KR20130051245A - Dispense apparatus of adhesive liquid and method thereof - Google Patents

Abstract

The adhesive liquid applying apparatus includes an adhesive liquid transfer pump for sucking the adhesive liquid into the transfer cylinder from the adhesive liquid storage container, removing the bubbles contained in the adhesive liquid, and then discharging the adhesive liquid, and the adhesive transferred from the adhesive liquid transfer pump. An adhesive liquid discharge pump for sucking and discharging the liquid into the discharge cylinder, a slit nozzle connected to the adhesive liquid discharge pump to receive the adhesive liquid, a substrate mounted on the lower surface of the slit nozzle, And a substrate stage capable of moving in one direction parallel to the slit nozzle. In the adhesive liquid applying device of the present invention, the adhesive liquid outlet provided in the slit nozzle is formed to extend along the other direction perpendicular to the one direction, the substrate mounted on the substrate stage is moved and the slit nozzle is fixed In this state, the adhesive liquid may be applied in the lower direction of the substrate.

Description

Adhesive liquid applying device and adhesive liquid applying method using the same {dispense apparatus of adhesive liquid and method

The present invention relates to an adhesive liquid applying apparatus and an adhesive liquid applying method using the same, and more particularly, to an apparatus for applying an adhesive liquid on a substrate and an adhesive liquid applying method using the same.

Due to the increase in smart phone users, in the manufacture of flat panel displays such as liquid crystal displays and organic light emitting displays, an adhesive solution is applied onto a substrate such as a glass substrate and a touch panel is bonded. A coalescence process is included. The time-consuming process of the bonding process is an adhesive liquid coating process. Therefore, it is necessary to reduce the time required for the adhesive liquid coating step and to improve the reliability of the adhesive liquid coating step. In other words, it is necessary to improve the thickness uniformity of the adhesive liquid in the adhesive liquid applying process and to suppress or eliminate the generation of bubbles in the adhesive liquid.

The problem to be solved by the present invention is to provide an adhesive liquid coating apparatus that can reduce the time required for the adhesive liquid coating process and improve the reliability of the adhesive liquid coating process.

In addition, another problem to be solved by the present invention is to provide a novel adhesive liquid coating method using the adhesive liquid coating apparatus.

In order to solve the above problems, the adhesive liquid applying apparatus of the present invention, the adhesive liquid transfer pump for sucking the adhesive liquid into the transfer cylinder from the adhesive liquid storage container and removing the bubbles contained in the adhesive liquid and then discharging the adhesive liquid; The adhesive liquid discharge pump for sucking and discharging the adhesive liquid transferred from the adhesive liquid pump into the discharge cylinder, the slit nozzle connected to the adhesive liquid discharge pump to receive the adhesive liquid, and the upper surface of the slit nozzle, And a substrate stage on which the substrate is mounted and capable of moving in one direction parallel to the slit nozzle.

In the adhesive liquid applying apparatus of the present invention, the adhesive liquid outlet provided in the slit nozzle is formed to extend in the other direction perpendicular to one direction, the substrate mounted on the substrate stage is moved and the slit nozzle is fixed The adhesive liquid can be applied in the downward direction.

In one embodiment of the present invention, the slit nozzle is a support block connected to the adhesive liquid discharge pump, a nozzle block connected to the support block and having an adhesive liquid outlet, and the adhesive is installed to supply the adhesive liquid in the support block and the nozzle block It may include a liquid supply piping. On the nozzle block, a measurement sensor may be further installed to measure the horizontal level between the slit nozzle and the substrate mounted on the substrate stage. The adhesive liquid discharge pump and the slit nozzle can be configured integrally.

In one embodiment of the invention, the transfer cylinder is a pneumatic cylinder operated by air, and the discharge cylinder may consist of an oil cylinder operated by oil.

In one embodiment of the present invention, one end of the transfer cylinder is provided with a first suction pipe for sucking the adhesive liquid contained in the adhesive liquid storage container, and the other end of the transfer cylinder to the adhesive liquid sucked in the transfer cylinder The first discharge pipe which can be discharged may be connected.

In one embodiment of the present invention, in the suction unit provided at one end of the discharge cylinder is connected to the first discharge pipe is provided with a second suction pipe for sucking the adhesive liquid, the discharge unit provided at the other end of the discharge cylinder The second discharge pipe which can discharge the adhesive liquid sucked in the discharge cylinder may be connected to the inside.

