KR20080061052A - Calibration system and calibration method of linear light sensor - Google Patents
Calibration system and calibration method of linear light sensor Download PDFInfo
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Abstract
본 발명은 어레이를 구성하고 있는 광센서의 측정값을 이용하여 모든 광센서의 감도를 균일화할 수 있는 선형 광센서의 보정장치 및 방법을 제공함에 목적이 있다. It is an object of the present invention to provide an apparatus and method for calibrating a linear optical sensor that can equalize the sensitivity of all the optical sensors using the measured values of the optical sensors constituting the array.
본 발명의 선형 광센서의 보정 시스템은 소정의 입사광을 광전류값으로 출력하기 위하여 복수의 어레이로 형성된 선형 광센서; 상기 광전류값과 상기 선형 광센서의 암전류값을 이용하여 계산된 감도가 보정된 광전류값과 감도가 균일화된 광전류값을 저장하기 위한 메모리; 및 상기 감도가 보정된 광전류값과 감도가 균일화된 광전류값을 계산하기 위한 데이터 처리부를 포함한다.The linear optical sensor correction system of the present invention includes a linear optical sensor formed of a plurality of arrays for outputting a predetermined incident light as a photocurrent value; A memory for storing the photocurrent value whose sensitivity is calculated using the photocurrent value and the dark current value of the linear optical sensor and the photocurrent value whose sensitivity is uniform; And a data processor for calculating the photocurrent value whose sensitivity is corrected and the photocurrent value whose sensitivity is uniform.
Description
도 1은 본 발명에 따른 선형 광센서 보정 시스템의 구성도,1 is a block diagram of a linear optical sensor correction system according to the present invention,
도 2는 선형 광센서의 광전류 특성 그래프,2 is a photocurrent characteristic graph of the linear optical sensor,
도 3은 본 발명에 따른 보정 시스템을 이용하여 균일화된 광센서의 광특성그래프.3 is an optical characteristic graph of an optical sensor uniformed using a correction system according to the present invention.
*도면의 주요 부분에 대한 설명** Description of the main parts of the drawings *
110: 선형 어레이 광센서 120: 데이터 처리부110: linear array optical sensor 120: data processing unit
130: 메모리 130: memory
본 발명은 광센서로부터 출력되는 광전류값을 보정하기 위한 것에 관한 것으로, 보다 상세하게는 광전류가 선형적으로 변하는 광증폭형 트랜지스터로 구성된 어레이 광센서로부터 출력되는 출력값의 균일도 향상을 위한 선형 광센서의 보정 시스템 및 그 방법에 관한 것이다.The present invention relates to correcting a photocurrent value output from an optical sensor, and more particularly, to a linear optical sensor for improving the uniformity of an output value output from an array optical sensor composed of an optical amplification transistor in which the photocurrent changes linearly. A calibration system and method thereof are provided.
광증폭형이나 포토 트랜지스터형 고감도 수광소자 선형 어레이 광센서는 포토 다이오드형 선형 어레이 센서 대비 높은 감도 특성을 가진다. 특히 단일 소자를 확장시킨 선형 어레이(256 by 1, 512 by 1 등 1차원 어레이) 센서의 경우 휴대용 고감도 분광기등으로 응용이 가능하여 미약광을 이용한 바이오 진단기나 이화학 분석 등 넓은 분야에 응용되어 사용된다. 선형 어레이 센서는 어레이를 구성하는 모든 개별소자들의 특성이 균일하게 제작되어야 바람직하지만 현실적으로 제작 공정에서 불안정성이 존재하므로 인해 수율 및 활용도가 높지 않았다. 단순한 P-N접합을 이용한 다이오드형의 선형 어레이 센서의 경우는 균일도가 상대적으로 양호하여 활용도가 높은 편이나 소자 내부에서 광증폭 작용이 발생하는 트랜지스터형 선형 어레이 광센서의 경우는 개별 소자간의 불균일도가 높아 실용화가 어렵다는 것이 단점이다.The optical amplification type or phototransistor type high sensitivity light receiving element linear array optical sensor has higher sensitivity than the photodiode type linear array sensor. In particular, linear array sensors (single-dimensional arrays such as 256 by 1 and 512 by 1) can be used as portable high-sensitivity spectrometers. They are applied to a wide range of fields such as bio diagnostics and physicochemical analysis using weak light. . The linear array sensor is preferable to make the characteristics of all the individual elements constituting the array uniformly, but in reality, instability exists in the manufacturing process, and the yield and utilization were not high. Diode type linear array sensors using simple PN junctions have relatively good uniformity and high utilization, but transistor type linear array optical sensors in which optical amplification occurs inside devices have high unevenness between individual elements. The disadvantage is that it is difficult to use.
