KR20090053184A - Large-capacity chemical or liquid gas storage tanks and supply systems using them - Google Patents

Abstract

The present invention relates to a large-capacity chemical or liquid gas supply storage tank and a supply system using the same.

More specifically, the large-capacity chemical or liquid gas supply storage tank is provided with a chamber in which a high temperature / low temperature heat medium is supplied around an outer circumference of a storage container equipped with a temperature sensor and a pressure sensor in which the chemical or liquid gas is stored, and the chamber The frame is provided with a fixed fixture and a wheel for movement to the lower side to facilitate the movement and protection of the storage container is installed, the valve box is installed on one side of the frame to facilitate the attachment and detachment of the pipe and the chemical or liquid gas injection / discharge pipe of the heating medium , The high temperature heat medium or low temperature heat medium is supplied to the chamber to control the pressure in the storage container and the temperature of the chemical or liquid gas.

The supply system using a large-capacity chemical or liquid gas supply storage tank is introduced into the valve box and piping of the large-capacity chemical or liquid gas supply storage tank formed as described above, and supplies a high-temperature heating medium or a low-temperature heating medium to the chamber. The control unit adjusts the temperature and pressure in the storage container by supplying a high temperature heat medium or a low temperature heat medium to the chamber of the storage tank by a signal transmitted from a temperature sensor and a pressure sensor installed in the storage tank of the storage tank. Lose,

The heat source supply unit stores a high temperature heat medium and supplies a high temperature heat medium to the chamber, and a storage tank equipped with a heater coil and a temperature sensor, a recovery tank storing a low temperature medium heat medium supplied to the chamber to cool the storage container, and the storage. The low temperature heat medium supply pipe is installed with a high temperature heat medium supply pipe having a pump and a valve for supplying a high temperature heat medium of a reservoir when the container is heated, and a valve for supplying a low temperature heat medium in the chamber when the storage container is cooled, and the high temperature heat medium supply pipe It is composed of a low-temperature heat medium recovery pipe is installed on one side and the valve is installed to recover the low temperature heat medium during cooling of the storage container, and a return pipe provided with a pump for supplying the heat medium of the recovery tank to the water storage tank.

Large capacity, chemical, liquid gas, storage tank, supply system

Description

Storage tank for large-capacity chemical or liquid gas supply and supply system using same {A TANK FOR LARGE CHEMICALS OR LIQUID-PHASE GAS SUPPLY AND SYSTEM USING IT}

The present invention relates to a storage tank for supplying a large-capacity chemical or liquid gas and a supply system using the same, which can be movable, can be controlled in pressure and temperature, and can be supplied in a gaseous state of ultra high purity.

As the semiconductor and liquid crystal display (LCD) and light emitting diode (LED) markets have grown and technology is more intensive, and the size of semiconductor wafer and LCD flat panel has gradually increased, the ultra high purity used in the above process (ultra high purity) The use of chemicals or liquefied gases is also increasing in large quantities, and ultra high purity chemicals and liquid gases are generally shipped to consumers as canisters, cylinders, Y cylinders (see below) and toner.

However, the increase in demand has provided a supply system where traditional small and medium sized containers are no longer satisfactory to consumers, which makes large containers such as tube trailers, ISO (International Standards Organization) containers and tankers more practical. Is considered.

The ISO container is a standard means of transporting equipment and other goods by air, land, sea and rail for a long time. The container is durable, durable and placed on the floor of cargo compartments of trains, trucks, docks and large aircraft. It has a size and shape that can be easily and economically fixed.

In general, freight transport containers are formed in standard dimensions and are used for international transportation such as land, sea or air. In addition, such containers are provided with corner connectors which are used to lift the container and also lock the container to the means of transport in which the container is carried. The dimensions of these containers are usually referred to as ISO containers since they have been defined by international standards bodies.

The purity of the chemicals and gases delivered to the ISO container is the most important factor for large delivery systems. Ultra high purity chemicals and gases must meet very stringent specifications for humidity, metal content, particulates, and the like.

