KR20150095053A - Validity verification apparatus of product inspection and method thereof - Google Patents

Abstract

An apparatus and method for validating a product inspection are provided. An apparatus for verifying the validity of a product inspection according to an embodiment of the present invention is an apparatus for verifying the validity of a product inspected whether or not a defect inspection of a product conveyed by a conveyor is valid, A plurality of image processing modules each for detecting defect information of the product based on the defect information and for determining whether the product is defective according to the defect information to generate an individual inspection result value; A central processing module for generating a final inspection result value by summing the individual inspection result values and generating total defect information by summing up each defect information; And a validity checking module for displaying the total defect information on one image and verifying the validity of the final inspection result value by comparing with the previously stored inspection standard.

Description

TECHNICAL FIELD [0001] The present invention relates to an apparatus and method for verifying product validation,

The present invention relates to an apparatus and method for verifying the validity of a product inspection, and more particularly, to an apparatus and method for verifying the validity of a product inspection, which can confirm whether the inspection has been effectively performed after inspection of the product.

Substrates, wafers, etc., which are widely used in the electronic industry, are detected by a tester. For example, the product to be inspected is photographed with a camera to classify the product as a good product or a defective product.

Set the product to be inspected in the inspection machine, manipulate the parameters and inspect it. However, there was an inconvenience in that the product was taken out of the equipment and placed on a microscope or a magnifying glass to check whether the inspection defect was normal or not. In addition, when the vision setting is not normally verified, a series of automated tasks are started to produce the product according to the automatic operation, causing an inspection error of the manufactured product, and deteriorating the detecting ability and yield of the inspection device. For this reason, the detection ability and yield of the inspection apparatus are influenced by the operator of the first-class inspection equipment, and it takes a lot of time to train the operator of the inspection apparatus of the beginning level.

Korea Open Patent No. 2012-0108215 (Published on May 10, 2012) Japanese Unexamined Patent Publication No. 2008-215827 (disclosed on September 18, 2008) US Publication No. US2013 / 0279796 (published October 24, 2013)

An object of the present invention is to provide an apparatus and method for verifying the validity of a product inspection, which can confirm whether the inspection of the product is valid.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to another aspect of the present invention, there is provided an apparatus for verifying the validity of a product inspection, the apparatus verifying whether or not a defect inspection of a product conveyed by a conveyor is valid, A plurality of image processing modules each for detecting defect information of the product on the basis of an image photographed by a camera, for determining whether the product is defective according to the defect information, and generating an individual inspection result value; A central processing module for generating a final inspection result value by summing the individual inspection result values and generating total defect information by summing up each defect information; And a validity checking module for displaying the total defect information on one image and verifying the validity of the final inspection result value by comparing with the previously stored inspection standard.

According to another aspect of the present invention, there is provided a method of validating a product inspection, comprising: obtaining an image of a product to be inspected, defect information of the product and individual inspection result values of the product; Summing the individual inspection result values to generate a final inspection result value of the product, and summing the defect information to generate total defect information; Displaying the total defect information on a master image of the product; Verifying whether the final inspection result value is an intrinsic defect or a false defect based on the displayed defect information; And reassigning the product by resetting the final inspection result value based on the verification result.

Other specific details of the invention are included in the detailed description and drawings.

According to the present invention, it is possible to verify whether the inspection of a specific product has been effectively performed, and accordingly, the automatic run mode can be continuously tested by continuously changing to the Auto Run mode.

In addition, it is possible to check the setting of the inspection parameters and the errors of the setting values before the auto run mode, thereby improving the reliability of the inspection equipment.