이러한 균일도 문제의 원인은 셀사이의 감도차이, 암전류, 조명의 변화와, 광학계의 특성에 있다. 이러한 비균일성을 보상하기 위하여 광전셀로부터 출력되는 신호는 보정되어야 한다. 보정하는 원리는 광센서의 데이터를 보정하기전 균일한 백색광을 광센서에 주사하고, 그 값을 기준 데이터로 설정하여 하여 보정한다. The cause of the uniformity problem is the sensitivity difference between the cells, dark current, changes in illumination, and the characteristics of the optical system. To compensate for this nonuniformity, the signal output from the photovoltaic cell must be corrected. The principle of correction is correcting by scanning a uniform white light to the optical sensor before setting the data of the optical sensor and setting the value as reference data.
종래에는 광센서의 측정값이 일정 한계값 이하로 떨어지는 값을 전체 픽셀열의 평균값으로 치환하거나 다수 측정값을 평균한 단순 평균값을 이용하였다. Conventionally, a simple average value obtained by substituting an average value of all pixel rows or replacing a value in which a measured value of an optical sensor falls below a predetermined limit value is averaged.
그러나, 어레이를 구성하고 있는 광센서의 각각은 입사광에 따른 출력 광전 류와 암전류가 서로 상이하고, 이에 따른 감도가 서로 상이하기 때문에, 단순 평균값을 적용할 경우, 광센서의 출력 값에 대한 신뢰성이 저하되는 문제점이 있다.However, since each of the optical sensors constituting the array has different output photoelectric currents and dark currents due to incident light and their sensitivity is different from each other, when a simple average value is applied, the reliability of the output sensor of the optical sensor is not high. There is a problem of deterioration.
본 발명은 어레이를 구성하고 있는 광센서의 측정값을 이용하여 모든 광센서의 감도를 균일화할 수 있는 선형 광센서의 보정 시스템 및 방법을 제공함에 목적이 있다. An object of the present invention is to provide a system and method for calibrating a linear optical sensor that can equalize the sensitivity of all the optical sensors using the measured values of the optical sensors constituting the array.
본 발명의 선형 광센서의 보정 시스템은 소정의 입사광을 광전류값으로 출력하기 위하여 복수의 어레이로 형성된 선형 광센서; 상기 광전류값과 상기 선형 광센서의 암전류값을 이용하여 계산된 감도가 보정된 광전류값과 감도가 균일화된 광전류값을 저장하기 위한 메모리; 및 상기 감도가 보정된 광전류값과 감도가 균일화된 광전류값을 계산하기 위한 데이터 처리부를 포함한다.The linear optical sensor correction system of the present invention includes a linear optical sensor formed of a plurality of arrays for outputting a predetermined incident light as a photocurrent value; A memory for storing the photocurrent value whose sensitivity is calculated using the photocurrent value and the dark current value of the linear optical sensor and the photocurrent value whose sensitivity is uniform; And a data processor for calculating the photocurrent value whose sensitivity is corrected and the photocurrent value whose sensitivity is uniform.
본 발명의 선형 광센서의 보정방법은 선형 광센서를 이용하여 입사광을 광전류값으로 출력한 후 저장하는 단계; 상기 선형 광센서의 암전류값을 저장하는 단계; 상기 암전류와 광전류값을 계산하여 보정된 광전류값으로 저장하는 단계; 및 상기 보정된 광전류값과 입사광에 따른 상기 선형 광센서의 측정값을 통하여 균일화된 광전류값으로 저장하는 단계를 포함한다.The calibration method of the linear light sensor of the present invention comprises the steps of outputting and storing the incident light as a photocurrent value using the linear light sensor; Storing a dark current value of the linear photosensor; Calculating the dark current and the photocurrent value and storing the calculated dark current and the photocurrent value as corrected photocurrent values; And storing the corrected photocurrent value as a uniform photocurrent value through the measured value of the linear optical sensor according to the incident light.
이하 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하기로 한다. 이에 앞서, 본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석되어서는 아니되며, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다. Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.
따라서, 본 명세서에 기재된 실시예와 도면에 도시된 구성은 본 발명의 가장 바람직한 일 실시예에 불과할 뿐이고 본 발명의 기술적 사상을 모두 대변하는 것은 아니므로, 본 출원시점에 있어서 이들을 대체할 수 있는 다양한 균등물과 변형예들이 있을 수 있음을 이해하여야 한다. Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.
도 1은 본 발명에 따른 선형 광센서 보정 시스템의 구성도이다.1 is a block diagram of a linear optical sensor correction system according to the present invention.
