KR20210017140A - X-ray generator having a cooling means - Google Patents

Abstract

The present invention relates to an X-ray generator having a heat dissipation member, comprising: a housing having an opening on one side thereof, a heat dissipating member seated inside through the opening of the housing and coupled to the other side of the housing, and disposed inside the housing And an insulating case, a cathode electrode disposed on one side of the insulating case and having an emitter for emitting electrons formed thereon, and disposed so as to face the cathode electrode on the other side of the insulating case, and generating X-rays by collision with incident electrons. An X-ray tube comprising an anode electrode on which a target is formed and a gate electrode disposed between the cathode electrode and the anode electrode to control electron emission from the emitter to generate X-rays, and an anode electrode of the X-ray tube It is located at the top and the other side is coupled to the heat dissipating member, and includes a heat pipe filled with air or fluid therein. Such an X-ray generator includes heat generated by a high voltage and/or high current applied for a high-power X-ray tube and heat generated by collisions between electrons emitted from the cathode electrode and the anode target. And a heat dissipation member provided in the X-ray generator housing to improve the heat dissipation effect of the X-ray generator, and even without a separate device such as a pump for circulating air or fluid in the heat pipe, Heat can be discharged to the outside of the X-ray generator, and a pump for circulating air or fluid in the heat pipe is unnecessary, so that the X-ray generator can be miniaturized and lightweight.

Description

X-ray generator with heat dissipation member {X-RAY GENERATOR HAVING A COOLING MEANS}

The present invention relates to an X-ray generator, and more particularly, a heat pipe provided on an anode electrode of an X-ray tube, and heat generated from the anode electrode by connecting one end of the heat fiber to a radiating member of the X-ray generator. The present invention relates to an X-ray generator capable of efficiently discharging to the outside of the X-ray generator.

In general, an X-ray generator is a device that inspects an object or the like in a non-contact or non-destructive manner, and the X-ray generator includes an X-ray tube that generates X-rays by colliding electrons with a predetermined target.

The X-ray tube may be classified into a hot cathode X-ray tube using filaments and a cold cathode X-ray tube using nanostructures such as carbon nanotubes (CNTs), depending on how X-rays are produced.

The hot cathode type X-ray tube needs to raise the tungsten filament to a high temperature of 1000 degrees or more to emit electrons, so additional power is consumed to emit electrons, and since the generated electrons are randomly emitted from the tungsten surface having a spiral structure, X-ray emission There is a problem that the efficiency and focusing performance are significantly deteriorated.

The hot cathode type X-ray tube generates heat by raising the tungsten filament to a high temperature of 1000 degrees or more for electron emission, and heat is generated by the electrons emitted from the filament colliding with the target of the anode electrode. The generated heat deteriorates the performance of the X-ray tube, and there is a problem that the X-ray tube is destroyed.

A conventional X-ray generator for solving this problem is a housing 40, an X-ray tube 50, an insulating oil tank 51, an insulating oil pump 52, a radiator 53, and a fan 54 as shown in FIG. 1. ), a pipe 55 and a high voltage generator 60, and the X-ray tube 50 includes a cathode electrode 1, a filament 2, an anode electrode 3, and a target as shown in FIG. 4), support (5), vacuum enclosure (6), enclosure bonding material (7), cooling nozzle (8), cooling surface (9), insulation pipe (10), side wall inner surface (11), gap (12) , Including a support (13).

In the heat dissipation of the conventional X-ray generator, a hole is drilled on the back side of the target 4 formed on the anode electrode 3 to insert the cooling nozzle 8, and the insulating oil supplied through the insulating pipe 10 is supplied to the cooling surface 9 And cooling the anode electrode 3. The sprayed insulating oil is sent to the radiator 53 provided outside the housing 10 through the gap 12 between the side wall inner surface 11 and the cooling nozzle 8, the support material 5, and the support material 13 to be cooled. Then, the pump 52 is supplied to the X-ray tube again. Heat generated from the anode electrode 3 is radiated from the collision between the electrons emitted from the cathode electrode 1 and the target 4 of the anode electrode 3 by the circulation of the insulating oil.

