KR20000035302A - Manufacturing method and apparatus of liquid crystal display - Google Patents

Abstract

The liquid crystal display which spray-sprayed the dispersion liquid 1 which disperse | distributed microparticles | fine-particles 14 to the liquid was spray-sprayed to the board | substrate 13 by the semi-dry spray spreading method, and bonded together by making the board | substrate surface which spray-sprayed into the inside into the cell thickness. In manufacturing the device, the fine particles 14 are spray-sprayed onto the substrate 13 while controlling the spraying time corresponding to the liquid amount of the spraying liquid 1 so that the density of the fine particles on the substrate surface is close to the target value. To control. Alternatively, the number of the fine particles 14 sprayed onto the substrate 13 is counted, the spraying time of the spraying liquid in the subsequent step is controlled in correspondence with the count value, and the fine particles 14 on the substrate surface are controlled. The density of is controlled to be close to the target value. Thereby, the manufacturing method and manufacturing apparatus of the liquid crystal display element which can prevent the fluctuation | variation of the spreading density of the spacer microparticles | fine-particles put on a board | substrate, and can obtain the liquid crystal display element which has a uniform cell gap and a favorable display quality are provided.

Description

The manufacturing method and manufacturing apparatus of a liquid crystal display element, and a liquid crystal display element {MANUFACTURING METHOD AND APPARATUS OF LIQUID CRYSTAL DISPLAY}

TECHNICAL FIELD This invention relates to the manufacturing method and manufacturing apparatus of a liquid crystal display element which sprays a spacer by the semi-dry spray spreading method, and a liquid crystal display element.

Generally, a liquid crystal display element is made to contact a pair of board | substrates which apply | coated the sealing material to the outer periphery edge of at least one board | substrate through a spacer, is bonded by a sealing material, forms a liquid crystal cell, and injects a liquid crystal into this liquid crystal cell. It is comprised by charging. A pair of substrate space | intervals of a liquid crystal display element becomes thickness of a liquid crystal layer (henceforth "cell thickness").

The cell thickness of a liquid crystal display element is an important factor which determines the optical characteristic as a display element, and the microparticles | fine-particles of several micrometers size which become a spacer are provided between board | substrates so that a display area may become uniform cell thickness.

In order to deposit the fine particles serving as the spacers between the substrates, for example, a dry electrostatic spraying method in which the fine particles are charged, dispersed, and sprayed onto the substrate before bonding, or a moving nozzle spraying spraying the fine particles by a spray nozzle moving on the substrate. The method, the semi-dry spray spraying method which spray-sprays disperse | distributing microparticles in a volatile liquid, etc. are mentioned. Especially, the semi-dry spray spreading method can be used suitably.

When carrying out the semi-dry spray spreading method, first, the fine particles are dispersed in a volatile liquid such as alcohol to prepare a spreading liquid. Since the particle size of the fine particles to be dispersed in the spraying liquid has a particle diameter of about several micrometers, it is stirred with a stirrer or ultrasonic waves in order to uniformly disperse.

9 shows a spacer spraying apparatus that executes a conventional semi-dry spray spraying method.

The spraying liquid 1 is sent by the pump 6 from the container 4 to the arrow A direction through the liquid circulation hose 5a, and passes through the spray nozzle 8 provided in the upper part of the spraying chamber 7. Moreover, it is comprised so that it may be sent to the arrow B direction through the liquid circulation hose 5b, and may return to the container 4 and circulate.

Inside the spray nozzle 8, a needle valve is provided in a liquid circulation path (not shown), and the high pressure air 24 pressure-controlled by a regulator (not shown) is piped through the solenoid valve 10a. When it is sent in the direction of arrow C through 9a and supplied to the spray nozzle 8, it is comprised so that a needle valve may open at this air pressure.

In addition, when the high pressure nitrogen gas 25 pressure-controlled by a regulator (not shown) is sent to the arrow D direction through the pipe 9b via the solenoid valve 10b, the nitrogen-spray liquid 1 It is configured to be sprayed.

The opening and closing of the solenoid valves 10a and 10b are controlled by the spraying control unit 3, and the opening and closing time is a timer 2 provided in the spraying control unit 3 and an operation panel 12 connected thereto. Controlled by And when the solenoid valves 10a and 10b open to both sides, the spraying liquid 1 is spray-sprayed.