The discharge cylinder may be provided with a first on-off valve capable of turning on and off the flow of the adhesive liquid sucked from the second suction pipe. The discharge cylinder may be provided with a second on-off valve for turning on and off the flow of the adhesive liquid supplied to the second discharge pipe.

In order to solve the above problems, the adhesive liquid applying method of the present invention is to suck the adhesive liquid from the adhesive liquid storage container to one end of the transfer cylinder constituting the adhesive liquid transfer pump, wherein the adhesive liquid in the transfer cylinder includes bubbles It is provided. Bubbles contained in the adhesive liquid in the transfer cylinder are removed and the adhesive liquid is discharged to the other end of the transfer cylinder. The adhesive liquid discharged from the other end of the transfer cylinder is sucked from one end of the discharge cylinder constituting the adhesive liquid discharge pump. The adhesive liquid sucked from one end of the discharge cylinder is discharged to the other end of the discharge cylinder. The adhesive liquid discharged to the other end of the discharge cylinder is applied to the substrate attached to the substrate stage through the slit nozzle.

The substrate stage is located above the slit nozzle, the substrate is mounted on the lower surface thereof and can move in one direction parallel to the slit nozzle, and the adhesive liquid outlet provided in the slit nozzle extends along the other direction perpendicular to the one direction. The substrate mounted on the substrate stage moves and the adhesive liquid is applied in the lower direction of the substrate while the slit nozzle is fixed.

In one embodiment of the present invention, removing the bubbles generated in the adhesive liquid in the transfer cylinder, the step of sucking the adhesive liquid in the transfer cylinder, and by moving the piston located in the transfer cylinder to the upper to vacuum the inside of the transfer cylinder And maintaining the state to discharge the bubbles in the adhesive liquid into the transfer cylinder, and discharging the bubbles discharged into the transfer cylinder to the outside of the transfer cylinder.

The adhesive liquid applying apparatus and the method of the present invention can apply the adhesive liquid on the substrate using a slit nozzle having an adhesive liquid outlet having the same length as one end face of the substrate, thereby completing the adhesive liquid applying process in a short time.

Since the adhesive liquid applying apparatus and the method of the present invention apply a thin adhesive liquid through the slit nozzle at the bottom of the substrate while the substrate is moving, the adhesive liquid applied on the substrate may be less affected by surface resistance or gravity. Can be. Thereby, adhesive liquid can be apply | coated with a uniform height on a board | substrate.

The adhesive liquid applying device and the method of the present invention include an adhesive liquid transfer pump and an adhesive liquid discharge pump to remove bubbles contained in the adhesive liquid and to precisely control the coating amount of the adhesive liquid.

1 is a view schematically showing the configuration of the adhesive liquid applying apparatus according to an embodiment of the present invention,
2 is a view for explaining a process of transferring the adhesive liquid through the adhesive liquid transfer pump of FIG.
3a to 3d are views for explaining a process of removing bubbles through the operation of the adhesive liquid transfer pump of FIG.
4 and 5 are front and side views of the adhesive liquid discharge pump and the slit nozzle of the adhesive liquid applying device of FIG. 1, respectively;
6 is a perspective view of a slit nozzle,
FIG. 7 is a schematic diagram illustrating a process of moving between the slit nozzle and the substrate stage of FIG. 5,
8 and 9 are a block diagram and a flow chart for explaining the adhesive liquid applying method according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated and described in detail in the drawings. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for similar elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged or reduced from the actual dimensions for the sake of clarity of the present invention.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

1 is a view schematically showing the configuration of the adhesive liquid applying apparatus according to an embodiment of the present invention, Figure 2 is a view for explaining a process of transferring the adhesive liquid through the adhesive liquid transfer pump of FIG.

Specifically, the adhesive liquid applying apparatus 400 according to the present invention includes an air inlet 402, an air pipe 403 through which air injected from the air inlet 402 is moved, and an air pipe 403. Regulator (404) for adjusting the pressure of air in the air, a meter (408) for measuring air pressure, and a valve (S / V0-S / V12) connected to the air pipe (403), for example, a solenoid valve (S / V0-S / V12). The solenoid valve may be a valve that is operated (on off) by electricity although not shown in the drawings. Air flowing through the air pipe 403 may be turned on and off by the valves S / V0-S / V12.