For example, 1 ppm (part per million) moisture content in the gas phase is generally considered to be the maximum allowable humidity level for chemicals and gases used in high technology industries.

The problem with large ultra high purity chemical and gas delivery systems is that there is little industry experience in the preparation and use of large vessels.

Typically, ultra high purity chemical and gas delivery systems are divided into two main parts. The first part is a storage vessel for storing and transporting liquefied chemicals and gases, and the second part is a vaporizer for vaporizing liquid and supplying gaseous phase to the distribution system.

The current technology to meet the high volume of use process is to cover both the tonnage cylinder and the heater with insulation inside, and install the vaporizing system (HVS) that acts as a vaporizer in the pipe after the vessel. However, it is a situation that two or more containers are used because they do not meet the usage of the process.

As mentioned above, the main concern related to gas delivery systems is the disadvantage of the purity of chemicals and gases, which can be an additional source of contamination of chemicals and liquid gases when using vaporizers, and vaporizers usually take up a lot of space and are expensive. Have

One attempt to remove this vaporizer and convey the gaseous phase directly from the vessel is described in US Pat. No. 6,025,576 to a large vessel heater skid for liquefied compressed gas, in which the compressed chemical and gas are dispensed from the cylinder. If you have the following problems.

When the high compression chemicals and gases are released from the cylinders, the expansion absorbs thermal energy, which causes cooling at the distribution points delivered throughout the cylinders, resulting in undesirable cooling of the chemicals and gases in the cylinders, cylinder walls. Cooling of the valve or regulator can cause freezing, which causes other problems in the flow of vaporized material in the overall system. This is the most vulnerable point at the moment when high flow rates are required.

Larger cylinders are referred to as “large containers” or “tonnage containers” and US Pat. No. 6,025,576 deals with a large-sized container such as a “Y” cylinder. The “Y” cylinder is approximately 24 inches in diameter, approximately 7 feet in length and weighs about 1150 lbs when empty. Typically, chemicals such as HCI and ammonia are distributed in large gas delivery systems using "Y" cylinders.

Current requirements are for gas flows in the range of 100 to 500 standard liters per minute (slpm), but some gases have speeds above about 25 slpm due to adverse effects from cooling in large gas delivery systems using "Y" cylinders. It is difficult to provide.

Various measurements exist in the prior art that attempt to maintain the temperature of the dispensing cylinder.

One solution is to cover the cylinder with insulation to help maintain the temperature of the cylinder. However, the commonly used insulation does not keep the cylinder at a high enough temperature and actually has the disadvantage of preventing the queue from heating the cylinder.

In the past, however, cylinders were handled and stored by placing or attaching them to a skeletal structure, ie a "skid". This was time consuming and prevented the heater from attaching to the cylinder, and most of the transport skids had a small space to fix the heater.

The heater should be attached when the cylinder is taken from the carrying skid and placed on the dispensing skid. Later, the heater has the disadvantage that it must be removed when it is necessary to return the cylinder to consume it and recharge it.

US Pat. No. 6,025,576 discloses a skid with a built-in heating element for heating and supporting a large vessel for compressed gas distribution, but the technique presented above allows the system to have two important elements: a heater skid separate from the vessel. There is a disadvantage that it must be provided, and may be applied to a medium cylinder such as a Y container or a toner, but cannot be suitably used for a large container such as an ISO container.

When used in an ISO container, for example, the skid will have a significant weight when mounted with the ISO container, which will reduce the container size to meet transport requirements.

On the other hand, ISO containers cannot be placed on skids that are used as stand alone units due to the container frame structure. Thus, other systems are required.

The present invention provides a chamber in which the heat medium is supplied to the outside of the storage container for storing a large amount of chemical or liquid gas to indirectly heat and cool the storage container, and to provide a frame for easy protection and movement / fixation of the storage container. It is an object to provide a storage tank for supplying a large capacity chemical or liquid gas containing.