When spray-spraying the spraying liquid 1 to the board | substrate 13 of the spraying chamber 7, the predetermined spraying time is set to the operation panel 12 beforehand. The timer 2 incorporated in the spray control unit 3 operates according to the set spraying time, the solenoid valves 10a and 10b are opened, the high pressure air and nitrogen are supplied to the spray nozzle 8, and the spraying liquid 1 ) Is spray sprayed.

The substrate 13 is provided below the inside of the spray chamber 7, and the sprayed spray liquid 1 drops slowly as shown by the broken line in the spray chamber 7, and volatile liquid evaporates therebetween. The fine particles 14 adhere to the substrate 13.

The board | substrate 13 in which the microparticles | fine-particles 14 were spread | spread is carried out from the spraying chamber 7 as shown by arrow E, and the number of the microparticles | fine-particles 14 on the board | substrate 13 is measured by the particle counter 15a. As the particle counter 15a, a method of electrically imaging a portion of the substrate surface and measuring the number of fine particles from an image signal is generally taken.

On the surface of the substrate 13 to which the fine particles 14 are sprayed, a sealant is applied in advance, and a cell gap is formed by joining with a single substrate with the surface spray-sprayed on the substrate 13 inward and forming a cell gap. By performing ultraviolet irradiation, a sealing agent is hardened and a liquid crystal cell is formed.

Finally, a liquid crystal display element is completed by injecting and filling a liquid crystal into a liquid crystal cell.

The liquid crystal display element comprised as mentioned above is a display element using the electro-optical characteristic of a liquid crystal, and cell thickness is one of the important factors which determine display characteristics.

In order to make this cell thickness a predetermined value, fine particles 14 serving as spacers are sprayed, but when the density of the fine particles 14 in the liquid crystal cell changes, the cell thickness also changes accordingly. Therefore, in the mass production of the liquid crystal display element, it is required to spray so that the density (hereinafter, referred to as "spray density") of the fine particles 14 on the substrate 13 is uniform and stable in the spreading step of the fine particles 14. do.

However, in the conventional spreading apparatus, the spreading density decreases every time the spreading frequency increases for the following reasons, and there is a problem that a stable cell thickness cannot be obtained. That is, in the said conventional spreading apparatus, the spraying liquid 1 of the quantity provided in the lump is provided in the container 4 before spraying spraying, and spraying spraying is performed with respect to the board | substrate 13 sent sequentially. . Therefore, the spraying liquid 1 which entered the container 4 with time passes is reduced.

When the amount of the spraying liquid 1 decreases, since the liquid level of the spraying liquid 1 falls, the liquid pressure with respect to the spraying liquid 1 in the liquid circulation hoses 5a and 5b or the spray nozzle 8 falls. .

In the spray spraying of the spraying liquid 1, when the high-pressure nitrogen gas 25 is sprayed from the tip of the spray nozzle 8, the inside of the tip of the spray nozzle 8 becomes negative pressure, and the spraying liquid at this pressure (1) is carried out by being sucked by the tip of the spray nozzle 8 and sprayed simultaneously with the high-pressure nitrogen gas 25.

However, as described above, when the liquid pressure decreases due to the decrease in the spraying liquid 1, the liquid amount of the spraying liquid 1 exiting from the spray nozzle 8 decreases, and the fine particles sprayed onto the surface of the substrate 13 ( The spreading density of 14 is reduced.

In the above conventional sprinkling apparatus, there is no method of compensating for this even if the sprinkling density decreases. Therefore, when the sprinkling density is out of the target range, the operator inevitably changes the sprinkling time during production.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and in the method for producing a liquid crystal display device by the semi-dry spray spreading method, a decrease in the spreading density of the spacer fine particles laid on the substrate is prevented, and the display quality has a uniform cell thickness. It is providing the manufacturing method and manufacturing apparatus of a liquid crystal display element which can obtain a favorable liquid crystal display element, and a liquid crystal display element.

1 is a side view of the manufacturing apparatus of the liquid crystal display element in Example 1;

2 is a partial side view of a manufacturing apparatus configuration of a liquid crystal display element in Example 1;

3 (a) and 3 (b) show a change in spraying density with respect to the number of sprayings,

4 is a partial side view of a manufacturing apparatus configuration of a liquid crystal display element in Example 2;

5 (a) and 5 (b) are diagrams showing a relationship between the amount of sprayed liquid and the spraying time in Example 2,

6 is a side view of the manufacturing apparatus of the liquid crystal display element in Example 2;

7 is a partial side view of the manufacturing apparatus configuration of a liquid crystal display element in Example 3;

8 is a relationship diagram between a difference between a target value of spraying density and a measured value and spraying time in Example 3;

9 is a configuration diagram of a spacer spraying device of a conventional liquid crystal display element.