However, in the conventional X-ray generator, a radiator for cooling the insulating oil and a pump for circulating the insulating oil must be provided outside and braked, so that the volume of the X-ray generator is increased and there is a limit to miniaturization.

In addition, the conventional X-ray generator has a problem in that it cannot dissipate heat generated from the X-ray tube when a pump for circulating insulating oil fails.

In view of these problems, research on field emission type X-ray tubes using nanostructures such as CNTs as a cold cathode electron emission source has been actively conducted in recent years.

The field emission type X-ray tube does not need to increase the temperature in order to emit electrons, so less heat is generated from the X-ray tube. In addition, the field emission type X-ray tube does not cause power loss due to heat compared to the hot cathode type X-ray tube, and since the emitted electrons are emitted along the length of the CNT, the direction of electrons toward the target on the anode side is excellent. X-ray emission efficiency and focusing performance are improved, and electron emission from the hot-cathode type X-ray tube has an electron emission characteristic in accordance with analog due to the unique warm-up time of the filament, but in the case of the field emission type X-ray tube, the above Since a warm-up time is not required, digital driving is possible based on very fast on-off characteristics.

Recently, we are trying to improve production yield through inspection for removing static electricity and particles for display products that are becoming larger in size, and an X-ray generator is used to remove such static electricity and particles. There is an increasing demand for an X-ray generator with high power and fast on-off for irradiating X-rays.

However, when the output of the X-ray tube is increased by applying a high voltage and/or high current for a high-output X-ray tube, high heat is generated from the electrode, and when the X-ray generator is continuously driven to improve the manufacturing yield of the display, the X-ray tube The X-ray tube is driven again before the temperature of the heated anode electrode is lowered by the heat generated by the collision between the electrons emitted from the cathode electrode of and the target of the anode electrode, thereby continuously generating heat in the anode electrode. When a lot of heat is generated in the X-ray tube, the performance of the X-ray tube is deteriorated or the X-ray tube is destroyed.

Accordingly, the present invention takes into account such a problem, by installing a heat pipe above the anode of the X-ray tube, and connecting one end of the heat pipe to a heat dissipating member installed in the housing of the X-ray generator to generate heat generated from the X-ray tube. It provides an X-ray generator capable of emitting radiation.

An X-ray tube generator according to one aspect of the present invention includes a housing having an opening on one side thereof, a heat dissipating member seated inside through the opening of the housing and coupled to the other side of the housing, and disposed inside the housing, and an insulating case , A cathode electrode disposed on one side of the insulating case and having an emitter for emitting electrons, and a target disposed on the other side of the insulating case to face the cathode electrode and generating X-rays by collision with incident electrons An X-ray tube comprising an anode electrode and a gate electrode that is disposed between the cathode electrode and the anode electrode to control electron emission from the emitter, and is positioned above the anode electrode of the X-ray tube. The side is coupled to the heat dissipating member and includes a heat pipe filled with air or fluid therein.

The opening may be formed in a partial region of one of a plurality of surfaces constituting the housing.

The opening may be formed in the entire area of one of a plurality of surfaces constituting the housing.

형, 복수의 오목부와 볼록부가 연결된 형상, 복수의 일자형 관 중 하나의 형상으로 형성된다. The heat pipe is U-shaped, V-shaped,

It is formed in one of a mold, a shape in which a plurality of concave portions and convex portions are connected, and a plurality of straight pipes.

In the X-ray generator of the present invention, heat generated by the high voltage and/or high current applied to the high-power X-ray tube and the heat generated by the collision between the electrons emitted from the cathode electrode and the anode target are provided on the anode electrode. It is discharged to the outside through the pipe and the heat dissipating member provided in the housing of the X-ray generator.

