KR20070105595A - Organic thin film deposition apparatus - Google Patents
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- KR20070105595A KR20070105595A KR1020060037923A KR20060037923A KR20070105595A KR 20070105595 A KR20070105595 A KR 20070105595A KR 1020060037923 A KR1020060037923 A KR 1020060037923A KR 20060037923 A KR20060037923 A KR 20060037923A KR 20070105595 A KR20070105595 A KR 20070105595A
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- 238000000427 thin-film deposition Methods 0.000 title claims abstract description 15
- 238000000151 deposition Methods 0.000 claims abstract description 48
- 230000008021 deposition Effects 0.000 claims abstract description 47
- 238000001704 evaporation Methods 0.000 claims abstract description 34
- 230000008020 evaporation Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 238000000926 separation method Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 11
- 239000002019 doping agent Substances 0.000 claims description 9
- 239000011368 organic material Substances 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WMAXWOOEPJQXEB-UHFFFAOYSA-N 2-phenyl-5-(4-phenylphenyl)-1,3,4-oxadiazole Chemical compound C1=CC=CC=C1C1=NN=C(C=2C=CC(=CC=2)C=2C=CC=CC=2)O1 WMAXWOOEPJQXEB-UHFFFAOYSA-N 0.000 description 1
- AWXGSYPUMWKTBR-UHFFFAOYSA-N 4-carbazol-9-yl-n,n-bis(4-carbazol-9-ylphenyl)aniline Chemical compound C12=CC=CC=C2C2=CC=CC=C2N1C1=CC=C(N(C=2C=CC(=CC=2)N2C3=CC=CC=C3C3=CC=CC=C32)C=2C=CC(=CC=2)N2C3=CC=CC=C3C3=CC=CC=C32)C=C1 AWXGSYPUMWKTBR-UHFFFAOYSA-N 0.000 description 1
- DIVZFUBWFAOMCW-UHFFFAOYSA-N 4-n-(3-methylphenyl)-1-n,1-n-bis[4-(n-(3-methylphenyl)anilino)phenyl]-4-n-phenylbenzene-1,4-diamine Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)N(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 DIVZFUBWFAOMCW-UHFFFAOYSA-N 0.000 description 1
- 101000837344 Homo sapiens T-cell leukemia translocation-altered gene protein Proteins 0.000 description 1
- 102100028692 T-cell leukemia translocation-altered gene protein Human genes 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
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Abstract
본 발명은 유기박막 증착장치에 관한 것으로서, 본 발명에 의한 기판에 유기박막을 형성하는 증착장치는 증착챔버; 및 복수개의 점증착원이 서로 이격되어 선형으로 배열되는 증착원 어셈블리;를 포함하여 이루어지되, 상기 점증착원들 사이의 이격거리는 중앙에서 외측으로 갈수록 작아지도록 배치되는 것을 특징으로 하고, 공정시 상기 기판을 수평이동시킬 수 있는 이동수단이 더 구비되는 것이 바람직하다. The present invention relates to an organic thin film deposition apparatus, wherein the deposition apparatus for forming an organic thin film on a substrate according to the present invention comprises a deposition chamber; And a deposition source assembly in which a plurality of point evaporation sources are linearly spaced apart from each other. It is preferable that a moving means for horizontally moving the substrate is further provided.
본 발명에 따르면, 복수개의 점증착원들 사이의 이격거리를 조절함으로써, 증착률의 제어가 매우 용이하다는 효과가 있다. According to the present invention, by controlling the separation distance between the plurality of point deposition sources, there is an effect that the control of the deposition rate is very easy.
Description
도 1은 종래 유기박막 증착장치를 나타낸 것이다. 1 shows a conventional organic thin film deposition apparatus.
도 2는 종래 유기박막 증착공정을 설명하는 개략도이다. 2 is a schematic diagram illustrating a conventional organic thin film deposition process.
도 3은 본 발명에 의한 유기박막 증착장치를 나타낸 것이다. Figure 3 shows an organic thin film deposition apparatus according to the present invention.
도 4는 본 발명에 의한 유기박막 증착공정을 설명하는 개략도이다. 4 is a schematic view illustrating an organic thin film deposition process according to the present invention.
도 5 내지 도 7은 본 발명에 의한 증착원 어셈블리의 다양한 실시예를 나타낸 것이다. 5 to 7 show various embodiments of the deposition source assembly according to the present invention.
