KR20100068818A - 절삭공구용 다층경질 박막 - Google Patents
절삭공구용 다층경질 박막 Download PDFInfo
- Publication number
- KR20100068818A KR20100068818A KR1020080127298A KR20080127298A KR20100068818A KR 20100068818 A KR20100068818 A KR 20100068818A KR 1020080127298 A KR1020080127298 A KR 1020080127298A KR 20080127298 A KR20080127298 A KR 20080127298A KR 20100068818 A KR20100068818 A KR 20100068818A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- thin film
- outermost layer
- group
- al2o3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
- 절삭공구를 이루는 초경 모재 및 써메트 모재 또는 세라믹 모재 위에 화학 기상 증착법을 통해 형성되는 다층경질 박막에 있어서,10~300㎛ 입자를 이용하여 습식 블라스팅 처리를 실시하여 인장 잔류응력 및 표면 거칠기를 감소시키면서 고인성 내마모성을 갖는 Al2O3를 최외각 층으로 하고,상기 최외각층의 하지층은 식별성이 우수하고 다양한 색상을 가지며 최외각층과의 밀착력을 향상시키면서 내마모성이 우수한 주기율표상의 Ⅳ족, Ⅴ족, Ⅵ족 금속 원소 중 하나 또는 그 이상의 탄화물, 질화물, 탄질화물, 붕화탄질화물을 박막 증착한 것을 특징으로 하는 절삭공구용 다층경질 박막.
- 제 1항에 있어서, 상기 하지층은 Me(BxCyNz)로 구성되며, 여기서 Me는 주기율표상의 Ⅳ족, Ⅴ족, Ⅵ족 금속 원소 중 하나이고, x+y+z=1, 0≤x<0.01, 0.05<z<0.95을 특징으로 하는 절삭공구용 다층경질 박막.
- 제 1항 또는 제 2항에 있어서, 상기 최외각층은 κ-Al2O3이면서 단층 또는 다층으로 구성되고, 0.5~8㎛ 두께 -2~6㎛ 두께가 우선시 - 로 증착되는 것을 특징으로 하는 절삭공구용 다층경질 박막.
- 제 1항 또는 제 2항에 있어서, 상기 하지층은 증착 가스의 구성 비율에 따라 검정색, 노란색, 갈색, 회색, 아이보리색, 빨간색 중 어느 하나인 것을 특징으로 하는 절삭공구용 다층경질 박막.
- 제 1항 또는 제 2항에 있어서, 상기 최외곽층은 표면 거칠기(Ra)가 0.05~0.100㎛ 인 것을 특징으로 하는 절삭공구용 다층경질 박막.
- 제 1항 또는 제 2항에 있어서, 상기 최외곽층은 상면과 측면의 색상이 동일하며, 응력이 -100~3900MPa 인 것을 특징으로 하는 절삭공구용 다층경질 박막.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080127298A KR20100068818A (ko) | 2008-12-15 | 2008-12-15 | 절삭공구용 다층경질 박막 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080127298A KR20100068818A (ko) | 2008-12-15 | 2008-12-15 | 절삭공구용 다층경질 박막 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20100068818A true KR20100068818A (ko) | 2010-06-24 |
Family
ID=42367016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080127298A Ceased KR20100068818A (ko) | 2008-12-15 | 2008-12-15 | 절삭공구용 다층경질 박막 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20100068818A (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018183862A (ja) * | 2017-04-21 | 2018-11-22 | 株式会社タンガロイ | 被覆切削工具 |
JP2018183864A (ja) * | 2017-04-21 | 2018-11-22 | 株式会社タンガロイ | 被覆切削工具 |
CN116140661A (zh) * | 2023-01-28 | 2023-05-23 | 湘潭大学 | 一种残余应力增韧金属陶瓷刀具及其加工系统 |
-
2008
- 2008-12-15 KR KR1020080127298A patent/KR20100068818A/ko not_active Ceased
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018183862A (ja) * | 2017-04-21 | 2018-11-22 | 株式会社タンガロイ | 被覆切削工具 |
JP2018183864A (ja) * | 2017-04-21 | 2018-11-22 | 株式会社タンガロイ | 被覆切削工具 |
CN116140661A (zh) * | 2023-01-28 | 2023-05-23 | 湘潭大学 | 一种残余应力增韧金属陶瓷刀具及其加工系统 |
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Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20081215 |
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PG1501 | Laying open of application | ||
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Comment text: Notification of reason for refusal Patent event date: 20110211 Patent event code: PE09021S01D |
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PE0601 | Decision on rejection of patent |
Patent event date: 20111021 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20110211 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |