residual gas. ) Can be completely adhered to.

The driving unit 1000 includes a first driving unit that moves the sample tray unit 100 or the blade unit 200 in a first direction perpendicular to the upper surface of the sample tray unit 100 on which the thin film sample 10 is mounted. 1100), a second driving unit that moves the sample tray unit 100 or the blade unit 200 in a second direction perpendicular to the first direction, and the sample tray unit 100 or the blade unit 200 in the first direction. And a third driving unit moving in a third direction perpendicular to the second direction.

The first direction may be a z-axis direction on the coordinate system shown in FIGS. 1 to 7. The second direction may be the x-axis direction on the coordinate system shown in FIGS. 1 to 7. The third direction may be a y-axis direction on the coordinate system shown in FIGS. 1 to 7.

The driving unit 1000 is a first guide bar that guides the movement of the sample tray unit 100 or the blade unit 200 in the first direction, and guides the movement of the sample tray unit 100 or the blade unit 200 in the second direction. It may include a second guide bar and a third guide bar for guiding the movement of the sample tray unit 100 or the blade unit 200 in the third direction.

The first driving unit 1100 may provide a driving force for approaching or separating the blade unit 200 from the thin film sample 10 to the sample tray unit 100 or the blade unit 200. Specifically, the driving unit 1000 is a first driving unit for moving the blade unit 200 in a first direction perpendicular to the upper surface of the sample tray unit 100 on which the thin film sample 10 is mounted ( 1100) may be included. In the surface cutting apparatus of the present invention, the measurement unit may measure a relative positional displacement between the first driving part 1100 and the blade unit 200. The first driving unit 1100 may provide a driving force to the blade unit 200.

The second driving unit provides a driving force to the sample tray unit 100 or the blade unit 200 when one end of the blade unit 200 is inserted into the thin film sample 10 to thereby control the sample tray unit 100 or the blade unit 200. By moving in two directions, the surface of the thin film sample 10 can be cut. A level system may be provided on the second guide bar.

As shown in FIG. 2, in the surface cutting apparatus of the present invention, the blade unit 200 moves in a second direction parallel to the upper surface of the sample tray unit 100 with respect to the sample tray unit 100, The surface of the thin film sample 10 can be cut. In this case, the second driving unit may move the sample tray unit 100 or the blade unit 200. Preferably, the second driving unit may apply a driving force to the sample tray unit 100 to move the blade unit 200 on the sample tray unit 100 in the second direction.

The third driving unit may provide a driving force when the blade unit 200 is separated from the thin film sample 10. Since the position of the blade unit 200 on the sample tray unit 100 can be changed by the third driving unit, the surface cutting apparatus of the present invention changes the position of the blade unit 200, The surface can be cut in several areas. When cutting the surface of the thin film sample 10, if a large area is cut at one time, the thin film sample 10 receives excessive force, so the sample may be wrinkled or broken, and the device may be finely twisted to make the surface to a uniform thickness. It can be difficult to cut. Therefore, there is a limit to the area or width for one surface cut. However, since it is desirable to cut the surface as wide as possible for accurate analysis of the thin film sample 10, it may be desirable to repeatedly cut the surface of the thin film sample 10 while changing the position of the blade unit 200. . Specifically, the third driving unit may provide a driving force to the blade unit 200.

As shown in FIG. 2, the blade unit 200 is in contact with or inserted into the thin film sample 10 to cut the surface of the thin film sample 10, and the blade portion 210 is fixed and the blade It may include a blade body 220 that transmits the driving force of the driving unit 1000 to the unit 210.

The blade portion 210 extends in the vertical direction (z-axis direction), and a blade protruding in the second direction may be formed at a lower end of the blade portion 210. The bottom surface of the blade portion 210 may be formed to be an inclined surface so that the end of the blade portion of the blade portion 210 is located at the lowermost end. Accordingly, when the blade portion 210 cuts the thin film sample 10, the area in which the bottom surface of the blade portion 210 contacts the thin film sample 10 may be minimized, thereby reducing friction. The blade portion 210 may be a tungsten blade.

The width of the blade portion 210 in the y-axis direction may be 1 mm to 10 mm. As the blade unit 200 moves in the second direction, when cutting the surface of the thin film sample 10, it receives a force proportional to the width, and when the width of the blade portion 210 exceeds 10 mm, the thin film sample 10 ) May be pushed or wrinkled, and may be severely broken, so it may be desirable that the width of the blade portion 210 is 10 mm or less. In addition, when the blade portion 210 is formed to be less than 1 mm, the cutting efficiency may decrease, so it may be desirable that the width of the blade portion 210 be 1 mm or more. For example, the width of the blade portion 210 may be 3 mm.