**도면의 주요부분에 대한 부호의 설명**** Description of the symbols for the main parts of the drawings **
1: 증착장치 2: 챔버 1: vapor deposition apparatus 2: chamber
10: 증착원 어셈블리 20: 쉴드 10: deposition source assembly 20: shield
21: 슬릿21: slit
본 발명은 유기박막 증착장치에 관한 것으로서, 보다 상세하게는 선형으로 배치되는 복수개의 점증착원들 사이의 이격거리를 조절함으로써, 증착률을 제어할 수 있는 유기박막 증착장치에 관한 것이다. The present invention relates to an organic thin film deposition apparatus, and more particularly, to an organic thin film deposition apparatus capable of controlling the deposition rate by adjusting the separation distance between a plurality of point deposition sources arranged in a linear manner.
최근 정보 통신 기술의 비약적인 발전과 시장의 팽창에 따라 디스플레이 소자로 평판표시소자(Flat Panel Display)가 각광받고 있다. 이러한 평판표시소자로는 액정 표시소자(Liquid Crystal Display), 플라즈마 디스플레이 소자(Plasma Display Panel), 유기 발광 소자(Organic Light Emitting Diodes) 등이 대표적이다. Recently, with the rapid development of information and communication technology and the expansion of the market, flat panel displays have been in the spotlight as display devices. Such flat panel displays include liquid crystal displays, plasma display panels, organic light emitting diodes, and the like.
그 중에서 유기발광소자는 빠른 응답속도, 기존의 액정표시소자보다 낮은 소비 전력, 경량성, 별도의 백라이트(back light) 장치가 필요 없어서 초 박형으로 만들 수 있는 점, 고휘도 등의 매우 좋은 장점을 가지고 있어서 차세대 디스플레이 소자로서 각광받고 있다. Among them, the organic light emitting device has very good advantages such as fast response speed, lower power consumption than conventional liquid crystal display, light weight, ultra thin without needing a back light device, and high brightness. As a result, it is attracting attention as a next generation display device.
이러한 유기발광소자는 기판 위에 양극 막, 유기 박막, 음극 막을 순서대로 입히고, 양극과 음극 사이에 전압을 걸어줌으로써 적당한 에너지의 차이가 유기 박막에 형성되어 스스로 발광하는 원리이다. 즉, 주입되는 전자와 정공(hole)이 재결합하며 남는 여기 에너지가 빛으로 발생하는 것이다. 이때 유기 물질의 도판트의 양에 따라 발생하는 빛의 파장을 조절할 수 있으므로 풀 칼라(full color)의 구현이 가능하다. In the organic light emitting device, an anode film, an organic thin film, and a cathode film are sequentially coated on a substrate, and a suitable energy difference is formed in the organic film by emitting a voltage between the anode and the cathode, thereby emitting light by itself. That is, the excitation energy left by recombination of injected electrons and holes is generated as light. In this case, since the wavelength of light generated according to the amount of the dopant of the organic material may be adjusted, full color may be realized.
유기발광소자의 자세한 구조는 도면에는 도시하지 않았지만 기판상에 양극(anode), 정공 주입층(hole injection layer), 정공 운송층(hole transfer layer), 발광층(emitting layer), 전자 운송층(eletron transfer layer), 전자 주입층 (eletron injection layer), 음극(cathode)이 순서대로 적층되어 형성된다. 여기에서 양극으로는 면저항이 작고 투과성이 좋은 ITO(Indium Tin Oxide)가 주로 사용된다. 그리고 유기 박막은 발광 효율을 높이기 위하여 정공 주입층, 정공 운송층, 발광층, 전자 운송층, 전자 주입층의 다층으로 구성되며, 발광층으로 사용되는 유기물질은 Alq3, TPD, PBD, m-MTDATA, TCTA 등이다. 또한, 음극으로는 LiF-Al 금속막이 사용된다. 그리고 유기 박막이 공기 중의 수분과 산소에 매우 약하므로 소자의 수명(life time)을 증가시키기 위해 봉합하는 봉지막이 최상부에 형성된다. Although the detailed structure of the organic light emitting diode is not shown in the drawing, an anode, a hole injection layer, a hole transport layer, an emission layer, and an electron transport layer are deposited on a substrate. A layer, an electron injection layer, and a cathode are stacked in this order. In this case, ITO (Indium Tin Oxide) having a small sheet resistance and good permeability is mainly used as the anode. And an organic thin film is composed of a hole injection layer, a hole transport layer, light emitting layer, an electron transport layer, the electron injection layer, the multi-layer to increase the light emitting efficiency, an organic material used for the light emitting layer is Alq 3, TPD, PBD, m-MTDATA, TCTA. In addition, a LiF-Al metal film is used as the cathode. In addition, since the organic thin film is very weak to moisture and oxygen in the air, an encapsulation film is formed on the top to increase the life time of the device.
