KR20090108426A - Carbon nanotube patch, its manufacturing method, and its use method - Google Patents

Abstract

PURPOSE: A carbon nanotube patch and a fabrication method thereof are provided to control the absorption rate of cosmetics or medicines into skin in order to repair damaged skin. CONSTITUTION: A carbon nanotube patch comprises an electrode(100), carbon nanotubes(110), and interlayer dielectric(120). The carbon nanotubes are arranged on one side of the electrode. The interlayer dielectric is filled into the gaps between the carbon nanotubes. One ends of the carbon nanotubes are contacted with the electrode. The other ends of the carbon nanotubes are directly or indirectly in contact with a user's skin. The carbon nanotubes deliver voltage to the user's skin for electrostimulation.

Description

Carbon nanotube patch, manufacturing method thereof, and use method thereof {CARBON NANO TUBE PATCH, THE FABRICATION METHOD OF THE SAME, THE USING METHOD OF THE SAME}

The present invention relates to a patch. In particular, the present invention relates to a medical / beauty patch using carbon nanotubes.

Carbon nanotubes (CNTs) are a few um long and only a few nm in diameter, so when the electric field is applied, the electric field is amplified very strongly at the end of the carbon nanotubes. As a result, field emission is possible in CNTs at several volts / um. And, CNTs are very hard, and the electrical conductivity is also very good. Carbon nanotubes include single-walled carbon nanotubes, multi-walled carbon nanotubes, and bundles. Mass production of carbon nanotubes is expected soon.

The patch using the conventional ion topper shape applied a voltage to a solid electrode. However, since it is solid, the solid electrode patch is difficult to apply to curved skin such as the face. In addition, the distance between the solid electrode and the skin is not constant, the drug transmittance may be different depending on the position. In addition, a skin treatment device that stimulates the skin by applying a DC or RF voltage to the solid electrode is also difficult to apply to curved skin such as skin.

One technical problem to be solved by the present invention is to provide a patch for promoting drug absorption of the skin by using the characteristics of carbon nanotubes that emit a strong electric field at a small voltage.

One technical problem to be solved by the present invention is to provide a method for producing a patch to promote the drug absorption of the skin by using the properties of carbon nanotubes that emit a strong electric field at a small voltage.

One technical problem to be solved by the present invention is to provide a method of using the patch to promote the drug absorption of the skin by using the characteristics of carbon nanotubes that emit a strong electric field at a small voltage.

Carbon nanotube patch according to an embodiment of the present invention includes an electrode, carbon nanotubes disposed on one surface of the electrode, and an interlayer dielectric filling between the carbon nanotubes, the carbon nanotubes of One end is in contact with the electrode, and the other end of the carbon nanotube is in direct or indirect contact with the skin.

In one embodiment of the present invention, the carbon nanotubes may be disposed perpendicular to the electrode.

In one embodiment of the present invention, by applying a voltage to the carbon nanotubes through the electrode may give an electrical stimulation to the skin.

In one embodiment of the present invention, the electrode and the interlayer dielectric may be formed of a flexible material.

In one embodiment of the present invention, the top surface of the carbon nanotubes and the interlayer dielectric may be flat.

In one embodiment of the present invention, a protective film may be further included on the other end of the interlayer dielectric and the carbon nanotubes.

In one embodiment of the present invention, a drug layer may be further included between the interlayer dielectric and the other end of the carbon nanotubes and the skin.

In one embodiment of the present invention, the voltage may be applied to the carbon nanotubes to infiltrate the drug into the skin.

In one embodiment of the present invention, further comprising a power supply, the power supply may be electrically connected to the electrode.

In one embodiment of the present invention, the power supply unit includes a power source and a control unit, the control unit may control the waveform applied to the electrode.

In one embodiment of the present invention, the waveform applied to the electrode may include at least one of DC, pulse, AC, RF.

In one embodiment of the present invention, the adhesive tape further comprises, the adhesive tape is disposed on the other surface of the electrode can be in close contact with the carbon nanotubes on the skin.

Carbon nanotube patch according to an embodiment of the present invention is a lower electrode, the lower carbon nanotubes disposed on one surface of the lower electrode, and the lower interlayer dielectric filling the lower portion of the lower carbon nanotubes, the lower interlayer An upper electrode formed on the dielectric, upper carbon nanotubes disposed on the upper electrode, and an upper interlayer dielectric filling the upper and lower carbon nanotubes of the lower carbon nanotubes, wherein the upper carbon nanotubes One end of the lower carbon nanotubes is in contact with the lower electrode, and the other end of the lower carbon nanotubes and the upper carbon nanotubes is in direct or indirect contact with the skin.

In one embodiment of the present invention, the upper portion of the first carbon nanotubes on the first interlayer dielectric may be coded with a nanotube insulating film.

Method of manufacturing a carbon nanotube patch (patch) according to an embodiment of the present invention includes forming carbon nanotubes on one surface of the electrode, and filling the interlayer dielectric between the carbon nanotubes, the carbon One end of the nanotubes is in contact with the electrode, and the other end of the carbon nanotubes faces the object to be treated.

In an embodiment of the present invention, the forming of the carbon nanotubes may include spraying a solvent including carbon nanotubes already grown on the electrode, removing the solvent, and applying an electric field to the electrode. It may include the step of aligning the carbon nanotubes.

In one embodiment of the present invention, filling the interlayer dielectric between the carbon nanotubes may include spin coating or depositing the interlayer dielectric of the carbon nanotubes.

In one embodiment of the present invention, at least one of the steps of planarizing the carbon nanotubes, forming a protective film on the carbon nanotubes, and forming an adhesive tape on the other surface of the electrode It may include.

In one embodiment of the present invention, the planarizing the carbon nanotubes may use a chemical mechanical polishing process.