In addition, it is an object to install a valve box on one side of the frame of the large-capacity chemical or liquid gas supply storage tank to facilitate the connection to the pipe to which the heat medium is supplied from the external heat source supply.

In addition, it is an object to provide a system capable of supplying a high-purity chemical or liquid gas by having a large-capacity chemical or liquid gas supply storage tank and a heat source supply unit and a control unit for controlling the same.

In order to achieve the above object, a large-capacity chemical or liquid gas supply storage tank of the present invention is provided with a temperature sensor and a pressure sensor in a storage container for storing the chemical or liquid gas in a large capacity, and a heat medium is supplied around the storage container. A chamber is installed, and a frame is formed to protect the storage container in which the chamber is installed. A fixture is formed at the lower side of the frame to facilitate fixing, and a wheel for movement is formed to facilitate movement. The valve box is provided with a valve in which a chemical or liquid gas is injected and discharged, a valve in which a heat medium is supplied into the chamber, and a valve in which the liquid is recovered.

That is, the plurality of valves formed in the valve box is a one-touch valve is installed so that the pipe to which the hot or low temperature heat medium is supplied and recovered, and the injection / discharge pipe to which the chemical or liquid gas is injected or discharged can be easily attached and detached. desirable.

An insulating material may be further installed on the upper side of the chamber in which the heat medium is supplied.

In the system using the large-capacity chemical or liquid gas supply storage tank, a heat source supply unit for supplying a high temperature heat medium or a low temperature heat medium in the chamber is installed in the chamber, and the temperature is installed in the storage container. By the signal transmitted from the sensor and the pressure sensor to the high temperature heat medium or low temperature heat medium from the heat source supply to the chamber of the storage tank to control the temperature and pressure in the storage container,

The heat source supply unit stores a high temperature heat medium to stably supply a high temperature heat medium to the chamber, and a storage tank in which a heater coil and a temperature sensor are installed, and a recovery tank for storing a low temperature medium heat medium supplied to the chamber to cool the storage container; A high temperature heat medium supply pipe having a pump and a valve for supplying a high temperature heat medium of a reservoir when the storage container is heated, and a low temperature heat medium supply pipe having a valve for supplying a low temperature heat medium in a chamber when the storage container is cooled, and the It is composed of a low temperature heat medium recovery pipe is installed on one side of the high temperature heat medium supply pipe is installed with a valve for recovering the low temperature heat medium when the storage container is cooled, and a return pipe provided with a pump for supplying the heat medium of the recovery tank to the water tank.

A purge pipe is further installed to supply air or nitrogen gas into the chamber for rapid cooling in case of abnormality of the storage container.

The control unit operates valves installed in the pipe to selectively supply the high temperature heat medium and the low temperature heat medium to the chamber, and adjust the temperature of the reservoir to control the temperature of the high temperature heat medium and the flow rate supplied to the pump. The range of pressure error is ± 5psi, and the range of temperature error is ± 1 ℃.

It may further include a connection valve box having a one-touch valve is installed so that the valve box and the heat source supply unit and the control unit of the storage tank can be easily spoken.

This means that if the heat source supply unit and the control unit are addressed to the connection valve box in advance, and the connection between the connection valve box and the valve box of the storage tank is connected using the connecting tubes, the storage tank can be easily addressed to the heat source supply unit and the control unit. To facilitate the replacement of storage tanks.

It is preferable that the high temperature heat medium supply pipe is further provided with an auxiliary pump so as to stably supply the high temperature heat medium.

The present invention made as described above, the mass storage container is easy to move and fix by the frame and the fixture is equipped with a wheel for movement, indirect heating / cooling by the chamber formed on the outside of the storage container and the pressure and The temperature can be adjusted within the error range to provide high purity chemical or liquid gas. That is, by controlling the temperature and flow rate of the heat medium of the reservoir of the heat source supply unit to the chamber by controlling the temperature and flow rate to the chamber, the pressure and temperature in the storage container can be easily adjusted within an error range to supply a large amount of high purity chemical or liquid gas. Done.

