KR20210034811A - High frequency induction heating device - Google Patents

Abstract

According to the present invention, disclosed is a high-frequency induction heating apparatus. The disclosed high-frequency induction heating apparatus includes: a crucible body storing a substance for deposition; and an induction heating member provided in an outer part of the crucible body, and heating the crucible body by generating a high frequency. The crucible body is formed to have a structure of at least two walls by different kinds of materials. Therefore, the present invention is capable of preventing a deposition substance from being contaminated by impurities when heating and gasifying the liquefied deposition substance in an organic light emitting diode (OLED) manufacturing process, improving thermal efficiency when heating a deposition substance, and cleaning and reusing a crucible body by forming the crucible body to be separable.

Description

High frequency induction heating device {HIGH FREQUENCY INDUCTION HEATING DEVICE}

The present invention relates to a high-frequency induction heating device, and more particularly, when a liquid deposition material is heated and vaporized in an organic light emitting diode (OLED) manufacturing process, it is possible to prevent the deposition material from being contaminated by impurities. The present invention relates to a high-frequency induction heating device that not only improves the thermal efficiency during heating of, but also allows the crucible body to be separated and cleaned to be reused.

In general, as a method for melting a certain substance, there are an indirect heating method of heating a crucible containing a substance to be melted and a direct heating method of heating the substance to be melted itself.

In the indirect heating method, a melting target material is indirectly heated by induction heating a crucible having a melting temperature much higher than that of the material to be melted. In this method, since a crucible having a melting point much higher than that of the material to be melted must be used, the crucible and the hot melt are chemically reacted with each other to generate impurities in the melt, thereby making the crucible vulnerable.

The direct heating method is a method of inducing and heating a material to be melted. This melting method is one of the methods used for high-purity crystal growth because the purity of the melt can be kept high. In particular, in the case of melting a material having a melting point of 3000K or higher, this melting method can be said to be very efficient.

Crucible has been used such as a means for heating and smelting a metal having a high melting temperature, a means for heating to mix various metal materials, and the like.

On the other hand, OLED is not only a post LCD display, but also as a self-emitting device for high-resolution displays. In particular, recently, as the VR (virtual reality) market is growing, the need for high-resolution OLEDs used in VR products is also emerging, and for this reason, a technology for more finely manufacturing the pattern of the organic thin film of the OLED is required.

In addition, as one of the OLED manufacturing processes, thermal evaporation deposition, which deposits organic materials on a silicon wafer (substrate) by evaporating an organic light emitting material into a gas in a high vacuum state, is mainly used. It is manufactured in a point-type or linear shape, and it takes a lot of time to manufacture a large-area OLED device.

Recently, CRUCIBLE changes the state of the evaporation material through heating so that the evaporation material deposited on the surface of the panel is supplied when producing a display panel in the display manufacturing process using OLED. It is also used as a means to transmit it to the surface of the house.

However, the crucible of the prior art as described above, in the process of heating the deposition material, introduces impurities from the wall, etc., contaminates the deposition material, lowers the thermal efficiency, and increases the operating cost because it is replaced at a specific cycle. There is a problem.

Therefore, there is a need to improve this.

Meanwhile, “Crucible and a heating assembly including the same” is disclosed in Korean Patent Registration No. 10-1968819 (Registration Date: 2019.04.08).

The present invention was created by the above necessity, and prevents contamination of the deposition material by impurities when the liquid deposition material is heated and vaporized in the organic light emitting diode (OLED) manufacturing process, and heats the deposition material when heating the deposition material. Its purpose is to provide a high-frequency induction heating device that can be heated quickly while reducing loss to improve thermal efficiency, and that can be cleaned and reused after use.

In order to achieve the above object, a high frequency induction heating device according to an aspect of the present invention includes a crucible body for receiving a material for deposition, and is provided outside the crucible body, and generates a high frequency to generate the crew. It characterized in that it comprises an induction heating member for heating the sibble body.

In the present invention, the crucible body is characterized in that it is formed of the same material or different materials to have a structure of at least a double wall or more.