In addition, the X-ray generator of the present invention improves the heat dissipation effect of the X-ray generator through a heat pipe made of a material having good heat conduction.

In addition, the X-ray generator of the present invention can discharge heat generated from the anode electrode to the outside of the X-ray generator without a separate device such as a pump for circulating air or fluid in the heat pipe.

Further, the X-ray generator of the present invention does not require a pump for circulating air or fluid in the heat pipe, and thus the X-ray generator can be miniaturized and lightweight.

1 is a conceptual diagram showing a heat dissipation structure of a conventional X-ray generator.
2 is a cross-sectional view showing a conventional X-ray tube.
3 is a view showing an X-ray generating apparatus according to an embodiment of the present invention.
4 is a diagram illustrating another X-ray generating apparatus according to an embodiment of the present invention.
5 is a cross-sectional view showing an X-ray tube according to an embodiment of the present invention.
6 to 8 are cross-sectional views of a heat pipe shape installed in an X-ray tube according to an embodiment of the present invention.

The features and effects of the present invention described above will become more apparent through the following detailed description in connection with the accompanying drawings, and accordingly, those of ordinary skill in the art to which the present invention pertains can easily implement the technical idea of the present invention. I will be able to. In the present invention, various modifications may be made and various forms may be applied, and specific embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific form disclosed, it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention. The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or a combination thereof described in the specification, but one or more other features or It is to be understood that the presence or addition of numbers, steps, actions, components, parts, or combinations thereof does not preclude the possibility of preliminary exclusion. In addition, in the present application, expressions including top and bottom, such as top, bottom, top, and bottom, are not classified according to absolute height, but represent a relative position centered on the internal space of the device.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

3 to 4 are diagrams showing an X-ray generating apparatus according to an embodiment of the present invention.

3 and 4, the X-ray generator 1000 according to an embodiment of the present invention includes a housing 100, a heat dissipating member 200 provided at one side of the housing, and installed inside the housing. A field emission type X-ray tube 300, a heat pipe 400 connecting the X-ray tube and the heat dissipating member, a high voltage generator 60, and a control unit (not shown).

The housing 100 is made of a metal housing, and an opening 110 for coupling with the heat dissipating member 200 is formed in the housing 100. The opening 110 may be formed in a partial area of one surface of the housing 100 as shown in FIG. 2, or may be formed in the entire area of one surface of the housing 100 as shown in FIG. 3. Inside the housing 100, an X-ray tube 300, a heat pipe 400, a high voltage generator 60, and a control unit (not shown) may be installed. The inner space of the housing 100 may be in a vacuum state or may be filled with insulating oil for insulation and X-ray shielding.

The heat dissipation member 200 is inserted into the opening 110 and is coupled to the other side of the housing. The heat dissipation member 200 may be formed in a partial area of one side of the housing 100 as shown in FIG. 3, or may be formed in the entire area of one side of the housing 100 as shown in FIG. 4. . A method of coupling the heat dissipation member 200 to the housing 1000 may be coupled by brazing and a coupling member such as an adhesive or screw bolt. The heat dissipation member 200 may be formed of a metal plate such as copper having good thermal conductivity, or may be a heat sink having a protrusion.

The X-ray tube 300 is disposed inside the housing 100 and receives power from the high voltage generator 60 to generate X-rays. The configuration of the X-ray tube 300 will be described in detail below.