In an embodiment, the planarizing of the carbon nanotubes may include forming a hard mask layer on the other end of the carbon nanotubes, selectively etching the carbon nanotubes, and the hard mask layer. It may include the step of removing.

In an embodiment of the present invention, the forming of the passivation layer on the carbon nanotubes may include selectively etching some of the carbon nanotubes and surface treatment, and depositing the passivation layer on the carbon nanotubes. It may include.

A method of using a carbon nanotube patch according to an embodiment of the present invention includes bonding a patch including carbon nanotubes to a skin, and applying a voltage to the carbon nanotubes to release an electric field to the skin. do.

Patches comprising carbon nanotubes according to the present invention can be used for muscle therapy, fat removal, neurotherapy, pain removal, dental pain removal, effective administration of drugs, skin massage and the like. One side of the patch containing the carbon nanotubes according to the present invention to the skin, the other side by applying a DC voltage or a pulse voltage to stimulate the skin with electrons emitted from the electric field and / or carbon nanotubes to regenerate the skin To improve the skin permeability of the effects and drugs / cosmetics to achieve a cosmetic / medical effect. The patch including carbon nanotubes according to the present invention may have an effect of regulating intracellular absorption rate after applying cosmetics / drugs and promoting regeneration of skin damage sites such as bruising. In addition, the patch containing carbon nanotubes according to the present invention can give an aging skin regeneration effect.

Carbon nanotubes are not damaged physically or chemically well and emit electrons or electric fields when voltage is applied. Using the properties of the carbon nanotubes, the patch using carbon nanotubes can stimulate the skin to prevent aging, regeneration of damaged cells. The carbon nanotube patch according to the present invention is applied after applying the drug / cosmetic using an iontophoretic patch or an electro-poration phenomenon to improve the skin permeability of the drug / cosmetic cosmetic / medical use Can be used for Specifically, the carbon nanotube patch according to the present invention is epicondylitis, herpes neuralgia, sprain, carpal bone syndrome, tendinitis, arthritis, rheumatism, local anesthesia, temporomandibular joint syndrome (temporomandibular joiint, TMJ), tough tow (Turf) It can be used for toe, metatarsalphalangeal joint sprain, trigger point, nicotine absorption, insulin absorption for diabetes treatment, vomiting, nausea, skin massage, and skin regeneration treatment.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed contents can be thorough and complete, and to fully convey the spirit of the present invention to those skilled in the art. In the drawings, the thicknesses of electrodes, films, layers, and regions are exaggerated for clarity. In addition, where a film, layer is said to be "on" another film or electrode, it may be formed directly on the other layer or electrode or a third layer may be interposed therebetween. Portions denoted by like reference numerals denote like elements throughout the specification.

1 is a perspective view illustrating a patch according to an embodiment of the present invention.

Referring to FIG. 1, the patch according to the present invention includes an electrode 100, carbon nanotubes 110 disposed on one surface of the electrode 100, and an interlayer dielectric filling between the carbon nanotubes 110. 120). One end of the carbon nanotubes 110 may contact the electrode 100, and the other end of the carbon nanotubes 110 may directly or indirectly contact the skin 10.

Carbon nanotubes 110 are disposed on the electrode 100. One end of the carbon nanotubes 110 contacts the electrode 100. The carbon nanotubes 110 may be arranged perpendicular to the electrode 100, but are not limited thereto and may be arranged obliquely. The other end of the carbon nanotubes 110 may be in direct or indirect contact with the skin. The electrode 100 may be electrically connected to the power supply unit 170. The power supply unit 170 may apply an electric field between the electrode 100 and the skin 10. Accordingly, the carbon nanotubes 110 may emit an electric field and / or electrons. The electric field and / or electrons may stimulate the skin 10.

The electrode 100 may have conductivity. The electrode 100 may further include a support substrate (not shown). The electrode 100 may have a single layer structure or a multilayer structure. The electrode 100 may be a conductive polymer film. Alternatively, the electrode 100 may include an electrode formed on the polymer film. The electrode 100 may be a metal thin film. The electrode 100 may have flexibility, but is not limited thereto. The electrode 100 may be quartz / electrode or silicon / electrode. The electrode 100 may include at least one of a metal, a metal compound, a doped polysilicon, and a conductive polymer film. The electrode 100 may be freely deformed as long as electricity passes through one surface of the carbon nanotubes 110.

The carbon nanotubes 110 may include at least one of a single wall carbon nanotube, a multiwall carbon nanotube, and a rope. The carbon nanotubes 110 may have a diameter of several nm to several hundred nm. In addition, the carbon nanotubes 110 may have a length of several um to several thousand um. The carbon nanotubes 110 may be grown on the electrode 100 by a chemical vapor deposition method. Meanwhile, the carbon nanotubes 110 may not be directly grown on the electrode 100, but may orient the already grown carbon nanotubes 110 to the electrode 100. Alternatively, the carbon nanotubes 110 aligned and grown on another substrate may be peeled off to attach the grown carbon nanotubes 110 in an aligned state on the electrode 100. The carbon nanotubes 110 may be closely arranged to be in contact with each other, or may be coarsely arranged to maximize the concentration effect of the electric field. The density of the carbon nanotubes 110 per unit area may be variously modified according to the purpose of the patch. The carbon nanotubes 110 are preferably all aligned with the same length and in the same direction, but are not limited thereto and may have different lengths. The other ends of the carbon nanotubes 110 may be opened.

After sprinkling cobalt particles on the electrode 100, the carbon nanotubes 110 may be grown on the electrode 100. The cobalt particles may improve the growth linearity of the carbon nanotubes 110. Alternatively, when the carbon nanotubes 110 are grown while applying an electric field on the electrode 100, growth linearity of the carbon nanotubes 110 may be improved. The electric field on the electrode 100 may be formed by a plasma. The alignment direction of the carbon nanotubes 110 may coincide with the direction of the electric field.