본 발명에 따른 선형 광센서 보정 시스템은 외부에서 조사되는 빛을 받아 전류로 변환하는 선형 광센서(111), 전류를 계산하여 수치로 변환하는 데이터 처리립리부(CPU:120) 및 수치로 변환된 전류값을 저장하기 위한 메모리(130)로 구성되어 있다.The linear optical sensor correction system according to the present invention receives a light emitted from the outside and converts the linear light sensor 111 into a current, a data processing part (CPU: 120) and calculates the current and converts it to a numerical value It is composed of a
본 발명에 따른 선형 광센서는 트랜지스터 구조로서 플로팅 게이트와 바디(body)가 연결된 것을 사용할 수 있다.In the linear optical sensor according to the present invention, a floating gate and a body are connected to each other as a transistor structure.
본 발명에 따른 선형 광센서는 SOI(Silicon On Insulator)에 형성된 MOSFET형의 트랜지스터를 사용할 수 있다.The linear optical sensor according to the present invention may use a MOSFET type transistor formed in a silicon on insulator (SOI).
도 2는 선형 광센서의 광특성을 보여주는 그래프이다.2 is a graph showing optical characteristics of a linear optical sensor.
소정의 파워(P)를 갖는 광원으로부터의 빛이 선형 광센서(111)에 조사되는 경우의 광전류를 K1, K2,..., KN, 광이 없는 상태에서 광센서의 흐르는 전류는 측정한 암전류를 L1, L2,..., LN이라 하면, 도시된 바와 같이 같은 복수의 어레이에 위치한 각각의 선형 광센서(111)에서 측정되는 광전류(K)와 암전류(L)에 있어서 편차를 갖게 된다. 그리고, 선형 광센서(111)마다 광전류와 암전류에 있어서 차이가 있어 광센서 보정시 광전류와 암전류 모두를 감안하여야 한다.A photo current K 1, K 2, ..., K N, the flowing current of the light sensor in the absence of the light state in the case where light from a light source having a predetermined power (P) to be irradiated to the linear optical sensor 111 is When the measured dark currents are L 1 , L 2 ,..., L N , the photocurrent K and the dark current L measured by each linear optical sensor 111 located in the same plurality of arrays as shown in FIG. There is a deviation. In addition, there is a difference in the photocurrent and the dark current for each of the linear optical sensors 111. Therefore, both the photocurrent and the dark current should be taken into account when calibrating the photosensor.
먼저, 측정된 암전류와 광전류를 메모리에 저장한다. 데이터 처리부(120)는저장된 암전류와 광전류, 그리고 식 1로 표현되는 함수를 이용하여 감도가 보정된 광전류값을 출력하고 다시 메모리에 저장한다.First, the measured dark current and photocurrent are stored in the memory. The
[식 1][Equation 1]
(YN: N번째 어레이에 위치한 광센서의 감도가 보정된 광전류 함수, KN: 소정의 파워(P)를 갖는 광원에서 조사된 광량을 N번째 어레이에 위치한 광센서가 측정한 광전류, LN:N번째 어레이에 위치한 광센서의 암전류)(Y N : Photocurrent function whose sensitivity of the photo sensor located in the Nth array is corrected, K N : Photocurrent measured by the photo sensor located in the N th array, the amount of light emitted from the light source with a predetermined power P, L N : Dark current of optical sensor located in Nth array)
실질적인 광센서의 감도는 X의 계수로서 기울기를 의미하는 광센서에 입력된 파워(P) 대비 출력 광전류(K)이다. 그러나, 빛이 없는 경우 광센서 내부에서 흐르는 암전류가 존재한다. 따라서, 실제 광센서에 흐르는 전류는 출력된 광전류에서 암전류를 감해야 한다. 따라서, 어레이마다 구비된 광센서에서 출력된 광전류(K) 값에서 암전류(L) 값을 감한 값을 이용하여 어레이마다 형성된 광센서의 상대적으로 감도가 보정된 광전류값을 계산한 후 메모리에 저장한다. 특정 광센서의 경우, 광전류와 암전류의 편차가 작아 감한 값이 암전류 값의 레벨에 있을 경우가 있으므로, 데이터의 신뢰성을 위하여 소정의 암전류(L) 값을 더한다.The actual sensitivity of the optical sensor is the output photocurrent (K) relative to the power (P) input to the optical sensor, which means the slope as the coefficient of X. However, in the absence of light, there is a dark current flowing inside the optical sensor. Therefore, the current flowing through the actual optical sensor should subtract the dark current from the output photocurrent. Therefore, by using the value obtained by subtracting the dark current (L) value from the photocurrent (K) value output from the optical sensor provided for each array, calculates the relative current of the photosensitive value of the optical sensor formed for each array and stores it in the memory. . In the case of a specific optical sensor, since the deviation between the photocurrent and the dark current is small, the value may be at the level of the dark current value. Therefore, a predetermined dark current L value is added for data reliability.