Explanation of symbols for the main parts of the drawings

1: spraying liquid 4: container

7: spray chamber 8: spray nozzle

11: control device 13: substrate

14: particulate 15a, 15b: particle counter

16 liquid level detection device 17 spray time control unit

17a: timer A 17b: timer B

17c: writable timer 17d: numeric conversion section

18 light source 19 photoelectric sensor

20: laser scanning light source 21: photoelectric sensor

22 sensor control unit 23a image processing measurement unit

23b: optical system

The manufacturing method of the liquid crystal display element of this invention is a process which detects at least 1 of the liquid amount and weight of the dispersion liquid which disperse | distributed the microparticles used as a spacer to a liquid, and accommodated in the container, and at least 1 of the detected liquid amount and the said weight. Determining the value of the spray time, the spray pressure, the opening degree of the needle valve inside the spray nozzle, or the distance between the spray nozzle and the substrate, and the spray time, spray pressure, spray interior based on the determined value Spraying the spraying liquid onto the substrate by controlling the opening degree of the needle valve or the distance between the spray nozzle and the substrate so that the density of the fine particles on the substrate surface approaches a predetermined target value. It is characterized by executing control.

Such a structure can control each element which a variation easily produces in a process, suppresses the dispersion | variation of the spreading density, prevents the dispersion | variation in a cell gap, and can obtain the liquid crystal display element with a favorable display quality.

In addition, the manufacturing method of the liquid crystal display element of this invention is the process of spray-spraying the spraying liquid which disperse | distributed the microparticles used as a spacer to a liquid to a board | substrate, the process of detecting the liquid amount of the said spraying liquid, and the said detected And spraying while controlling the spraying time in correspondence with the liquid amount, thereby controlling the density of the fine particles on the substrate surface to be close to a predetermined target value.

According to this configuration, by controlling the spraying time in correspondence with the liquid amount of the spraying liquid, the reduction of the spraying density is suppressed, the fall of the cell gap is prevented, and the liquid crystal display element with favorable display quality is obtained.

Moreover, the manufacturing method of the liquid crystal display element of this invention is the process of spray-spraying to the board | substrate the spraying liquid which disperse | distributed the microparticles used as a spacer to the liquid, the process of counting the number of the said microparticles | fine-particles spread on the said board | substrate, and the coefficient It is comprised by the process of controlling spraying time of the spraying liquid to the board | substrate processed by a subsequent process corresponding to a value, and controlling the density of the said microparticles | fine-particles on a board | substrate surface to approach a predetermined target value.

According to this configuration, since the number of fine particles sprayed onto the substrate is directly counted and the next spraying time is controlled based on this count value, the decrease in the spreading density due to the decrease in the amount of sprayed liquid is suppressed, and the cell gap is lowered. And a liquid crystal display element with a favorable display quality is obtained.

Moreover, the manufacturing apparatus of the liquid crystal display element of this invention is the container which accommodates spraying liquid, the spraying apparatus which has a spraying function which sprays the spraying liquid accommodated in the said container to a board | substrate, and the liquid quantity detection which detects the liquid amount of the said spraying liquid. Means and a spraying time control means for controlling the spraying time so as to correspond to the amount of liquid detected by the liquid level detecting means to bring the density of the fine particles on the substrate surface closer to a predetermined target value.

According to this configuration, stabilization of the spreading density is easily realized when spray spreading.

Moreover, the manufacturing apparatus of the liquid crystal display element of this invention is a container which accommodates spraying liquid, the spraying apparatus which has a spraying function which sprays the spraying liquid accommodated in the said container to the board | substrate, and the number of the microparticles | fine-particles sprayed on the said board | substrate And means for measuring and spraying time control means for controlling the spraying time such that the density of the particles on the substrate surface approaches a predetermined target value in correspondence with the number of the particles measured.

Also with this configuration, stabilization of the spreading density is easily realized when spraying is carried out.

Moreover, the liquid crystal display element of this invention was manufactured by the manufacturing method of the above liquid crystal display element, It is characterized by the above-mentioned.