The interlayer dielectric 120 may fill between the carbon nanotubes 110. The interlayer dielectric 120 may have a void (not shown). The interlayer dielectric 120 may be formed using spin coding, chemical vapor deposition, capillary phenomenon, or the like. The thickness of the interlayer dielectric 120 may be equal to the length of the carbon nanotubes 110. The interlayer dielectric 120 is flexible and may not be brittle. The interlayer dielectric 120 may permeate well between the carbon nanotubes. The interlayer dielectric 120 may have strong adhesion to the carbon nanotubes 110. In the formation of the interlayer dielectric 120, it is preferable not to damage the carbon nanotubes 110 and / or the electrode 100. The interlayer dielectric 120 is preferably harmless to the human body. The interlayer dielectric 120 may include at least one of plastic, acrylic resin, glass, silicone adhesive, polyimide, and rubber.

The passivation layer 130 may be disposed on the other end of the carbon nanotubes 110 and the interlayer dielectric 120. The protective layer 130 may prevent the carbon nanotubes 110 from being broken or pulled out. If the side effects such as skin irritation are caused by direct skin contact of the carbon nanotubes, the carbon nanotubes may be in direct contact with the skin. Can be prevented. The protective film 130 is harmless when in contact with the skin, the protective film 130 is preferably harmless when inhaling a human. In addition, the passivation layer 130 may have strong adhesion to the carbon nanotubes 110 and / or the interlayer dielectric 120, and the passivation layer 13 may have flexibility. Specifically, the protective layer 130 may include at least one of a thermally curable resin, a UV curable resin, a polyimide, a polyurethane, and a teflon. The passivation layer 130 may be deposited by deposition or spin coating. The protective layer 130 is not limited to the above materials. The passivation layer 130 may be a thin film to enable emission of an electric field and / or electrons.

The drug layer 140 may be disposed between the passivation layer 130 and the skin 10. The drug layer 140 may be formed by absorbing a drug on a fabric or a porous object capable of absorbing liquid. The drug layer 140 may be exchanged or recharged. The drug included in the drug layer 140 may include at least one of nicotine, insulin, an anticancer agent, an antibiotic, an antiemetic agent, a nerve stabilizer, an anesthetic drug, and the like. The drug is not limited to the above. The patch according to an embodiment of the present invention can intensively administer the drug to the treatment site, do not affect the stomach and intestine, and avoid the interference by the rapid metabolic action of food, stomach acid and liver in the stomach. The drug may be ionized. However, the drug is not limited to ionization.

According to a modified embodiment of the present invention, the drug layer 140 may include a cream or cosmetics. The cosmetic or cream can easily penetrate the skin by electrical stimulation by the carbon nanotubes (110).

The patch according to an embodiment of the present invention may include an adhesive tape 150. The adhesive tape 150 may be disposed on the other surface of the electrode 100 to closely adhere the carbon nanotubes 110 to the skin 10. The adhesive tape 150 may have flexibility. The adhesive tape 150 may include a fibrous layer and / or an acrylic layer. An adhesive (not shown) may be attached to one surface of the adhesive tape 150. The adhesive tape 150 may include a fabric, one surface of the fabric may be coated with plastic, and the other surface may be coated with an adhesive. The adhesive tape 150 may include plastic and an adhesive. The adhesive may be an acrylic adhesive. The adhesive tape 150 may include a vent 152. The arrangement and size of the vent may be variously modified. The adhesive tape 150 may include a skin electrode 151. The skin electrode 151 may be disposed in the adhesive tape to contact the skin 10. The skin electrode 151 and the electrode 100 may not be overlapped. Accordingly, the power supply unit 170 may apply a potential difference to the skin 10. The skin electrode 151 and the electrode 100 may be electrically connected to the power supply unit 170. According to the modified embodiment of the present invention, the patch and the skin may be in close contact with the elastic tape or the elastic band instead of the adhesive tape 150.

The connector 160 may be disposed on the other surface of the electrode 100. The connector 150 may be a means for electrically connecting the power supply unit 170 and the electrode 100. The connector 160 may be disposed to directly contact the other surface of the electrode 100. Meanwhile, when the electrode 100 includes a support substrate, the connector 160 may be disposed to be electrically connected to the electrode 100. The shape and position of the connector 160 may be variously modified.

The power supply unit 170 applies a voltage to the electrode 100. The voltage waveform applied to the electrode 100 may include at least one of DC, pulse, AC, and RF. The power supply unit 170 may be disposed on the other surface of the electrode 100. The power supply unit 170 may include a battery. The power supply unit 170 may be spatially separated from the electrode 100. The power supply unit 170 may include a power supply (not shown) and a control unit (not shown). The controller may variously modify the voltage applied to the electrode 100. In the case of single-walled carbon nanotubes, a current of 10 ^-6 amperes (A) may flow when a voltage of 2300 volts (V) is applied. Since this corresponds to the level of daily static electricity, an instantaneous voltage in the range of about several thousand volts (V) to several volts (V) may be applied to the skin to irritate the skin. The operating voltage applied to the electrode or the electrode may be limited to several tens of volts (V) or less for safety. In addition, the control unit may include a fuse and / or an overcurrent prevention circuit to prevent the flow of overcurrent. In the case of a 2cm x 3cm patch, when an operating voltage of 400 ~ 900V or less is applied to the electrode or the electrode, a current of a level that does not cause pain to the human body may flow.

2 is a cross-sectional view illustrating a patch according to another embodiment of the present invention.

Referring to FIG. 2, the patch according to the present invention may not include the drug layer described with reference to FIG. 1. The power supply unit may be disposed to be spatially adjacent to the patch. The patch can be used for skin massage or skin irritation. In addition, creams or cosmetics may be used instead of the drug layer.