In the present invention, the crucible body includes a crucible housing heated by the induction heating member, and is installed inside the crucible housing to accommodate the deposition material, and the same material as the crucible housing or It characterized in that it comprises an inner crucible formed of a different material.

In the present invention, the crucible housing is characterized in that it is formed of at least one of ceramics such as quartz, graphite, and composite, metals such as alumina, titanium, and tantalum.

In the present invention, the inner crucible is characterized in that it is formed of ceramic and metal.

In the present invention, the crucible housing is provided between the inner crucible and the outer liner so that the outer liner and the inner crucible are seated, and is formed of the same material or a different material as the outer liner to conduct heat. It characterized in that it comprises a heat conduction heater for heating the inner crucible through.

In the present invention, the crucible housing is characterized in that the outer liner is formed of quartz, and the thermally conductive heater is formed of ceramic, graphite, and metal.

In the present invention, the crucible body is characterized in that the inner crucible is detachably inserted into the crucible housing.

In the present invention, the crucible housing is characterized in that it has a detachable opening to separate and insert the inner crucible.

In the present invention, the crucible housing is characterized in that the upper surface is opened so that the inner crucible can be separated and inserted to form the detachable opening.

In the present invention, the inner crucible includes a container part accommodating the deposition material, a nozzle part coupled to the container part to seal the container part, and having a discharge pipe through which the deposition material is vaporized and discharged. It is done.

In the present invention, the nozzle unit is characterized in that a plurality of the discharge pipes are formed to be spaced apart from each other so as to have equal or different distances from the central part of the container to both sides.

In the present invention, the jozel part is characterized in that the separation distance is formed to gradually shorten as the discharge pipe goes from the central part to both sides.

As described above, the high frequency induction heating apparatus according to an aspect of the present invention has a double-walled structure that heats and vaporizes a liquid deposition material in an organic light emitting diode (OLED) manufacturing process, unlike the prior art. Therefore, it has the effect of preventing the deposition material from being contaminated by foreign substances.

In addition, the high-frequency induction heating device according to the present invention has an outer liner made of quartz, a heat conduction heater made of graphite, and an inner crucible made of metal. It has an effect of improving thermal efficiency by heating and maintaining the temperature in a heated state appropriately.

In addition, since the high frequency induction heating device according to the present invention can separate the inner crucible made of metal from the crucible housing, it can be cleaned after use according to the change of the evaporation material and reused to improve compatibility. Has an effect.

1 is an exploded perspective view illustrating a high frequency induction heating apparatus according to an embodiment of the present invention.
2 is a combined perspective view illustrating a high frequency induction heating apparatus according to an embodiment of the present invention.
3 is a front view of FIG. 2.
4 is a plan view of FIG. 2.
5 is a cross-sectional view taken along line AA of FIG. 3 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
6 is a cross-sectional view taken along line BB of FIG. 4 for explaining a high frequency induction heating apparatus according to an embodiment of the present invention.
7 is a perspective view illustrating a high frequency induction heating apparatus according to another embodiment of the present invention.
8 is a cross-sectional view illustrating a high-frequency induction heating apparatus according to another embodiment of the present invention.

Hereinafter, a preferred embodiment of the high-frequency induction heating apparatus according to the present invention will be described with reference to the accompanying drawings. In this process, the thickness of the lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of description.

In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of users or operators. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

1 is an exploded perspective view for explaining a high-frequency induction heating device according to an embodiment of the present invention, Figure 2 is a combined perspective view for explaining a high-frequency induction heating device according to an embodiment of the present invention, and Figure 3 is 2 is a front view, and FIG. 4 is a plan view of FIG. 2.

In addition, FIG. 5 is a cross-sectional view taken along line AA of FIG. 3 for explaining a high frequency induction heating device according to an embodiment of the present invention, and FIG. 6 is FIG. 4 for explaining a high frequency induction heating device according to an embodiment of the present invention. It is a cross-sectional view taken along line BB.

