KR20100120323A - Chiller system - Google Patents

Abstract

The present invention relates to a chiller system, an object of the present invention relates to a device for cooling the heat load of industrial equipment (semiconductor manufacturing equipment, laser, injection machine, medical equipment and chemical processing equipment, etc.) to enable a stable process.

To this end, the condensing pressure control valve (30, 34), hot gas control valve (31), cold water tank 61 and the liquid refrigerant control valve (33) is a conventional refrigeration air conditioning cycle compressor (1), condenser (2) In addition to the expansion valve (4) and evaporator (3), the heat load (Heat load) of the industrial manufacturing equipment (Year load) Due to the nature of the manufacturing facility, the chiller system is not controlled by ON-OFF, but is required to operate for partial load (load less than the chiller's rated cooling capacity) in the facility where continuous operation is required. Conventional equipment that is used by heating the cooling water of the system (water, oil or brine, etc., used as cooling material in the evaporator and circulated by the pump, hereinafter referred to as cooling water) with an electric heater is used to control the capacity of the compressor, Gas control valve 31 and By controlling the pressure control valve (30, 34), a significant reduction in power consumption and year-round optimum condensation pressure control, not only energy saving, but also cooling water temperature control using the cold water tank 61, industrial equipment ( In particular, it has the characteristic of satisfy | filling the required cooling water temperature variation rate of semiconductor manufacturing equipment etc.).

Description

Chiller System {CHILLER SYSTEM}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chiller system, and an object thereof is to provide a cooling apparatus for cooling a heat load of an industrial facility (semiconductor manufacturing facility, laser, injection machine, medical device, chemical process facility, etc.) to enable a stable process. .

Conventional industrial chiller systems include the following.

 6 is an industrial chiller system composed of a compressor 1, a condenser 2, an expansion valve 4, an evaporator 3, an electric heater 80, a coolant pump 51, and a process facility 60. Although it is widely used as the most basic industrial cooling system for cooling the heat load of the process equipment 60 of the 500 to the chiller system 300, the heat load of the process equipment 60 is higher than the cooling capacity of the chiller system. In the case of the semiconductor manufacturing equipment which does not control the compressor 1 in the low part load state, the external heat load must be supplied to the electric heater 80 so that the power to the chiller system is consumed. It has the disadvantage of consuming power plus heater power consumption.

According to the present invention, the heat load of an industrial facility (semiconductor manufacturing facility, laser, injection machine, medical device and chemical process facility, etc.) is irregularly generated during year and day load by using a chiller system. It is an object of the present invention to provide a chiller system that performs a part load operation without using an electric heater and constantly controls the temperature variation of the coolant in a variable operation mode.

The present invention uses the condensing pressure control valve (30, 34), the hot gas control valve (31), the cold water tank 61 and the liquid refrigerant control valve (33) is a conventional refrigeration air conditioning cycle compressor (1), condenser (2) , An additional form attached to the expansion valve 4 and the evaporator 3, in which the heat load of the industrial manufacturing equipment varies randomly during the year and the day load. By controlling the variable capacity control, the hot gas control valve 31 and the condensation pressure control valves 30 and 34 of the compressor 1 without the use of an electric heater in operation, a significant power consumption can be reduced and Year) It is characterized by controlling the condensation pressure optimally, and controlling the temperature deviation of the cooling water outlet temperature by using the temperature sensors (73, 74, 75).

The chiller system of the present invention can significantly reduce the operating cost of the chiller system by controlling the capacity of the compressor and controlling the condensing pressure without using an electric heater in the cooling water system, and precisely controlling the cooling water temperature variation for industrial facilities. It has the advantage of stable operation.