이렇게 각 어레이의 광센서마다 감도가 보정된 광전류를 식 1로 표현하면, 다양한 기울기(감도)를 갖는 그래프로 표현된다. 광센서의 감도는 어느 정도 보정되었지만, 여전히 기울기의 차이를 보이므로 이러한 기울기를 균일화, 즉, 감도를 균일화여 모든 광센서의 광전류 특성을 균일화할 필요가 있다. 감도의 균일화는 앞서 메모리(130)에 저장된 측정값을 이용하여 데이터 처리부(120)에서 계산하되, 아래 식 2와 같은 함수를 이용함으로써, 광센서의 감도를 균일화한다. When the photocurrent whose sensitivity is corrected for each optical sensor of each array is expressed by
[식 2][Equation 2]
(H(YN): N번째 어레이에 위치한 광센서의 균일화된 광전류 함수, AH: 최대 광전류값, AL: 최소 광전류값, YN: N번째 어레이에 위치한 광센서의 감도가 보정된 광전류 함수, KN: 소정의 파워(P)를 갖는 광원에서 조사된 광량을 N번째 어레이에 위치한 광센서가 측정한 광전류, LN: N번째 어레이에 위치한 광센서의 암전류)(H (Y N ): uniform photocurrent function of the photo sensor located in the Nth array, A H : maximum photocurrent value, A L : minimum photocurrent value, Y N : photocurrent with corrected sensitivity of the photo sensor located in the Nth array Function, K N : Light current measured by the light sensor located in the Nth array, and L N : Dark current of the light sensor located in the Nth array.
도 3은 본 발명에 따른 보정 시스템을 이용하여 균일화된 광센서의 광특성그래프로서, 식 1에 의하여 감도가 보정된 N번째 어레이의 광센서 특성 그래프를 나타낸 것이다. 감도가 보정된 그래프는 광센서의 개수만큼 존재하지만, 일예로서 하나만 도시하였다. 감도가 보정된 모든 그래프는 식 2에 의하여 균일화된 그래프로 이동함으로써, 도 4에서 도시된 바와 같이 모든 광센서의 감도가 균일화된다. 즉, 최종 출력되는 데이터는 암전류와 광전류 기하학적으로 정규화(Normalize)된다.3 is an optical characteristic graph of an optical sensor uniformed using the correction system according to the present invention, and shows an optical sensor characteristic graph of the Nth array whose sensitivity is corrected by
본 발명은 이상에서 살펴본 바와 같이 바람직한 실시예를 들어 도시하고 설명하였으나, 상기한 실시예에 한정되지 아니하며 본 발명의 정신을 벗어나지 않는 범위 내에서 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의해 다양한 변경과 수정이 가능할 것이다.Although the present invention has been shown and described with reference to the preferred embodiments as described above, it is not limited to the above embodiments and those skilled in the art without departing from the spirit of the present invention. Various changes and modifications will be possible.
본 발명의 선형 광센서 보정 시스템 및 방법은 제조공정상의 문제점으로 발생할 수 있는 광센서들 간의 서로 다른 광전류 특성을 프로그램을 통하여 균일화함으로써, 제품의 수율을 크게 향상시킬 수 있는 효과가 있다.The linear optical sensor calibration system and method of the present invention have the effect of equalizing different photocurrent characteristics between optical sensors that may occur due to manufacturing process problems through a program, thereby greatly improving the yield of a product.
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WO2016200166A1 (en) * | 2015-06-09 | 2016-12-15 | (주) 솔 | Method for correcting optical sensor array module through characteristic evaluation |
KR20160144692A (en) * | 2015-06-09 | 2016-12-19 | (주) 솔 | The method of calibration of photon sensor pixel array by evaluating its characteristic |
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WO2016200166A1 (en) * | 2015-06-09 | 2016-12-15 | (주) 솔 | Method for correcting optical sensor array module through characteristic evaluation |
KR20160144692A (en) * | 2015-06-09 | 2016-12-19 | (주) 솔 | The method of calibration of photon sensor pixel array by evaluating its characteristic |
US11112301B2 (en) | 2015-06-09 | 2021-09-07 | Sol Inc. | Method for correcting optical sensor array module through characteristic evaluation |
US11680850B2 (en) | 2015-06-09 | 2023-06-20 | Sol Inc. | Method for correcting optical sensor array module through characteristic evaluation |
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