7 is a perspective view illustrating a high frequency induction heating device according to another embodiment of the present invention, and FIG. 8 is a cross-sectional view illustrating a high frequency induction heating device according to another embodiment of the present invention.

A high-frequency induction heating apparatus according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6.

1 to 6, the high frequency induction heating apparatus 100 according to an embodiment of the present invention heats a liquid deposition material for surface treatment or thin film formation in an organic light emitting diode (OLED) manufacturing process. It is applied to a wet deposition technique that vaporizes it.

In addition, the high-frequency induction heating apparatus 100 according to the present embodiment is used in a high vacuum state, and a liquid deposition material is vaporized and discharged to a gaseous treatment object.

To this end, the high frequency induction heating apparatus 100 according to the present embodiment includes a crucible body 110 in which a material for deposition is accommodated, and an induction heating member 120 for heating the crucible body 110 do.

In the high frequency induction heating apparatus 100 according to this embodiment, when the crucible body 110 is heated by the induction heating member 120 and the temperature rises, the deposition material accommodated in the crucible body 110 While also heated, a phase change is made to a gaseous state, and a substance whose gaseous state is changed is discharged to the outside of the crucible body 110 and supplied to the object to be treated.

In this embodiment, the high-frequency induction heating device 100 is described as an example of heating and vaporizing a liquid deposition material, but it may be vaporized by heating a solid deposition material, or an organic light-emitting diode (OLED) manufacturing process. Of course, it can be applied to various surface treatment technologies.

The crucible body 110 accommodating the evaporation material may be formed in a rectangular parallelepiped shape, and is formed of a heterogeneous material to have a structure of at least a double wall or more so as to improve thermal efficiency.

Since the crucible body 110 according to the present embodiment has a partition wall structure of a different material, rapid induction heating by the induction heating member 120 is possible, thereby reducing the heating time of the deposition material, as well as heating. It is possible to maintain the condition for an appropriate long time. Therefore, it is possible to improve the thermal efficiency of the high-frequency induction heating device 100.

In particular, the crucible body 110 according to the present embodiment is detachably mounted inside the crucible housing 111 in which the induction heating member 120 is disposed outside, and the crucible housing 111 It is provided with an inner crucible 113 for accommodating the evaporation material. In this case, the crucible main body 110 is formed of a different material in which the crucible housing 111 and the inner crucible 113 are different from each other.

For example, in the crucible body 110 according to the present embodiment, the crucible housing 111 has excellent heat resistance, electrical insulation, and thermal insulation properties, such as quartz, graphite, tantalum, It may be formed of any one or more of titanium and alumina, and the inner crucible 113 may be made of a metal having excellent thermal conductivity and less generation of impurities.

Through this, the crucible body 110 according to the present embodiment not only can quickly heat and vaporize the deposition material, but also prevent impurities from being generated in the inner crucible 113 in the process of heating and vaporizing the deposition material. Therefore, it is possible to prevent the deposition material from being contaminated by impurities.

In addition, in the crucible body 110 according to the present embodiment, the crucible housing 111 is formed of a different material in a double structure so as to properly maintain electrical conductivity that further improves thermal efficiency.

Specifically, the crucible housing 111 includes an outer liner 111a on which the induction heating member 120 is disposed, and a heat conduction heater coupled to the inside of the outer liner 111a so that the inner crucible 113 is seated. It includes (111b), is heated through the heat generated by the induction heating member 120.

At this time, the upper surface of the crucible housing 111 is opened so that the inner crucible 113 can be inserted or separated, thereby forming a detachable opening 111c.

The crucible housing 111 according to the present embodiment may be formed of one or more of quartz, graphite series, tantalum, titanium, and alumina. .

For example, in the crucible housing 111, the outer liner 111a may be made of quartz, and the thermally conductive heater 111b may be made of graphite.

As such, the crucible housing 111 is formed of a material having different physical properties between the outer liner 111a and the heat conduction heater 111b, so that rapid heating by the outer liner 111a is possible, and the heat conduction heater 111b is Through the inner crucible 113, rapid heat conduction is possible. In addition, after being heated to a set temperature, the temperature of the crucible body 110 can be properly maintained by the heat conduction heater 111b, thereby improving thermal efficiency.