According to this configuration, there is no variation in cell gap, and a liquid crystal display element having good display quality is obtained.

EMBODIMENT OF THE INVENTION Hereinafter, each Example of this invention is described using FIGS.

In addition, the same code | symbol is attached | subjected and demonstrated to the same function as FIG. 9 which shows the said prior art example.

The manufacturing method and manufacturing apparatus of the liquid crystal display element in Example 1 of this invention are demonstrated using FIGS. 1-3 (b).

FIG. 1: shows the block diagram of the sprinkling apparatus in Example 1, FIG. 2: shows the principal part of the sprinkling apparatus used in Example 1 which is the specific example, FIG. 3 (a), (b) shows in Example 1 The measurement results are shown.

In the first embodiment, in order to make the spraying density more stable than the conventional spraying apparatus, the spraying density is approached to the target value in correspondence with the liquid level detecting device for detecting the liquid amount of the spraying liquid and the liquid amount detected by the liquid level detecting device. The point which provided the spraying time control apparatus which controls spraying time is a novel point, and the basic structure other than that is substantially the same as FIG. 9 which shows the said prior art example.

In detail, as shown in FIG. 1, the container 4 containing the spraying liquid 1 is provided with the liquid amount detection apparatus 16 which detects the liquid amount of the spraying liquid 1 which changes with spray spraying. . In addition, in FIG. 9 which shows the said conventional example, instead of the spraying control part 3 which built-in the timer 2 and was connected with the operation panel 12, in this Example 1, it connects with the said liquid quantity detection apparatus 16. In FIG. The control apparatus 11 incorporating one spray time control part 17 is provided.

In the sprinkling apparatus configured as described above, when the amount of the liquid entering the container 4 decreases as the number of spraying increases, the amount of the spraying liquid 1 entered into the container 4 is calculated by the liquid amount detecting device 16, This liquid amount information is transmitted as a signal to the spraying time control part 17 which comprises the control apparatus 11.

The spraying time control part 17 which obtained liquid quantity information calculates the spraying time to spray-spray next from the information, changes the setting of a timer so that spraying density similar to the previous spraying process is obtained, and the solenoid valve 10a, 10b).

By setting it as this structure, even if the application | coating frequency | count is increased, since the application | coating density to the board | substrate 13 will always be constant, a stable cell gap can be obtained and a liquid crystal display element with a favorable display quality will be obtained.

The specific example in (Example 1) is shown below.

(Example 1)

In the sprinkling apparatus of the said Example 1, in this Example 1, the light source 18 and the photoelectric sensor 19 were used as the liquid amount detection apparatus 16, as shown in FIG. The timer A 17a and the timer B 17b were used as the spraying time control part 17 which comprises the control apparatus 11. As shown in FIG.

And using the transparent glass container as the container 4 which puts the spreading liquid 1, it installed previously so that the light emitted from the light source 18 may pass through the container 4, and may reach | attain the photoelectric sensor 19. As shown in FIG.

As the spraying solution 1, for example, an aqueous solution obtained by mixing isopropyl alcohol and pure water in a ratio of 5: 5 was used by mixing and dispersing fine particles having a diameter of 5 µm as spacers so as to have a concentration of 1 g per 100 ml. .

When the sparging liquid 1 is difficult to transmit light because the fine particles 14 are mixed, and the sparging liquid 1 does not exist in the optical path between the light source 18 and the photoelectric sensor 19, Therefore, the amount of light received by the photoelectric sensor 19 is greatly changed.

Therefore, in the first embodiment, whether the liquid level of the spraying liquid 1 in the container 4 is above or below the predetermined liquid level detection position using the pair of light sources 18 and the photoelectric sensor 19. Is determined, and the information is transmitted as an electric signal from the photoelectric sensor 19 to the spraying time control unit 17 provided in the control device 11.

The spraying time control unit 17 has two timers, a timer A 17a and a timer B 17b, and the spraying time when the liquid level of the spraying liquid 1 is above a predetermined liquid level detecting position, the timer A It is set to (17a), and it is comprised so that the spray time when the liquid surface of the spraying liquid 1 is below a predetermined liquid amount detection position is set to timer B 17b.