자형관 등 의 형상으로 형성될 수도 있고, 복수의 오목부와 볼록부가 연결된 형상으로 형성될 수도 있으며, 복수개의 일자형 관으로 형성될 수도 있다. 히트 파이트(400) 내부에는 공기 또는 유체가 채워져 있고 엑스선 튜브(300)에서 열이 발생하면 엑스선 튜브(300)와 연결된 부분의 히트 파이프(400) 내부에 채워진 공기 또는 유체가 열을 전달받고, 열을 전달받은 공기 또는 유체는 대류 현상에 의해 온도가 높은 엑스선 튜브(300)측에서 온도가 낮은 방열부재(200)측으로 이동하여 방열부재(200)에 열을 전달한다. 또한, 방열부재(200)에 의해 냉각된 공기 또는 유체는 방열부재(200)측에서 엑스선 튜브(300) 측으로 이동하게 된다. 히트 파이프(400)는 열전도성이 좋은 재질로 형성되어, 엑스선 튜브(300)에서 발생되는 열을 방열부재(200) 측으로 이동시킨다. 히트 파이프(400)는 아노드 전극(330)의 타겟(332)에 가깝게 상부에 형성된다. 히트 파이프(400)가 타겟(332)에 가깝게 형성되어 전자와 타겟(332)의 충돌에 의해 발생되는 열을 빠르게 외부로 방출시킬 수 있다.The heat pipe 400 is connected to the X-ray tube 300 and the heat dissipating member 200. The heat pipe 400 serves to radiate heat generated from the X-ray tube 300 to the outside of the X-ray generator 1000 through the heat dissipating member 200. The heat pipe 400 is a U-shaped pipe, a V-shaped pipe,

It may be formed in a shape such as a shape tube, may be formed in a shape in which a plurality of concave portions and convex portions are connected, and may be formed as a plurality of straight pipes. The heat pipe 400 is filled with air or fluid, and when heat is generated in the X-ray tube 300, the air or fluid filled in the heat pipe 400 at the portion connected to the X-ray tube 300 receives heat. The air or fluid that has been delivered is moved from the side of the X-ray tube 300 having a high temperature to the side of the heat dissipating member 200 having a low temperature due to a convection phenomenon to transfer heat to the radiating member 200. In addition, the air or fluid cooled by the radiating member 200 moves from the radiating member 200 side to the X-ray tube 300 side. The heat pipe 400 is formed of a material having good thermal conductivity, and moves heat generated from the X-ray tube 300 toward the heat dissipating member 200. The heat pipe 400 is formed on the anode electrode 330 close to the target 332. The heat pipe 400 is formed close to the target 332 so that heat generated by the collision between the electrons and the target 332 can be quickly released to the outside.

The high voltage generator 60 generates a high voltage required for the housing 100 and the X-ray tube 300, and a controller (not shown) controls the driving of the X-ray tube 300. The high voltage generator 60 and the controller (not shown) may be formed inside the housing 100 of the X-ray generator 1000 or outside the housing 100.

5 is a schematic cross-sectional view of an X-ray tube according to an embodiment of the present invention, and FIGS. 6 to 8 are cross-sectional views of a heat pipe shape installed in the X-ray tube according to an embodiment of the present invention.

5 to 8, the X-ray tube 300 according to an embodiment of the present invention includes an insulating case 310, a cathode electrode 320, an anode electrode 330, and a gate electrode 340. Includes.

The insulating case 310 is formed in a cylindrical tube shape, and is formed of an insulating material such as ceramic, glass, or silicon, and the insulating case 310 electrically connects the cathode electrode 320 and the anode electrode 330 to each other. Insulate.

The cathode electrode 320 is disposed on one side of the insulating case 310 and includes an emitter 322 for emitting electrons. The cathode electrode 320 is coupled to one side of the insulating case 310 to seal one side of the insulating case 310, or has a structure disposed inside the insulating case 310.