The adhesive liquid applying device 400 according to the present invention includes an adhesive liquid storage container 101 in which an adhesive liquid 102 having an appropriate viscosity, for example, an ultraviolet curing adhesive liquid is contained, and a liquid contained in the adhesive liquid storage container 101. The first suction pipe 104, which can suck the adhesive liquid 102, and the adhesive liquid 102 sucked through the first suction pipe 104, are sucked into the transfer cylinder 106 and the first discharge pipe 108 is disposed. It includes an adhesive liquid transfer pump 100 that can be discharged through).

Adhesive liquid transfer pump 100 includes a pump piston (110, P) that can move up and down. In FIG. 1, two adhesive liquid storage containers 100, a first suction pipe 104 and a first discharge pipe 108 are shown, but according to the number of the adhesive liquid storage containers 101, the first suction pipe 104 is shown. ) And the number of the first discharge pipes 108 may be configured in plural numbers. In FIG. 1, the part shown with the bold line shows the path | route which the adhesive liquid 102 flows through.

The adhesive liquid storage container 101 may be provided with a sensor S capable of measuring the pressure of the adhesive liquid storage container 101. The sensor S is a sensor that detects the presence or absence of the adhesive liquid in the adhesive liquid storage container 101. The first suction pipe 104 is provided with an inlet valve 114 capable of controlling the flow of the adhesive liquid 102 on and off. The first discharge pipe 108 is also provided with an outlet valve 116 that can control the flow of the adhesive liquid 102 on and off. The inlet and outlet valves 114 and 116 may be configured as air valves (A / V) that operate according to electrical signals.

1 and 2, the inlet and outlet valves 114, 116 are shown installed in the first suction pipe 104 and the first discharge pipe 108, but are connected directly to the transfer cylinder 106. It may be attached. 1 and 2, reference numeral 118 denotes a connecting member connecting two first discharge pipes 108. The adhesive liquid 102 discharged through the first discharge pipe 108 is transferred through the connection member 118 and the integrated discharge pipe 120 to be discharged to the adhesive liquid discharge pump 200. The integrated discharge pipe 120 may be collectively referred to as a discharge pipe.

In the adhesive liquid applying apparatus 400 according to the present invention, the transfer cylinder 106 constituting the adhesive liquid transfer pump 100 may be a pneumatic cylinder operated by air. When using a pneumatic cylinder, a large amount of adhesive liquid 102 can be sucked from the adhesive liquid storage container 101 quickly.

Here, the adhesive liquid transfer process will be described in more detail with reference to FIG. 2.

Pressure is applied to the adhesive liquid storage container 101 through an air exhaust pipe 117 connected to the adhesive liquid transfer pump 100, and the pump piston 110 of the adhesive liquid transfer pump 100 rises upward to thereby raise the adhesive liquid ( 102 is sucked into the transfer cylinder 106 through the first suction pipe 104. That is, a first suction pipe for sucking the adhesive liquid 102 contained in the adhesive liquid storage container 101 is provided at one end of the transfer cylinder 106, and the adhesive liquid 102 is formed by the first suction pipe ( It is sucked into the transfer cylinder 106 through 104.

The adhesive liquid 102 sucked into the transfer cylinder 106 is discharged to the first discharge pipe 108 by lowering the pump piston 110 again. That is, a first discharge pipe capable of discharging the adhesive liquid 102 sucked into the transfer cylinder 106 is connected to the other end of the transfer cylinder 106, and the adhesive liquid 102 sucked into the transfer cylinder 106 is connected. ) Is discharged to the first discharge pipe 108. As a result, the adhesive liquid 102 discharged through the first discharge pipe 108 is discharged to the integrated discharge pipe 120 through the connection member 118.

When the adhesive liquid is transferred from the adhesive liquid storage container 100 to the integrated discharge pipe 120, the inlet and outlet valves 114, 116, and A / V1-A / V4 are turned on and off as necessary. For example, the inlet valve 114 (A / V1-A / V2) may be in an off state when applying pressure to the adhesive liquid storage container 100 and in an on state when the piston 110 is raised upward. The outlet valve 116 (A / V3-A / V4) is off when the piston 110 is raised upward and is on when the piston 110 is lowered to discharge the adhesive liquid 102 in the transfer cylinder 106. May be in a state.