Therefore, at the start of spraying onto the substrate 13, the liquid level of the spraying liquid 1 is above the predetermined liquid level detecting position, and the timer A is applied to the predetermined spraying liquid amount provided with the photoelectric sensor 19 after the spraying starts. Spray spraying is performed by the time set in 17a, consumption of the spraying liquid 1 progresses gradually, spray spraying is performed by the time set by the timer B 17b from the predetermined spraying liquid amount.

Using the apparatus configured as described above, spraying is performed by setting the spraying time of the timer A 17a to 5.0 seconds and the spraying time of the timer B 17b to 5.5 seconds. Measured.

In addition, the liquid quantity detection position, ie, the position of the photoelectric sensor 19, was made into the position of half the capacity | capacitance of the container 4. As shown in FIG. In addition, the relative value of the spreading density is a relative value of the actual measured value when the target spreading density is made into 100%, and the spreading density measures 18 places on a board | substrate with a particle counter, and calculate | requires the average value.

The obtained measurement result is shown to FIG. 3 (a).

(Comparative Example 1)

In order to compare with the said Example 1, the measurement result using the spreading apparatus in FIG. 9 which shows the said prior art example is shown to FIG. 3 (b). The spraying time at this time is fixed at 5.0 seconds.

As shown in Fig. 3A, the spreading density with the increase in the number of spreading tends to decrease slightly, but the spreading density increases with the boundary of the switching of the spraying time, the number of fine particles decreases, and the excess is eliminated. have.

In addition, as shown in FIG.3 (b), in the conventional spraying apparatus, spraying density decreases with the increase of spraying frequency | count.

By controlling the spraying time in accordance with the liquid level of the spraying liquid, that is, the amount of liquid sprayed in this way, it is possible to prevent the reduction of the number of particles to be sprayed onto the substrate due to the decrease of the amount of spraying liquid, so that the display quality has a stable uniform cell thickness. A good liquid crystal display element can be obtained.

In the present embodiment, an example using a pair of light sources 18 and a photoelectric sensor 19 has been described. However, by using a plurality of pairs of light sources and a photoelectric sensor, a predetermined liquid level detection position becomes plural, and the liquid level of the spraying liquid. Higher precision control is possible by determining the spraying time in accordance with which range of the plurality of predetermined liquid level heights.

(Example 2)

4 shows Example 2 of the present invention.

In the second embodiment, the writable timer 17c is used as the spray time control unit 17 constituting the control device 11 by using the laser scanning light source 20 and the photoelectric sensor 21 as the liquid amount detection device 16. ) And the numerical conversion unit 17d, and the photoelectric sensor 21 and the numerical conversion unit 17d via the sensor control unit 22 are different from those in the first embodiment, and the other basic configuration is the above embodiment. Almost the same as in Example 1.

The laser scanning light source 20 and the light source sensor 21 as the liquid amount detecting device 16 are temporally similar to the arrow G from the arrow F showing the spot light generated from the laser scanning light source 20 within the measurement range. When scanning, this laser light is received by the photoelectric sensor 21, and the sensor control part 22 is comprised so that the liquid level position may be digitized. The liquid amount of the spraying liquid is calculated from the liquid level position of the spraying liquid.

By using such a liquid amount detection device 16, a slight change in the liquid surface position due to one spray can be grasped by a laser scanning sensor at all times, and the liquid amount of the spray liquid can be sent to the spraying time control unit 17 as numerical information. Therefore, by using the laser scanning type sensor 20 which scans a predetermined range, the liquid amount of the spraying liquid 1 which entered the container 4 can be measured more accurately than Example 1 mentioned above.

In addition, the liquid surface position measured by the laser scanning type sensor 20 which scans the said predetermined range is digitized by the sensor control part 22, and is transmitted to the spraying time control part 17. FIG. The spraying time control apparatus 17 is comprised so that control of a multilayer can be performed according to the transmitted signal.

In detail, the spraying time control part 17 writes in advance the spraying time set using the numerical-conversion part 17d according to the information of the liquid surface position transmitted from the sensor control part 22, ie, the liquid quantity information of the spreading liquid. It is set to the enabled timer 17c.

The relationship of the spraying time with respect to the liquid amount of spraying liquid is set so that the numerical information of liquid quantity may correspond to the spraying time of a multistage layer, for example, as shown to Fig.5 (a).

In this Example 2, up to 300 ml of the spraying liquid was divided into seven steps, and the spraying time was set as shown in each step. For example, spraying starts with 5.0 ml of spraying time at 300 ml of an initial liquid quantity, and spraying | recovery | recovery progresses, and when a liquid volume reaches 240 ml, spraying time will switch to 5.4 second.