The emitter 322 is formed on the cathode electrode 320 as an electron emission source emitting electrons. The emitter 322 may be formed on a separate substrate and coupled to the cathode electrode 320, or may be formed directly on the surface of the cathode electrode 320. The emitter 322 may be formed of a number of nanostructures, such as, for example, Carbon Nano Tube (CNT). In the case of forming the emitter 322 with CNT, a number of CNTs are directly grown on the surface of the cathode electrode 320 by using a chemical vapor deposition method (CVD), or a CNT paste is applied and then fired. Can be formed. The emitter 322 may be formed in a pattern shape on at least a portion of the cathode electrode 320, or may be formed in a bulk shape over at least a portion of the cathode electrode 320. When the emitter 322 is formed in a bulk shape, the total area of the emitter 322 is increased and the amount of electrons emitted from the emitter under the same voltage is increased, which reduces the emission burden of individual emitters, thereby greatly increasing the lifetime. It will have an effect. In this case, it is preferable that the predetermined region includes at least all of the plurality of gate holes 342 formed in the gate electrode 340 in order to improve electron emission efficiency.

The anode electrode 330 is disposed on the other side of the insulating case to face the cathode electrode 120. The anode electrode 330 may be coupled to the other side of the insulating case 310 to seal the other side of the insulating case 310 with a vacuum, or may have a structure disposed inside the sealed insulating case 310.

The anode electrode 330 is formed by a collision between the target 332 generating X-rays by collision with electrons incident from the cathode electrode 320, and the target 322 with electrons incident from the cathode electrode 320. It includes a heat pipe 400 for dissipating heat generated from the anode electrode 330.

The target 332 is formed on the surface of the anode electrode 330 and generates X-rays by collision with electrons emitted from the emitter 322. The target 322 may be formed separately from the anode electrode 320 and may be coupled through brazing or the like, or the anode electrode 320 itself may serve as a target. The target 322 may be made of tungsten (W), copper (Cu), cobalt (Co), chromium (Cr), iron (Fe), silver (Ag), tantalum (Ta), or yttrium (Y). It is preferably made of tungsten having a high melting point and excellent X-ray emission efficiency.

’자관으로 형성되고 ‘

’자 형상 부분이 아노드 전극(330) 내부에 설치되며 히트 파이프의 끝단이 방열 부재(200)에 연결된다. 히트 파이프(400) 내부에는 아노드 전극(330)의 냉각을 위한 공기 또는 유체가 채워져 있다. 아노드 전극(330)에서 열이 발생하게 되면 아노드 전극(330) 내부에 설치된 히트 파이프(400) 내의 공기 또는 유체가 가열되고, 가열된 공기 또는 유체는 대류 현상에 의해 방열부재(200) 쪽으로 이동하게 되며, 방열부재(200)에 의해 냉각된 공기 또는 유체가 아노드 전극(330) 쪽으로 이동하여 아노드 전극(330)을 냉각시킨다. 즉, 엑스선 튜브(300)에서 발생되는 열은 히트 파이프(400)를 이루는 재질 및 히트 파이프(400) 내부에 채워진 공기 또는 유체를 통해 방열부재(200)으로 이동된다.The heat pipe 400 is installed on the anode electrode 330 and generates heat generated from the X-ray tube 300 such as heat generated from the anode electrode 330 due to collision between electrons and the target 332. It performs a role of transmitting to the heat dissipation member 200 installed in 1000). The heat pipe 400 formed of a material having good thermal conductivity is'

'It is formed by self-gwan'

The'shaped part is installed inside the anode electrode 330 and the end of the heat pipe is connected to the heat dissipating member 200. Air or fluid for cooling the anode electrode 330 is filled inside the heat pipe 400. When heat is generated from the anode electrode 330, air or fluid in the heat pipe 400 installed inside the anode electrode 330 is heated, and the heated air or fluid is directed toward the heat dissipating member 200 by convection. The air or fluid cooled by the heat dissipating member 200 moves toward the anode electrode 330 to cool the anode electrode 330. That is, heat generated from the X-ray tube 300 is transferred to the heat dissipating member 200 through a material forming the heat pipe 400 and air or fluid filled in the heat pipe 400.