The adhesive discharge pump 200 is connected to the integrated discharge pipe 120. That is, one end of the adhesive liquid discharge pump 200 is connected to the integrated discharge pipe 120. The adhesive liquid discharge pump 200 serves to supply the adhesive liquid 102 introduced by the integrated discharge pipe 120 to the slit nozzle 300. The adhesive liquid discharge pump 200 may be provided with first and second on / off valves 202 and 204 for controlling the flow of the adhesive liquid. The first and second on-off valves 202 and 204 may be configured as air valves (A / V) that operate according to electrical signals. The adhesive liquid 102 discharged from the adhesive liquid discharge pump 200 may be applied to the substrate 502 of FIG. 4.

In the adhesive liquid applying apparatus 400 according to the present invention, the discharge cylinder (212 of FIG. 4) constituting the adhesive liquid discharge pump 200 may be configured as an oil cylinder operated by oil. The oil cylinder can be discharged while precisely controlling the adhesive liquid by operating the diaphragm with oil as described later.

The adhesive liquid applying apparatus 400 according to the present invention may include the adhesive liquid transfer pump 100 and the adhesive liquid discharge pump 200 to apply the adhesive liquid 102 on the substrate while controlling it quickly and precisely. The process of applying the adhesive liquid 102 to the adhesive liquid discharge pump 200, the slit nozzle 300 and the substrate 502 will be described in more detail later.

3A to 3D are views for explaining a process of removing bubbles through the operation of the adhesive liquid transfer pump of FIG. 1. In Figs. 3A to 3D, the same reference numerals denote the same members.

Referring to FIG. 3A, the adhesive liquid transfer pump 100 includes a transfer cylinder 106 having a predetermined space therein. The adhesive liquid transfer pump 200 is installed inside the transfer cylinder 106 and has a pump piston 110 having a close contact with the inner wall of the transfer cylinder 106, and a rod 122 connected to the pump piston 110. Rod). An auxiliary transfer cylinder 106b may be installed below the transfer cylinder 106. The transfer cylinder 106 may be divided into a main transfer cylinder 106a in direct contact with the piston 110 and an auxiliary transfer cylinder 106b in communication with the main transfer cylinder 106a.

The rod 122 is connected to the upper side of the pump piston 110, the air 122 is formed in the rod 122 to supply air to move the pump piston 110 up and down. One side of the air pipe 124 is provided with an air discharge valve 134 for discharging air from the air pipe 124.

The adhesive liquid transfer pump 100 sucks the adhesive liquid 102 into the transfer cylinder 106 by the vertical movement of the pump piston 110 or discharges it into the first discharge pipe 108. One side of the transfer cylinder 106 may be provided with an inlet valve 114 that can control the flow of the adhesive liquid (102). The inlet valve 114 may be provided with a valve piston 126 that directly controls the flow of the adhesive liquid. 3A-3D, 128 is a suction pipe connection capable of sucking the adhesive liquid, reference numeral 130 is a discharge pipe connection capable of discharging the adhesive liquid, and an inlet valve 114 is attached to the transfer cylinder 106. It is shown as being.

Hereinafter, a process of removing bubbles through the operation of the adhesive liquid transfer pump 100 of FIG. 1 will be described.

3A illustrates the initial state of the adhesive liquid transfer pump 100. The initial state is that the inlet valve 114 is open so that the inside of the transfer cylinder 106 is filled with air 132. 3B illustrates a case where the pump piston 110 is lowered while the inlet valve 114 is open. In this case, the inside of the transfer cylinder 106 is a state where the air 132 is slightly filled.

3C is a case where the pump piston 110 is slightly raised upward while the inlet valve 114 is open. In this case, the inside of the transfer cylinder 106 is a state in which the adhesive liquid 102 is sucked. 3D illustrates a case where the pump piston 110 is raised as much as possible while the inlet valve 114 is closed. In this case, a low vacuum, that is, a low pressure is formed in the inside of the transfer cylinder 106, and the bubble 136 dissolved in the adhesive liquid 102 escapes. The bubble 136 thus released is discharged to the outside through the exhaust pipe 124. Thus, the adhesive liquid applying apparatus 400 of the present invention is provided with the adhesive liquid transfer pump 100 and the adhesive liquid discharge pump 200 to remove the bubbles 136 included in the adhesive liquid 102 and the adhesive liquid ( The application amount of 102 can be precisely controlled.