The blade body 220 may be coupled to the upper end of the blade portion 210.

The sample tray unit 100 may have an upper surface formed in a plane perpendicular to the first direction so that the thin film sample 10 is taken. A plurality of pinholes are provided in the sample tray unit 100, and a negative pressure is formed in the pinhole with a vacuum unit, so that the thin film sample 10 may be fixed and adhered to the sample tray unit 100.

The sample tray unit 100 may be moved in the second direction by the second driving unit. That is, when cutting the surface of the thin film sample 10, the sample tray unit 100 may be moved to adjust a relative position between the sample tray unit 100 and the blade unit 200.

The sample tray unit 100 may be provided to include at least one of Aluminum 6061, Carbon A36, and SUS304 Stainless. The sample tray unit 100 may be made of a material that is less deformed due to external force, temperature, chemical substances, or the like.

The measuring unit may include a dial gauge 310.

The dial gauge 310 may be a length measuring device that compares the length by reading a dimension indicated on a scale plate by enlarging the minute movement of the spindle with a gear device by placing the measurer 311 on the part to be measured.

The dial gauge 310 is also referred to as a dial indicator. It is not to measure the length of the workpiece directly, but to compare the length, and it can be used to inspect the unevenness of the plane, the attachment state of the workpiece, the shaking of the axis center, and the shaking of a right angle.

The dial gauge 310 has a rack engraved on the spindle and transmits the movement of the spindle to the gear. It is often used that the guide rotates 1 revolution for the spindle to move 1 mm. The scale plate has one scale of 0.01mm and one with 0.001mm. If it is 0.01mm, 10mm can be measured, and if it is 0.001mm, 0.3mm, 1mm, 2mm, etc. can be measured. The error of the dial gauge 310 is usually allowed a maximum of one division-a few divisions.

As shown in FIG. 3, the dial gauge 310 may include a disk-shaped body with a scale on which a length value is displayed, and a measurer 311 protruding from the outer periphery of the body in the radial direction of the body. have. The dial gauge 310 may have a change in the length direction of the measurer 311 displayed as a scale.

Hereinafter, in the surface cutting apparatus of the present invention, a coupling structure between the blade unit 200, the measuring unit, and the first driving unit 1100 will be described in detail with reference to FIGS. 4 to 7.

In the surface cutting apparatus of the present invention, the measurement unit may measure a relative positional displacement between the first driving part 1100 and the blade unit 200. Specifically, in a state in which the lower end of the measuring body 320 of the measuring unit coupled with the blade body 220 of the blade unit 200 is in contact with the surface of the thin film sample 10, the first driving part 1100 It may be to measure a change in length between the blade body 220 and the moving part that transmits power to the blade unit 200, and measure the depth at which the blade unit 200 is inserted into the thin film sample 10.

As shown in FIGS. 4 and 6, the first driving unit 1100 includes a moving unit that moves up and down along the first direction, and a linear actuator 1130 that transmits a driving force for the moving unit to move up and down. Including, the blade unit 200 has a lower end portion in contact with or inserted into the thin film sample 10 to cut the surface of the thin film sample 10, the blade portion 210, and the lower portion of the blade portion 210 It may be to include an upper end portion of the blade body 220 that moves up and down together with the moving portion.

The blade body 220 may be provided in the shape of a rod extending in the first direction. The blade body 220 is coupled to the moving part through the measuring unit, and can move up and down together with the moving part.

The measuring unit includes a dial gauge 310 fixed to the moving part, a measuring body 320 coupled to a side surface of the blade body 220 and having a lower end in contact with the surface of the thin film sample 10, , Including a measurement support 330 fixed to the blade body 220 and in contact with the measurer 311 of the dial gauge 310, and the measurement body 320 contracts or expands in the first direction The moving part may be elastically supported by the elastic member 1119.

The dial gauge 310 may be fixed to the moving part so that the length direction of the measurer 311 is parallel to the first direction. Specifically, the moving part includes a moving plate 1113 having a plane parallel to the first direction and moving upright by the linear actuator 1130, and the moving plate 1113 is in a direction perpendicular to the plane. It may be coupled to the protruding member 1111. A fixing ring 312 is provided on the rear surface of the body of the dial gauge 310, and the fixing ring 312 of the dial gauge 310 may be coupled to the protruding member 1111.