In order to achieve the above object, the chiller system according to the present invention includes a compressor for compressing and discharging a refrigerant gas at a high temperature and high pressure, a condenser for condensing the refrigerant compressed by the compressor in a liquid phase, and a high temperature condensed in the condenser. An expansion valve for expanding the high pressure liquid refrigerant into a low pressure liquid refrigerant, and evaporating while achieving a refrigerating effect by heat exchange with the object to be cooled using the latent heat of evaporation of the refrigerant evaporated from the expansion valve. A chiller system comprising an evaporator for returning a low-temperature, low-pressure gaseous refrigerant gas to a compressor, and a cooling water system for cooling a process facility.

A compressor system (200) comprising the compressor (1), evaporator (3), expansion valve (4), hot gas control valve (31), liquid refrigerant control valve (33), and capillary tubes (40, 41);

A condenser system (2) comprising the condenser (20, 21), condensing pressure control valve (30, 34) and a cooling fan motor (50);

It is characterized by a cooling water system 500 comprising a cooling water tank 61, a cooling water pump 51, and a process facility 60.

The features and advantages of the present invention will become more apparent from the detailed description of the preferred embodiments based on the accompanying drawings. Prior to this, terms or words used in the present specification and claims should not be construed as being limited to the common or dictionary meanings, and the inventors may properly interpret the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, the chiller system which concerns on this invention is demonstrated, referring an accompanying drawing.

1 is a cycle diagram showing a schematic diagram of a chiller system according to the present invention.

Reference numeral 1 denotes a compressor, which is used to inhale refrigerant gas, compress it at high temperature and high pressure, and discharge it, and various forms such as reciprocating type, crank type, swash plate type, wobble plate type, rotary type, and scroll type depending on the purpose of use. Compressor can be applied.

The discharge line of the compressor 1 is connected to the condenser 20 and the condenser 21, the condensation pressure control valve 30 is located in the pipe of the condenser 20 in the compressor (1).

At this time, by dissipating the refrigerant gas compressed and discharged from the compressor 1 in the condenser 20, 21, it is condensed into a liquid refrigerant of high temperature and high pressure. Although not shown in detail, the condenser 20 and 21 are a plurality of tubes forming a predetermined flow path by connecting an inlet header, an outlet header, and an inlet / outlet header when the air heat exchanger is connected to each other; And a conventional type with corgate type heat transfer fins laminated between the tubes can be applied. Therefore, the air blown by the cooling fan passes through the heat transfer fins between the tubes, and in this process, the refrigerant flowing in the condenser is deprived of heat to the blown air, thereby performing the condensation of the refrigerant.

In addition, when the condenser 20, 21 is a water heat exchanger in the form of a plate heat exchanger, a cell-and-tube heat exchanger, a spiral tube and a double tube heat exchanger in the form of a heat loss to the heat in the water inside the heat exchanger to lose heat, condensation of the refrigerant is performed do.

On the other hand, the inlet line side of the compressor (1) by evaporating the refrigerant flowing from the expansion valve (4) to be described later by using the latent heat of evaporation heat exchanged between the object and the refrigerant to be cooled to achieve the freezing effect (3) Is connected. The evaporator (3) is in the form of a plate heat exchanger, a cell-and-tube heat exchanger, a spiral tube and a double tube heat exchanger, and the like to take the temperature (heat) into the cooling water in the heat exchanger to perform the evaporation of the refrigerant.

 At the inlet end of the evaporator 3, an expansion valve 4 for supplying the liquid refrigerant in the high temperature and high pressure state to the refrigerant in the low pressure state by the throttling action to supply the evaporator 3 so that the evaporation is easily performed is provided. Is installed. Although not shown in detail here, the expansion valve 4 has an internal pressure equalization capillary tube for controlling the trajectory of the high-pressure refrigerant flow path through the pressure transmission rod by the expansion displacement of the diaphragm according to the temperature inside the thermostat chamber. In general, the thermostatic expansion valve, the capillary type, and the electronic expansion valve, which are called TEV, can be used in various forms, such as an external pressure control method for adjusting the trajectory of the high-pressure refrigerant flow path by the expansion displacement of the diaphragm.