4 and 5 are front and side views of the adhesive liquid discharge pump and the slit nozzle of the adhesive liquid applying device of FIG. 1, respectively, and FIG. 6 shows a perspective view of the slit nozzle.

Specifically, the adhesive liquid discharge pump 200 includes a discharge cylinder 212 capable of sucking and discharging the adhesive liquid 102. The discharge cylinder 212 is connected to the integrated discharge pipe 120 at one end thereof is connected to the suction unit 206 that can suck the adhesive liquid (102). The other end of the discharge cylinder 212 is connected to the slit nozzle 300 is connected to the discharge portion 208 for discharging the adhesive liquid (102).

Inside the suction part 206, a second suction pipe 207 is connected to the discharge cylinder 212 to allow the adhesive liquid 102 to be sucked. Inside the discharge part 208, a second discharge pipe 211 is connected to the discharge cylinder 212 to discharge the adhesive liquid 102.

The diaphragm 210 is provided in the cylinder block 209 which comprises the discharge cylinder 212. In the discharge cylinder 212, a pressure is applied to the working fluid, that is, the oil 214 according to the driving of the pump piston 216, and the diaphragm 210 moves left and right to direct the adhesive liquid 102 to the second discharge pipe. It is possible to discharge to 211. As described above, the discharge cylinder 212 constituting the adhesive liquid discharge pump 200 is an oil cylinder operated by oil. When the oil cylinder is configured as described above, the diaphragm 210 may be operated by oil, and the adhesive liquid 102 may be precisely controlled and discharged. In Figure 4, reference numeral 222 is a pressure sensor for measuring the pressure of the oil, reference numeral 218 is a motor for driving the pump piston 216, reference numeral 220 is a connecting member connected to the pump piston 216.

The discharge cylinder 212 is provided with a first on-off valve 202 capable of turning on and off the flow of the adhesive liquid 102 sucked from the second suction pipe 207. In addition, the discharge cylinder 212 is provided with a second on-off valve 204 that can turn on / off the flow of the adhesive liquid 102 supplied to the second discharge pipe 211. The first and second on / off valves 202 and 204 may be air valves.

The slit nozzle 300 that receives the adhesive liquid 102 is connected to the adhesive liquid discharge pump 200. The adhesive liquid discharge pump 200 and the slit nozzle 300 may be integrally formed. When the adhesive liquid discharge pump 200 and the slit nozzle 300 are integrally formed, the adhesive liquid 102 may be applied onto the substrate 502 more precisely. The slit nozzle 300 includes a support block 301 connected to the adhesive liquid discharge pump 200, a nozzle block 308 connected to the support block 301 and having an adhesive liquid outlet 304, and a support block 301. And within the nozzle block 308

The adhesive liquid supply pipe 302 provided to supply the adhesive liquid 102 is included. The nozzle block 308 is provided with a buffer pipe 306 which is connected to the adhesive liquid supply pipe 302 and can hold the adhesive liquid 102 for a while. The adhesive liquid 102 is discharged from the tip of the slit nozzle 300, that is, the adhesive liquid outlet through the buffer pipe 306.

The substrate stage 500 is installed on the slit nozzle 300. The lower surface of the substrate stage 500 is mounted with a substrate 502, for example a glass substrate. As illustrated in FIG. 6, the substrate stage 500 may move in one direction, for example, the X-axis direction, in parallel with the slit nozzle 300 using the driving unit 506. The adhesive liquid outlet 304 provided in the slit nozzle 300 extends along another direction perpendicular to one direction, for example, in the Y-axis direction.

As shown in FIG. 6, level alignment in the Z-axis direction between the slit nozzle 300 and the substrate stage 500 is performed using the measurement sensor 309, for example, a laser sensor. In other words, the level in the Z-axis direction, that is, the horizontal level, between the nozzle block 308 of the slit nozzle 300 and the substrate 502 mounted on the substrate stage 500 is a horizontal measurement attached to the nozzle block 308. Using 309. The distance between the nozzle block 308 of the slit nozzle 300 and the substrate 502 mounted on the substrate stage 500 can be kept constant. Therefore, while the substrate 502 mounted on the substrate stage 500 is moved, the adhesive liquid 102 is applied in the lower direction of the substrate 502 while the slit nozzle 300 is fixed. The movement relationship between the slit nozzle 300 and the substrate stage 500 will be described in more detail later.