1 is a view showing a product inspection on a conveyor.
2 is a block diagram of an apparatus for verifying the validity of a product inspection according to an embodiment of the present invention.
FIG. 3 is a block diagram showing devices connected to the validity checking device of the product inspection of FIG. 2. FIG.
4 is a view showing the position of the sensor module of the device for verifying the validity of the product inspection of Fig.
Fig. 5 is a view showing a beam pattern and an output profile of the sensor module of the apparatus for verifying the validity of the product inspection of Fig. 2. Fig.
6 is a detailed block diagram of the image processing module of the apparatus for verifying product validity shown in FIG.
7 is a detailed block diagram of the central processing module of the apparatus for verifying the validity of the product inspection of FIG.
FIG. 8 is a view for explaining a re-examination process of the apparatus for verifying the validity of the product inspection of FIG. 2. FIG.
FIG. 9 is a detailed block diagram of the validation module of the validation device for product inspection of FIG. 2; FIG.
10 is a diagram showing an image acquired by the apparatus for verifying the validity of the product inspection of FIG.
11 is a flowchart showing a procedure of a method for verifying the validity of a product inspection according to an embodiment of the present invention.
FIG. 12 is a flowchart showing a procedure of a product inspection method in the case of the Auto Run mode after performing the method for verifying the validity of the product inspection according to the embodiment of the present invention shown in FIG.
FIG. 13 is a diagram illustrating an operation sequence of a method for validating a product inspection according to an embodiment of the present invention shown in FIG.
FIG. 14 is a diagram illustrating an operation sequence of the product inspection method in the case of the Auto Run mode after performing the method for validating the product inspection according to the embodiment of the present invention shown in FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Although the first, second, etc. are used to describe various elements, components and / or sections, it is needless to say that these elements, components and / or sections are not limited by these terms. These terms are only used to distinguish one element, element or section from another element, element or section. Therefore, it goes without saying that the first element, the first element or the first section mentioned below may be the second element, the second element or the second section within the technical spirit of the present invention.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, the terms "comprises" and / or "made of" means that a component, step, operation, and / or element may be embodied in one or more other components, steps, operations, and / And does not exclude the presence or addition thereof.

Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

1 is a view showing a product inspection on a conveyor. 2 is a block diagram of an apparatus for verifying the validity of a product inspection according to an embodiment of the present invention.

1, a product P is conveyed to a conveyor 11, and a grab sensor 142 senses the product P, and a camera 21 located at an upper portion of the conveyor 11 senses the product P P, and analyzes the photographed image to detect a defect in the product P. Here, the grab sensor 142 is a sensor for capturing an image. The grab sensor 142 captures an image taken by the camera 21 every time a product P conveyed from the conveyor 11 is sensed, Stop. At this time, when the image is acquired, the illumination device 27 is installed in various ways according to defects of the product P to be inspected. When the image processing module 110 receives an instruction to acquire an image from the grab sensor 142, the illumination device 27 and the camera 21 are synchronized to acquire an image.

2, an apparatus 100 for verifying the validity of a product inspection according to an embodiment of the present invention verifies whether a defect inspection of a product P conveyed by a conveyor 11 is valid, Module 110, central processing module 120, validation module 130, sensor module 140, display module 150, and the like. Here, the product P may include all products capable of confirming the defect based on the image obtained by the camera 21, such as a substrate, a wafer, and the like. Preferably, the product P may be a glass for display of a mobile device such as a smart phone.

Specifically, an apparatus for verifying the validity of a product inspection 100 according to an exemplary embodiment of the present invention is a device for verifying the validity of a product (product) (P) of the product (P), respectively, and generates individual inspection result values by judging whether or not the product (P) is defective according to the defect information. The central processing module (120) (P) by summing the individual inspection result values obtained from the respective defect information (110-1, 110-2, ..., 110-n) And displays the whole defect information on the display module 150 as one image by the validation module 130. The validity of the final inspection result value is verified by comparing the defect information with a previously stored inspection standard. It will be apparent to those skilled in the art that the image processing module 110, the central processing module 120, and the validity verification module 130 may be implemented as respective modules as well as a single module. An apparatus 100 for verifying the validity of a product inspection according to an embodiment of the present invention is a device for verifying the validity of a product inspected by a plurality of sensor modules 140 so that each camera 21 can detect a product P, Detects the glass conveyed by the conveyor 11 to photograph, and displays the defective information on the image by the display module 150.

The operation of the apparatus for verifying the validity of a product inspection 100 according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2. The product P includes a camera 21 installed on a conveyor 11 for each inspection step Upon passing, each image processing module 110 sends the detected individual test result values to the central processing module 120. After the product P passes through the last inspection conveyor, the final image processing module 110-n outputs the determination result and the product P stops at the verification determination standby position. When individual inspection result values inspected from the final image processing module 110-n arrive at the central processing module 120, the individual inspection result values for the product P are added up and the final inspection result value is supplied to the central processing module 120 ). For example, if any of the individual inspection results is defective, the final inspection result is defective. If all the inspection results are good, the final inspection result is a good product. The summed judgment result of the inspected products P is a validity verification module 130 which is higher than the central processing module 120 and can change the summed final judgment result.