Referring to the present invention in more detail with reference to the accompanying drawings,

As shown in FIG. 1, a storage tank for supplying a large amount of chemical or liquid gas is largely a storage container 11 formed to store the chemical or liquid gas in a large capacity, and a chamber 12 installed around an outer circumference of the storage container 11. ), A frame 13 formed structurally stable to protect the storage container 11 and the chamber 12, and a valve box 15 installed at one side of the frame 13.

The storage container 11 is formed so that the capacity of 50 ~ 50,000 kg of the chemical or liquid gas can be stored, the temperature sensor 11-1 and the pressure sensor 11-2 to check the temperature and pressure therein ) Is installed. In addition, a level gauge may be further formed at one side of the storage container 11 to check the capacity of the stored chemical or liquid gas.

The outer circumference of the storage container 11 made as described above is provided with a chamber 12 to which the heat medium is supplied to heat and cool the storage container 11.

Insulating material 14 is further provided above the chamber 12.

As described above, a fixture 13-1 is formed at the lower side to be fixed to the vehicle or the train so that the storage container 11 in which the chamber 12 is formed can be stably and easily moved, and moved to the lower side to facilitate movement. The frame 13 provided with the wheel 13-2 is formed.

That is, the frame 13 has a structurally stable hexahedral structure, and the storage container 11 in which the chamber 12 is formed in the inner space is placed therein, and chemical or liquid gas is stored in the storage container 1. It is stored and easily fixed to the transfer means such as a vehicle by the fixing device 13-1 during the movement to facilitate the transfer, and to be easily moved to the desired position when dismantling from the transfer means by the wheel for movement.

One side of the frame 13 is provided with a valve box 15 in which a plurality of valves are installed.

The valves installed in the valve box are generally one-touch valves, and the valves supply the chamber 12 with an injection / discharge valve and a heat medium for injecting and discharging a chemical or liquid gas into the storage container 11. It is composed of a supply valve and a recovery valve in which the heat medium is discharged and recovered from the chamber 12.

2 to 3 is a system using a large-capacity chemical or liquid gas supply storage tank is largely the storage tank (1) formed to store / move the large-capacity chemical or liquid gas and the storage tank (1) The heat source supply unit (2) for supplying the heat medium into the chamber 12 of the) and the heat medium supplied from the heat source supply unit (2) in accordance with the pressure and temperature of the storage container (11) of the storage tank (1) to the storage container ( 11) the control unit 3 for adjusting the pressure and temperature.

As the heat medium used in the heat source supply unit 2, water is usually used, but other heat mediums having a higher specific pressure specific heat than water may be used.

 The heat source supply unit 2 stores a high temperature heat medium to stably supply a high temperature heat medium to the chamber 12, and a level gauge 21 for sensing the heater coil 21-3, the temperature sensor 21-1, and the water level. -2) the storage tank 21 is installed, the recovery tank 22 for storing the recovered medium-low temperature heat medium supplied to the chamber 12 to cool the storage container 11, and the storage container 11 The low temperature heat medium in the chamber 12 during the cooling of the storage container 11 and the high temperature heat medium supply pipe B1 provided with a pump P1 and a valve V1 for supplying a high temperature heat medium of the reservoir 21 during heating. Low temperature heat medium supply pipe (B3) is provided with a valve (V3) for supplying the valve, and the valve (V2) is installed on one side of the high temperature heat medium supply pipe (B1) to recover the low temperature heat medium during cooling of the storage container (11) Return pipe B4 provided with the installed low temperature heat medium recovery pipe B2 and a pump P2 for supplying the heat medium of the recovery tank 22 to the water storage tank 21. Achieved.

In addition, the gray casting tank 22 is provided with a temperature sensor 22-1 and a level gauge 22-2 for measuring the number and temperature of the water in the recovery tank 22, and the pump P1 and the valve V1. In parallel with the pump P1 'and the valve V1' are further installed.