FIG. 7 is a schematic diagram illustrating a movement process between the slit nozzle and the substrate stage of FIG. 5.

Specifically, the top and bottom views of FIG. 7 are a plan view and a cross-sectional view for explaining a movement process between the slit nozzle 300 and the substrate stage 500, respectively. The slit nozzle 300 is located below the substrate stage 500 on which the substrate 502 is mounted, as shown in the lower figure. The substrate 502 may move in one direction, that is, in the -X axis direction or the + X axis direction. The adhesive liquid outlet 304 provided in the slit nozzle 300 extends along the other direction perpendicular to the one direction, that is, the Y-axis direction.

The slit nozzle 300 applies the adhesive liquid 102 in the downward direction of the substrate 502 in a fixed state. In particular, the present invention is to apply the adhesive liquid 102 on the substrate by using the slit nozzle 300 having the adhesive liquid outlet 304 of the same length as one end surface of the substrate to complete the adhesive liquid application process in a short time Can be. In addition, the present invention applies a thin film, for example, a few micrometers to several millimeters thick adhesive liquid 102 in the lower direction of the substrate 502 while the slit nozzle 300 is fixed while the substrate is moving. The adhesive liquid 102 applied on the 502 may be less affected by surface resistance or gravity. Accordingly, the adhesive liquid 102 can be applied onto the substrate 502 at a uniform height.

8 and 9 are a block diagram and a flow chart for explaining the adhesive liquid applying method according to an embodiment of the present invention.

Specifically, FIG. 8 is a view showing the flow of the adhesive liquid 102 when applying the adhesive liquid 102 from the adhesive liquid storage container 101 to the substrate 502, and FIG. 9 is an embodiment of the present invention. It is a flowchart for demonstrating the adhesive liquid application | coating method by this.

In more detail, the adhesive liquid 102 is sucked from the adhesive liquid storage container 101 to one end of the transfer cylinder 106 constituting the adhesive liquid transfer pump 100 via the inlet valve 114, but the transfer cylinder The adhesive liquid 102 in 106 contains bubbles (step 602). The adhesive liquid storage container 101 may be divided into a first adhesive liquid storage container and a second adhesive liquid storage container.

The bubble 136 contained in the adhesive liquid 102 in the transfer cylinder 106 is removed, and the adhesive liquid is discharged to the other end of the transfer cylinder 106 (step 604). Since the process of removing the bubbles contained in the adhesive liquid 102 has been described in detail with reference to FIGS. 3A to 3D, it is omitted here.

The adhesive liquid 102 discharged from the other end of the transfer cylinder 106 is sucked from one end of the discharge cylinder 212 constituting the adhesive liquid discharge pump 200 via the outlet valve 116 (step 606). The adhesive liquid 102 sucked at one end of the discharge cylinder 212 is discharged to the other end of the discharge cylinder 212 via the first and second on / off valves 202 and 204 (step 608).

The adhesive liquid 102 discharged to the other end of the discharge cylinder 212 is applied to the substrate 502 attached to the substrate stage 500 through the slit nozzle 300 (step 610). As illustrated in FIGS. 4 to 6, the substrate stage 500 is positioned above the slit nozzle 300 and has a substrate 502 mounted on the lower surface thereof and may move in one direction in parallel with the slit nozzle 300. .

The adhesive liquid outlet 304 provided in the slit nozzle 300 extends along another direction perpendicular to one direction, and the substrate 502 mounted on the substrate stage 500 moves and the slit nozzle 300 is fixed. In this state, the adhesive liquid 102 is applied in the lower direction of the substrate 502.

Continue. Although not shown in the drawings, the substrate merging process may be performed. That is, after the adhesive liquid 102 is applied onto the substrate 502, the second substrate is aligned on the substrate 502 to which the adhesive liquid 102 is applied to bond the substrate 502 and the second substrate to each other. . The coalescence process can be carried out in a low pressure state of the vacuum vessel. The bonded substrate 502 and the second substrate bond the substrate 502 and the second substrate more completely by irradiating ultraviolet rays.

