KR20100035247A - 레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의신호선 형성 방법 - Google Patents
레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의신호선 형성 방법 Download PDFInfo
- Publication number
- KR20100035247A KR20100035247A KR1020080094501A KR20080094501A KR20100035247A KR 20100035247 A KR20100035247 A KR 20100035247A KR 1020080094501 A KR1020080094501 A KR 1020080094501A KR 20080094501 A KR20080094501 A KR 20080094501A KR 20100035247 A KR20100035247 A KR 20100035247A
- Authority
- KR
- South Korea
- Prior art keywords
- transparent electrode
- metal film
- forming
- signal line
- touch panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000034 method Methods 0.000 title claims abstract description 46
- 238000000059 patterning Methods 0.000 title claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 67
- 239000002184 metal Substances 0.000 claims abstract description 67
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000005530 etching Methods 0.000 claims abstract description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 10
- 238000005240 physical vapour deposition Methods 0.000 claims description 10
- 229910052709 silver Inorganic materials 0.000 claims description 10
- 239000004332 silver Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 41
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
- G06F3/04164—Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0108—Transparent
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/032—Materials
- H05K2201/0326—Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Nonlinear Science (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Human Computer Interaction (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Position Input By Displaying (AREA)
- Manufacture Of Switches (AREA)
Abstract
Description
Claims (6)
- 베이스 기판의 상면에 투명 전극을 형성하는 제1단계;상기 투명 전극의 상면에 금속막을 형성하는 제2단계;상기 금속막의 상면에 레이저를 조사하여 상기 금속막 및 상기 투명 전극을 에칭함으로써, 상기 투명 전극에 패턴을 형성하는 제3단계;상기 패턴이 형성된 상기 투명 전극 상면에 형성된 금속막을 제거하는 제4단계;를 포함하여 구성되는 투명 전극의 패턴화 방법.
- 제1항에 있어서,상기 제2단계는,물리기상증착(PVD) 방법을 이용하여 상기 투명 전극의 상면에 금속막을 형성하는 것을 특징으로 하는 투명 전극의 패턴화 방법.
- 제1항 또는 제2항에 있어서,상기 금속막은,금, 은, 구리 또는 알루미늄 중 하나 이상의 금속을 포함하여 구성되는 것을 특징으로 하는 투명 전극의 패턴화 방법.
- 베이스 기판의 상면에 투명 전극을 형성하는 제1단계;상기 투명 전극의 상면에 금속막을 형성하는 제2단계;상기 금속막 중 신호선을 구성할 부분의 가장자리에 레이저를 조사하여 상기 금속막 및 상기 투명 전극을 에칭함으로써, 상기 금속막에 신호선을 형성하는 제3단계;상기 투명 전극 상면에 형성된 금속막 중, 상기 신호선을 구성하지 않는 부분을 제거하는 제4단계;를 포함하여 구성되는 터치 패널의 신호선 형성 방법.
- 제4항에 있어서,상기 제2단계는,물리기상증착(PVD) 방법을 이용하여 상기 투명 전극의 상면에 금속막을 형성하는 것을 특징으로 하는 터치 패널의 신호선 형성 방법.
- 제4항 또는 제5항에 있어서,상기 금속막은,금, 은, 구리 또는 알루미늄 중 하나 이상의 금속을 포함하여 구성되는 것을 특징으로 하는 터치 패널의 신호선 형성 방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080094501A KR20100035247A (ko) | 2008-09-26 | 2008-09-26 | 레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의신호선 형성 방법 |
PCT/KR2009/005222 WO2010035976A1 (ko) | 2008-09-26 | 2009-09-15 | 레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의 신호선 형성 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080094501A KR20100035247A (ko) | 2008-09-26 | 2008-09-26 | 레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의신호선 형성 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20100035247A true KR20100035247A (ko) | 2010-04-05 |
Family
ID=42059915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080094501A Ceased KR20100035247A (ko) | 2008-09-26 | 2008-09-26 | 레이저를 이용한 투명 전극의 패턴화 방법 및 터치 패널의신호선 형성 방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR20100035247A (ko) |
WO (1) | WO2010035976A1 (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101140954B1 (ko) * | 2010-05-13 | 2012-05-03 | 삼성전기주식회사 | 투명 전도성 기판과 그 제조방법, 및 이를 이용한 터치스크린 |
WO2012057568A3 (ko) * | 2010-10-29 | 2012-06-21 | 주식회사 티메이 | 터치패널용 패드의 제조방법 및 이 제조방법에 의해 제조되는 터치패널용 패드 |
WO2012173455A3 (ko) * | 2011-06-16 | 2013-04-11 | 솔렌시스 주식회사 | 터치 패널 제조 방법, 및 이를 위한 레이저 장치 |
KR101384110B1 (ko) * | 2010-10-29 | 2014-04-10 | 박준영 | 터치패널용 패드의 제조방법 및 이 제조방법에 의해 제조되는 터치패널용 패드 |
WO2018070620A1 (ko) * | 2016-10-11 | 2018-04-19 | 위아코퍼레이션 주식회사 | 레이저를 이용한 ito 결정화 장치 및 방법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05299679A (ja) * | 1992-04-22 | 1993-11-12 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
JP2581373B2 (ja) * | 1992-04-27 | 1997-02-12 | 双葉電子工業株式会社 | 透明導電膜配線基板の製造方法 |
KR100395598B1 (ko) * | 2001-07-05 | 2003-08-21 | 주식회사 이오테크닉스 | 레이저를 이용한 터치스크린의 투명전극 식각 방법 |
JP4103865B2 (ja) * | 2004-07-27 | 2008-06-18 | セイコーエプソン株式会社 | 有機el表示装置の製造方法 |
-
2008
- 2008-09-26 KR KR1020080094501A patent/KR20100035247A/ko not_active Ceased
-
2009
- 2009-09-15 WO PCT/KR2009/005222 patent/WO2010035976A1/ko active Application Filing
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101140954B1 (ko) * | 2010-05-13 | 2012-05-03 | 삼성전기주식회사 | 투명 전도성 기판과 그 제조방법, 및 이를 이용한 터치스크린 |
WO2012057568A3 (ko) * | 2010-10-29 | 2012-06-21 | 주식회사 티메이 | 터치패널용 패드의 제조방법 및 이 제조방법에 의해 제조되는 터치패널용 패드 |
KR101384110B1 (ko) * | 2010-10-29 | 2014-04-10 | 박준영 | 터치패널용 패드의 제조방법 및 이 제조방법에 의해 제조되는 터치패널용 패드 |
WO2012173455A3 (ko) * | 2011-06-16 | 2013-04-11 | 솔렌시스 주식회사 | 터치 패널 제조 방법, 및 이를 위한 레이저 장치 |
WO2018070620A1 (ko) * | 2016-10-11 | 2018-04-19 | 위아코퍼레이션 주식회사 | 레이저를 이용한 ito 결정화 장치 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
WO2010035976A1 (ko) | 2010-04-01 |
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