That is, there is a verification process that confirms the validity of inspection equipment, inspection standards, or operator-to-operator inspection in an automated inspection equipment, which can be referred to as a verifier mode. The validation module 130 automatically accesses the central processing module 120 to obtain a resultant image when the summed judgment result of the product P is generated, displays the entire image of the inspected product P, And displays the defect (Defect) inspected in the entire image. When each defect is clicked, the screen is enlarged, and whether the product (P) is an intrinsic defect or a false defect is discriminated in comparison with the inspection standard. (OK), a failure (NG), a re-inspection (Rework) or the like to the central processing module 120 based on the verification result of the product P determined by the validation module 130, The processing module 120 issues an instruction to automatically classify the product P to the transport equipment with the changed determination result value. Of course, it is obvious to those skilled in the art that OK, bad, and rework are only examples of classifying the product P, and that it is freely changeable according to the purpose of classification.

When the validity of the inspection is verified for the specific product P by the validation module 130, that is, when the process of eye leveling between the inspection equipment and the inspection standard or the worker is completed, It is possible to maximize the yield of inspection equipment. In addition, it is possible to check the tuning operation of the inspection parameters and the error of the setting value before the automatic operation mode of the Auto Run mode, thereby enhancing the reliability of the inspection equipment. It helps to operate the equipment. Herein, the Auto Run mode is a mode in which the validation module 130 does not have the authority to determine the final inspection result value for the product P, and when the final inspection is completed, the central processing module 120 checks the final inspection result The determination of the value is carried out automatically. If the individual inspection results are not received from the respective image processing modules 110 after passing through the last conveyor, or if the individual inspection result values are received later than the inspection setting time, the central processing module 120 or the conveying equipment automatically performs the re- . This will be described later.

FIG. 3 is a block diagram showing devices connected to the validity checking device of the product inspection of FIG. 2. FIG.

3, the product inspection validation apparatus 100 is connected to the front equipment 200 and the transfer equipment 10 via the central processing module 120 to transmit and receive information and the like, To control the equipment and the like. The feeding of the product P to the transporting equipment 10 is inline with the front equipment 200 so that when the central processing module 120 sends the input signal of the product P to the front equipment 200, The product P is introduced. The product P is moved back to the rear equipment 300 after the product P is again classified as good, defective, and re-inspected by the apparatus 100 for validating the product inspection in the transporting equipment 10 and its validity is verified . For example, the conveying device 10 is a device for conveying the conveyor 11 or the product P of Fig. 1 in which the camera 21 and the illuminating device 27 are installed, and the central processing module 120 is an OK ), Bad (NG), and re-inspection (Rework). When the central processing module 120 sends the final determination result of OK, NG and Rework to the transporting equipment 10, the sorting device (not shown) included in the transporting equipment 10 And classification is performed according to the determination result. Of course, the transport equipment 10 may include sorting equipment, but the sorting equipment may be installed separately without including sorting equipment. The classification device is a structure (for example, XYZ robot) capable of adsorbing the product P and treating the product P at classification positions of OK, NG, and rework, Or may be constructed for various purposes.

4 is a view showing the position of the sensor module of the device for verifying the validity of the product inspection of Fig. 5 is a view showing a beam pattern and an output profile of the sensor module of the apparatus for verifying the validity of the product inspection of Fig.

As described above, the product P to be inspected may include glass (G) for display of a mobile device such as a smart phone or a tablet PC. The display glass G of the mobile device may have a hole H for a camera lens or the like. However, a sensing error of the sensor module 140 may occur due to the hole H.

4, a plurality of sensor modules 140 for sensing the glass G conveyed by the conveyor 11 such that each camera 21 photographs a glass G is provided with a grab sensor 142 of the glass G and a detection sensor 144 for other purposes so that the position of each sensor 142, 144 in the conveyor 11 can avoid the hole H in the center of the glass G, / 2 can be set up or down. The position of each of the sensors 142 and 144 can be detected by the sensors 142 and 144 regardless of whether the glass G has holes H or not.