Reference Signs List 100: adhesive liquid transfer pump, 101: adhesive liquid storage container, 102: adhesive liquid, 104: first suction pipe, 118: second discharge pipe, 114: inlet valve, 118: outlet valve, 120: integrated discharge pipe, 200 : Adhesive liquid discharge pump, slit nozzle: 300, substrate stage: 500, substrate: 502

Claims (10)

An adhesive liquid transfer pump that sucks the adhesive liquid into the transfer cylinder from the adhesive liquid storage container, removes bubbles contained in the adhesive liquid, and then discharges the adhesive liquid;
An adhesive liquid discharge pump configured to suck and discharge the adhesive liquid transferred from the adhesive liquid transfer pump into the discharge cylinder;
A slit nozzle connected to the adhesive liquid discharge pump to receive the adhesive liquid; And
A substrate stage positioned above the slit nozzle and having a substrate mounted on the lower surface thereof and movable in one direction parallel to the slit nozzle,
The adhesive liquid outlet provided in the slit nozzle extends along another direction perpendicular to the one direction, wherein the substrate mounted on the substrate stage moves and the slit nozzle is fixed in the lower direction of the substrate. An adhesive liquid application device, which can apply an adhesive liquid. The slit nozzle of claim 1, wherein the slit nozzle includes a support block connected to the adhesive liquid discharge pump, a nozzle block connected to the support block, the adhesive block having the adhesive liquid discharge port, and the adhesive liquid supplied into the support block and the nozzle block. Adhesive liquid applying device, characterized in that configured to include an adhesive liquid supply pipe is installed. The adhesive liquid applying device according to claim 2, wherein a measurement sensor is further provided on the nozzle block for measuring a horizontal level between the slit nozzle and a substrate mounted on the substrate stage. The adhesive liquid applying apparatus according to claim 1, wherein the adhesive liquid discharge pump and the slit nozzle are integrally formed. The adhesive liquid applying device according to claim 1, wherein the transfer cylinder is a pneumatic cylinder operated by air, and the discharge cylinder is configured by an oil cylinder operated by oil. According to claim 1, wherein one end of the transfer cylinder is provided with a first suction pipe for sucking the adhesive liquid contained in the adhesive liquid storage container, and the other end of the transfer cylinder is sucked into the transfer cylinder An adhesive liquid applying device, characterized in that the first discharge pipe which can discharge the adhesive liquid is connected. According to claim 6, In the suction portion provided at one end of the discharge cylinder is provided with a second suction pipe which is connected to the first discharge pipe for sucking the adhesive liquid, the discharge is installed at the other end of the discharge cylinder An adhesive liquid applying device, characterized in that the second discharge pipe which can discharge the adhesive liquid sucked in the discharge cylinder is connected to the part. The method of claim 7, wherein the discharge cylinder is provided with a first on-off valve for turning on and off the flow of the adhesive liquid sucked from the second suction pipe, the discharge cylinder is supplied to the second discharge pipe And a second on-off valve for turning on and off the flow of the adhesive liquid. Suctioning the adhesive liquid from the adhesive liquid storage container to one end of the transfer cylinder constituting the adhesive liquid transfer pump, wherein the adhesive liquid in the transfer cylinder includes bubbles;
Removing the bubbles contained in the adhesive liquid in the transfer cylinder and discharging the adhesive liquid to the other end of the transfer cylinder;
Sucking the adhesive liquid discharged from the other end of the transfer cylinder at one end of the discharge cylinder constituting the adhesive liquid discharge pump;
Discharging the adhesive liquid sucked from one end of the discharge cylinder to the other end of the discharge cylinder; And
Applying the adhesive liquid discharged to the other end of the discharge cylinder to a substrate attached to the substrate stage through a slit nozzle,
The substrate stage is located above the slit nozzle, the substrate is mounted on the lower surface and can move in one direction parallel to the slit nozzle,
The adhesive liquid outlet provided in the slit nozzle extends along another direction perpendicular to the one direction, wherein the substrate mounted on the substrate stage moves and the slit nozzle is fixed in the lower direction of the substrate. Adhesive liquid coating method characterized by applying an adhesive liquid. The method of claim 8, wherein removing bubbles generated in the adhesive liquid in the transfer cylinder,
Sucking the adhesive liquid into the transfer cylinder;
Moving the piston located in the transfer cylinder upward to maintain the inside of the transfer cylinder in a vacuum state and discharging bubbles in the adhesive liquid into the transfer cylinder;
And discharging bubbles discharged into the transfer cylinder to the outside of the transfer cylinder.

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