KR20050027497A - Robot hand for transportinng glass - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot hand for storing and extracting a substrate inside a cassette in a liquid crystal display device and a semiconductor process. A substrate suction bar installed lower than the position; And a holder for fixing the adsorption bar.

Description

ROBOT HAND FOR TRANSPORTINNG GLASS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot hand (robert hand), which is a liquid crystal display element substrate transporting means. In particular, when a substrate of the liquid crystal display element is stored in or out of the cassette, the substrate and the cassette loaded inside the cassette are provided. The present invention relates to a robot hand designed to prevent a substrate from being broken or a crack from occurring due to a collision with a robot hand that has entered.

Recently, with the development of various portable electronic devices such as mobile phones, PDAs, and notebook computers, there is a growing demand for flat panel display devices for light and thin applications. Such flat panel displays are being actively researched, such as LCD (Liquid Crystal Display), PDP (Plasma Display Panel), FED (Field Emission Display), VFD (Vacuum Fluorescent Display), but mass production technology, ease of driving means, Liquid crystal display devices (LCDs) are in the spotlight for reasons of implementation.

1 schematically illustrates a cross section of a general liquid crystal display device. As shown in the figure, the liquid crystal display device 1 is composed of a lower substrate 5 and an upper substrate 3 and a liquid crystal layer 7 formed between the lower substrate 5 and the upper substrate 3. .

The lower substrate 5 is a driving element array substrate. Although not shown in detail in the drawing, a plurality of pixels are formed on the lower substrate 5, and each pixel includes a thin film transistor and a thin film transistor. The same drive element is formed.

The upper substrate 3 is a color filter substrate, and a color filter layer for realizing color is formed. In addition, a pixel electrode and a common electrode are formed on the lower substrate 5 and the upper substrate 3, respectively, and an alignment film for aligning liquid crystal molecules of the liquid crystal layer 7 is coated.

The lower substrate 5 and the upper substrate 3 are bonded by a sealing material 9, and a liquid crystal layer 7 is formed therebetween to form a driving element formed on the lower substrate 5. By driving the liquid crystal molecules by controlling the amount of light passing through the liquid crystal layer to display the information.

The liquid crystal display device as described above is fabricated through a predetermined semiconductor process on a transparent substrate such as glass, and the substrate is loaded into a cassette and then processed by another worker or other transport means such as an automatic guided vehicle. Transferred to the equipment. Substrate storage and take-out of the cassette are made by the robot hand.

2 is a view schematically showing the structure of a robot hand for storing and taking out a substrate in a cassette.

As shown in the figure, the robot hand 10 has a first to third adsorption bars 11a to 11c capable of adsorbing a substrate and an adsorption bar holder 13 for fixing the adsorption bars 11a to 11c. It is composed of

The adsorption bars 11a to 11c are formed of at least two bars so that the substrate can be transported flat without bending, and the number of adsorption bars is increased to safely transport the substrate as the substrate is enlarged. In addition, each suction bar 11a-11c is provided with the vacuum pad (not shown) which can adsorb | suck and fix the board | substrate 15. As shown in FIG.

3 is a cross-sectional view taken along line II ′ of FIG. 2, showing a cross section of the adsorption bar on which the substrate is placed. As shown in the figure, all of the first to third adsorption bars 11a to 11c maintain the same height. Therefore, they adsorb the substrates 15 side by side in a straight line, and then store the substrates 15 in a cassette or take out the substrates stored in the cassette.

Figure 4 shows the state in which the substrate is accommodated in the cassette by the robot hand configured as described above, the figure shows only a part of the cassette on which the substrate is loaded.

As shown in the figure, the cassette 20 is provided with a frame 21 perpendicular to both sides, spaced apart a predetermined height on the side of the frame 21, the support for receiving a substantially single board 15 (23) is provided. At this time, the frame 21 has a box shape with one side open. A support bar 25 is further provided between both support members 23 to prevent sagging of the substrate 15. When the substrate 15 is stored or taken out, the suction bars 11a to 11c of the robot hand are positioned between the support bars 25.

However, even if the support bar 25 for preventing sagging is provided, sagging at the center of the substrate still occurs as the substrate becomes larger. In addition, the smaller the distance H between the supports 23 for accommodating the substrate 15, the better the logistics of the substrate. Therefore, the separation distance between the stored substrates is not sufficient, and due to the occurrence of deflection at the center of the substrate 15, the injection height of the suction bars 11a to 11c may be adjusted to be lower than the original height in consideration of the deflection of the substrate. Therefore, the free space is narrowed by that amount. At this time, when the substrate adsorption bars 11a to 11c of the robot hand enter the cassette to insert or take out the substrate, the first and third adsorption bars 11a and 11c and the lower substrate 15a provided on both sides thereof. The distance d1 and the distance d2 between the second suction bar 11b and the upper substrate 15b provided at the center are not sufficient, so that the substrate is contacted by the adsorption bars 11a to 11c and the substrates 15a and 15b. Cracks often occur in the process. Therefore, it is an obstacle to the design of low pitch cassette.