In addition, a purge pipe B5 is further formed in the low temperature heat medium supply pipe B3 so as to prepare for an ideal increase in pressure and temperature of the storage container 11, and the purge pipe Air or nitrogen is supplied to B5, and a valve V5 is provided to be controlled by the controller 3.

In addition, the low temperature heat medium supply pipe (B3) is provided with a branch pipe so that the heat medium recovered from the chamber 12 can be recovered to the reservoir 21, the valve (V4) is provided in the branch pipe.

A connection valve box 4 may be further provided between the heat source supply unit 2 and the valve box 15 of the storage tank 1, and a plurality of valves V5, V6, V7) is connected to the pipes of the heat source supply unit 2, the valve (V5, V6) is made of a one-touch valve.

This is characterized in that it facilitates the pipe connection between the valve box 15 and the heat source supply unit (2) of the storage tank (1).

The temperature sensor, the pressure sensor, and the level gauge presented above are electrically addressed with the control unit 3 to check the state of each storage container 11, the reservoir 21, and the recovery tank 22, and a plurality of pumps ( Type of heat medium (high temperature / low temperature) supplied to the chamber 12 of the storage tank 1 using P1, P1 ', P2 and a plurality of valves V1, V1', V2, V3, V4, and V5. By controlling the flow rate and to control the pressure and temperature in the storage container (11).

The valves usually use solenoid valves to operate through the control unit 3, and the pumps P1, P1 ′ and P2 are usually inverter pumps to control the operation and flow rate in accordance with the signal of the control unit 3. Use

That is, the controller 3 checks the temperature and pressure in the storage container 11 with the temperature sensor 11-1 and the pressure sensor 11-2 installed in the storage container 11, and checks the checked value. By controlling the temperature of the heat medium in the reservoir 21 to the heat source supply unit 2 by controlling the flow rate supplied using the pump (P1, P1 ') by heating the storage container 11 within the error range of temperature and pressure Will be

2 shows a state in which the high temperature heat medium of the heat source supply unit 2, the low casting 21 is supplied to the chamber 12 of the storage tank 1 to heat the storage container 11,

The heat medium heated to high temperature by the heater coil 21-3 is supplied to the chamber 12 of the storage tank 1 by the pump P1 through the high temperature heat medium supply pipe B1, and the low temperature heat medium supply pipe B3. ) Is recovered to the reservoir 21 through.

At this time, the valves V1, V4, V6, V7 are open, and the valves V1 ', V2, V3, V5, V8 are closed.

3 shows a state in which a low temperature heat medium is supplied to the chamber 12 of the storage tank 1 to cool the storage container 11 through the low temperature heat medium supply pipe B3 of the heat source supply part 2.

The low temperature heat medium is supplied to the chamber 12 of the storage tank 1 through the low temperature heat medium supply pipe B3 to which the low temperature heat medium is supplied, and the high temperature heat medium supply pipe B1 and the low temperature heat medium recovery pipe B2. Recovered to the recovery tank 22.

At this time, the valves V2, V3, V6, V7 are open, and the valves V1, V1 ', V4, V5, V8 are closed.

In case of abnormality in pressure and temperature of the storage container 11, the controller 3 opens the valve V5 so that cooling air or nitrogen is supplied into the chamber 12 through a pipe, and the controller 3 is The pumps P1, P1 'and P2 are stopped, the valves V5, V7, V6 and V2 are opened, the remaining valves are closed, and cooling air or nitrogen supplied to the purge pipe B5 is supplied to the chamber 12. It is supplied to be discharged to the recovery tank 22 so that the storage container 11 can be cooled quickly.

The control unit 3 operates the valves installed in the pipe to supply the high temperature heat medium and the low temperature heat medium to the chamber so that the pressure error range of the storage container is ± 5 psi and the temperature error range is ± 1 ° C. .

1 is a schematic view of a storage tank for supplying a large capacity chemical or liquid gas showing a preferred embodiment of the present invention.

2 and 3 is a schematic diagram of a system using a large-capacity chemical or storage tank for supplying a liquid gas showing a preferred embodiment of the present invention.

