KR20160087953A - Cluster type evaporation device for manufacturing of OLED - Google Patents

Abstract

A cluster type deposition apparatus for fabricating an organic light emitting device includes a loading chamber for supplying a substrate for an organic light emitting device, a transport chamber And a plurality of clusters each having a plurality of process chambers disposed around the transfer chamber for performing deposition by receiving a substrate from the loading chamber and connected to a buffer chamber for transporting and rotating the substrate, A substrate support for supporting a substrate is provided on both sides of the process chamber, and an evaporation source for reciprocating the lower region of the substrate supports for depositing organic substances on the substrate is provided on the bottom of the process chamber, The transfer unit includes a substrate holder, a polygonal joint for connecting the tip of the substrate holder to the substrate holder, Wherein one end of the link is connected to the center of the transfer chamber and the other end of the link is connected to the rear end of the link and the tip and the rear end of the link are perpendicular to the moving direction of the evaporation source And a pivotal link which is disposed on the transfer line.

Description

[0001] The present invention relates to a cluster type evaporation device for manufacturing an OLED,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cluster type deposition apparatus for manufacturing an organic light emitting diode, and more particularly, to a cluster type deposition apparatus for manufacturing an organic light emitting diode, in which a plurality of process chambers, a buffer chamber and a stack chamber are disposed around a single transfer chamber, To a cluster type deposition apparatus for manufacturing an organic light emitting device.

BACKGROUND ART An organic electroluminescent display device is a self-luminous display device having a wide viewing angle, excellent contrast, and fast response speed, and has been attracting attention as a next generation display device.

As is generally known, an organic electroluminescent device provided in an organic light emitting display includes first and second electrodes (an anode electrode and a cathode electrode) facing each other and an intermediate layer formed between the electrodes, Layers may be provided, which may include, for example, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, or the like.

The organic thin film or electrodes such as the hole injection layer, the hole transporting layer, the light emitting layer, the electron transporting layer, and the electron injecting layer formed on the substrate may be formed by a deposition method using a deposition apparatus As shown in FIG.

The organic material deposition method is generally implemented by mounting a substrate in a vacuum chamber, and then heating a heating container containing a substance to be vaporized to evaporate or sublimate the substance to be vaporized therein. That is, a shadow mask having an opening similar to the shape of the organic material pattern to be formed on the substrate is aligned in front of the substrate, and the organic material is evaporated or sublimated on the substrate to deposit the organic thin film or the like on the substrate.

In order to perform the organic material deposition process on the substrate, a process chamber for performing an organic material deposition process on the substrate, a transfer chamber for transferring and discharging the substrate to the process chamber, and a transfer chamber for loading / unloading There is a need for an organic deposition system composed of a loading / unloading chamber or a load lock chamber.

In recent years, efforts have been made to increase the deposition rate of organic materials on a substrate by loading two substrates in the process chamber and simultaneously or sequentially performing an organic material deposition process on the two substrates.

FIG. 1 is a plan view of a conventional organic material deposition system, and FIG. 2 is a front view of a process chamber for performing an organic material deposition process on two substrates.

1 and 2, a conventional general organic material deposition system includes loading / unloading chambers 1a and 1b disposed at both ends of a manufacturing process for loading or unloading a substrate P, And a plurality of clusters 2 arranged in a line between the first substrate 110a and the unloading chamber 110b and each of the clusters 2 includes a processing chamber 120 And a transfer chamber 130 for transferring the substrate P into and out of the process chamber 120.

An opening / closing door is provided between the loading / unloading chambers 110a and 110b and the transfer chamber 130. An opening / closing door is also provided between the transfer chamber 130 and the process chamber 120 to maintain the vacuum state So that the substrate P can be transported.

121b supporting the substrate P are disposed on both sides of the inside of the process chamber 120 and on both sides of the substrate support 121a and 121b for depositing organic substances on the substrate P, The evaporation source 122 reciprocating in a lower region of the substrate support bases 121a and 121b is configured to reciprocate in the horizontal direction in the lower region of the substrate support bases 121a and 121b by the conveying means 123. [

Organic materials evaporated in the organic material evaporation source 122 disposed on the bottom side of the process chamber 120 are deposited on the two substrates P transferred in the process chamber 120 having the above-described structure.