Accordingly, the present invention has been made to solve the above problems, and an object of the present invention is to prevent cracks in the substrate by contact with the adsorption bar when the substrate is accommodated in or taken out of the cassette by the adsorption bar. have.

In addition, the present invention is to ensure a free space between the adsorption bar and the upper, lower substrate to design a low separation cassette.

Other objects and features of the present invention will be described in detail in the configuration and claims of the following invention.

The present invention for achieving the above object is a liquid crystal display device and a robot hand for storing and taking out the substrate inside the cassette in the semiconductor process, comprising a plurality of absorption bars (absorption bar), the absorption bar located in the center The substrate adsorption bar is installed lower than the height of the adsorption bar located on both sides; And a holder for fixing the adsorption bar.

The suction bar is provided with a plurality of vacuum pads for stably fixing the substrate.

In addition, when the amount of deflection of the substrate accommodated in the cassette is δ, the height of the adsorption bar provided at the center is set as low as δ / 2 relative to the position of the adsorption bar provided at both sides.

In addition, the substrate is mounted on the robot hand according to the present invention, the second suction bar is located in the center and the first and third suction bars located on both sides of the second suction bar, the second suction bar is the first And a substrate adsorption bar installed to be lower than the position of the third adsorption bar. And a holder for fixing the first to third suction bars.

In addition, when the amount of deflection of the substrate accommodated in the cassette is δ, the second adsorption bar is installed by δ / 2 lower than the positions of the first and third adsorption bars.

As described above, the substrate handling robot hand according to the present invention considers the degree of deflection of the substrate stored in the cassette, and lowers the position of the suction bar located in the center to reduce the distance between the substrate and the suction bar stored in the cassette. It can be increased to prevent contact between the substrate and the adsorption bar.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

5 is a perspective view showing a robot hand according to the present invention, showing a back side of the robot hand.

As shown in the figure, the robot hand 30 according to the present invention includes first to third adsorption bars 31a to 31c and one end of the adsorption bars 31a to 31c capable of adsorbing and fixing a substrate. It consists of a suction bar holder 33 for fixing.

In addition, as shown in an enlarged view, the first to third adsorption bars 31a to 31c are provided with a vacuum pad 31 'capable of adsorbing a substrate, and the shape of the vacuum pad 31' is It may be made of square or circle, but the shape can be freely designed.

In addition, the height of the second suction bar 31b positioned at the center thereof is lower than that of the first and third suction bars 31a and 31c. This can be implemented by forming a groove 33 'in a portion of the suction bar holder 33 for fixing the first and third suction bars 31a and 31c. That is, the center portion of the fixing stand 33 for supporting one end of the second suction bar 31b provided on both sides is left unchanged, and the fixing stand 33 for supporting one end of the first and third suction bars 31a to 31c. After forming grooves 33 'corresponding to a height to lower the position of the second adsorption bar 31b on both outer sides of the grooves, the second adsorption bar 31b is formed inside the grooves 33'. By installing the second adsorption bar (31b) lower than the first and the third adsorption bar (31a, 31c) can be installed.

The figure shown in FIG. 5 shows the back of the adsorption bar, which is rotated 180 degrees and viewed from the side on which the substrate is placed (FIG. 5), the first and third adsorption bars 31a and 31c provided on both sides. When the groove is formed to increase the position, accordingly, the height of the second adsorption bar 31b installed in the center portion is relatively low.

Alternatively, by fixing the positions of the first and third suction bars 31a and 31c and lowering the positions of the second suction bars 31b, the position of the second suction bars 31b may be relatively lowered. have. This is possible by partially raising the part of the fixing stand 33 on which one end of the second suction bar 31b is supported.

FIG. 6 is a cross-sectional view taken along line II-II 'of FIG. 5 and illustrates a cross section of FIG.

As shown in the figure, when looking at the cross-section of the first to third adsorption bars 31a to 31c, the height of the second adsorption bar 31b installed at the center is lower than that of the first and third adsorption bars 31a and 31c. Is installed. At this time, when the degree of deflection of the substrate is δ, the deflection height of the second adsorption bar 31b with respect to the first and third adsorption bars 31a and 31c is δ / 2. This is to prevent the breakage of the substrate by securing a free space between the substrate and the adsorption bar accommodated in the cassette when the adsorption bar enters inside the cassette, and the prevention of damage to the substrate according to the present invention will be described in more detail later. do.