It is preferred that the compressor 1 has a hot gas bypass control valve 31 on the pipe branched on the pipe of the condenser system 2, and the capillary tube 40 is connected to the rear end thereof. The outlet pipe of is connected to the pipe between the expansion valve 4 and the evaporator (3).

In addition, there is a condensation pressure control valve 30 on the connecting pipe of the condenser 20 in the outlet pipe of the compressor 1, and on the pipe connecting the outlet side of the condenser 20 and the outlet side of the condenser 21. There is a check valve 34, a liquid refrigerant control valve 33 branches in the pipe between the outlet side of the condenser system 2 and the expansion valve 4, and a capillary tube 41 is provided at the rear end of the liquid refrigerant control valve 33. ) Is preferably attached, and the outlet side of the capillary tube 41 is connected to the suction side pipe of the compressor 1.

On the other hand, the coolant system 500 is the outlet of the coolant pump 51 is the coolant tank after the low temperature of the coolant is cooled in the evaporator (3) of the chiller system 300 by the temperature rise after heat exchange with the heat load of the process equipment (60) It is drawn in to 61, and is drawn in again to the process facility 60 by the cooling water pump 51. FIG.

When the operation of the present invention is classified according to the type of operation, 1) it can be classified into a full load mode and a partial load mode.

First, the full load mode is a state in which the cooling demand heat load of the process facility 60 of FIG. 1 is full load, and the compressor 1 is at full load operation. In operation, the condenser 20, 21 of the condenser system 2 condenses the refrigerant in a gaseous state of high temperature and high pressure discharged from the compressor 1, introduces it into the expansion valve 4 as a high pressure liquid refrigerant, and expands the expansion valve 4. ) Is supplied at the inlet end of the evaporator (3) to the evaporator (3) to expand the liquid refrigerant of the high temperature and high pressure state into a low pressure refrigerant by the throttling action to facilitate the evaporation action, the evaporator (3) By evaporating the refrigerant flowing from the expansion valve (4) by using the latent heat of evaporation at this time the heat exchanged between the coolant and the refrigerant to cool the cooling water and suck the compressor (1) in a low-temperature low-pressure gas state.

In this operation mode, the hot gas control valve 31 is operated in a controlled state, and the liquid refrigerant control valve 33 is set to a discharge value of the compressor 1 by the temperature sensor 70 of the control system diagram of FIG. , 95 ° C) or higher, and closes below the set value (eg, 85 ° C), and the condenser fan motor 50 reduces the condensing pressure in winter and low-temperature weather conditions. Controlled by the set pressure (On-off or speed control or inverter, etc.), the condensation pressure control valve 30 is operated in the open (summer) in summer, condenser to control the condensation pressure in cold weather conditions and low temperature outside Even when the fan motor 50 is controlled, the condensation pressure fluctuation range is large, and the condenser fan motor 50 is intermittently controlled, or the condensation pressure is set even when the inverter is controlled at the minimum frequency (eg, 20 Hz). lower than the bar) Therefore, in order to prevent this, the condensation pressure control valve 30 is closed to control the condenser heat transfer area so that normal operation is made.

In this mode, the chiller system 300 controls the temperature data of the temperature sensors 73, 74, and 75 of the cooling water system 500 in the main controller 100 in comparison with the cooling water set temperature. In the compressor 1, the compressor 1 is operated at the maximum capacity. When the variable capacity control compressor 1 is applied below the set temperature, the capacity is decreased. In the compressor 1 of the constant capacity (constant capacity), the hot gas control valve 31 By reducing the cooling capacity of the chiller system 300 to maintain the temperature of the coolant to the set temperature.

The condensation pressure control valve 30, the hot gas control valve 31, and the liquid refrigerant control valve 32 perform on / off control in the solenoid valve type, and proportional control in the proportional control valve type (0). -100%).