’자관 형상으로 형성될 수도 있고, 'U'자관, 'V'자관 등 다양한 형상으로 형성될 수도 있다. 또한, 히트 파이프(400)는 도 6에 도시된 바와 같이 일자형 관이 복수개 형성될 수도 있고, 도 7에 도시된 바와 같이 복수의 오목부와 볼록부를 갖도록 형상될 수도 있다. 또한, 히트 파이프(400)는 도 8에 도시된 바와 같이 아노드 전극(330) 내부에 설치되지 않고, 아노드 전극(330) 표면에 결합되어 아노드 전극(330)에서 발생하는 열을 방열부재(200) 측으로 이동시킬 수도 있다.As shown in Figure 5, the heat pipe 400 is'

It may be formed in the shape of a'magnetic tube,' or may be formed in various shapes such as a'U' tube and a'V' tube. In addition, the heat pipe 400 may have a plurality of straight pipes as shown in FIG. 6 or may be shaped to have a plurality of concave portions and convex portions as shown in FIG. 7. In addition, the heat pipe 400 is not installed inside the anode electrode 330 as shown in FIG. 8, but is coupled to the surface of the anode electrode 330 to dissipate heat generated from the anode electrode 330. It can also be moved to the 200 side.

When an external voltage is applied from an external power supply to each electrode of the X-ray tube 300, a high potential difference of tens to several hundreds kV is formed between the cathode electrode 320 and the anode electrode 330. Accordingly, electrons emitted from the emitter 122 are accelerated in the direction of the anode electrode 330 due to the electric field effect formed in the electric potential difference between the cathode electrode 320 and the anode electrode 330, and contact with the target 322. X-rays are generated by collision.

The gate electrode 340 is disposed between the cathode electrode 320 and the anode electrode 330. The gate electrode 340 is disposed close to the emitter 322 as an electron emission source to form an electric field that initiates electron emission. A plurality of gate holes 342 are formed in the gate electrode 340 to allow electrons emitted from the emitter 322 to pass therethrough.

The X-ray tube 300 may further include a focusing electrode (not shown) that forms an electric field between the gate electrode 340 and the anode electrode 330 for focusing electrons passing through the plurality of gate holes 342. have.

In the detailed description of the present invention described above, it has been described with reference to preferred embodiments of the present invention, but those skilled in the art or those of ordinary skill in the art will have the spirit of the present invention described in the claims to be described later. And it will be appreciated that various modifications and changes can be made to the present invention within a range not departing from the technical field.

40: housing 50: X-ray tube
51: insulating oil tank 52: insulating oil pump
53: radiator 54: fan
55: pipe 60: high voltage generator
100: housing 110: opening
200: radiating member 300: X-ray tube
310: insulating case 320: cathode electrode
322: emitter 330: anode electrode
332: target 340: gate electrode
342: gate hole 400: heat pipe
1000: X-ray generator

Claims (4)

A housing having an opening on one side;
A heat dissipating member seated inside through the opening of the housing and coupled to the other side of the housing;
Arranged inside the housing, an insulating case, a cathode electrode disposed on one side of the insulating case and having an emitter for emitting electrons formed thereon, and disposed opposite the cathode electrode on the other side of the insulating case, and colliding with incident electrons An X-ray tube comprising an anode electrode on which a target for generating X-rays is formed and a gate electrode disposed between the cathode electrode and the anode electrode to control electron emission from the emitter to generate X-rays to the outside;
And a heat pipe positioned above the anode electrode of the X-ray tube and coupled to the heat dissipating member on the other side, and filled with air or fluid therein. The method of claim 1,
The opening is a field emission type X-ray generator, characterized in that formed in a partial region of one of a plurality of surfaces constituting the housing. The method of claim 1,
The opening is a field emission type X-ray generator, characterized in that formed in the entire area of one of the plurality of surfaces constituting the housing. The method of claim 1,
The heat pipe is U-shaped, V-shaped,

A field emission type X-ray generator, characterized in that it is formed in one of a shape, a shape in which a plurality of concave portions and convex portions are connected, and a plurality of straight pipes.

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