Figure 7 is a plan view showing that the substrate is accommodated in the cassette by the robot hand configured as described above.

As shown in the figure, the cassette 40 is composed of a frame 41 in the form of a box having one side open, and a plurality of supports 43 capable of accommodating the substrate 35 in both frames 41 facing each other. ) Is installed. In addition, a support bar 45 for preventing the deflection of the substrate is provided on one surface of the substrate 35 opposite to the inlet through which the substrate 35 enters.

When the substrate enters into the cassette configured as described above by the suction bars 31a to 31c of the robot hand, the substrate 35 is accommodated in the support 43. At this time, the suction bar (31a ~ 31c) of the robot hand coming into the cassette is to enter between the support bar (45).

FIG. 8 is a cross-sectional view taken along the line III-III 'of FIG. 7, and the first and third adsorption bars 31a positioned at both sides of the height of the second adsorption bar 31b positioned at the center, as shown in the drawing. By lowering the height of, 31c, the distance between the suction bars 31a to 31c and the substrate 35 accommodated in the cassette, that is, the injection height of the suction bar can be increased. In other words, when the degree of deflection of the substrate 35 is δ, when the second adsorption bar 31b is lowered by δ / 2, the distance between the upper substrate 35b and the second adsorption bar 31b is decreased. increase by δ / 4. At this time, the distance d1 between the first and third suction bars 31a and 31c and the lower substrate 35a is constant, and the distance d2 between the second suction bar 31b and the upper substrate 35b is δ than in the prior art. Increasing the input height of the adsorption bars 31a to 31c by δ / 4, the distance between the first and third adsorption bars 31a and 31c and the lower substrate 35a is increased by 1/2. d1 'is increased by δ / 4 than before, and the distance d2' between the second suction bar 31b and the upper substrate 35b is also increased by δ / 4 than before.

Therefore, as the distance between the adsorption bar and the substrate increases, it is possible to prevent the substrate from being damaged by the impact of the adsorption bar, thereby enabling a low-spaced cassette design.

As described above, according to the present invention, in the robot hand adsorption bar for inserting and extracting a substrate into and out of the cassette, the height of the adsorption bar located at the center is lower than that of the adsorption bar located at both sides in consideration of the deflection of the center substrate. Since the distance between the board | substrate stored in the inside and the adsorption bar can be ensured, the damage of a board | substrate by these contacts can be prevented.

1 is a schematic cross-sectional view of a general liquid crystal display device.

Figure 2 is a schematic view showing the structure of a conventional robot hand.

3 is a cross-sectional view taken along line II ′ of FIG. 2;

4 is a view schematically showing the structure of a robot hand according to the present invention.

FIG. 6 is a cross-sectional view taken along line II-II ′ of FIG. 5.

Figure 7 is a plan view showing that the substrate is accommodated in the cassette by the robot hand configured as described above.

8 is a cross-sectional view taken along the line III-III ′ of FIG. 7.

*** Explanation of symbols for main parts of drawing ***

30: Robot hand 31a ~ 31c: First to third suction bar

31 ': vacuum pad 33: holder

33 ': groove 35: substrate

40: cassette 41: frame

43: support 45: support bar

Claims (6)

In a robot hand for storing and taking out a substrate in a cassette in a liquid crystal display device and a semiconductor process, It consists of a plurality of adsorption bar (adsorption bar), the adsorption bar located in the center of the substrate adsorption bar is installed lower than the position of the adsorption bar located on both sides; And A robot hand for moving a substrate comprising a fixing stand for fixing the suction bar. The robot hand for moving a substrate according to claim 1, wherein a plurality of vacuum pads are formed in the suction bar. The position of the adsorption bar provided in the center is lower than δ (where δ is the amount of deflection of the substrate stored in the cassette) / 2 as compared with the positions of the adsorption bar provided on both sides. Robot hand for moving the substrate. In the robot hand for storing and taking out the substrate in the cassette in the liquid crystal display device and semiconductor process, The substrate is seated and includes a second adsorption bar positioned at the center and first and third adsorption bars located at both sides of the second adsorption bar, wherein the second adsorption bar is positioned relative to the positions of the first and third adsorption bars. A substrate adsorption bar configured to be installed low; And Robot hand for moving the substrate configured to include a fixing for fixing the first to third adsorption bar. The robot hand for moving a substrate according to claim 4, wherein the first to third suction bars are provided with a vacuum pad capable of absorbing the substrate. 5. The method of claim 4, wherein the second adsorption bar is installed at a position lower than δ (where δ is the amount of deflection of the substrate housed in the cassette) / 2 than the positions of the first and third adsorption bars. Robot hand for moving board.