The inner crucible 113 accommodating the evaporation material is inserted into the heat conduction heater 111b so as to be seated or detachable, and heated through the thermal conduction of the crucible housing 111 to heat the evaporation material to evaporate it.

The inner crucible 113 according to the present embodiment includes a container part 113a for accommodating a deposition material, and a nozzle part 113b that seals the container part 113a to discharge vaporized deposits. At this time, the inner crucible 113 is formed of a metal material to prevent contamination of the deposition material by discharging impurities in the process of heating the deposition material.

Since the inner crucible 113 can be separated from the crucible housing 111, after the use of a deposition material of a specific component is completed, it can be cleaned and used to deposit another deposition material.

That is, since the inner crucible 113 can be cleaned and reused without the need to change the entire crucible body 110 according to the change of the deposition material, compatibility can be improved.

The nozzle unit 113b includes a plurality of discharge pipes 113c to discharge the vaporized deposition material from the container unit 113a. At this time, the nozzle unit 113b is formed such that the separation distance L gradually decreases as the discharge pipe 113c goes from the center to both sides so that the vaporized deposits can be discharged smoothly.

For example, since the inner crucible 113 according to the present embodiment is formed in a rectangular shape, vaporization of the evaporation material proceeds slightly faster in the regions of both corners. Accordingly, the inner crucible 113 smoothly discharges vaporized deposits from all areas through the discharge pipe 113c whose interval is gradually shortened.

The induction heating member 120 according to the present embodiment is provided outside the outer liner 111a and generates a high frequency to heat the crucible body 110. The induction heating member 120 is provided in the form of a coil to surround the outer surface of the upper end of the outer liner 111a.

The operation of the high-frequency induction heating apparatus according to an embodiment of the present invention configured as described above will be described.

When current is applied to the induction heating member 120 from an external current transformer or a power source such as a transformer, the induction heating member 120 generates a high frequency, and the crucible body 110 is heated by the high frequency. The temperature of 110 rises.

In addition, when the temperature of the crucible body 110 is heated to a set temperature, the liquid deposition material accommodated in the inner crucible 113 is heated and vaporized.

At this time, the temperature of the crucible body 110 is controlled by controlling the intensity of the current applied to the induction heating member 120. For example, as the intensity of the current applied to the induction heating member 120 increases, the temperature of the crucible body 110 increases.

In addition, the vaporized deposition material vaporized in the inner crucible 113 is supplied to the deposition facility through the discharge pipe 113c.

In the high-frequency induction heating apparatus 100 according to the present invention, the inner crucible 113 for receiving the liquid deposition material and the crucible housing 111 for heating the inner crucible 113 Since it is made of a different material and installed in a double structure, it is possible to quickly heat the inner crucible 113 while reducing heat loss.

In addition, in the high frequency induction heating apparatus 100 according to the present invention, since the inner crucible 113 accommodating the deposition material is formed of metal, it is possible to prevent the deposition material from being contaminated by foreign materials when the deposition material is heated. do.

In summary, in the high-frequency induction heating apparatus 100 according to the present invention, the outer liner 111a is formed of quartz, the thermally conductive heater 111b is made of graphite, and the inner crucible 113 is formed of metal. Since it has a triple structure, it is possible not only to shorten the heating time of the evaporation material while reducing heat loss, but also to properly maintain the heated temperature of the crucible body 110, thereby improving thermal efficiency. .

In particular, in the high frequency induction heating apparatus 100 according to the present invention, since the inner crucible 113 made of metal can be detached from the crucible housing 111, when the deposition material is changed, the inner crucible ( 113) can be separated and washed, and then reused.

Next, a high-frequency induction heating apparatus according to another embodiment of the present invention will be described with reference to FIGS. 7 and 8.

7 is a perspective view illustrating a high frequency induction heating apparatus according to another embodiment of the present invention, and FIG. 8 is a cross-sectional view illustrating a high frequency induction heating apparatus according to another embodiment of the present invention.