The measurement body 320 may be in the shape of a rod extending in the vertical direction. That is, the length directions of the measuring body 320 and the blade body 220 may be parallel to each other.

As shown in FIG. 5, the measuring body 320 is provided with a first protrusion 321 protruding from the measuring body 320 in a direction perpendicular to the first direction, and the blade body part ( A second protrusion 221 protruding from the blade body 220 in a direction parallel to the protruding direction of the first protruding part 321 may be provided at the blade body 220. In the surface cutting apparatus of the present invention, the first protrusion 321 and the second protrusion 221 are moved in the first direction in order to adjust the relative positional displacement between the blade body 220 and the measurement body 320. It may further include a micrometer which penetrates into and is coupled to the first protrusion 321 and the second protrusion 221.

The micrometer is a device that can measure the length of an object to the extent of micrometers (μm), a sleeve 341, a thimble coupled to one end of the sleeve, and a spindle coupled to the other end of the sleeve. ) 343, and when the thimble is rotated in the longitudinal direction of the micrometer by the rotation axis, the length of the spindle protruding from the sleeve may be adjusted.

The micrometer sleeve 341 may be fixed to the first protrusion 321, and the micrometer spindle 343 may be coupled to the second protrusion 221. The zero point of the dial gauge 310 may be adjusted by adjusting the relative position in the first direction between the blade body 220 and the measurement body 320 by manipulating the micrometer of the thimble.

A rolling wheel that rolls in the cutting direction of the blade unit 200 may be provided at a lower end of the measuring body 320. Specifically, a rolling wheel 323 may be provided at the lower end of the measuring body 320 to cause the lower end of the measuring body 320 to roll friction with the surface of the thin film sample 10. In the surface cutting apparatus of the present invention, in order to cut the surface of the thin film sample 10 with a uniform thickness, the insertion depth of the blade unit 200 is adjusted even while the blade unit 200 cuts the surface of the thin film sample 10. It needs to be measured in real time. Accordingly, when the surface is cut, the lower end of the measurement body 320 may be maintained in contact with the surface of the thin film sample 10. At this time, in order to prevent the thin film sample 10 from being pushed or wrinkled by the measurement body 320, it is necessary to minimize friction between the measurement body 320 and the surface of the thin film sample 10, and , A rolling wheel 323 may be provided at the lower end of the measuring body 320. That is, the measurement body 320 may prevent movement or deformation of the thin film sample 10 due to friction by making rolling friction with the thin film sample 10 rather than sliding friction.

The measurement body 320 may be coupled to a third protrusion 1112 having an upper end protruding from the surface of the moving plate 1113 with the elastic member 1119 interposed therebetween. That is, the measurement body 320 may be elastically supported by the third protrusion 1112. The elastic member 1119 may be a spring or the like. At this time, in order that the measurement body 320 is not inclined and the length direction of the measurement body 320 remains parallel to the first direction, the movable part protrudes on the surface of the movable plate 1113 to measure the measurement. It may include a guide portion for guiding the vertical movement of the body portion 320.

As shown in FIGS. 4 to 7, the guide part has a first guide part 1115 in contact with one side of the measuring body 320, and a first guide part 1115 in contact with the other side of the measuring body 320. It may include 2 guide parts (1117). That is, the first guide unit 1115 and the second guide unit 1117 may contact both sides of the measurement body 320 to guide the movement of the measurement body 320. Specifically, the measurement body 320 is disposed at a position facing one side of the moving plate 1113, and the first guide unit 1115 and the second guide unit 1117 are the one side of the moving plate 1113 It may be provided to protrude from the surface.

The first guide part 1115 includes a rolling wheel 1115a that supports the one side surface of the measurement foam tube part, and the second guide part 1117 covers the other side of the measurement body part 320. It may include a supporting rolling wheel (1117a).

A plurality of rolling wheels 1115a of the first guide part 1115 and a plurality of rolling wheels 1117a of the second guide part 1117 may be provided, respectively. The rotation axes of the plurality of rolling wheels 1115a of the first guide part 1115 may be located on a virtual straight line parallel to the first direction. Rotation axes of the plurality of rolling wheels 1117a of the second guide unit 1117 may also be located on a virtual straight line parallel to the first direction. Accordingly, the plurality of rolling wheels 1115a of the first guide unit 1115 and the plurality of rolling wheels 1117a of the second guide unit 1117 support the measurement body 320 at a plurality of points, thereby It is possible to prevent the unit 320 from tilting.