5, when the sensor module 140 is moved up and down to adjust a beam pattern, the sensor module 140 detects the glass G even if the glass G has a hole H, can do. That is, when the hole H exists in the glass G, the sensor module 140 is moved to the glass G side to increase the output of the beams irradiated by the respective sensors 142 and 144, can do. As the sensor module 140 moves up and down, the grapple sensor 142 will always show a constant output profile as shown on the right side of FIG.

6 is a detailed block diagram of the image processing module of the apparatus for verifying product validity shown in FIG.

6, the image processing module 110 includes an image acquisition unit 112 for acquiring an image from the camera 21, a defect information detecting unit 114 for detecting the defect information from the image, And a failure judgment unit 116 for judging whether or not the product P is defective based on the result and generating an individual inspection result value. As described above, the image processing module 110 is composed of a plurality of images, and the determination result based on the acquired information of the image is used as a basic data for final determination.

7 is a detailed block diagram of the central processing module of the apparatus for verifying the validity of the product inspection of FIG. 8 is a view for explaining the re-examination process of the apparatus for verifying the validity of the product inspection of Fig.

7, the central processing module 120 generates the final inspection result of the product P by summing the individual inspection result values obtained from the image processing module 110, A summing information generating unit 122 that sums up each piece of defect information obtained from the validation verification module 130 to generate total defect information, and a control unit 122 that controls to regulate the product P based on the verification result value verified by the validity verification module 130 And a central control unit 124 for controlling the operation of the apparatus. Therefore, the central processing module 120 classifies the product P by summing the inspection results of the image processing module 110, and the verification is performed by the separate validity verification module 130 and the validity verification module 130, The product (P) is reclassified according to the verification result of the product (P).

At this time, the central processing module 120 may issue a retest decision of the product P. Specifically, the central control unit 124 of the central processing module 120 checks at least one of the individual test result values received from the plurality of image processing modules 110-1, 110-2, ..., 110-n, , It is possible to perform control so that the defect inspection of the product P is performed again. In addition, the central control unit 124 of the central processing module 120 may not receive individual test result values from at least one of the plurality of image processing modules 110-1, 110-2, ..., 110-n , Or if it is received later than a preset time, the defect inspection of the product (P) can be controlled again. For example, if the control process of the central processing module 120 or the transfer equipment 10 takes a long time or the detection result does not come out due to a problem, the process waits for the set time (that is, The result of the retesting can be output. 8, sensor detection is ON / OFF-controlled by a set length value of the glass G or a set time value after the sensor 142 detects the sensor value. After the detection by the sensor 142, when the set Null Result Time is exceeded, the result can be outputted as a result of the retest.

FIG. 9 is a detailed block diagram of the validation module of the validation device for product inspection of FIG. 2; FIG.

9, the validity verification module 130 controls the display unit 150 to display a storage unit 132 for storing an inspection standard and all of the defect information. The validity verification module 130 compares the final inspection result value And a verification control unit 134 for verifying the validity of the verification result. For example, the validation module 130 may include an image of defective and good products by converting the inspection standard of the product to be inspected into a DB, and the DB image may be displayed on the central processing module 120 of the product (P) It can be changed automatically by reflecting the final test result value. The validation module 130 may be constituted by a physical configuration or a virtual operation program.

10 is a diagram showing an image acquired by the apparatus for verifying the validity of the product inspection of FIG.

Referring to FIG. 10, the image Ig processed by the device verification validation apparatus 100 is displayed on the screen 155 of the display module 150.

When one defect f 'is selected from among several defects f of the image Ig, the screen is enlarged and the operator can check each defect by referring to the inspection standard, and can output the judgment result. When the determination result is obtained, the validation verification module 130 changes the final result value of the central processing module 120, and the product P is reclassified. When verification of the verifier mode is completed, the mode is changed to the Auto Run mode, and the automatic inspection is performed by the image processing module 110 and the central processing module 120 without the validation module 130.

11 is a flowchart showing a procedure of a method for verifying the validity of a product inspection according to an embodiment of the present invention.