한편, 현재까지 개발된 유기박막형성 방법에는 진공증착법(Vacuum Deposition Method), 스퍼터링(sputtering)법, 이온빔 증착(Ion-beam Deposition)법, Pulsed-laser 증착법, 분자선 증착법, 화학기상증착법, 스핀코터(spin coater) 등이 있다. 이 중에서 현재 상용화되어 있는 기술은 진공증착법이다. Meanwhile, organic thin film formation methods developed to date include vacuum deposition method, sputtering method, ion-beam deposition method, pulsed-laser deposition method, molecular beam deposition method, chemical vapor deposition method, and spin coater ( spin coater). Among these, currently commercially available technology is vacuum deposition.
여기서, 진공증착법이란 유기물이 수용된 도가니 주위를 가열하여 기화 또는 승화시켜 증기(기체)상태의 유기물을 도가니 상부에 위치한 기판에 증착하는 것이다. Here, the vacuum evaporation method is to vaporize or sublime the surroundings of the crucible containing the organic material to vaporize or sublime to deposit the organic matter in the vapor (gas) state on the substrate located above the crucible.
도 1 및 도 2를 참조하여 종래 유기박막 증착장치를 설명한다. 도시된 바와 같이, 증착원(110)이 설치된 증착챔버(100)에 기판(S)을 반입, 지지한다. 상기 증착원(110)은 선형증착원(Linear Source)로서, 상부에 개구부(111)가 형성된 선형 몸체에 유기물질을 수용할 수 있도록 형성되고, 이를 가열하여 증발시킬 수 있는 히터(미도시)가 포함되어 이루어진다. A conventional organic thin film deposition apparatus will be described with reference to FIGS. 1 and 2. As shown, the substrate S is carried and supported in the
증착챔버(100)에 기판(S)을 반입, 지지한 다음, 유기물질을 증발시켜서 소정 두께의 유기박막을 형성하는 것이다. After carrying in and supporting the substrate S in the
한편, 유기박막의 형성에 있어서 중요한 것은 박막의 균일도이다. 특히, 기판의 중앙부위가 가장자리보다 더 많이 증착되는 현상이 발생된다. On the other hand, in forming the organic thin film, an important factor is the uniformity of the thin film. In particular, the phenomenon that the central portion of the substrate is deposited more than the edge occurs.
이를 개선하기 위해 선형증착원의 개구부의 형상을 적절히 조절함으로써 박막의 균일도를 향상시켰다. 즉, 도시된 바와 같이, 상기 개구부의 중앙을 양단부보다 더 작게 형성한 것이다. 그러나 이러한 개구부의 형상을 조절하는 것은 다수번의 실험을 통해 얻어지는 매우 난해한 작업이었다. In order to improve this, the uniformity of the thin film was improved by appropriately adjusting the shape of the opening of the linear deposition source. That is, as shown, the center of the opening is formed smaller than both ends. However, adjusting the shape of these openings was a very difficult task obtained through a number of experiments.
본 발명은 상술한 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 선형으로 배치되는 복수개의 점증착원들 사이의 이격거리를 조절함으로써, 증착률을 제어할 수 있는 유기박막 증착장치를 제공함에 있다. The present invention has been made to solve the above problems, an object of the present invention is to provide an organic thin film deposition apparatus that can control the deposition rate by adjusting the separation distance between a plurality of linear deposition sources arranged in a linear manner. Is in.
위와 같은 기술적 과제를 해결하기 위하여 본 발명에 의한 기판에 유기박막을 형성하는 증착장치는 증착챔버; 및 복수개의 점증착원이 서로 이격되어 선형으로 배열되는 증착원 어셈블리;를 포함하여 이루어지되, 상기 점증착원들 사이의 이격거리는 중앙에서 외측으로 갈수록 작아지도록 배치되는 것을 특징으로 한다. In order to solve the above technical problem, a deposition apparatus for forming an organic thin film on a substrate according to the present invention comprises a deposition chamber; And a deposition source assembly in which a plurality of point evaporation sources are linearly spaced apart from each other.
또한 상기 증착원 어셈블리는 상기 점증착원들이 1열로 배치되되, 호스트를 증발시키는 점증착원과, 도펀트를 증발시키는 점증착원이 교차되도록 배치될 수 있다.In addition, the deposition source assembly may be arranged so that the deposition source is arranged in one row, the deposition source for evaporating the host and the deposition source for evaporating the dopant intersect.
또는 상기 점증착원들이 2열 이상으로 배치되되, 호스트를 증발시키는 열과, 도펀트를 증발시키는 열이 교차되도록 배치될 수도 있을 것이다. Alternatively, the evaporation sources may be arranged in two or more rows, such that heat for evaporating the host and heat for evaporating the dopant may be intersected.
또한 상기 증착원 어셈블리의 상방에는 증발된 유기물의 비산형태를 제어하는 슬릿이 형성된 쉴드(shield)가 더 구비되는 것이 바람직하다. In addition, the upper side of the evaporation source assembly is preferably provided with a shield (shield) formed with a slit for controlling the scattering form of the evaporated organic matter.