In this way, the liquid amount and the spraying time of the spraying liquid were controlled by multiple layers, and the relationship between the number of spraying and the spreading density was investigated.

The obtained measurement result is shown to FIG. 5 (b).

As shown in FIG. 5 (b), even when the number of times of spraying increases, there is almost no decrease in the spreading density, and FIG. 3 (a) showing Example 1 and FIG. 3 (b) showing Comparative Example 1 are shown. Compared with the measurement result, it turns out that spraying density was aimed at stability.

As described above, by performing the time control of the multi-layered layer, more precise control is possible, and a good liquid crystal display element having a stable uniform cell gap can be obtained.

In addition, when performing high-precision control, what is necessary is just to increase the number of steps of spraying time, As another method, the liquid level position information is sent to the spraying time control part 17 as an analog electric signal, and the spraying time control part 17 is carried out. In this case, a method such as relating the liquid level position information to the spraying time in a continuous amount may be employed.

In this embodiment, the method for detecting the liquid amount or the liquid level of the spraying liquid was described in detail. However, it goes without saying that the density of the sprayed fine particles may be controlled by providing an apparatus for measuring the weight of the spraying liquid and changing the spraying time of the spraying liquid based on the weight or based on both the weight and the liquid amount. Moreover, what is necessary is just to put the weighing apparatus of spraying liquid under the container 4 (not shown) of spraying liquid.

6 shows the manufacturing method and the manufacturing apparatus of the liquid crystal display element in Example 2 of this invention.

In the first embodiment, the liquid level detecting device 16 and the spraying time control unit 17 are provided in order to make the spraying density constant in the subsequent step and the previous step, but in the second embodiment, the liquid level detecting device 16 Instead, it differs in that the device for measuring the spreading density has a special configuration.

That is, in the said Example 1, although the particle counter 15a which connects the liquid amount detection apparatus 16 and the spraying time control part 17, and measures the spraying density used the same thing as before, in this Example 2, Without providing the liquid amount detecting device 16, the particle counter 15b has a special configuration, the particle counter 15b and the spraying time control unit 17 are connected, and the fine particles measured by the particle counter 15b ( Corresponding to the number of 14), the spraying time control unit 17 differs in that the spraying time is configured to control the spraying time so as to approach the target value.

In detail, when the board | substrate 13 after spraying the spraying liquid 1 is carried in to the particle counter 15b, the particle counter 15b measures the number of microparticles | fine-particles on the board | substrate 13, and sprays the spraying density information Transmit to time control unit 17.

The spraying time control part 17 which obtained spraying density information resets the spraying time at the time of spray-spraying next from this information to a timer, and controls the solenoid valves 10a and 10b.

Therefore, the spray density in a previous process and a subsequent process can be kept stable, and a liquid crystal display device with a uniform cell gap can be obtained.

The specific example in Example 2 is shown below.

(Example 3)

FIG. 7: shows the principal part of the sprinkling apparatus in Example 3 of this invention.

The particle counter 15b is, as the optical system 23b, a CCD camera in which ring illumination is provided so that shadows do not occur in the fine particles in the imaging area, and an image incorporating a computer for measuring the number of particles from the image captured by the camera. It is comprised by the process measuring apparatus 23a.

The substrate 13 which has been sprayed with the fine particles 14 in the spray chamber 7 is taken in by a stage (not shown) and carried into the particle counter 15b.

When the particle counter 15b starts measurement, the stage moves to the position previously designated by the measurement program, and images a plurality of substrates 13 with a CCD camera. The picked-up image is measured by the image processing measuring device 23a, and the number of fine particles is stored in the storage device together with information such as measurement conditions as the spreading density data.

By comparing the number of microparticles | fine-particles 14 measured in this way with the number of target microparticles | fine-particles 14, the information which controls spraying time is obtained.

From this information, the spraying time control unit 17 operates to change the spraying time at the next spraying to compensate for the lack of excess of the number of fine particles 14.

In general, the particle counter 15b has a general-purpose computer as the image processing measurement device 23a and as a machine control or data processing device, and when the time control is judged by this computer, the spraying time control unit 17 It can simplify the configuration of.