The patch according to the present invention includes an electrode 100, carbon nanotubes 110 disposed on one surface of the electrode 100, and an interlayer dielectric 120 filling between the carbon nanotubes 110. One end of the carbon nanotubes 110 may contact the electrode 100, and the other end of the carbon nanotubes 110 may directly or indirectly contact the skin 10.

The support substrate 102 may be disposed on the other surface of the electrode 100. The support substrate 102 is preferably a flexible dielectric. The electrode 100 may include at least one of a metal, a metal compound, and a doped semiconductor. The carbon nanotubes 110 are disposed on one surface of the electrode 100. One end of the carbon nanotubes 110 contacts the electrode 100. The carbon nanotubes 110 may be arranged perpendicular to the electrode 100, but are not limited thereto and may be arranged obliquely. The other end of the carbon nanotubes 110 may be in direct or indirect contact with the skin. The electrode 100 may be electrically connected to the power supply unit 170. An electric field may be applied between the electrode 100 and the skin 10 by the power supply 170. Accordingly, the carbon nanotubes 110 may emit an electric field and / or electrons. The electric field and / or electrons may irritate the skin.

The electrode 100 may have flexibility, but is not limited thereto and may not have flexibility. The electrode 100 may have a single layer structure or a multilayer structure. The electrode 100 may include a support substrate 102. The support substrate 102 may be a polymer film. The electrode 100 may include an electrode formed on a polymer film. The electrode 100 may be a metal thin film. The electrode 100 may be quartz / electrode or silicon / electrode. The electrode may include at least one of a metal, a metal compound, and a doped polysilicon. The electrode 100 may be freely deformed as long as electricity passes through one surface of the carbon nanotubes 110.

The carbon nanotubes 110 may include at least one of a single wall carbon nanotube, a multiwall carbon nanotube, and a rope. The carbon nanotubes 110 may have a diameter of several nm to several hundred nm. In addition, the carbon nanotubes 110 may have a length of several um to several thousand um. The carbon nanotubes 110 may be grown on the electrode 100 by a chemical vapor deposition method. Meanwhile, the carbon nanotubes 110 may not be directly grown on the electrode 100, and the already grown carbon nanotubes 110 may be oriented in the electrode 100. Alternatively, the carbon nanotubes aligned and grown on another substrate may be peeled off to attach the carbon nanotubes 110 in the aligned state on the electrode 100. The carbon nanotubes 110 may be closely arranged to contact each other. The density of the carbon nanotubes 110 per unit area may be variously modified according to the purpose of the patch. The carbon nanotubes 110 are preferably all aligned with the same length and in the same direction, but are not limited thereto and may have different lengths.

The interlayer dielectric 120 may fill between the carbon nanotubes 110. The interlayer dielectric 120 may have a void (not shown). The interlayer dielectric 120 may be formed using spin coding, chemical vapor deposition, capillary phenomenon, or the like. The thickness of the interlayer dielectric 120 may be equal to the length of the carbon nanotubes. The interlayer dielectric 120 is flexible and may not be brittle. The interlayer dielectric 120 may penetrate well between the carbon nanotubes 110. The interlayer dielectric 120 may have a strong adhesion to the carbon nanotubes 110. When the interlayer dielectric 120 is formed, it is preferable that the carbon nanotubes 110 and / or the electrode 100 are not damaged. The interlayer dielectric 120 is preferably harmless to the human body.

A protective film 130 may be disposed on the other end of the carbon nanotubes 110 and the interlayer dielectric 120. The protective layer 130 may prevent the carbon nanotubes 110 from being broken or pulled out. If the side effects such as skin irritation are caused by direct skin contact of the carbon nanotubes, the carbon nanotubes may be in direct contact with the skin. Can be prevented. The protective film 130 is harmless when in contact with the skin, the protective film 130 is preferably harmless when inhaled by humans. In addition, the passivation layer 130 may have strong adhesion to the carbon nanotubes 110 and / or the interlayer dielectric 120, and the passivation layer 130 may have flexibility. Specifically, the protective layer 130 may include at least one of a thermally curable resin, a UV curable resin, a polyimide, a polyurethane, and a teflon. The passivation layer 130 may be deposited by deposition or spin coding. The protective layer 130 is not limited to the above materials.

The patch according to the present invention may include an adhesive tape 150. The adhesive tape 150 may be disposed on the other surface of the electrode 100 to closely adhere the carbon nanotubes 110 to the skin 10. The adhesive tape 150 may have flexibility. The adhesive tape 150 may include a fibrous layer and / or an acrylic layer 156. An adhesive 156 may be attached to one surface of the adhesive tape 150. The adhesive tape 150 may include a fabric, one surface of the fabric may be coated with plastic, and the other surface may be coated with an adhesive. The adhesive tape 150 may include plastic and an adhesive. The adhesive 156 may be an acrylic adhesive. The adhesive tape 150 may include a vent 152. The arrangement and size of the vent may be variously modified.

According to an embodiment of the present invention, the patch and the skin may be in close contact with the elastic tape or the elastic band instead of the adhesive tape.

The connector 160 may be disposed on the other surface of the electrode 100. The connector 160 may be a means for electrically connecting the power supply unit 170 and the electrode 100. When the electrode 100 includes the support substrate 102, the connector 160 may be disposed in a hole formed in the support substrate 102. Accordingly, the connector 160 may be in electrical contact with the electrode 100. As long as the connector 160 is arranged to be electrically connected to the electrode 100, the shape and position of the connector 160 may be variously modified.