Accordingly, the organic thin films can be simultaneously or sequentially deposited on the two substrates P supported on the substrate supporters 121a and 121b disposed on one side and the other side in the process chamber 120. [

The two substrates P transferred to the process chamber 120 are transferred by a transfer unit 140 disposed inside the transfer chamber 130. The transfer unit 140 is connected to the rear end 141, Is rotatably installed at the center of the transfer chamber 130 and the substrate holder 144 of the distal end portion 143 is moved back and forth from the center point C1 of the transfer chamber 130 while the joint portion 142 is folded . Therefore, the substrate P conveyed by the conveying unit 140 is moved forward and backward radially from the center point C1 of the conveying chamber 130.

Therefore, the substrate P is disposed inside the process chamber 120 in parallel with the direction in which the substrate P is carried in and out by the forward and backward movement of the transfer unit 140, or in the direction parallel to the moving direction of the evaporation source 122 A rotating unit 124 for rotating the substrate supports 121a and 121b is provided.

That is, in the conventional deposition apparatus, in the process of loading or unloading the substrate P into or out of the process chamber 120, the substrate P is moved in the direction A1 in which the evaporation source 122 moves, 121b in the process chamber 120 where the process equipment and process control are complicated and the deposition is performed since the robot arm needs to be rotated in parallel to the direction of rotation There is a problem in that the maintenance unit is required to be additionally provided so as not to deposit the evaporation material in the rotation unit 124 and the maintenance item is increased.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to solve the above-mentioned problems, and it is an object of the present invention to provide a process chamber And a clustering type deposition apparatus for manufacturing an organic light emitting device.

Another object of the present invention is to provide a clustering type deposition apparatus for manufacturing an organic light emitting device which can freely design clusters constituting process equipments by making the substrate carry / unload direction of the process chamber not be directed toward the center of the transfer unit.

In addition, since the structure for aligning the moving direction of the transfer unit and the loading / unloading direction of the substrate in the process chamber can be omitted in the conventional process, process and process control are simplified, and the entire manufacturing process line is stopped, The present invention provides a cluster type deposition apparatus for manufacturing an organic light emitting device, which can minimize maintenance items to be released.

According to the present invention, the above objects can be accomplished by a substrate processing apparatus comprising: a loading chamber for supplying a substrate for an organic light emitting element; a transfer chamber having a transferring unit for transferring a substrate; And a plurality of clusters each having a plurality of process chambers disposed in the process chambers and connected to a buffer chamber for transporting and rotating the substrates, wherein a substrate support for supporting the substrates is provided on both sides of the process chamber, And a transfer unit for transferring the substrate to the substrate holder, wherein the transfer unit comprises: a substrate holder; and a plurality of joints, each of which is connected to the substrate holder, Link, one end connected to the center of the transfer chamber and the other end connected to the rear end of the multi-joint link, And a pivotal link that allows the tip and the rear end of the link to be disposed on a transfer line of the substrate perpendicular to the moving direction of the evaporation source from the front center of the substrate supporter.

Here, the rear end portion of the multi-joint link rotates in a direction opposite to the rotation direction of the pivotal link with respect to the rotation of one end of the pivotal link, and the rotation angle of the rear end portion of the multi-joint link rotates at the same angle as the rotation angle of the pivotal link desirable.

In addition, it is preferable that a plurality of the process chamber and the stock chamber are arranged along the circumference of the transfer chamber.

According to the present invention, there is provided a cluster-type deposition apparatus for manufacturing an organic light-emitting device capable of reducing the total length of process equipment for manufacturing organic light emitting devices by disposing a plurality of process chambers, buffer chambers and stack chambers around a single transfer chamber.