In Example 3, the difference between the target spraying density and the actually measured spraying density is Δn, and the spraying time set in advance for the Δn is determined by a computer of the image processing measuring device 23a, and the spraying time is determined. The spray time is sent to the control unit 17.

The spray time control unit 17 has a writable timer 17c and may be configured as long as the numerical value applied from the computer is set to the opening time of the solenoid valve.

8 shows an example of the relationship between the difference Δn between the target value of the spraying density and the measured value and the spraying time.

In this case, in the range of ± 35 to Δn pieces / mm ² in 5 / mm ² pitch, the spraying time is set to 14 steps:

When spraying is performed in this way, as in FIG. 5 (b) which is the measurement result in the said Example 2, stable spraying density with respect to spraying frequency | count can be implement | achieved.

In addition, in the case of the spreading device configured as described above, complicated computational processing by a computer is possible, and thus it is possible to associate Δn and the spreading time by any correspondence table or calculation formula.

In addition, in the said Example 3, although the computer was used for the particle counter 15b, this invention is not limited to this, Computation function which sets a spray time to the spray time control part 17 instead of a computer, and conditions It is also possible to have a function of inputting and outputting data, and to output only the data of the spreading density from the particle counter 15b.

Thus, by controlling the number of the microparticles | fine-particles 14 sprayed on the board | substrate 13 corresponding to spraying time, not only the number of microparticles | fine-particles 14 but a spray pressure fluctuation (in this case, a pressure rise) etc. The increase in the number of the fine particles 14 due to other defects can also be controlled. Therefore, a good liquid crystal display element having a stable and uniform cell gap can be obtained.

Moreover, in the Example of this invention, the example which determines the spraying time based on the detected liquid amount or the count value of the spread | dispersed microparticles | fine-particles was explained in full detail. However, when the spraying pressure varies, the spraying density also changes. In order to stabilize the spraying density against fluctuations in the spraying pressure, a device for measuring the spraying pressure for spraying the fine particles is provided and the spraying time is determined on the basis of the detected liquid amount and the measured value of the spraying pressure, whereby the variation is further reduced. It becomes possible to realize the density of small particles. The spray pressure measuring device may be provided, for example, between the spray nozzle 8 and the solenoid valve 10b (not shown).

Also, based on the liquid amount of the spraying liquid, the weight of the spraying liquid, the coefficient value of the sprayed fine particles, or a combination thereof, not only the spraying time is changed, but also the spraying pressure is controlled, or the degree of opening of the needle valve inside the spray nozzle. It is needless to say that the density of the sprayed fine particles can be controlled to be closer to a predetermined target value more precisely by controlling, controlling the distance between the spray nozzle and the substrate, or controlling the combination thereof.

According to the manufacturing method of the liquid crystal display element of this invention as mentioned above, when spraying and spraying the spraying liquid which disperse | distributed the microparticles | fine-particles uniformly to the board | substrate by the semi-dry spray method, a board | substrate is controlled corresponding to the liquid amount of the spraying liquid, and controlling spraying time. By spray-spraying on and controlling the density of the said microparticles | fine-particles on a board | substrate surface to a target value, the fall of spraying density can be suppressed, the fall of a cell gap can be prevented, and the liquid crystal display element with a favorable display quality can be obtained.

Alternatively, the fine particles are spray-sprayed onto the substrate while controlling the spraying time of the subsequent step in correspondence with the number of fine particles sprayed on the substrate, and the density of the fine particles on the substrate surface is controlled to be close to a target value. The effect can be obtained.

According to the present invention, it is possible to control each element that is likely to cause variation in the process, to suppress variation in spreading density, to prevent variation in cell gap, and to obtain a liquid crystal display device having good display quality.

In addition, by controlling the spraying time in correspondence with the liquid amount of the spraying liquid, a decrease in the spraying density is suppressed, a drop in the cell gap is prevented, and a liquid crystal display element having a good display quality is obtained.

In addition, since the number of fine particles sprayed onto the substrate is directly counted and the next spraying time is controlled based on this count value, the reduction of the spreading density due to the decrease of the amount of sprayed liquid is suppressed, and the drop of the cell gap is prevented. A liquid crystal display element with good display quality is obtained.