The power supply unit 170 applies a voltage to the electrode 100. The voltage waveform applied to the electrode 100 may include at least one of DC, pulse, AC, and RF. The power supply unit 170 may be disposed on the other surface of the electrode. The power supply unit 170 may include a power supply (not shown) and a control unit (not shown). The controller may variously modify the voltage applied to the electrode 100. In the case of single-walled carbon nanotubes, a current of 10 ^-6 amperes (A) may flow when a voltage of 2300 volts (V) is applied. Since this corresponds to the level of daily static electricity, an instantaneous voltage in the range of about several thousand volts (V) to several volts (V) may be applied to the skin to irritate the skin. The operating voltage applied to the electrode or the electrode may be limited to several tens of volts (V) or less for safety. In addition, the controller may include a fuse and / or an overcurrent prevention circuit to prevent the flow of overcurrent. In the case of 2cm x 3cm patch, when an operating voltage of 400 ~ 900V or less is applied to the electrode or the electrode, a current of a level that does not cause pain to the human body may flow.

3 is a cross-sectional view illustrating a patch according to another embodiment of the present invention.

Referring to FIG. 3, the patch according to the present invention includes an electrode 100, an interlayer dielectric 120 filling between carbon nanotubes 110 and carbon nanotubes 110 disposed on one surface of the electrode 100. ). The electrode 120 may have conductivity. One end of the carbon nanotubes 110 may be in contact with one surface of the electrode 100, and the other end of the carbon nanotubes 120 may be in direct or indirect contact with the skin 10. The power supply unit 170 may apply a voltage between the skin 10 and the electrode 100 so that the carbon nanotubes 170 may emit an electric field and / or electrons to the skin 10. The power supply unit may apply a potential difference to the electrode and a skin electrode (not shown) in contact with the skin. Alternatively, according to a modified embodiment, the power supply unit 170 may apply a voltage only to the electrode 100. The adhesive tape 150 may adhere the carbon nanotubes 110 to the skin.

4 is a cross-sectional view illustrating a patch according to another embodiment of the present invention.

Referring to FIG. 4, the patch according to the present invention includes an electrode 100, an interlayer dielectric filling the space between the carbon nanotubes 110 and the carbon nanotubes 110 disposed on one surface of the electrode 100. 120). The support substrate 102 may be disposed on the other surface of the electrode 100. The support substrate 102 may be a flexible dielectric. The carbon nanotubes 110 are disposed on the electrode 100. One end of the carbon nanotubes 110 may be in contact with one surface of the electrode 100, and the other end of the carbon nanotubes 110 may be in direct or indirect contact with the skin 10. The power supply unit 170 may be electrically connected to the electrode 100. The method of connecting the power supply unit 170 and the electrode 100 may be variously modified. The adhesive tape 150 may adhere the carbon nanotubes 110 to the skin.

5 is a cross-sectional view illustrating a patch according to another embodiment of the present invention.

Referring to FIG. 5, the patch according to the present invention includes an electrode 100, an interlayer dielectric filling the space between the carbon nanotubes 110 and the carbon nanotubes 110 disposed on one surface of the electrode 100. 120). The electrode 110 may include a conductor. The carbon nanotubes 110 are disposed on the electrode 100. One end of the carbon nanotubes 110 may be in contact with one surface of the electrode 100, and the other end of the carbon nanotubes 110 may be indirectly in contact with the skin 10. The drug layer 140 may be disposed between the skin 10 and the other ends of the carbon nanotubes 110. The drug layer 140 may include a porous material absorbing drugs. The porous material may include at least one of a fabric and a porous material. The drug may include at least one of cosmetics or drugs. The electric field of the carbon nanotubes 110 may adjust the drug absorption rate of the cells of the skin 10. In addition, the electric field of the carbon nanotubes 110 may promote the regeneration of a skin injury site such as a bruise. The drug may be a drug that is typically administered to the skin via injection, orally or through the skin. In addition, the drug may include a cream or cosmetic for the cosmetic effect in addition to the therapeutic effect. The drug is not limited to being ionized in the drug layer 140. The power supply unit 170 applies a potential difference between the electrode and the skin. The power supply unit 170 may be electrically connected to the electrode 100. The skin 10 may not need to be electrically connected directly to the power supply. The adhesive tape 150 may adhere the carbon nanotubes 110 to the skin.

6 is a cross-sectional view illustrating a patch according to another embodiment of the present invention.

Referring to FIG. 6, the patch according to the present invention includes a lower electrode 200a, lower carbon nanotubes 210a disposed on one surface of the lower electrode 200a, and lower portions of the lower carbon nanotubes 210a. The lower interlayer dielectric 220a fills the gap. The patch may be disposed on the nanotube insulating layer 212 disposed on the upper side of the lower carbon nanotubes 210a, on the upper electrode 200b disposed on the lower interlayer dielectric 220a, and on the upper electrode 200b. The upper carbon nanotubes 210b may be disposed, and the upper interlayer dielectric 220b may fill the upper portions of the upper carbon nanotubes 210b and the lower carbon nanotubes 210a. The other end of the lower carbon nanotubes 210a, the other end of the upper carbon nanotubes 210b, and the upper surface of the upper interlayer dielectric 220b may be planarized. The passivation layer 230 may be disposed on the upper interlayer dielectric 220b. The protective layer 230 may directly or indirectly contact the skin. The power supply unit 270 applies a voltage difference between the lower electrode 200a and the upper electrode 200b. Accordingly, the lower carbon nanotubes 210a and / or the upper carbon nanotubes 210b may emit an electric field and / or electrons to the skin 10. The adhesive tape 250 may adhere the carbon nanotubes 210a and 210b to the skin 10.

7A and 7B are plan views and cross-sectional views illustrating a patch according to another embodiment of the present invention.

7A and 7B, the patch according to the present invention may include a plurality of carbon nanotube patches. The carbon nanotube patches may be arranged in a matrix form. The arrangement of the carbon nanotube patches may be variously modified. The carbon nanotube patches have a rectangular shape on a plan view, but are not limited thereto, and may be modified into various shapes such as an oval shape and a rhombus shape.