2) The part load operation mode (Part load) is a state in which the cooling demand heat load of the process equipment 60 of FIG. 1 is a part load, and the compressor 1 is an evaporator 3. The low temperature low pressure refrigerant gas at the outlet is compressed into a high temperature and high pressure refrigerant gas, and the condensers 20 and 21 of the condenser system 2 condense the high temperature and high pressure gaseous refrigerant discharged from the compressor 1 to generate a high pressure liquid. The refrigerant is introduced into the expansion valve 4 in the refrigerant state, and the expansion valve 4 is easily evaporated by expanding the liquid refrigerant in the high temperature and high pressure state supplied to the inlet end of the evaporator 3 into the refrigerant in the low pressure state by the throttling action. It is supplied to the evaporator 3 as much as possible, and the evaporator 3 evaporates the refrigerant flowing from the expansion valve 4 so as to exchange heat between the cooling water and the refrigerant by using the latent heat of evaporation to cool the cooling water and to supply a low temperature low pressure gas to the compressor. Inhale as it is.

In this operation mode, the hot gas control valve 31 is operated in a controlled state, and the liquid refrigerant control valve 33 is set to a discharge value of the compressor 1 by the temperature sensor 70 of the control system diagram of FIG. , 95 ° C) or higher, open state, close below the set value (eg 85 ° C), and the condenser fan motor 50 operates in winter or in low-temperature weather conditions or partial load operation. Control the condensation pressure to the set pressure (On-off, speed control or inverter, etc.), the condensation pressure control valve 30 is operated in the open (summer) in the summer, weather conditions or partial loads in the winter or low outside temperature Even if the condenser fan motor 50 is controlled for condensation pressure control during operation, the condensation pressure fluctuation range is large, and the control of the condenser fan motor 50 is intermittently performed, or even at the minimum frequency (eg, 20 Hz) control when controlling the inverter. Condensing pressure And so that a normal operation by closing (Close), the condensation pressure control side (30) in order to prevent this, by controlling the heat transfer area of the condenser made because the phenomenon occurs is lowered to less than 15 bar).

In this mode, the capacity control of the chiller system 300 does not control the capacity of the compressor 1 when the compressor 1 is in the form of a constant volume, so that the hot gas control valve 31 is controlled alone, and the variable ( variable volume) (e.g., inverter) is a type of controlling the capacity of the compressor (1) and controlling the hot gas control valve (31).

In FIG. 2, the temperature data of the temperature sensors 73, 74, and 75 of the cooling water system 500 are measured by the main controller 100, and compared with the cooling water setting temperature. By controlling the hot gas bypass control valve 31 to reduce the amount of hot gas bypass to increase the cooling capacity of the chiller system 300, the compressor (1) in the form of variable volume capacity (e.g. inverter) Control to increase the capacity of the capacitor (eg, increase frequency in the case of inverter compressor; 50Hz-> 55Hz).

The control for reducing the hot gas bypass capacity of the hot gas control valve 31 controls the on-off time period to be long when the hot gas control valve 31 is a solenoid valve, and in the form of a proportional control valve, Yes, reduce valve opening: 50%-> 40%).

On the other hand, when the temperature of the coolant is lower than the set temperature, the constant volume compressor 1 controls the hot gas control valve 31 to increase the amount of hot gas bypass to decrease the cooling capacity of the chiller system 300. In the form of variable volume capacity (e.g. inverter), the capacity of the compressor 1 is reduced (e.g. frequency reduction in the case of inverter compressor; 50 Hz-> 45 Hz). At a minimum control frequency (eg 30 Hz), the frequency is controlled to reduce the cooling capacity by controlling the hot gas valve 31.

At this time, the control for increasing the hot gas bypass capacity of the hot gas control valve 31 controls the long on-off time period if the hot gas control valve 31 is a solenoid valve, and in the form of a proportional control valve, E.g. valve opening degree: 50%-> 40%).

In the full load mode and the partial load mode, the electric heater of the conventional chiller system (chiller system) (Fig. 7; 80) is not used, and thus a significant energy saving can be achieved. When the variable capacity of (1) is applied, it is possible to drastically reduce the energy by reducing the power of the electric heater 80 + the compressor 1.