Further, since the multi-joint link of the transfer unit can be moved from the center of the transfer chamber by the pivotal link and disposed on the front surface of the both side substrate supports of the process chamber, the substrate loading / unloading direction of the process chamber is directed toward the center of the transfer unit Therefore, a clustering type deposition apparatus for manufacturing an organic light emitting device is provided in which clusters constituting process equipments can be freely designed.

In addition, since the structure for aligning the moving direction of the transfer unit and the loading / unloading direction of the substrate in the process chamber can be omitted in the conventional process, process and process control are simplified, and the entire manufacturing process line is stopped, There is provided a cluster type deposition apparatus for manufacturing an organic light emitting element capable of minimizing maintenance items to be released.

1 is a plan view of a conventional general organic material deposition system,
FIG. 2 is a front view of a process chamber for performing an organic material deposition process on two substrates,
FIG. 3 is an operation diagram showing a substrate alignment process of a conventional process chamber,
4 is a plan view of a cluster-type deposition apparatus for manufacturing an organic light-
FIG. 5 is an enlarged view of a cluster according to the cluster-type deposition apparatus for manufacturing an organic light-
6 is a front view of a process chamber according to the cluster type deposition apparatus for manufacturing an organic light emitting device of the present invention,
FIG. 7 is an operation diagram illustrating a substrate loading / unloading process of a process chamber according to the cluster type deposition apparatus for manufacturing an organic light emitting device of the present invention.

Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

Hereinafter, a cluster type deposition apparatus for manufacturing an organic light emitting diode according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 4 is a plan view of a cluster type deposition apparatus for manufacturing an organic light-emitting device according to the present invention, FIG. 5 is an enlarged view of a cluster type deposition apparatus for manufacturing an organic light- FIG. 7 is a front view of a process chamber according to a deposition apparatus; FIG.

As shown in FIG. 1, the deposition apparatus according to the present invention includes loading / unloading chambers 10a and 10b disposed at both ends to supply and recover a substrate P for manufacturing an organic light emitting device, And a plurality of clusters 20 disposed between the loading / unloading chambers 10a and 10b so as to process the substrate P supplied from the processing chambers 10a and 10a for each manufacturing process. Although four clusters 20 are shown in FIG. 4, the number of clusters 20 can be increased or decreased as needed.

Each cluster 20 is composed of a transfer chamber 21, a process chamber 22, a stack chamber 23, and a buffer chamber 24.

The transfer chamber 21 is located in the central portion of the cluster 20 and is connected to the loading / unloading chambers 10a and 10b or the neighboring clusters 20 via the buffer chamber 24. The substrate P is transported by a plurality of process chambers 22 disposed in the periphery of the transport chamber 21 by a transport unit 25 disposed at the center of the transport chamber 21, Thin films are deposited in order.

One or more process chambers 22 are present per cluster 20 and are located around the transfer chamber 21. Each of the process chambers 22 is provided with a different type of evaporation source for depositing different evaporation layers on the substrate P. [

The inside of the process chamber 22 is maintained in a vacuum state and both sides of the inside of the process chamber 22 are provided with substrate supports 221a and 221b for supporting the substrate P, The evaporation source 222 is reciprocally moved in the horizontal direction by the driving means 223 in the lower region of the substrate supports 221a and 221b for depositing the organic material on the substrate support bases 221a and 221b.

In the cluster type deposition apparatus for fabricating an organic light emitting diode according to the present invention, a plurality of process chambers 22, a buffer chamber 24, and a stack chamber 23 are disposed around a single transfer chamber 21, The length of process equipment can be reduced.

The process chamber 22 is constructed such that the evaporation source 222 reciprocates in the direction normal to the process chamber on the inner bottom surface and the substrate supports 221a and 221b on both sides of the process chamber 22 are arranged such that one side of the substrate P When the substrate P is carried in / out from the front of the substrate support bases 221a and 221b, the transport direction of the substrate P is shifted to the center of the transport chamber 21 .