 The carbon nanotube patches may include a first carbon nanotube patch 380a and a second carbon nanotube patch 380b. The first carbon nanotube patch 380a may include a first electrode 300a, first carbon nanotubes 310a disposed on one surface of the first electrode 300a, and the first carbon nanotubes 310a. ) And a first interlayer dielectric 320a. The second carbon nanotube patch 380b includes a second electrode 300b, second carbon nanotubes 310b disposed on one surface of the second electrode 300b, and second carbon nanotubes 310b. ) And a second interlayer dielectric 320b that fills in the gaps. The adhesive tape 350 may be disposed to cover the first carbon nanotube patch 380a and the second carbon nanotube patch 380b. The adhesive tape 350 may adhere the carbon nanotube patches to the skin 10. The adhesive tape 350 may include a connection hole 358 for electrical connection with the power supply unit 370. The connection hole 358 may be disposed on the other surfaces of the first electrode 300a and the second electrode 300b. The power supply unit 370 may be electrically connected to the first electrode 300a and / or the second electrode 300b. The same voltage may be applied to the first electrode 300a and the second electrode 300b.

According to a modified embodiment of the present invention, different voltages of the first electrode 300a and the second electrode 300b may be applied. Specifically, a positive voltage may be applied between the first electrode and the second electrode. Subsequently, a negative voltage may be applied between the first electrode 300a and the second electrode 300b. The method of applying a voltage to the first electrode and the second electrode may be variously modified.

8A to 8G are cross-sectional views illustrating a method of manufacturing a patch according to another embodiment of the present invention. The carbon nanotube patch according to the present invention may be formed by forming carbon nanotubes 110 on one surface of an electrode 100 and filling an interlayer dielectric 120 between the carbon nanotubes 110. One end of the carbon nanotubes 110 is in contact with the electrode 110, the other end of the carbon nanotubes 110 is in direct or indirect contact with the skin. Forming the carbon nanotubes 110 is sprayed on the electrode 100, the solvent 112 including the already grown carbon nanotubes 110, the solvent is removed, to the electrode 100 It may include aligning the carbon nanotubes 110 by applying an electric field. Filling the interlayer dielectric 120 between the carbon nanotubes 110 may be performed by spin coating or depositing the carbon nanotubes interlayer dielectric.

Referring to FIG. 8A, a patch according to an embodiment of the present invention coats carbon nanotubes 110 mixed with a solvent 112 on an electrode 100. The solvent may include at least one of water, alcohol, toluene, and polystyrene. The solvent is not limited to the above materials. The density per unit area of the carbon nanotubes may be variously modified. Spin coding may be used to apply the solvent 112 including carbon nanotubes 110 onto the electrode.

Referring to FIG. 8B, the carbon nanotubes 110 may be aligned by drying the solvent while applying an electric field on the electrode 100. The carbon nanotubes 110 may be aligned in the direction of the electric field. Drying of the solvent may be dried in a vacuum. The drying time is preferably carried out at a temperature above room temperature. Moreover, 1 hour or more of drying time is preferable.

Referring to FIG. 8C, the interlayer dielectric 120 is formed on the aligned electrodes of the carbon nanotubes 110. The interlayer dielectric 120 may fill between the carbon nanotubes. The thickness of the interlayer dielectric 120 may be the same length of the carbon nanotubes. The interlayer dielectric 120 may be formed by spin coding, deposition, sputtering, or the like. The interlayer dielectric 120 may include at least one of silicon nitride, silicon oxide, polymer, resin, acrylic, glass, and plastic. The interlayer dielectric 120 may be applied by spin coating and formed through a drying process. The interlayer dielectric 120 is preferably flexible and not easily broken. The interlayer dielectric 120 is preferably permeated well between the carbon nanotubes. The interlayer dielectric 120 preferably has strong adhesion to the carbon nanotubes 110 and the electrode 100. The interlayer dielectric 120 may be a material that does not react with the electrode 100. The interlayer dielectric 120 may be harmless to a human body when contacted or inhaled.

Referring to FIG. 8D, a hard mask layer 122 may be deposited on the electrode 100 on which the interlayer dielectric 120 is formed. The hard mask layer 122 may be a material having an etching selectivity with respect to the carbon nanotubes 110. The hard mask layer 122 may be formed by spin coating or chemical vapor deposition. The hard mask layer 122 may include at least one of glass, a silicon nitride film, a silicon oxide film, a polymer film, and a conductive film.

Referring to FIG. 8E, the carbon nanotubes 110 may be selectively etched using the hard mask layer as an etch mask. Accordingly, the top surface of the hard mask layer 122 may be planarized. The etching may be performed by at least one of wet etching, dry etching, and chemical mechanical polishing processes.

Referring to FIG. 8F, the hard mask layer 122 may be removed. Removal of the hard mask layer 122 may be performed by at least one of wet etching, dry etching, and chemical mechanical polishing processes. Subsequently, a post-etch process may be additionally performed after processing the other ends of the carbon nanotubes 110. Accordingly, the other ends of the carbon nanotubes 110 may be opened. The post etching process may be a conventional dry etching method or may be a plasma enhanced oxidation process.

Referring to FIG. 8G, a passivation layer 130 may be formed on an upper surface of the interlayer dielectric 120. The passivation layer 130 may prevent the carbon nanotubes 110 from leaking out. The protective layer 130 may be a material harmless to the human body when contacted / inhaled. The passivation layer 130 may be thinly formed to facilitate emission of an electric field / electric field. In addition, the passivation layer 130 may have a strong adhesive force with the interlayer dielectric and / or the carbon nanotubes. The passivation layer 130 may have flexibility. Specifically, the protective layer 130 may include at least one of a thermally curable resin, a UV curable resin, a polyimide, a polyurethane, and a teflon. The passivation layer 130 may be deposited by deposition or spin coding. The protective layer 130 is not limited to the above materials.