또한 상기 기판을 수평이동시키는 이동수단이 더 구비되는 것이 바람직하다. In addition, it is preferable that the movement means for horizontally moving the substrate is further provided.
이하, 첨부된 도면을 참조하여 본 발명에 의한 실시예의 구성 및 작용을 구체적으로 설명한다. Hereinafter, with reference to the accompanying drawings will be described in detail the configuration and operation of the embodiment according to the present invention.
도 3 및 도 4를 참조하면, 본 실시예의 증착장치(1)는 챔버(2)와, 상기 챔버(2)의 내부에 설치된 증착원 어셈블리(10)를 포함하여 이루어진다.3 and 4, the
상기 증착원 어셈블리(10)는 복수개의 점증착원을 선형으로 배열하되, 특히 점증착원들 사이의 이격거리를 적절히 조절한 것이다. The
또한 상기 기판(S)과 증착원 어셈블리(10) 사이 공간에는 쉴드(20)가 더 구비된다. 상기 쉴드(20)는 증발된 유기물질의 비산형태를 제어하기 위한 것으로서, 유기물질이 통과될 수 있도록 슬릿(21)이 형성되어 있다. In addition, a
또한 증착공정 중에 기판(S)을 수평방향으로 이동시켜 스캐닝할 수 있도록 기판 이송수단(미도시)이 더 구비되어 있다. 기판 이송수단은 공지의 수단들이 적용 가능하다. In addition, the substrate transfer means (not shown) is further provided to move the substrate (S) in the horizontal direction during the deposition process to scan. The substrate transfer means is applicable to known means.
도 5를 참조하여 상기 증착원 어셈블리(10)를 보다 구체적으로 설명하면, 상기 점증착원들 사이의 이격거리를 중앙에서 외측으로 갈수록 작아지도록 배치한 것이다(d1=d2>d3=d4>d5=d6). 이것은 상술한 바와 같이, 기판(S)의 중앙부위에 더 많이 증착되는 것을 방지하기 위한 것이다. Referring to FIG. 5, the
또한 상기 복수의 점증착원들은 호스트를 증발시키는 점증착원과 도펀트를 증발시키는 점증착원이 교차되도록 배치됨으로써 이종물질을 동시 증착할 수 있다. In addition, the plurality of point evaporation sources may be disposed so as to cross the point evaporation source for evaporating the host and the evaporation source for evaporating the dopant to simultaneously deposit different materials.
또한 도 6과 같이, 복수의 점증착원들을 2열로 배치할 수도 있다. 이 때, 1열은 호스트를 증발시키는 점증착원들(11)이고, 2열은 도펀트를 증발시키는 점증착원들(12)로 배치할 수 있다. In addition, as shown in FIG. 6, a plurality of deposition deposition sources may be arranged in two rows. At this time, the first column may be arranged as the
도 7을 참조하면, 상기 증착원 어셈블리(10)는 복수개의 점증착원을 선형으로 배치하되, 3열로 구성할 수도 있다. 이 경우에는 1열과 3열은 호스트를 증발시키는 점증착원들(11)이고, 2열은 도펀트를 증발시키는 점증착원들(12)이다. 특히, 각 점증착원을 지그재그 형상으로 배열한 것이다. 반대로 1열과 3열은 도펀트를 증발시키는 점증착원들이고, 2열은 호스트를 증발시키는 점증착원들일 수도 있는 것이다. Referring to FIG. 7, the
이를 참조하여 본 발명의 작용을 설명한다. The operation of the present invention will be described with reference to this.
도시된 바와 같이, 점증착원을 선형으로 배치함으로써 선형증착원과 유사한 작용을 할 수 있다. 더욱이, 점증착원들의 이격거리를 조절함으로써 증착율을 제어할 수 있게 된다. 이와 같이 증착율을 제어하기 위하여 점증착원들의 이격거리를 조절하는 것은 동일목적을 위하여 선형증착원의 개구부 형상을 조절하는 것보다 매우 용이한 것이다. As shown, by arranging the point evaporator linearly, the action similar to the linear evaporation source can be achieved. Moreover, the deposition rate can be controlled by adjusting the separation distance of the evaporation sources. As such, adjusting the separation distance of the point deposition sources to control the deposition rate is much easier than adjusting the opening shape of the linear deposition source for the same purpose.
본 발명에 따르면, 복수개의 점증착원들 사이의 이격거리를 조절함으로써, 증착률의 제어가 매우 용이하다는 효과가 있다. According to the present invention, by controlling the separation distance between the plurality of point deposition sources, there is an effect that the control of the deposition rate is very easy.
Claims (5)
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