In describing a high-frequency induction heating device according to another embodiment of the present invention, the same reference numerals are used for configurations that are the same as those of the high-frequency induction heating device according to an embodiment, and a detailed description thereof will be omitted.

The high-frequency induction heating apparatus 100 according to another embodiment of the present invention is formed by dividing a crucible body 110 and an induction heating member 120 that heats the crucible body 110.

For example, the high frequency induction heating apparatus 100 according to another embodiment of the present invention includes a first crucible assembly 130, a second crucible assembly 140, and a third crucible assembly ( 140, and the second crucible assembly 140 and the third crucible assembly 140 are disposed on both sides of the first crucible assembly 130, respectively.

In addition, the high frequency induction heating apparatus 100 according to another embodiment of the present invention includes a first crucible assembly 130, a second crucible assembly 140, and a third crucible assembly 140 divided into three. ) Between each of the shielding plate 160 is provided.

In this way, the deposition of the deposition material that is divided and disposed of the first crucible assembly 130, the second crucible assembly 140, and the third crucible assembly 140 is performed more uniformly. At this time, the first crucible assembly 130, the second crucible assembly 140, and the third crucible assembly 140 are provided with an inner crucible 113 on the outer liner 111a without a heat conduction heater 111b. ) Can be installed right away.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is only illustrative, and those of ordinary skill in the field to which the technology pertains, various modifications and other equivalent embodiments are possible. I will understand.

Therefore, the true technical protection scope of the present invention should be determined by the claims.

100: high frequency induction heating device 110: crucible body
111: crucible housing 111a: outer liner
111b: heat conduction heater 113: inner crucible
113a: container part 113b: nozzle part
113c: discharge pipe 120: induction heating member
130: first crucible assembly 140: second crucible assembly
150: first crucible assembly 160: shielding plate

Claims (10)

A crucible body containing a material for deposition; And
Includes; an induction heating member provided outside the crucible body and generating a high frequency to heat the crucible body,
The crucible body is a high-frequency induction heating apparatus, characterized in that formed to have a structure of at least double walls or more made of the same material or different materials.
The method of claim 1,
The crucible body may include a crucible housing heated by the induction heating member; And
An inner crucible installed inside the crucible housing to receive the deposition material, and formed of the same material or a different material as the crucible housing;
High frequency induction heating device comprising a.
The method of claim 2,
The crucible housing is formed of at least one of ceramics such as quartz, graphite, and composite, metals such as alumina, titanium, and tantalum,
The inner crucible is a high-frequency induction heating apparatus, characterized in that formed of ceramic and metal.
The method of claim 3,
The crucible housing may include an outer liner; And
A heat conduction heater provided between the inner crucible and the outer liner so that the inner crucible is seated, and formed of the same material or a different material as the outer liner to heat the inner crucible through heat conduction;
High frequency induction heating device comprising a.
The method of claim 4,
In the crucible housing, the outer liner is formed of quartz, and the heat conduction heater is formed of any one of ceramic, graphite, and metal.
The method according to any one of claims 2 to 5,
In the crucible main body, the inner crucible is detachably inserted into the crucible housing.
The method of claim 6,
The crucible housing, characterized in that the high-frequency induction heating apparatus having a detachable opening to separate and insert the inner crucible.
The method of claim 6,
The crucible housing is a high-frequency induction heating apparatus, characterized in that the upper surface is opened so as to separate and insert the inner crucible to form a detachable opening.
The method according to any one of claims 2 to 5,
The inner crucible may include: a container part accommodating the deposition material; And
A nozzle part coupled to the container part to seal the container part, and having a discharge pipe through which the deposition material is vaporized and discharged;
High frequency induction heating device comprising a.
The method of claim 9,
The nozzle unit, wherein the discharge pipe is formed to be spaced apart from each other, the separation distance from the central portion of the container unit toward both sides of the high frequency induction heating device, characterized in that formed to have an equal or different separation distance.

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