[Explanation of symbols on the main parts of the drawings]

1: storage tank 2: heat source supply unit

3: control unit

11: storage container 12: chamber

13 frame 15 valve box

21: reservoir 22: recovery tank

P: Pump V: Valve

B: Piping

Claims (8)

In the storage tank for large capacity chemical or liquid gas supply, A storage container 11 in which a temperature sensor 11-1 and a pressure sensor 11-2 in which the chemical or liquid gas is stored are installed; A chamber 12 to which a heat medium installed around the outside of the storage container 11 is supplied; A frame 13 formed to facilitate protection and movement of the storage container 11 in which the chamber 12 is installed; Large-capacity chemical or liquid gas supply storage tank, characterized in that formed to include a valve box 15 installed on one side of the frame (13). The method of claim 1, The lower side of the frame 13 is a storage tank for supplying a large-capacity chemical or liquid gas, characterized in that the fastener (13-1) and the moving wheel (13-2) is installed to facilitate the fixing. The method of claim 1, The valve box 15 is characterized in that a plurality of valves of the one-touch type is installed to easily attach and detach the pipe in which the hot or cold heat medium is supplied and recovered, and the injection / discharge pipe in which the chemical or liquid gas is injected or discharged Large-capacity chemical or liquid storage tanks. A storage container 11 having a temperature sensor and a pressure sensor for storing a chemical or liquid gas, a chamber 12 supplied with a heat medium installed around the outside of the storage container 11, and a storage in which the chamber 12 is installed. A storage tank (1) for supplying a chemical or liquid gas formed of a frame (13) formed to facilitate the protection and movement of the container (11) and a valve box (15) installed at one side of the frame (13); A heat source supply part (2) extending into the valve box (15) and connected to a pipe to supply a high temperature heat medium or a low temperature heat medium to the chamber (14); The high temperature heat medium or low temperature heat medium is supplied from the heat source supply unit 2 to the chamber 12 of the storage tank 1 by a signal transmitted from the temperature sensor and the pressure sensor installed in the storage container 11. 11) Supply system using a large-capacity chemical or liquid gas supply storage tank consisting of a control unit (3) for controlling the temperature and pressure in the. The method of claim 4, wherein The heat source supply unit 2 includes a reservoir 21 in which a heater coil 21-3 and a temperature sensor 21-1 are installed to store a high temperature heat medium and supply a high temperature heat medium to the chamber 12; A recovery tank 22 which is supplied to the chamber 12 and stores a medium-low heat medium in which the storage container 11 is cooled; A high temperature heat medium supply pipe B1 provided with a pump P1 and a valve V1 for supplying a high temperature heat medium of the water storage tank 21 when the storage container 11 is heated; A low temperature heat medium supply pipe (B3) provided with a valve (V3) for supplying a low temperature heat medium in the chamber (12) when the storage container (11) is cooled; A low temperature heat medium recovery pipe (B2) installed at one side of the high temperature heat medium supply pipe (B1) and provided with a valve (V2) at which a low temperature heat medium is recovered when the storage container (11) is cooled; Supply system using a large-capacity chemical or liquid gas supply storage tank, characterized in that consisting of a return pipe (B4) is provided with a pump (P2) for supplying the heat medium of the recovery tank 22 to the water storage tank (21). The method of claim 4, wherein When the storage container 11 is heated, the pump P1 'and the valve V1' are further installed in parallel with the pump P1 and the valve V1 so as to stably supply the high temperature heat medium of the reservoir 21. Supply system using a large-capacity chemical or storage tank for liquid gas supply. The method of claim 4, wherein Using a large-capacity chemical or liquid gas supply storage tank, characterized in that the purge pipe (B5) is further installed to supply air or nitrogen gas into the chamber 12 for rapid cooling in case of abnormality of the storage container (11) Supply system. The method of claim 4, wherein Supply system using a large-capacity chemical or liquid gas supply storage tank, characterized in that the connection valve box (4) is further provided with a valve (V5, V6) is installed to facilitate the speech of the storage tank (1).

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