9 is a cross-sectional view illustrating a step of forming carbon nanotubes on one surface of an electrode according to another embodiment of the present invention.

Referring to FIG. 9, the carbon nanotubes 110 may be grown while applying an electric field on the electrode 100. The electric field may improve the growth linearity of the carbon nanotubes 110. Meanwhile, a catalyst may be sprayed on the electrode 100, and then a hydrogen plasma may be formed to surface-treat the electrode 100. In this case, the growth linearity of the carbon nanotubes may be improved. The catalyst may be cobalt particles.

10A and 10C are cross-sectional views illustrating forming carbon nanotubes on one surface of an electrode according to another embodiment of the present invention.

10A to 10C, carbon nanotubes may be grown while applying an electric field on the substrate 98. Lower ends of the carbon nanotubes 110 may be attached to each other. The carbon nanotubes 110 may be formed using a plasma process. The formation temperature of the carbon nanotubes 110 may be more than 600 degrees Celsius. The substrate 98 may be a quartz or silicon substrate. The carbon nanotubes 110 may be attached to lower ends of the carbon nanotubes 110 and may be peeled off from the substrate 98. The stripped carbon nanotubes may be disposed on the electrode 100.

According to a modified embodiment of the present invention, the electrode 100 may be formed on the substrate 98. Applying an electric field on the electrode can grow the carbon nanotubes (110). Lower ends of the carbon nanotubes 110 may be attached to each other. The carbon nanotubes and the electrode may be separated from each other from the substrate. The separated carbon nanotubes and the electrode may be disposed on a support substrate (not shown).

According to a modified embodiment of the present invention, carbon nanotubes 110 are formed on the substrate 98, and then an interlayer dielectric 120 is formed. Subsequently, the carbon nanotubes 110 and the interlayer dielectric 120 may be separated from each other from the substrate 98. The separated carbon nanotubes and the interlayer dielectric may be disposed on the electrode 100.

11 is a cross-sectional view illustrating a step of planarizing the carbon nanotubes according to another embodiment of the present invention.

8D and 11, carbon nanotubes 110 are formed on the electrode 100, and the interlayer dielectric 120 is filled between the carbon nanotubes 110. In order to planarize the other ends of the carbon nanotubes 120, a top surface of the interlayer dielectric 120 may be planarized using a chemical mechanical polishing process.

12A to 12E are cross-sectional views illustrating patches of a multilayer structure according to an embodiment of the present invention.

Referring to FIG. 12A, lower carbon nanotubes are disposed on the lower electrode 200a. The methods of disposing the lower carbon nanotubes are omitted since they are overlapped with those described in FIGS. 8 to 10. One end of the lower carbon nanotubes 210a disposed on one surface of the lower electrode 200a contacts one surface of the lower electrode 200a. The lower carbon nanotubes 210a may be directly formed on the electrode 200a. The method of forming the lower carbon nanotubes 210a may be variously modified.

Referring to FIG. 12B, a lower interlayer dielectric 220a filling a lower portion of the lower carbon nanotubes 210a is coated. The lower interlayer dielectric 220a may be formed using spin coding, chemical vapor deposition, capillary phenomenon, or the like. The thickness of the lower interlayer dielectric 220a is preferably about half the length of the lower carbon nanotubes 210a. The lower interlayer dielectric 220a is flexible and may not be easily broken. The lower interlayer dielectric 220a may penetrate well between the first carbon nanotubes 210a. The lower interlayer dielectric 220a may have a strong adhesion to the lower carbon nanotubes 210a. When the lower interlayer dielectric 220a is formed, it is preferable that the lower carbon nanotubes 210a and / or the lower electrode 200a are not damaged. The lower interlayer dielectric 220a is preferably harmless to a human body. The lower interlayer dielectric may include at least one of a thermally curable resin, a UV curable resin, a polyimide, a polyurethane, and teflon.

Referring to FIG. 12C, a nanotube insulating film 212 is formed on the lower interlayer dielectric 220a. The nanotube insulating layer 212 may cover the upper portion of the lower carbon nanotubes 210a and the lower interlayer dielectric 220a. The nanotube insulating layer 212 may have a strong adhesion to the lower carbon nanotubes 210a. The nanotube insulating film 212 is preferably harmless to the human body. The carbon nanotube insulating layer may include at least one of a thermally curable resin, a UV curable resin, a polyimide, a polyurethane, a silicon nitride film, a silicon oxide film, and a teflon.

According to a modified embodiment of the present invention, the nanotube insulating film 212 on the lower interlayer dielectric may be selectively removed.

Referring to FIG. 12D, an upper electrode 200b is formed on the carbon nanotube insulating layer 212. The upper electrode 200b may be made of the same material as the lower electrode 200a. The upper electrode 200b may be formed using a sputtering apparatus or a plating apparatus with strong straightness. Upper carbon nanotubes 210b are formed on the lower electrode 200b. Next, an upper interlayer dielectric 220b is applied. The upper interlayer dielectric 220b may be the same material as the lower interlayer dielectric 220a. The top surface of the upper interlayer dielectric may then be planarized.

Referring to FIG. 12E, a passivation layer 230 is formed on the upper interlayer dielectric 220b. The protective layer 230 may directly or indirectly contact the skin. The power supply unit (not shown) applies a voltage difference between the lower electrode 200a and the upper electrode 200b. Accordingly, the lower carbon nanotubes 210a and / or the upper carbon nanotubes 210b may emit an electric field and / or electrons to the skin.

13A and 13 are plan views illustrating the shape of a patch according to an embodiment of the present invention.