Claims (16)

Dispersing the fine particles serving as a spacer in a liquid to detect at least one of the liquid amount and weight of the spraying liquid contained in the container; Determining a value of a spray time, spray pressure, opening degree of the needle valve inside the spray nozzle, or a distance between the spray nozzle and the substrate based on at least one of the detected liquid amount and the weight; Spraying the spraying liquid onto the substrate by controlling the spraying time, the spraying pressure, the opening degree of the needle valve inside the spray nozzle, or the distance between the spray nozzle and the substrate based on the determined value, The manufacturing method of the liquid crystal display element which controls the density of the said microparticles | fine-particles in the said board | substrate surface to approach a predetermined target value. Dispersing the fine particles serving as a spacer in the liquid to detect the liquid amount of the spraying liquid contained in the container; Determining a spraying time based on the detected liquid amount; And spraying the spraying liquid onto the substrate by the determined spraying time, The manufacturing method of the liquid crystal display element which controls the density of the said microparticles | fine-particles on the said board | substrate surface to approach a predetermined target value. The method of claim 2, Further comprising the step of measuring the spray pressure for spraying the fine particles, The manufacturing method of the liquid crystal display element which determines a spraying time based on the detected liquid quantity and the measured value of the said spraying pressure. Dispersing the fine particles serving as a spacer in the liquid and spray-spraying the spraying liquid contained in the container onto the substrate; Detecting a liquid amount of the spraying liquid; Spraying and spraying while controlling the spraying time corresponding to the detected liquid amount, and controlling the density of the fine particles on the substrate surface to be close to a predetermined target value. The manufacturing method of a liquid crystal display element. The method of claim 4, wherein The liquid crystal display element manufacturing method of this liquid crystal is performed by detecting the height of the liquid surface of the spray liquid accommodated in the said container. The method of claim 4, wherein The liquid level of the liquid level detected by the said spreading liquid is multiple, The manufacturing method of the liquid crystal display element which determines spraying time, respectively according to which range of the some predetermined | prescribed liquid level height. Counting the number of the fine particles on the substrate to which the spraying liquid in which the fine particles serving as the spacers are dispersed in a liquid; Determining a spraying time based on the counted value of the fine particles, And spraying the spraying liquid onto the substrate by the determined spraying time, The manufacturing method of the liquid crystal display element which controls the density of the said microparticles | fine-particles in the said board | substrate surface to approach a predetermined target value. The method of claim 7, wherein And the spraying time is determined using a corresponding table or a calculation formula that forms a relationship between the counting value of the fine particles and the spraying time based on the counting value of the fine particles. The method of claim 7, wherein Further comprising a step of measuring the spray pressure for spraying the fine particles, The manufacturing method of the liquid crystal display element which determines spraying time based on the count value of the said microparticles, and the measured value of the said spraying pressure. Spray-spraying the spraying liquid which disperse | distributed the microparticles used as a spacer to the liquid to a board | substrate, Counting the number of the fine particles spread on the substrate, And controlling the spraying time of the spraying liquid onto the substrate to be processed in a subsequent step in correspondence with the count value, thereby controlling the density of the fine particles on the substrate surface to be close to a predetermined target value. The manufacturing method of a liquid crystal display element. A container containing the spraying liquid, A spraying device having a spraying function for spraying the spraying liquid accommodated in the container onto a substrate; Liquid amount detecting means for detecting a liquid amount of the spreading liquid; The spray time control means which controls the spray time so that the density of microparticles | fine-particles on the said board | substrate surface may approach a predetermined target value corresponding to the liquid amount detected by the said liquid quantity detection means was provided. The manufacturing apparatus of a liquid crystal display element. The method of claim 11, The liquid crystal display element manufacturing apparatus which comprised the said liquid amount detection means with the liquid level detection means which detects the liquid surface position of the said spreading liquid. The method of claim 11, An apparatus for producing a liquid crystal display device, further comprising a device for measuring spray pressure for spraying the fine particles. A container containing the spraying liquid, A spraying device having a spraying function for spraying the spraying liquid accommodated in the container onto a substrate; Means for measuring the number of fine particles spread on the substrate, Corresponding spraying time control means for controlling the spraying time such that the density of the fine particles on the substrate surface approaches a predetermined target value in correspondence with the measured number of the fine particles The manufacturing apparatus of a liquid crystal display element. The method of claim 12, An apparatus for producing a liquid crystal display device, further comprising a device for measuring spray pressure for spraying the fine particles. The liquid crystal display element manufactured by the manufacturing method of the liquid crystal display element of any one of Claims 1, 4, or 10.