Referring to FIG. 11, a validation method of a product inspection according to an embodiment of the present invention includes obtaining an image of a product to be inspected, defect information of the product, and individual inspection result values of the product (S110) , Summing up the obtained individual inspection result values to generate a final inspection result value of the product, adding the defect information to generate total defect information (S120), and displaying the total defect information on the master image of the product (S130), the result of the final inspection is compared with the inspection standard, whether the final inspection result is an intrinsic defect or a false defect (S140), and the final inspection result value is reset based on the verification result The product is reclassified (S150).

Here, if the individual inspection result value is not received in the step S120 of generating the total defect information, or if it is received later than the predetermined time, the defect inspection of the product can be reworked.

In addition, in step S150 of reclassifying the product, the product can be classified into failure (NG), good (OK), and re-inspection (rework). At this time, the failure (NG) means that the product is defective, and the good (OK) means that the product is good. The rework means that it is not a good product or a defective product.

Through this, the validity of the product inspection can be verified once again, and it can be called Verifier mode. In Verifier mode, when the process of adjusting the inspection equipment, inspection standard or operator level is completed for a specific product, the product is automatically inspected continuously by changing to the Auto Run mode, thereby maximizing the yield of the automatic inspection equipment. In addition, it can check the tuning operation of inspection parameters and error of setting value before automatic inspection of Auto Run mode, so that the inspection equipment can be trusted and the inspection equipment can guide the operator to operate the equipment .

FIG. 12 is a flowchart showing a procedure of a product inspection method in the case of the Auto Run mode after performing the method for verifying the validity of the product inspection according to the embodiment of the present invention shown in FIG.

When the verification of the product is completed, that is, when the verifier mode is completed, each step of FIG. 11 can be repeatedly performed without step S140 of FIG. 11 to be verified and compared with the inspection standard. 12, an image of a product to be inspected, defect information of the product, and individual inspection result values of the product are obtained (S210), and the final inspection result values of the product are generated by summing the individual inspection result values (S220), the total defect information is displayed on the master image of the product (S230), and the product is sorted on the basis of the final inspection result value (S240 ).

Thus, since there is no verification procedure for the final inspection result value for the product, when the inspection of the final image is completed, the defect judgment is automatically performed based on the sum of all the results, that is, only the final inspection result value.

FIG. 13 is a diagram illustrating an operation sequence of a method for validating a product inspection according to an embodiment of the present invention shown in FIG. FIG. 14 is a diagram illustrating an operation sequence of the product inspection method in the case of the Auto Run mode after the method for verifying the validity of the product inspection according to the embodiment of the present invention shown in FIG. 11 is performed.

Referring to FIG. 13, when the verifier mode (1), the conveyor 11 is driven (2), and when the glass G is detected, input is counted (3). When the first glass G passes through the first grab sensor 142, the glass G stops at the next position of the conveyor 11 after the set time has elapsed after the detection of the falling edge, and the second glass G Once the operation is performed and the first glass G passes through the last grab sensor 142, the conveyor is stopped and all the positions of the conveyors that the camera 21 can take are in a state in which the glass G is raised, (G) are transmitted from the image processing module 110 to the central processing module 120 ((4) to (8)). When the individual inspection result value reaches the central processing module 120, the validation verification module 130 automatically accesses the central processing module 120 to display the entire image, and detects each defect detected in the entire image (9). The operator checks each defect (Defect) by referring to the inspection standard, and outputs the judgment result (10). When the determination result is obtained, the validity verification module 130 changes the final check result of the central processing module 120 (11). The central processing module 120 sends the changed final inspection result value to the transporting equipment 10, and issues a classification (good, bad, retest) command (12).

Thereafter, the inserted glass (G) is continuously inspected to verify the validity of the inspection. When the validation of the inspection is completed, the automatic inspection is performed by switching to the Auto Run mode. Such automatic checking in the Auto Run mode is shown in Fig.