The transfer line for loading / unloading the substrate P to / from the both-side substrate supporters 221a and 221b includes a substrate P which is orthogonal to the transfer direction of the evaporation source 222 from the front center of the one-side substrate supporter 221a, The substrate transfer line L1 of the one substrate support 221a and the substrate transfer line perpendicular to the transfer direction of the evaporation source 222 from the front center of the other substrate support 221b The substrate transfer line L1 of the one substrate support 221a and the substrate transfer line L2 of the other substrate support 221b are connected to the transfer chamber 21, Are arranged on both sides in parallel with each other with respect to the center of the frame.

The buffer chamber 24 and the stack chamber 23 provided around the transfer chamber 21 together with the process chamber 22 transfer the substrate P in the transfer direction of the substrate P for transferring / And intersects with the center point C1 of the chamber 21. [

5, the transfer unit 25 is connected to the substrate transfer lines L1 and L2 of the one substrate support 221a and the other substrate support 221b of the process chamber 22, 244 and the stack chamber 23 and includes a substrate holder 251 and forward and backward multi-joint links 252 connected to the substrate holder 251 at the distal end 252a, One end portion 253a is connected to the center of the transfer chamber 21 and the other end portion 253b is connected to the rear end portion 252b of the poly link link 252 so that the poly link link 252 is connected to the substrate support 221a And 221b on the line orthogonal to the moving direction of the evaporation source 222. The rotation link 253 is disposed on a line orthogonal to the moving direction of the evaporation source 222 from the front center of the evaporation sources 221 and 221b.

A process of loading / unloading the substrate P into / from the process chamber 22 using the transfer unit 25 is as follows.

7 to 10 are views illustrating the process of loading / unloading the substrate P of the process chamber 22 according to the cluster type deposition apparatus for manufacturing the organic light emitting device of the present invention.

7, in the state where the distal end portion 252a and the rear end portion 252b are disposed on the substrate transfer line L1 of the one-side substrate support 221a, the poly- The rotation of the joint 252c causes the substrate holder 251 of the distal end portion 252a to move from the inner space of the transfer chamber 21 along the substrate transfer line L1 to the substrate support 221a inside the process chamber 22 Or the substrate holder 251 of the distal end portion 252a is moved back from the substrate support 221a inside the process chamber 22 to the inner space of the transfer chamber 21.

8, the rotation link 253 of the transfer unit 25 is moved to the process chamber (not shown) to transfer the substrate P to or from the other substrate support 221b of the process chamber 22 Joint link 252 rotates together with the pivotal link 253 in the inner space of the transfer chamber 21 when the one substrate support 221a of the transfer chamber 22 is rotated from the other substrate support 221b toward the other substrate support 221b. The rotation angle A of the pivot link 253 is set such that the other end 253b of the pivot link 253 connected to the rear end 252b of the multi- Is set to an angle from a point intersecting the line L1 to a point intersecting the substrate transfer line L2 of the other substrate support 221b.

9, the rear end 252b of the multi-joint link 252 connected to the other end 253b of the pivot link 253 rotates in the direction opposite to the pivot link 253, (252) is arranged on the substrate transfer line (L2) of the other substrate support base (221b). At this time, the rotational angle A of the rear end 252b of the articulated link 252 connected to the other end 253b of the rotational link 253 is smaller than the rotational angle A of the one end 253a of the rotational link 253, (A). When the rear end portion 252b of the articulated link 252 connected to the other end portion 253b of the tilting link 253 rotates in the direction opposite to the one end portion 253a of the tilting link 253, The rotation centers of the front end portion 252a and the rear end portion 252b of the second substrate support base 221b are respectively disposed on the substrate transfer line L2 of the other substrate support base 221b.

10, when the middle joint 252c of the multi-joint link 252 is driven to rotate, the substrate holder 251 connected to the distal end 252a of the multi-joint link 252 is moved to the other substrate support 252. In this state, The substrate P can be carried in or out of the other substrate support 221b by advancing or retracting on the substrate transfer line L2 of the second substrate support 221b.

8 and 9, the rotation of the one end 253a of the rotation link 253 and the rotation of the rear end 252b of the articulated link 252 are sequentially performed in order to understand the driving of the rotation link 253 It is preferable that one end 253a of the pivot link 253 connected to the center of the transport chamber 21 and the rear end 252b of the multi-joint link 252 are simultaneously driven to rotate.