The measurement support part 330 may include a measurement support surface that is a plane perpendicular to the first direction, and an end of the measurer 311 of the dial gauge 310 may be in contact with the measurement support surface. Therefore, when the lower end of the blade unit 200 is inserted into the thin film sample 10, the lower end of the measuring body 320 is pressed by the surface of the thin film sample 10, and the elasticity that supports the measuring body 320 The member 1119 is contracted, and as the elastic member 1119 is contracted, the relative position in the first direction between the moving part and the blade body 220 may be changed. Accordingly, the measurement support surface presses the lower end of the measurer 311 of the dial gauge 310, and the insertion depth of the blade unit 200 may be displayed on the dial gauge 310.

The measurement support 330 may be coupled to the side of the blade body 220.

Although the embodiments according to the present invention have been described above, these are merely exemplary, and those of ordinary skill in the art will understand that various modifications and equivalent ranges of embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the following claims.

10... thin film sample 100... sample tray unit
200... blade unit 210... blade part
220... blade body 221... second protrusion
310... dial gauge 311... measurer
312...fixing hook 320...measuring body
321...first protrusion 323...cloud wheel
330...measuring support 341...sleeve
343...spindle 1000...drive unit
1100...first driving part 1111...protruding member
1112...3rd protrusion 1113...moving plate
1115...first guide part 1115a...rolling wheel
1117... second guide part 1117a... rolling wheel
1119...elastic member 1130...linear actuator

Claims (9)

A sample tray unit on which the thin film sample is mounted on the upper surface;
A blade unit for cutting the surface of the thin film sample mounted on the sample tray unit;
A driving unit that provides a driving force to the blade unit or the sample tray unit to adjust the relative positions of the blade unit and the sample tray unit;
A vacuum unit providing a negative pressure for fixing the position of the thin film sample on the upper surface of the sample tray unit; And
Surface cutting apparatus comprising a measuring unit for measuring the depth of the lower end of the blade unit is inserted into the thin film sample. The method of claim 1,
The drive unit,
And a first driving unit for moving the blade unit in a first direction perpendicular to an upper surface of the sample tray unit on which the thin film sample is mounted,
The measuring unit measures the relative positional displacement between the first driving part and the blade unit. The method of claim 2,
The first driving unit includes a moving unit for vertical movement along the first direction, and a linear actuator for transmitting a driving force for the moving unit for vertical movement,
The blade unit includes a blade portion whose lower end is in contact with or inserted into the thin film sample to cut the surface of the thin film sample, and an upper end portion of the blade portion is coupled to the lower end and moves upright with the moving portion Surface cutting device. The method of claim 3,
The measurement unit,
A dial gauge fixed to the moving part,
A measuring body coupled to a side surface of the blade body and having a lower end in contact with the surface of the thin film sample,
It includes a measurement support fixed to the blade body portion and in contact with the measuring person of the dial gauge,
The surface cutting device that the measuring body portion is elastically supported by the moving portion by an elastic member that contracts or expands in the first direction. The method of claim 4,
The measuring body part extends in the vertical direction,
The surface cutting device is provided with a rolling wheel that rolls in the cutting direction of the blade unit at a lower end of the measuring body. The method of claim 5,
The moving part,
A moving plate that moves up and down by the linear actuator and has a surface parallel to the first direction,
Surface cutting device comprising a guide portion protruding on the surface of the moving plate to guide the vertical movement of the measuring body. The method of claim 6,
The guide portion includes a first guide portion in contact with one side of the measurement body and a second guide portion in contact with the other side of the measurement body,
The first guide part includes a rolling wheel supporting the one side of the measuring foam tube part,
The second guide portion is a surface cutting device comprising a rolling wheel for supporting the other side surface of the measuring body. The method of claim 4,
The measurement body portion is provided with a first protrusion protruding from the measurement body in a direction perpendicular to the first direction,
The blade body portion is provided with a second projection protruding from the blade body in a direction parallel to the projection direction of the first projection,
In order to adjust the relative positional displacement between the blade body and the measurement body, a micrometer which is coupled to the first and second projections by penetrating the first and second projections in the first direction is further provided. The surface cutting device comprising. The method of claim 4,
The dial gauge is fixed to the moving part so that the length direction of the measurer of the dial gauge is parallel to the first direction,
The measurement support includes a measurement support surface that is a plane perpendicular to the first direction,
The surface cutting device in which the end of the measuring person of the dial gauge is in contact with the measuring support surface.

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