       3 is a diagram Pi illustrating the cycle of the chiller system according to the present invention, wherein the conventional refrigeration air conditioning cycles i1 ′, i2 ′, i3 ′ operate at high pressure P2 ′ and low pressure P1 ′. In the cycles i1, i2, i3 of the invention, in the system operating at high pressure (P2) and low pressure (P1), the discharge temperature is i2 'is higher than i2, so i2' becomes high temperature, and the amount (i2'-i1 ') Since it is larger than this amount (i2-i1), the conventional refrigeration air conditioning system causes damage due to the overload of the compressor (1) with more amount and higher discharge temperature, and the unit cooling capacity (i1-i3) is (i1). It is larger than '-i3') to improve the cooling capacity of the evaporator (3) to improve the cooling capacity of the cooling water at the outlet of the evaporator (3).

4 and 5 are time-pressure diagram and pressure-power diagram when the full load and partial load operation of the chiller system according to the present invention, the conventional chiller cycle (AB-C ') is operated at a high pressure (P2') Since the cycle ABC of the present invention is a high pressure P2, the power consumption at this time consumes W1 at P2 and W2 at P2 ', so W2> W1, so that the cycle of the present invention has a lower energy consumption than a conventional chiller system. It's a cycle.

Therefore, in the present invention, the power consumption reduction rate at the time of partial load operation is capable of high efficiency operation of [Wt = Wh (heater required power) + Wc (compressor variable capacity control power saving) + Wcond (condensation pressure control power saving)). Do.

1 is a schematic diagram of a heat pump system according to the present invention;

2 is a view showing a control system diagram of a heat pump system according to the present invention.

3 is a view showing a cycle diagram of a refrigeration air conditioning system according to the present invention

4 is a view showing a time-pressure diagram of a refrigeration air conditioning system according to the present invention;

5 is a view showing the pressure-consumption power of the refrigeration air conditioning system according to the present invention

6 is a schematic diagram of an example of a conventional system.

Claims (6)

A compressor for compressing and discharging the refrigerant gas to a high temperature and high pressure state, a condenser for condensing the refrigerant compressed in the compressor to a liquid phase, and an expansion for expanding the high temperature and high pressure liquid refrigerant condensed in the condenser into a low pressure liquid refrigerant Evaporator and process for returning the low-temperature, low-pressure gaseous refrigerant gas to the compressor while achieving a refrigeration effect by heat exchange with the object to be cooled using the latent heat of evaporation while evaporating the valve and the refrigerant expanded by the expansion valve. In a chiller system comprising a cooling water system for cooling equipment, A compressor system comprising the compressor, an evaporator, an expansion valve, a hot gas control valve, a liquid refrigerant control valve, and a capillary tube; A condenser system comprising the condenser, a condensation pressure control valve and a cooling fan motor; A chiller system characterized by a chilled water system consisting of a chilled water tank, a chilled water pump and a process facility. The condenser system of claim 1, wherein the condenser system is manufactured by attaching a condensation pressure control valve and a check valve to the at least one condenser in a form in which one or more condensers are connected in parallel, and controlling the condenser fan motor for condensing pressure control. In the form that is produced in the form, the form is produced in the form that the check valve attached or omitted. The method of claim 1, wherein a pipe is branched between the compressor and the condenser for hot gas bypass and connected to the inlet of the evaporator, and a control valve is attached to control the hot gas bypass capacity. The system of claim 1, wherein the cooling water system is a form in which the cooling water tank and the cooling water pump are connected between the process equipment and the evaporator, and optionally the cooling water tank can be omitted. The method of claim 1, wherein the capacity control and condensation pressure control of the compressor or the capacity control and hot gas control and condensation pressure control of the compressor are simultaneously performed for the partial load operation, or the hot gas control and the condensation pressure control are simultaneously performed. system. The system of claim 1, wherein the cooling water control system is omitted.

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