In this embodiment, in the state where the transfer unit 25 is positioned in the substrate transfer direction L1 of one substrate support 221a of the process chamber 22, the transfer unit 25 is moved in the substrate transfer direction L2 of the other substrate support 221b It is to be understood that the present invention is not limited to such a driving sequence. That is, in order to smoothly perform the deposition process, the substrate P is carried into the transfer chamber 21 from the buffer chamber 24 located at one side to transfer the substrate P to the one substrate support 221a of the process chamber 22 The substrate P is carried into the transfer chamber 21 from one buffer chamber 24 and transferred to the other substrate support 221b of the process chamber 22, The substrate P is transferred from the one substrate support 221a to the other buffer chamber 24 and the substrate P is transferred from the other substrate support 221b to the substrate P, And to transfer the substrate P to the other buffer chamber 24, as shown in FIG.

Similarly, when a mask disposed in the process chamber 22 is to be replaced, a mask is taken out of the stack chamber 23 located at one side of the transfer chamber 21 using the transfer unit 25, It is also possible to bring the mask in the process chamber 22 into the stack chamber 23 by bringing the mask in the process chamber 22 into the side of the substrate supports 221a and 221b.

According to the present embodiment, since the substrate P or the mask can be transferred using one transfer unit 25 in the process of depositing the substrate P and the process of exchanging the mask, the process equipment can be simplified .

Particularly, the multi-joint link 252 of the transfer unit 25 can be moved from the center of the transfer chamber 21 by the pivotal link 253 to be disposed on the front side of the both side substrate supports 221a and 221b of the process chamber Therefore, the substrate P loading / unloading direction of the process chamber 22 need not be directed to the center of the transfer unit. Therefore, the design of the cluster 20 constituting the process equipment becomes free, and the rotation unit for aligning the moving direction of the transfer unit and the loading / unloading direction of the substrate in the process chamber can be omitted in the conventional process, Maintenance items that require the process line to be shut down and the vacuum in the process chamber 22 to be released must be minimized.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

10a, 10b: loading / unloading chamber, 20a, 20b, 20c, 20d: cluster,
21: transfer chamber, 22: process chamber, 221a, 221b: substrate support,
222: evaporation source, 223: transfer means, 23: stack chamber, 24: buffer chamber,
25: transfer unit, 251: substrate holder, 252: articulated link, 252a:
252b: rear end portion, 252c: middle joint portion, 253: rotation link, 253a: one end portion,
253b: the other end, S: substrate,

Claims (3)

A loading chamber for supplying a substrate for an organic light emitting device;
A transfer chamber having a transferring unit for transferring a substrate, and a plurality of process chambers arranged around the transfer chamber for performing deposition by receiving a substrate from the loading chamber, the transfer chamber being connected to a buffer chamber for transferring and rotating the substrate, A plurality of clusters,
Wherein a substrate support for supporting the substrate is provided on both sides of the process chamber, and an evaporation source for reciprocating the lower region of the substrate supports for depositing organic substances on the substrate is provided on the bottom of the process chamber,
Wherein the transfer unit comprises a substrate holder and a forward / backward multi-joint link having a distal end connected to the substrate holder, one end connected to the center of the transfer chamber and the other end connected to a rear end of the multi- And a pivotal link for allowing the tip and the rear end of the substrate to be disposed on a transfer line of the substrate orthogonal to the moving direction of the evaporation source from the front center of the substrate support. The method according to claim 1,
Wherein the rear end of the multi-joint link rotates in a direction opposite to the rotation direction of the rotation link with respect to the rotation of the one end of the rotation link, and the rotation angle of the rear end of the multi-joint link rotates at the same angle as the rotation angle of the rotation link. Wherein the clad type deposition apparatus for forming an organic light emitting element comprises: 3. The method of claim 2,
Wherein the plurality of process chambers and the stock chambers are disposed along the periphery of the transport chamber.

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