13A and 13B, the patch may have a mask shape in which eyes, nose, and mouth are removed to cover the surface of the face. The patch can be flexible, so that the patch can be in close contact with the face. According to a modified embodiment of the present invention, a patch according to an embodiment of the present invention may have flexibility. Accordingly, it can be adhered to the skin with the curve, such as nose, joint area, chin area. The patch may include a connection hole 158 for electrical connection with a power supply (not shown). The shape of the patch according to the invention can be variously modified.

The method of using a carbon nanotube patch may include adhering a patch including carbon nanotubes to the skin, and applying an electric voltage to the carbon nanotubes to release an electric field to the skin. The patch can cosmetically treat the skin. On the other hand, when the patch includes a drug layer (not shown), the patch may medically treat the skin.

1 and 2 are perspective views illustrating a patch according to an embodiment of the present invention.

3 to 6 are cross-sectional views illustrating a patch according to another embodiment of the present invention.

7A and 7B are plan views and cross-sectional views illustrating a patch according to another embodiment of the present invention.

8A to 8G are cross-sectional views illustrating a method of manufacturing a patch according to another embodiment of the present invention.

9 is a cross-sectional view illustrating a step of forming carbon nanotubes on one surface of an electrode according to another embodiment of the present invention.

10A and 10C are cross-sectional views illustrating forming carbon nanotubes on one surface of an electrode according to another embodiment of the present invention.

11 is a cross-sectional view illustrating a step of planarizing carbon nanotubes according to another embodiment of the present invention.

12A to 12F are cross-sectional views illustrating patches of a multilayer structure according to an embodiment of the present invention.

13A and 13 are plan views illustrating the shape of a patch according to an embodiment of the present invention.

Claims (22)

electrode; Carbon nanotubes disposed on one surface of the electrode; And An interlayer dielectric filling between the carbon nanotubes, One end of the carbon nanotubes in contact with the electrode, the other end of the carbon nanotube patch, characterized in that the contact with the skin directly or indirectly. The method of claim 1, The carbon nanotubes patch is characterized in that disposed perpendicular to the electrode. The method of claim 1, Carbon nanotube patches, characterized in that the electrical stimulation to the skin by applying a voltage to the carbon nanotubes through the electrode. The method of claim 1, The electrode and the interlayer dielectric is a carbon nanotube patch, characterized in that formed of a flexible material. The method of claim 1, The carbon nanotube patch, characterized in that the top surface of the carbon nanotubes and the interlayer dielectric is flat. The method of claim 1, Carbon nanotube patch further comprises a protective film on the interlayer dielectric and the other end of the carbon nanotubes. The method of claim 1, And a drug layer between the interlayer dielectric and the other end of the carbon nanotubes and the skin. The method of claim 7, wherein Carbon nanotube patch, characterized in that to penetrate the drug by applying a voltage to the carbon nanotubes. The method of claim 1, Including a power unit, The power supply unit is a carbon nano tube patch, characterized in that electrically connected to the electrode. The method of claim 9, The power supply unit includes a power supply and a control unit, The control unit is a carbon nanotube patch, characterized in that for controlling the waveform applied to the electrode. The method of claim 10, The patch applied to the electrode, characterized in that it comprises at least one of DC, pulse, AC, RF. The method of claim 1, Include more gluing tape, The adhesive tape is disposed on the other surface of the electrode carbon nanotube patch, characterized in that the carbon nanotubes in close contact with the skin. Lower electrode; Lower carbon nanotubes disposed on one surface of the lower electrode; And A bottom interlayer dielectric filling the bottom of the bottom carbon nanotubes; An upper electrode formed on the lower interlayer dielectric; Upper carbon nanotubes disposed on the upper electrode; And An upper interlayer dielectric filling between the upper portions of the lower carbon nanotubes and the upper carbon nanotubes; Contacting the upper electrode of one end of the upper carbon nanotubes, One end of the lower carbon nanotubes is in contact with the lower electrode, and the other end of the lower carbon nanotubes and the upper carbon nanotubes are in direct or indirect contact with the skin, the carbon nanotube patch (patch) . The method of claim 13, The upper portion of the first carbon nanotubes on the first interlayer dielectric is characterized in that the carbon nanotube patch (code) Forming carbon nanotubes on one surface of the electrode; And Filling an interlayer dielectric between the carbon nanotubes, One end of the carbon nanotubes is in contact with the electrode, and the other end of the carbon nanotubes manufacturing method of the carbon nanotube patch, characterized in that directed toward the treatment object. The method of claim 15, Forming the carbon nanotubes is Spraying a solvent comprising carbon nanotubes already grown on the electrode; Removing the solvent; And And arranging the carbon nanotubes by applying an electric field to the electrode. The method of claim 15, Filling the interlayer dielectric between the carbon nanotubes is The carbon nanotubes manufacturing method of the carbon nanotube patch comprising the spin coating or depositing an interlayer dielectric. The method of claim 15, Planarizing the carbon nanotubes; Forming a protective film on the carbon nanotubes; And Method of producing a carbon nanotube patch, characterized in that it further comprises at least one step of forming an adhesive tape on the other surface of the electrode. The method of claim 18, The planarization of the carbon nanotubes is a method for producing a carbon nanotube patch, characterized in that using a chemical mechanical polishing process. The method of claim 18, Planarizing the carbon nanotubes may include Forming a hard mask layer on the other ends of the carbon nanotubes; Selectively etching the carbon nanotubes; And Method of manufacturing a carbon nanotube patch comprising the step of removing the hard mask layer. The method of claim 18, Forming a protective film on the carbon nanotubes is Selectively etching some of the carbon nanotubes and surface-treating them; And Method of manufacturing a carbon nanotube patch comprising the step of depositing a protective film on the carbon nanotubes.  Adhering a patch comprising carbon nanotubes to the skin; And And applying a voltage to the carbon nanotubes to emit an electric field to the skin.

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