In FIG. 14, when the conveyor 11 is driven (②), when the glass G is detected, the input counts (3). After the first glass G passes through the first grab sensor 142, the second glass gauge G is continuously operated in the same manner and the first glass G is moved to the last grab sensor 142 The glass G is lifted up at the positions of the respective conveyors that the camera 21 can take and the individual inspection result values of the glass G are processed by the image processing module 110, Module 120 ((4) to (8)). That is, the central processing module 120 receives all of the individual inspection result values from the image processing modules 110 and performs the inspection determination continuously without determining the validity verification module 130. Accordingly, the conveyor 11 It will not stop. At this time, if the result value is not reached within the set time from the image processing module 110 to the central processing module 120, the image processing module 110 sends the image data to the reworking (Rework) The central processing module 120 calculates the final inspection result value by summing up the individual inspection result values by the central processing module 120 Send test result value and classify (good, bad, retest) command (⑩).

Meanwhile, an apparatus and method for verifying the validity of a product inspection according to an embodiment of the present invention can be implemented as one module by software and hardware, and the embodiments of the present invention described above can be created as a program that can be executed in a computer , And a general-purpose computer that operates the program using a computer-readable recording medium. The computer-readable recording medium is implemented in the form of a carrier wave such as a ROM, a floppy disk, a magnetic medium such as a hard disk, an optical medium such as a CD or a DVD, and a transmission through the Internet. In addition, the computer-readable recording medium may be distributed to a network-connected computer system so that computer-readable codes may be stored and executed in a distributed manner.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

100: Validation device for product inspection
110: image processing module
120: central processing module
130: Validation module
140: Sensor module
150: Display module

Claims (14)

An apparatus for verifying whether or not a defect inspection of a product conveyed by a conveyor is valid, comprising:
A plurality of image processing means for respectively detecting defect information of the product on the basis of an image photographed by each camera installed in the conveyor, determining whether the product is defective according to the defect information, module;
A central processing module for generating a final inspection result value by summing the individual inspection result values and generating total defect information by summing up each defect information; And
And a validity checking module for displaying the total defect information on one image and verifying validity of the final inspection result value by comparing with the previously stored inspection standard. The method according to claim 1,
Wherein the product comprises a display glass of a mobile device. 3. The method of claim 2,
Further comprising a plurality of sensor modules for sensing the glass being conveyed by the conveyor such that each camera captures the glass. The method of claim 3,
Wherein the sensor module is installed at an upper portion or a lower portion of the glass, spaced apart from a virtual center line of the glass in the conveying direction. The method of claim 3,
Wherein the sensor module moves to the glass side to adjust the beam pattern. The method according to claim 1,
The image processing module includes:
An image acquisition unit for acquiring an image from the camera;
A defect information detector for detecting the defect information from the image; And
And a failure judgment unit for judging whether or not the product is defective based on the defect information and generating the individual inspection result value. The method according to claim 1,
The central processing module,
A summation information generation unit for summing up the individual inspection result values to generate a final inspection result value of the product, and to sum up each defect information to generate total defect information; And
And a central control unit for controlling the product to be reclassified based on the verification result value verified by the validity verification module. 8. The method of claim 7,
Wherein the central control unit controls to re-inspect the defect inspection of the product when it fails to receive the individual inspection result value from at least one of the plurality of image processing modules or is received later than a preset time Validation device. The method according to claim 1,
Further comprising a display module for displaying and displaying the total defect information on one image. 10. The method of claim 9,
The validation module includes:
A storage unit for storing the inspection standard; And
And a verification control unit for controlling the display unit to display the total failure information and verifying the validity of the final inspection result value by comparing with the inspection standard. Obtaining an image of a product to be inspected, defect information of the product, and individual inspection result values of the product;
Summing the individual inspection result values to generate a final inspection result value of the product, and summing the defect information to generate total defect information;
Displaying the total defect information on a master image of the product;
Verifying whether the final inspection result value is an intrinsic defect or a false defect based on the displayed defect information; And
And re-classifying the product by resetting the final inspection result value based on the verification result. 12. The method of claim 11,
Wherein the step of generating the total defect information comprises the step of controlling the defect inspection of the product to be reworked if the individual inspection result value is not received or is received later than a predetermined time, Validation method of test. 12. The method of claim 11,
Wherein the step of reclassifying the product comprises classifying the product into a defect (NG), a good (OK), and a rework (Rework). 14. The method of claim 13,
Further comprising the step of repeatedly performing each of the steps without verifying with the inspection standard when the verification of the product is completed.

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